Patent application number | Description | Published |
20090027641 | ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS INCLUDING THE SAME - An illumination optical system includes a first optical unit that collects light emitted from a light source; a reflective integrator that has a plurality of cylindrical reflection surfaces, whose generating lines are oriented in a uniform direction, and forms a plurality of linear light sources by using the light emitted from the first optical unit; a pair of flat mirrors that are disposed parallel to the generating lines so as to face each other with the plurality of linear light sources residing therebetween; an aperture stop that is disposed perpendicular to the generating lines and has an opening for allowing the light emitted from the plurality of linear light sources to pass therethrough; and a second optical unit that integrates beams of the light emitted from the plurality of linear light sources that have passed through the opening one on top of another in an illumination target plane. | 01-29-2009 |
20100053584 | ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS - An illumination optical system includes first and second reflection integrators. The second reflection integrator forms a plurality of linear light sources using light from the first reflection integrator. The illumination optical system further includes a pair of flat plane mirrors that are arranged parallel to the meridional line direction on the second reflection integrator and opposite to each other so as to sandwich the plurality of linear light sources in between, a unit for changing an aperture shape of an aperture stop arranged at an exit side of the second reflection integrator in a direction perpendicular to the meridional line direction so that the aperture stop has an optical Fourier transformation relationship with the surface to be illuminated, and an adjustment unit configured to adjust an interval between the pair of flat plane mirrors as the aperture shape of the aperture stop is changed. | 03-04-2010 |
20120170013 | ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE - An illumination optical system which illuminates an illumination surface with light from a light source, includes a divider which divides light from the light source to generate a plurality of light beams, a first reflective integrator which uniformizes light intensity distributions of the plurality of light beams generated by the divider, a condenser which condenses the light beam from the first reflective integrator, a second reflective integrator which receives the light beam from the condenser and illuminates the illumination surface, and an aperture stop arranged between the second reflective integrator and the illumination surface, wherein the divider generates the plurality of light beams so that light beams each having a cross-sectional shape different from a cross-sectional shape of the light provided from the light source to the divider enter a plane on which the aperture stop is arranged. | 07-05-2012 |
20120327208 | IMAGING APPARATUS - An imaging apparatus comprises: an imaging unit having an imaging optical system and an imaging device; a measuring unit that measures, for each of a plurality of regions on a specimen, an optical aberration or a physical quantity causing the aberration before the imaging of the specimen is performed; a plurality of optical elements that are inserted in an optical path of the imaging optical system for correcting the aberration and that differ in correction amount; and a control unit that selects an optical element from among the optical elements on the basis of a measurement result of the measuring unit, and inserts the selected optical element into the optical path of the imaging optical system before the imaging of the specimen. The imaging optical system is configured to be capable of forming simultaneously images of the plurality of regions on the imaging device. | 12-27-2012 |
20130162801 | MICROSCOPE - Provided is a microscope which includes an image pickup element, a light source, an optical system, a control unit and a sensor. The control unit controls for the acquisition of, in parallel with the first image pickup event by the image pickup element, necessary information when the second image pickup event by the image pickup element is performed, by using the sensor. A pair of sensors for a microscope includes a pair of sensors. A first sensor of the pair of sensors provides a signal that represents an environmental variable of a first area at a first period in time. A second sensor of the pair of sensors provides a signal that represents a quality of the first sensor's ability to represent the environmental variable of a second area at the first period in time, wherein the second sensor is adjacent to the first sensor. | 06-27-2013 |
20130169788 | MICROSCOPE, IMAGE ACQUISITION APPARATUS, AND IMAGE ACQUISITION SYSTEM - A microscope | 07-04-2013 |
20130169859 | IMAGING APPARATUS - An imaging apparatus ( | 07-04-2013 |
20130222569 | IMAGING APPARATUS - An imaging apparatus includes: an illumination optical system including a light source and guiding the light from the light source to an illuminated surface B including an object; a plurality of image sensors for acquiring an image of the illuminated surface formed by an imaging optical system; a measurement unit for measuring a size of the object; and a control unit for determining an image sensor to be used when acquiring the image of the illuminated surface, among the plurality of image sensors, based on a measurement result of the measurement unit. | 08-29-2013 |
20140160267 | Image Pickup Apparatus - An image pickup apparatus includes a measuring section configured to measure a surface shape of an object, an image pickup section configured to obtain images of different areas of the object on an image plane of an image pickup optical system by image pickup elements, a focal-position detecting unit configured to detect a focal position of the object where a focal-position detecting point is focused on the image plane, and a focal-position determining unit configured to determine a focal position of the object at a point different from the focal-position detecting point on the basis of detection of the focal-position detecting unit and measurement of the measuring section. The image pickup section takes the images of the different areas on the basis of determination of the focal-position determining unit while the images are focused on the image pickup elements. | 06-12-2014 |
Patent application number | Description | Published |
20140067179 | DIAGNOSTIC APPARATUS AND DIAGNOSTIC METHOD OF HYBRID VEHICLE - A diagnostic apparatus of a hybrid vehicle has an internal combustion engine, a motor that generates a driving force for vehicle travel, and a diagnostic unit that diagnoses a vehicle state by motoring the internal combustion engine using the motor in a state where an output of the internal combustion engine is zero. The apparatus includes a required driving force detection unit that detects a required driving force of a driver; a determination unit that determines whether or not a remaining time required until a diagnostic completion is a predetermined time or less, in a case where the required driving force with a predetermined lower limit value or more is detected by the required driving force detection unit when the vehicle state is diagnosed by the diagnostic unit; and a control device that causes the motor to output the driving force for the vehicle travel, in a case where the remaining time is the predetermined time or less in the determination result of the determination unit, and continues the vehicle state diagnosis using the diagnostic unit by motoring the internal combustion engine using the motor in the state where the output of the internal combustion engine is zero. | 03-06-2014 |
20140067200 | DIAGNOSTIC APPARATUS AND DIAGNOSTIC METHOD OF HYBRID VEHICLE - A diagnostic apparatus of a hybrid vehicle includes an internal combustion engine, an electricity storage device, a motor generating a driving force for a vehicle travel using at least electricity from the electricity storage device, a diagnostic unit diagnosing a vehicle state when an output of the internal combustion engine is zero, a state detection unit detecting a state of the electricity storage device, a remaining time acquisition unit acquiring a remaining time required until diagnostic completion, when the vehicle state is diagnosed by the diagnostic unit, a determination unit determining whether or not the diagnosis of the vehicle state is continued by the diagnostic unit, based on the state of the electricity storage device and the remaining time when the vehicle state is diagnosed by the diagnostic unit, and a control unit that controls continuation or stop of the vehicle state diagnosis according to the determination result. | 03-06-2014 |