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Stefan Xalter
OBERKOCHEN, DE
1. 20090244509 OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGEMENT FOR REDUCING IMAGE ABERRATIONS 10-01-20092. 20090207396 OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY 08-20-2009
3. 20090185148 SUPPORT FOR AN OPTICAL ELEMENT - The disclosure relates to a support structure for an optical element and an optical element module including such a 07-23-2009
4. 20090135395 OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY 05-28-2009
5. 20090052066 Actuator Device - s, as well as related systems and methods, are disclosed 02-26-2009