Patent application number | Description | Published |
20100259118 | VEHICLE DRIVE DEVICE - A vehicle drive device ( | 10-14-2010 |
20110187213 | TERMINAL BLOCK FOR ROTARY ELECTRIC MACHINE - A rotary electric machine terminal block fits into an opening of a case that contains a rotary electric machine, and is fixed to the case by a plate. The rotary electric machine terminal block has: a mount that is formed by fixing the electric power line connector and the signal line connector to the steel-made plate and performing insert molding so that an anti-vibration plate is formed on an upper surface of the plate; projected portions of the plate which each have a fixture hole for fixing the plate to the case; an edge seal member that covers an edge of the projected portion; a face seal member for tight attachment of the mount to the case; and two positioning pins. | 08-04-2011 |
20120206007 | ROTOR CORE FOR ROTATING ELECTRICAL MACHINE, AND MANUFACTURING METHOD THEREOF - A cylindrical rotor core | 08-16-2012 |
20130127283 | ROTOR OF AN ELECTRIC MOTOR AND MANUFACTURING METHOD OF SAME - A rotor of an electric motor is provided in which a cylindrical rotor core that is formed by stacked magnetic steel sheets and includes permanent magnets is crimp-fixed to a rotor shaft. The rotor core is directly fixed, in the axial direction of the rotor shaft, between a flange portion that is provided on an outer periphery of the rotor shaft and abuts against one axial end surface of the rotor core, and a crimping member that is crimp-fixed on the rotor shaft while pressure-contacting the other axial end surface of the rotor core. | 05-23-2013 |
20140341757 | OIL PUMP FOR VEHICLE AND VEHICLE WITH THE SAME - A plate is interposed between a rear cover and a pump body. The pump chamber is formed between the plate and the pump body. | 11-20-2014 |
Patent application number | Description | Published |
20090016774 | IMAGE FORMING APPARATUS, SCANNING OPTICAL APPARATUS, AND CONTROL METHODS THEREOF - The present invention provides an image forming apparatus that adjusts the amount of light of a light-emitting unit with high accuracy and suppresses an increase in control time that is required to adjust the amount of light, a scanning optical apparatus, and control methods thereof. To accomplish this, the image forming apparatus of the present invention derives a threshold current and a bias current of the light-emitting unit. Further, the image forming apparatus of the present invention supplies the bias current to the light-emitting unit when causing the light-emitting unit to emit light in an amount of light corresponding to the minimum density level, and supplies a current that is larger than the threshold current to the light-emitting unit when causing the light-emitting unit to emit light in an amount of light corresponding to a density level that is larger than that minimum density level. | 01-15-2009 |
20090323092 | IMAGE FORMING APPARATUS, IMAGE FORMING METHOD - An image forming apparatus has a calibration mode in which a calibration image is formed on a print medium to correct image forming conditions. The image forming apparatus detects print medium information to determine, on the basis of the print medium information, whether the print medium is a sheet recommended as a print medium for use in the calibration mode. The image forming apparatus sets calibration conditions corresponding to the determined recommended sheet. The image forming apparatus corrects the image forming conditions on the basis of the set calibration conditions. | 12-31-2009 |
20100074651 | SCANNING OPTICAL APPARATUS, IMAGE FORMING APPARATUS, AND CONTROL METHOD - A scanning optical apparatus includes, for example, a light source that outputs a light beam that has been pulse width modulated in accordance with input image data and a deflection unit that deflects the light beam so that the light beam scans the surface of an image carrier in the main scanning direction. The scanning optical apparatus furthermore includes a correction unit that corrects the pulse width and light amount applied to the light beam at each scanning position in the main scanning direction on the image carrier in accordance with focus error in the light beam at each scanning position. | 03-25-2010 |
20110122428 | IMAGE FORMING APPARATUS, IMAGE FORMING METHOD - An image forming apparatus has a calibration mode in which a calibration image is formed on a print medium to correct image forming conditions. The image forming apparatus detects print medium information to determine, on the basis of the print medium information, whether the print medium is a sheet recommended as a print medium for use in the calibration mode. The image forming apparatus sets calibration conditions corresponding to the determined recommended sheet. The image forming apparatus corrects the image forming conditions on the basis of the set calibration conditions. | 05-26-2011 |
