Patent application number | Description | Published |
20090025246 | Remote Center Compliant Flexure Device - An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes. | 01-29-2009 |
20090214689 | Imprint Lithography Templates Having Alignment Marks - One embodiment of the present invention is an imprint template for imprint lithography that comprises alignment marks embedded in bulk material of the imprint template. | 08-27-2009 |
20090294059 | Remote Center Compliant Flexure Device - An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes. | 12-03-2009 |
20100098848 | Fluid Dispense Device Calibration - Systems and methods for calibrating a dispense head to provide substantially uniform droplets on a substrate are described. | 04-22-2010 |
20100112220 | DISPENSE SYSTEM SET-UP AND CHARACTERIZATION - The present application describes methods and systems for setting up and characterizing fluid dispensing systems. The methods and systems characterize the fluid dispensing systems and associate the characterizations with the corresponding fluid dispensing systems. | 05-06-2010 |
20100154993 | SEPARATION METHODS FOR IMPRINT LITHOGRAPHY - Methods for separating a template from a substrate are described. Generally, the template and the substrate have a template-substrate interface. A tilting motion may be generated about a tilting axis located at the template-substrate interface. The tilting motion may include forming a wedge between the template and the substrate at one end of the template-substrate interface. The substrate may be titled with respect to the template, and the template may remain stationary. Additionally, a force may be applied to increase a distance between the template and the substrate, such that the template is spaced apart from the substrate. | 06-24-2010 |
20100286811 | Residual Layer Thickness Measurement and Correction - In nano-imprint lithography it is important to detect thickness non-uniformity of a residual layer formed on a substrate. Such non-uniformity is compensated such that a uniform residual layer may be formed. Compensation is performed by calculating a corrected fluid drop pattern. | 11-11-2010 |
20110042345 | METHODS FOR MANUFACTURING CHUCKING SYSTEMS - Methods for manufacturing chucking systems are described. Generally, a plurality of flow holes may be provided in an optical flat. A surface of the optical flat may be masked and patterned to provide a desired feature (e.g., pins or grooves). The surface may etched to produce the desired feature on the surface of the optical flat. | 02-24-2011 |