Yonejima
Toshihiko Yonejima, Toyama-Shi JP
Patent application number | Description | Published |
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20090017638 | Substrate processing apparatus and method for manufacturing semiconductor device - It is intended to provide a substrate processing apparatus and a semiconductor device manufacturing method capable of suppressing formation of a film inside a nozzle and extending a replacement or maintenance cycle of the nozzle, thereby realizing improvement in operation rate of the apparatus. A substrate processing apparatus comprising: a reaction container for performing a processing for generating a film containing a plurality of elements on a substrate; a heater for heating an inside of the reaction container; at least one nozzle that is provided inside the reaction container in such a fashion that at least a part thereof is opposed to the heater for supplying a first gas containing at least one of the plurality of elements forming the film and capable of depositing a film by itself into the reaction container; and a circulation pipe that is provided in such a fashion as to cover at least the part of the nozzle opposed to the heater for supplying a second gas containing at least one of the plurality of elements forming the film and not capable of depositing a film by itself into the reaction container after circulating the second gas thereinside. | 01-15-2009 |
Yasunori Yonejima, Muko-Shi JP
Patent application number | Description | Published |
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20150125911 | METHOD FOR PRODUCING OXO FATTY ACID AND RARE FATTY ACID - The present invention provides a production method of oxo fatty acid, as well as rare fatty acids such as conjugated fatty acid, hydroxylated fatty acid, partially saturated fatty acid and the like, which uses 4 kinds of enzymes (fatty acid-hydratase, hydroxylated fatty acid-dehydrogenase, oxo fatty acid-isomerase, oxo fatty acid-enone reductase) derived from | 05-07-2015 |
Yasunori Yonejima, Muko-Shi, Kyoto JP
Patent application number | Description | Published |
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20150342916 | METABOLISM-IMPROVING AGENT COMPRISING RARE FATTY ACID - The present invention provides a metabolism improving agent comprising an oxo fatty acid having 18 carbon atoms and a carbonyl group at the 10- or 12-position, and/or a hydroxy fatty acid having 18 carbon atoms and a hydroxyl group at the 10- and/or 12-position(s), and use of the metabolism improving agent as a food, a pharmaceutical product and the like. | 12-03-2015 |