20110236047 | OPTICAL SCANNING APPARATUS AND TECHNIQUE FOR CORRECTING OPTICAL CHARACTERISTICS IN AN IMAGE FORMING APPARATUS THAT EMPLOYS AN ELECTROSTATIC RECORDING METHOD OR AN ELECTROPHOTOGRAPHIC RECORDING METHOD - An optical scanning apparatus controls an output of a light source for forming an electrostatic latent image on an image carrier. The optical scanning apparatus includes a correction amount control unit configured to variably control a light quantity correction amount of the light source according to a scanning position on the image carrier during one scanning operation with a beam generated from the light source, an output signal level changing unit configured to change a level of an output signal from the correction amount control unit, and a light quantity control unit configured to control a light quantity of the light source according to the scanning position based on a signal from the output signal level changing unit. | 09-29-2011 |
20130147891 | OPTICAL SCANNING APPARATUS AND IMAGE FORMING APPARATUS - An optical scanning apparatus according to one aspect of this invention includes a light source that outputs a light beam having a light power based on a supplied driving current, a detection unit that detects the light power of the light beam, and a voltage holding unit that holds a charged voltage used to control the driving current. The optical scanning apparatus further includes a control unit that controls a charging unit so that the voltage holding unit is charged in a state where the driving current is not supplied to the light source, and controls the charging unit based on a detection result of the detection unit so that the voltage held in the voltage holding unit is controlled from the voltage of the voltage holding unit charged in the state where the driving current is not supplied to the light source. | 06-13-2013 |
20130215211 | EXPOSURE APPARATUS AND IMAGE FORMING APPARATUS - An exposure apparatus according to this invention uses, as a correction value, the difference between a threshold current obtained from the light emitting characteristics of a single laser light source when only the single laser light source emits a laser beam, and a threshold current obtained from the light emitting characteristics of the single laser light source when the single laser light source emits a laser beam while the bias currents are supplied to the remaining laser light sources other than the single laser light source. The exposure apparatus uses the correction value to correct bias currents and switching currents determined by APC, and exposes the surface of an image carrier with laser beams output from the plurality of laser light sources based on the corrected bias currents and switching currents. | 08-22-2013 |
20150338767 | IMAGE FORMING APPARATUS WITH LIGHT AMOUNT CONTROL - A droop characteristic or an inverse droop characteristic may fail to be sufficiently corrected depending on the temperature of a semiconductor laser. An image forming apparatus includes a droop correction unit configured to supply a correction current of which an attenuation tendency or a gradual increase tendency changes according to data about the temperature. | 11-26-2015 |
20150338769 | OPTICAL SCANNING APPARATUS AND IMAGE FORMING APPARATUS - The optical scanning apparatus correctly measures a gap between the laser beams of a plurality of the laser beams even when the scanning speed is changed and when the variation is caused, rightly corrects the variation. Thus, the optical scanning apparatus inputs detection signal BD_IN to the edge detecting unit at timing at which the laser beam is detected. During the enable gating, the count value representing the distance between the head laser beam and the end laser beam is counted in the counting unit. A plurality of speed ratio parameters according to the degree of changes in the scanning speed is input in the selector. The selector selects any one of the speed ratio parameters and multiplies by the count value by the multiplier, it is controlled to obtain the same multiplication result whichever scanning speed may be selected. | 11-26-2015 |
Patent application number | Description | Published |
20100148161 | COMPOUND FOR ORGANIC ELECTROLUMINESCENT DEVICE AND ORGANIC ELECTROLUMINESCENT DEVICE - Disclosed are an organic electroluminescent device (organic EL device) which is improved in luminous efficiency, fully secured of driving stability, and of simple constitution and a compound useful for the fabrication of said organic EL device. The compound for the organic EL device has an indolocarbazole structure or a structure similar thereto in the molecule wherein an aromatic group is bonded to the nitrogen atom in the indolocarbazole. The organic EL device has a light-emitting layer disposed between an anode and a cathode piled one upon another on a substrate and said light-emitting layer comprises a phosphorescent dopant and the aforementioned compound for an organic electroluminescent device as a host material. | 06-17-2010 |
