Patent application number | Description | Published |
20090009775 | Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle - A reticle has a mask substrate, a test pattern established on the mask substrate having an asymmetrical diffraction grating so as to generate positive first order diffracting light and negative first order diffracting light in different diffraction efficiencies, and a device pattern adjacent to the test pattern established on the mask substrate. | 01-08-2009 |
20090060112 | BOILING WATER NUCLEAR REACTOR AND EMERGENCY CORE COOLING SYSTEM OF THE SAME - A boiling water nuclear reactor comprises: a reactor containment vessel including a dry well and a wet well; a vent pipe connecting the dry well and the pressure suppression pool; a gravity-driven water injection pool to hold boric acid aqueous solution; an emergency core water-injection piping system for causing the boric acid aqueous solution in the gravity-driven water injection pool to fall so as to be injected into the reactor pressure vessel in case of reactor accident; a static containment vessel cooling system pool; a static containment vessel cooling system heat exchanger; a dry well connection pipe connecting an upper part of the static containment vessel cooling system heat exchanger and the dry well; and a gas vent pipe for discharging noncondensible gas in the static containment vessel cooling system heat exchanger into the inside of the pressure suppression pool. | 03-05-2009 |
20090080589 | CORE CATCHER, MANUFACTURING METHOD THEREOF, REACTOR CONTAINMENT VESSEL AND MANUFACTURING METHOD THEREOF - Core debris generated during a molten reactor core in a reactor containment vessel penetrating the reactor containment vessel is configured to be caught by a core catcher located beneath the reactor containment vessel which has a main body having first stage cooling water channels and second stage surrounded by cooling fins extending radially. The number of the second stage cooling channels is larger than that of the first stage cooling channels. Cooling water is supplied from a cooling water injection opening and distributed to the first cooling water channels at a distributor. An intermediate header is formed between the first and the second cooling water channels, and the cooling water is distributed to the second cooling water channels uniformly. | 03-26-2009 |
20090098473 | Photomask, method of lithography, and method for manufacturing the photomask - A photomask has a monitoring pattern configured to obtain information required for adjusting optical system of a projection lithography tool. The monitoring pattern encompasses a mask substrate and an asymmetrical diffraction grating delineated on the mask substrate, configured to generate a positive first order diffracted light and a negative first order diffracted light in different diffraction efficiencies. The asymmetrical diffraction grating includes a plurality of probing-phase shifters, disposed periodically on the mask substrate in parallel, and a plurality of opaque strips disposed on light-shielding faces of the probing-phase shifters. An asymmetrically recessed ridge implements each of the probing-phase shifters. | 04-16-2009 |
20090246891 | MARK FORMING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A mark forming method includes forming a first mask layer on a semiconductor substrate; forming at least three first patterns having periodicity on the first mask layer; forming a second mask layer on the first mask layer having the first patterns formed thereon; and forming an opening in the second mask layer to cover at least two patterns on ends of the at least three first patterns, thereby forming a mark composed of exposed ones of the first patterns. | 10-01-2009 |
20090323884 | CONTAINMENT VESSEL AND NUCLEAR POWER PLANT THEREWITH - A containment vessel for containing a reactor pressure vessel and steam generators has a main containment vessel, a diaphragm, a pressure suppression chamber, LOCA vent pipes. The reactor pressure vessel contains a reactor core of a pressurized water reactor. The diaphragm partitions the main containment vessel into an upper vessel and a lower vessel. The pressure suppression chamber has a suppression pool to store water and gas phase of the pressure suppression chamber communicates with the upper vessel. The LOCA vent pipes connect the pressure suppression chamber to the lower vessel. All of the equipments and piping that constitute the reactor pressure boundary, including the reactor pressure vessel, the steam generators, a cold leg pipe and a hot leg pipe, are contained in the lower vessel. | 12-31-2009 |
