Pittroff
Michael Pittroff, Hannover DE
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20090068844 | Etching Process - Mixtures of fluorine and inert gases like nitrogen and/or argon can be used for etching of semiconductors, solar panels and flat panels (TFTs and LCDs), and for cleaning of semiconductor surfaces and plasma chambers. Preferably, fluorine is comprised in an amount of 15 to 25 vol.-% in binary mixtures. The gas mixtures can be used as substitute or drop-in for respective mixtures comprising NF | 03-12-2009 |
Michael Pittroff, Seoul KR
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20110226368 | Bundle trailer for gas delivery - A bundle trailer for containers including (i) a supporting frame on which a plurality of bundles are located; (ii) a plurality of bundles, each bundle comprising: a bundle frame, a plurality of containers containing a chemical, and at least one bundle value for controlling delivery of the chemical in the containers; (iii) at least one trailer valve; and (iv) at least one clamp for fixing the bundle is disclosed. The bundle trailer is capable of delivering high purity hygroscopic, corrosive chemicals, such as elemental fluorine and mixtures thereof, with good flexibility, high safety, and low cost. | 09-22-2011 |
20130105006 | Purge box for fluorine supply | 05-02-2013 |
Wolfgang Pittroff, Woltersdorf DE
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20120106582 | HEAT SINK FOR A PULSED HIGH-POWER LASER DIODE - A semiconductor laser module having a substrate and having at least one semiconductor laser situated on the substrate, the substrate having a layer structure which includes at least one primary layer which establishes a thermal contact with the semiconductor laser. The semiconductor laser is designed in such a way that it emits heat pulses having a minimum specific heat of approximately 3 mJ per mm | 05-03-2012 |