20100148162 | COMPOUND FOR ORGANIC ELECTROLUMINESCENT DEVICE AND ORGANIC ELECTROLUMINESCENT DEVICE - Disclosed are a compound for an organic electroluminescent device (organic EL device) which is improved in luminous efficiency, fully secured of driving stability, and of simple constitution and an organic EL device using said compound. The compound for an organic EL device has two indolocarbazole skeletons each of which is bonded to an aromatic group or two skeletons similar thereto. The organic EL device comprises a light-emitting layer disposed between an anode and a cathode piled one upon another on a substrate and said light-emitting layer comprises a phosphorescent dopant and the aforementioned compound for an organic EL device as a host material. | 06-17-2010 |
20100181553 | ORGANIC ELECTROLUMINESCENT DEVICE MATERIAL AND ORGANIC ELECTROLUMINESCENT DEVICE - Disclosed is an organic electroluminescent device (organic EL device) that utilizes phosphorescence and is improved in luminous efficiency and fully secured of driving stability. The organic EL device comprises an anode, an organic layer containing a hole-transporting layer, a light-emitting layer, and an electron-transporting layer, and a cathode piled one upon another on a substrate while the hole-transporting layer is disposed between the light-emitting layer and the anode and the electron-transporting layer is disposed between the light-emitting layer and the cathode. The light-emitting layer comprises an aluminum heterocomplex or dimeric complex of deuterated substituted or unsubstituted 2-methyl-8-hydroxyquinoline (Me8HQ-D) in which the hydrogen atoms in the methyl group of substituted or unsubstituted 2-methyl-8-hydroxyquinoline (Me8HQ) are deuterated as a host material and an organic metal complex containing at least one metal selected from groups 7 to 11 of the periodic table as a guest material. | 07-22-2010 |
Patent application number | Description | Published |
20090267245 | Transmission Type Optical Element - The invention relates to a transmission type optical element configured so that a convex/concave structure is formed on a surface thereof, and that incident light to the optical element is subjected to an action at the convex/concave structure. In this optical element, a layer having a convex/concave structure is formed on one of surfaces of a substrate. The transmittance of each of the substrate and the layer having the convex/concave structure at a wavelength of 360 nm is set to be 90% or more so that the transmittance of the layer having the convex/concave structure is equal to or less than the transmittance of the substrate. | 10-29-2009 |
20100067070 | IMAGE READING DEVICE - An image reading device includes: a line illuminator for irradiating a document G; an erecting equal-magnification lens array operative to condense light reflected by the document G and including a stack of a first lens array plate and a second lens array plate each provided with an arrangement of a plurality of lenses on both sides thereof; a line image sensor operative to receive the light condensed by the erecting equal-magnification lens array; a housing for securing the line illuminator, the erecting equal-magnification lens array, and the line image sensor in their places; and a first light shielding member, a second light shielding member, and a third light shielding member operative to prevent light not contributing to imaging from entering the lenses. The first light shielding member, the second light shielding member, and the third light shielding member are formed as one piece with the main part of the housing. | 03-18-2010 |
20100142057 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE, IMAGE SENSOR UNIT, AND IMAGE READING DEVICE - An erecting equal-magnification lens array plate includes a stack of lens array plates each formed with a plurality of convex lenses on both surfaces of the plate. The plurality of convex lenses in each lens array plate are arranged such that the main lens array direction differs from the main scanning direction. A light shielding member operative to shield light not contributing to imaging is formed in the neighborhood of a position in the intermediate plane in the erecting equal-magnification lens array plate where an inverted image is formed. The light shielding member restricts a light transmitting region of each convex lens such that lens regions outside a slit opening, which is substantially parallel with the main scanning direction, are totally prevented from transmitting light. The position of the slit opening is determined with reference to the lens coordinates of the lens surface closest to the image plane. | 06-10-2010 |
Patent application number | Description | Published |
