Stommen
Bernard Stommen, Geldrop NL
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20090040638 | SIX DEGREE OF FREEDOM (DOF) ACTUATOR REACTION MASS - In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF. | 02-12-2009 |
20090185148 | SUPPORT FOR AN OPTICAL ELEMENT - The disclosure relates to a support structure for an optical element and an optical element module including such a support structure. The disclosure also relates to a method of supporting an optical element. The disclosure may be used in the context of photolithography processes for fabricating microelectronic devices, such as semiconductor devices, or in the context of fabricating devices, such as masks or reticles, used during such photolithography processes. | 07-23-2009 |
20090303626 | HOUSING STRUCTURE - A housing structure has a frame structure | 12-10-2009 |
Bernard Stommen, Hk Geldrop NL
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20110216428 | HOUSING STRUCTURE - A housing structure has a frame structure | 09-08-2011 |
Bernard Jacob Andries Stommen, Geldrop NL
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20130001442 | RADIATION SOURCE AND LITHOGRAPHIC APPARATUS - A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion. | 01-03-2013 |
Theodoor H. Stommen, Veldhoven NL
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20100214948 | APPARATUS AND METHOD OF CONFIGURING A DEVICE IN A NETWORK - The invention provides a method, apparatus and computer program product for ensuring that a device ( | 08-26-2010 |
Theodoor Hubert Stommen, Eindhoven NL
Patent application number | Description | Published |
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20090190352 | LIGHT-GENERATING DEVICE - A light-generating device ( | 07-30-2009 |
20090309507 | METHOD FOR POWERING A CONTROL CIRCUIT FOR A GAS DISCHARGE LAMP DURING PRE-HEATING OF SAID LAMP, AND A DEVICE FOR PERFORMING SAID METHOD - The method according to the present invention relates to controlling a gas discharge lamp during a pre-heating period of said lamp, wherein a first terminal of a control circuit is connected with a first electrode of the lamp and a second terminal of a control circuit is connected with a second electrode of the lamp, and wherein means are provided, suitable for connecting the first terminal and the second terminal with each other, thus providing a conducting path, and suitable for disconnecting the first terminal and the second terminal. Furthermore the method comprises the use of a chargeable and dischargeable power buffer, for powering control circuitry for operating the switching means. | 12-17-2009 |