20090141362 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE - An erecting equal-magnification lens array plate includes a stack of a plurality lens array plates built such that pairs of corresponding lenses form a coaxial lens system, where each lens array plate is formed with a plurality of convex lenses on both surfaces of the plate. The plate receives light from a substantially straight light source facing one side of the plate, and the plate forms an erect equal-magnification image of the substantially straight light source on an image plane facing the other side of the plate. The main lens arrangement direction differs from the main scanning direction of the erecting equal-magnification lens array plate. The erecting equal-magnification lens array plate is provided with a first light shielding member operative to shield light not contributing to imaging and formed in the neighborhood of a position in the intermediate plane in the erecting equal-magnification lens array plate where an inverted image of the substantially straight light source is formed, and with a second light shielding member operative to reduce the amount of light incident on at least some of the lenses at the periphery in the sub-scanning direction and provided on a lens surface facing a light source. | 06-04-2009 |
20100020421 | LENS ARRAY UNIT MOUNTING STRUCTURE - A lens array unit mounting structure mounts a lens array unit in a recess provided in a housing of an image reading device. The structure includes a right projection and a left projection provided on the lens array unit and includes a right groove and a left groove provided in the recess of the housing. The lens array unit is secured in the recess of the housing by engaging the right projection with the right groove and engaging the left projection with the left groove. | 01-28-2010 |
20110043872 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE, OPTICAL SCANNING UNIT, AND IMAGE READING DEVICE - An erecting equal-magnification lens array plate includes a stack of a first lens array plate provided with a plurality of first lenses arranged on a first surface and a plurality of second lenses arranged on a second surface, and a second lens array plate provided with a plurality of third lenses arranged on a third surface and a plurality of fourth lenses arranged on a fourth surface. The erecting equal-magnification lens array plate is provided with a first light shielding wall provided upright to surround the first lens, and a second light shielding wall provided upright to surround the fourth lens. An area on the first surface of the first lens array plate outside the effective region of the first lenses is roughened. | 02-24-2011 |
20110128592 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE, OPTICAL SCANNING UNIT, AND IMAGE READING DEVICE - An erecting equal-magnification lens array plate includes: a first lens array plate and a second lens array plate each provided with a plurality of convex lenses on both surfaces; a first light-shielding member provided with a plurality of first openings; and a second light-shielding member provided with a plurality of second openings. The first lens array plate and the second lens array plate form a stack such that a combination of the lenses associated with each other form a coaxial lens system. The first light-shielding member is provided on the first lens array plate such that the first opening is located opposite to the corresponding convex lens. The second light-shielding member is provided on the second lens array plate such that the second opening is located opposite to the corresponding fourth lens. An open end of each of the first opening and the second opening facing the lens is formed to become progressively larger in diameter toward the end. | 06-02-2011 |
20120224241 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE, OPTICAL SCANNING UNIT, IMAGE READING DEVICE, AND IMAGE WRITING DEVICE - An erecting equal-magnification lens array plate includes: a first lens array plate provided with a plurality of first lenses systematically arranged on a first surface and a plurality of second lenses systematically arranged on a second surface opposite to the first surface; and a second lens array plate provided with a plurality of third lenses systematically arranged on a third surface and a plurality of fourth lenses systematically arranged on a fourth surface opposite to the third surface. The first lens array plate and the second lens array plate form a stack such that the second surface and the third surface face each other to ensure that a combination of the lenses aligned with each other form a coaxial lens system. A plurality of V grooves are formed in an area between adjacent second lenses on the second surface in the erecting equal-magnification lens array plate. | 09-06-2012 |
20120224242 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE, OPTICAL SCANNING UNIT, IMAGE READING DEVICE, AND IMAGE WRITING DEVICE - An erecting equal-magnification lens array plate includes a first lens array plate and a second lens array plate provided opposite to each other, each of the first and second lens array plates being formed with a plurality of lenses on both sides thereof. The first lens array plate is provided with a first lens-to-lens distance determining part. The second lens array plate is provided with a second lens-to-lens distance determining part. The distance between opposite lenses is determined by the contact between the first lens-to-lens distance determining part and the second lens-to-lens distance determining part. | 09-06-2012 |
20120229878 | ERECTING EQUAL-MAGNIFICATION LENS ARRAY PLATE, OPTICAL SCANNING UNIT, IMAGE READING DEVICE, AND IMAGE WRITING DEVICE - An erecting equal-magnification lens array plate includes: a first lens array plate provided with a plurality of first lenses arranged on a first surface and a plurality of second lenses arranged on a second surface; and a second lens array plate provided with a plurality of third lenses arranged on a third surface and a plurality of fourth lenses arranged on a fourth surface. The first and second lens array plates are stacked. An intermediate light-shielding member provided with a plurality of intermediate through holes is between the first lens array plate and the second lens array plate. The intermediate through hole is formed such that the hole diameter is progressively smaller in a tapered fashion away from the second surface toward the third surface. A plurality of V grooves are formed in an area between adjacent second lenses on the second surface. | 09-13-2012 |
20140063597 | INFRARED CUT FILTER AND IMAGING APPARATUS - An infrared cut filter includes: a transparent dielectric substrate; an infrared reflecting layer formed on one surface of the transparent dielectric substrate and configured to reflect infrared light; and an infrared absorbing layer formed on the other surface of the transparent dielectric substrate and configured to absorb infrared light. The infrared absorbing layer is formed of a resin that contains infrared absorbing pigment. The infrared reflecting layer is formed of a dielectric multilayer film. | 03-06-2014 |
20140300956 | INFRARED CUT FILTER AND IMAGING APPARATUS - An infrared cut filter includes: a transparent dielectric substrate; an infrared reflecting layer formed on one surface of the transparent dielectric substrate and configured to reflect infrared light; and an infrared absorbing layer formed on the other surface of the transparent dielectric substrate and configured to absorb infrared light. The infrared absorbing layer is formed by encapsulating infrared absorbing pigment in a matrix containing silica, formed by a sol-gel method, as a main component. | 10-09-2014 |
Patent application number | Description | Published |
20100177593 | Stirring Apparatus - An object is to provide a stirring apparatus which can exhibit excellent mixing characteristics and shorten the mixing time. The stirring apparatus includes a stirred tank having a bottomed cylindrical shape, a rotational shaft disposed coaxially or substantially coaxially within the stirred tank, a plate-shaped bottom blade having a lower end edge shaped to conform to a bottom wall surface of the stirred tank, the bottom blade having an opening for communication between one face side and an opposite face side, of the bottom blade, the ratio (h/d) between the blade height h of the bottom blade and the impeller diameter d of the bottom blade satisfies 0.4≦h/d, and the ratio of the opening area to the projection area of the bottom blade as viewed from the rotational direction thereof (opening ratio of the bottom blade) is 10-60%. | 07-15-2010 |
20100214868 | Agitator and Agitation Method - It is an object of the present invention to provide an agitator equipped with a bottom paddle that has favorable agitation performance also in a streamline flow region of low Re number and to provide an agitation method. According to the agitator and the agitation method of the present invention, an object is agitated within an agitation tank by the use of an agitator that includes a rotating shaft that is disposed outside of the tank along the axis of a vertically oriented cylindrical agitation tank to be rotatable, and a flat agitation impeller made up of a bottom paddle, which lower end edge is formed to be of a shape that conforms with a tank bottom wall such that a specified clearance is formed between the lower end edge and the tank bottom wall, the bottom paddle being provided with a communicating portions at a positions away from the lower end edge upward by a specified amount for communicating between the front side and the rear side of the bottom paddle, and being mounted to the rotating shaft so as to locate close to the tank bottom wall and extend towards a sidewall of the tank. | 08-26-2010 |
Patent application number | Description | Published |
20100190417 | APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD - An apparatus for dressing a polishing pad is described. The apparatus includes a dresser drive shaft which is rotatable and vertically movable, a dresser flange coupled to the dresser drive shaft and configured to secure a dressing member thereto, a spherical bearing provided in the dresser flange and configured to allow the dressing member to tilt with respect to the dresser drive shaft, and a spring mechanism configured to generate a force against a tilting motion of the dressing member. | 07-29-2010 |
20120058709 | POLISHING APPARATUS AND METHOD - A polishing is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a substrate holding apparatus configured to hold the substrate and to press the substrate against the polishing surface, and a controller. The substrate holding apparatus includes an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate, a carrier provided above the elastic membrane, at least one pressure chamber formed between the elastic membrane and the carrier, and an infrared light detector configured to measure thermal energy from the elastic membrane. The controller calculates an estimate value of a temperature of the elastic membrane using a measured value of the infrared light detector. | 03-08-2012 |
20120064800 | POLISHING APPARATUS - A polishing apparatus includes: a table rotating motor configured to rotate the polishing table about its own axis; a top ring rotating motor configured to rotate the top ring about its own axis; a dresser configured to dress the polishing pad; a pad-height measuring device configured to measure a height of the polishing pad; and a diagnostic device configured to calculate an amount of wear of the polishing pad from the height of the polishing pad and to determine the end of a life of the polishing pad based on the amount of the wear of the polishing pad, the torque or current of the table rotating motor, and the torque or current of the top ring rotating motor. | 03-15-2012 |
20130136884 | ELASTIC MEMBRANE - There is provided an elastic membrane which can uniformly reduce deformation (elongation) of its contact portion, having a contact surface for contact with a substrate, along the contact surface in substantially the entire area of the contact portion from the center to the periphery. The elastic membrane includes a contact portion having a contact surface for contact with the substrate; a first peripheral wall portion coupled to the peripheral end of the contact portion and extending upwardly; and a second peripheral wall portion located on the inside of the first peripheral wall portion, coupled to the contact portion and extending upwardly, and defining a first chamber on the outer side thereof and a second chamber on the inner side thereof. In the elastic membrane, substantially the entire area of the contact portion is reinforced with a reinforcing member having a higher rigidity than the elastic membrane. | 05-30-2013 |
20130337586 | POLISHING METHOD - A method of polishing a substrate includes: performing a first polishing process of bringing the substrate into sliding contact with a polishing pad on a first polishing table to polish a metal film; performing a second polishing process of bringing the substrate into sliding contact with a polishing pad on a second polishing table to polish the metal film until a conductive film is exposed; performing a third polishing process of bringing the substrate into sliding contact with a polishing pad on a third polishing table to polish at least the conductive film; and performing a fourth polishing process of bringing the substrate into sliding contact with a polishing pad on a fourth polishing table to polish at least a dielectric film. | 12-19-2013 |
20140017824 | POLISHING METHOD - A method of polishing a substrate having a film is provided. The method includes: performing polishing of the substrate in a polishing section; transporting the polished substrate to a wet-type film thickness measuring device prior to cleaning and drying of the substrate; measuring a thickness of the film by the wet-type film thickness measuring device; comparing the thickness with a predetermined target value; and if the thickness has not reached the predetermined target value, performing re-polishing of the substrate in the polishing section prior to cleaning and drying of the substrate. | 01-16-2014 |
20140287653 | METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHING APPARATUS, AND POLISHING APPARATUS - The method includes the steps of measuring a surface height of a polishing member | 09-25-2014 |
20140342642 | METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON A POLISHING MEMBER, METHOD OF OBTAINING A SLIDING VECTOR DISTRIBUTION OF A DRESSER ON A POLISHING MEMBER, AND POLISHING APPARATUS - The method includes: calculating an increment of a sliding distance of a dresser by multiplying a relative speed between the dresser and a polishing member by a contact time between them; correcting the increment of the sliding distance by multiplying the calculated increment of the sliding distance by at least one correction coefficient; calculating the sliding distance by repeatedly adding the corrected increment of the sliding distance to the sliding distance according to elapse of time; and producing the sliding-distance distribution of the dresser from the obtained sliding distance and a position of a sliding-distance calculation point. The at least one correction coefficient includes an unevenness correction coefficient provided for the sliding-distance calculation point. The unevenness correction coefficient is a correction coefficient that allows a profile of the polishing member to reflect a difference between an amount of scraped material of the polishing member in its raised portion and an amount of scraped material of the polishing member in its recess portion. | 11-20-2014 |
20150017880 | FILM-THICKNESS MEASURING APPARATUS, FILM-THICKNESS MEASURING METHOD, AND POLISHING APPARATUS HAVING THE FILM-THICKNESS MEASURING APPARATUS - A film-thickness measuring apparatus and a film-thickness measuring method capable of improving an accuracy of the film-thickness measurement are disclosed. The film-thickness measuring apparatus includes a substrate stage configured to support a substrate horizontally, a rinsing water supply structure configured to supply rinsing water onto an entire surface of the substrate on the substrate stage, a film-thickness measuring head configured to transmit light to a measurement area of the surface of the substrate on the substrate stage, produce a spectrum of reflected light from the measurement area, and determine a film thickness of the substrate from the spectrum, and a fluid supply structure configured to form a flow of a gas on a path of the light and supply the flow of the gas onto the measurement area. | 01-15-2015 |
20150017887 | POLISHING APPARATUS AND POLISHED-STATE MONITORING METHOD - A polishing apparatus capable of achieving a highly-precise polishing result is disclosed. The polishing apparatus includes an in-line film-thickness measuring device configured to measure a film thickness of the substrate in a stationary state, and an in-situ spectral film-thickness monitor having a film thickness sensor disposed in a polishing table, the in-situ spectral film-thickness monitor being configured to subtract an initial film thickness, measured by the in-situ spectral film-thickness monitor before polishing of the substrate, from an initial film thickness, measured by the in-line film-thickness measuring device before polishing of the substrate, to determine a correction value, add the correction value to a film thickness that is measured when the substrate is being polished to obtain a monitoring film thickness, and monitor a progress of polishing of the substrate based on the monitoring film thickness. | 01-15-2015 |
20150093968 | POLISHING APPARATUS AND METHOD - A polishing is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a substrate holding apparatus configured to hold the substrate and to press the substrate against the polishing surface, and a controller. The substrate holding apparatus includes an elastic membrane configured to forma substrate holding surface which is brought into contact with the substrate, a carrier provided above the elastic membrane, at least one pressure chamber formed between the elastic membrane and the carrier, and an infrared light detector configured to measure thermal energy from the elastic membrane. The controller calculates an estimate value of a temperature of the elastic membrane using a measured value of the infrared light detector. | 04-02-2015 |
20150093971 | POLISHING APPARATUS AND METHOD - A polishing is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a substrate holding apparatus configured to hold the substrate and to press the substrate against the polishing surface, and a controller. The substrate holding apparatus includes an elastic membrane configured to forma substrate holding surface which is brought into contact with the substrate, a carrier provided above the elastic membrane, at least one pressure chamber formed between the elastic membrane and the carrier, and an infrared light detector configured to measure thermal energy from the elastic membrane. The controller calculates an estimate value of a temperature of the elastic membrane using a measured value of the infrared light detector. | 04-02-2015 |
20150111314 | A METHOD OF POLISHING A SUBSTRATE HAVING A FILM ON A SURFACE OF THE SUBSTRATE FOR SEMICONDUCTOR MANUFACTURING - A method of polishing a substrate having a film is provided. The method includes: performing polishing of the substrate in a polishing section; transporting the polished substrate to a wet-type film thickness measuring device prior to cleaning and drying of the substrate; measuring a thickness of the film by the wet-type film thickness measuring device; comparing the thickness with a predetermined target value; and if the thickness has not reached the predetermined target value, performing re-polishing of the substrate in the polishing section prior to cleaning and drying of the substrate. | 04-23-2015 |