20100055584 | EXPOSURE DEVICE AND EXPOSURE METHOD - An exposure device according to an embodiment includes an exposure light source for irradiating a reflective mask with an exposure light, an alignment light source for irradiating the reflective mask with an alignment light and an optical element having a structure that a light path of the exposure light extending from the alignment light source to the reflective mask shares at least part in common with a light path of the alignment light extending from the alignment light source to the reflective mask. | 03-04-2010 |
20100193831 | EPOXY RESIN COMPOSITION, CURED OBJECT OBTAINED THEREFROM, AND LIGHT-EMITTING DIODE - Provided are an epoxy resin composition including acid anhydrides (A) and epoxy resins (B), in which: (a) cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride accounts for 50 to 90 mass % of the acid anhydrides (A); (b) an alicyclic epoxy resin compound accounts for 30 to 90 mass % of the epoxy resins (B) and an epoxy resin compound represented by the following general formula (1) accounts for 10 to 50 mass % of the epoxy resins (B); and (c) contents of the acid anhydrides (A) and the epoxy resins (B) are such that a blending equivalent ratio between the acid anhydrides and the epoxy resins ranges from 0.4 to 0.7, a cured product of the composition, and a light-emitting diode. The epoxy resin composition has the following characteristics. That is, (1) the composition has a low viscosity after the mixing, a low degree of viscosity increase in standing at room temperature, and excellent workability, (2) the composition has satisfactory curability even when no curing accelerator is added, and (3) a cured product is colorless and transparent, has crack resistance, and changes its color to a small extent with long-term light irradiation and heating. The composition is suitable for an encapsulant for a photoelectric conversion element such as a blue LED or white LED. (In the formula, R's each independently represent a hydrogen atom or a methyl group, m represents an integer of 1 to 3, and n represents an integer of 2 to 8.) | 08-05-2010 |
20100272226 | BOILING WATER NUCLEAR REACTOR AND EMERGENCY CORE COOLING SYSTEM OF THE SAME - A boiling water nuclear reactor comprises: a reactor containment vessel including a dry well and a wet well; a vent pipe connecting the dry well and the pressure suppression pool; a gravity-driven water injection pool to hold boric acid aqueous solution; an emergency core water-injection piping system for causing the boric acid aqueous solution in the gravity-driven water injection pool to fall so as to be injected into the reactor pressure vessel in case of reactor accident; a static containment vessel cooling system pool; a static containment vessel cooling system heat exchanger; a dry well connection pipe connecting an upper part of the static containment vessel cooling system heat exchanger and the dry well; and a gas vent pipe for discharging noncondensible gas in the static containment vessel cooling system heat exchanger into the inside of the pressure suppression pool. | 10-28-2010 |
20110024930 | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device according to an embodiment includes bringing a pattern part for transfer formed on a template and a viscous material disposed on a material to be processed into contact with each other; and adjusting a distance between a surface of the material to be processed and a surface of the pattern part for transfer that faces the material to be processed so as to become a desired distance, in the contact situation of the pattern part for transfer and the viscous material. | 02-03-2011 |
20110036532 | APPARATUS FOR PRODUCING AMORPHOUS ALLOY FOIL STRIP AND METHOD FOR PRODUCING AMORPHOUS ALLOY FOIL STRIP - An apparatus and a method for producing an amorphous alloy foil strip, which are capable of producing an amorphous alloy foil strip having a large sheet thickness in an industrial scale, are provided. | 02-17-2011 |
20110059402 | EXPOSURE METHOD - According to the embodiments, exposure is performed on a resist on a substrate at a first focus position by using a phase shift mask in which a first light transmitting area and a second light transmitting area are formed adjacently via a light shielding pattern and a phase difference between light transmitting through the first light transmitting area and light transmitting through the second light transmitting area is φ≠π, and exposure is performed on the resist at a second focus position different from the first focus position by using the phase shift mask. | 03-10-2011 |
20110122390 | EXPOSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND EXPOSURE APPARATUS - According to one embodiment, on a substrate, a resist layer is laminated on an upper side of a pattern formation layer on which a desired pattern is formed. A diffraction pattern that diffracts exposure light irradiated on the substrate is formed further on the upper side than the resist layer. Overall exposure is performed from above the diffraction pattern using a deformed light having illumination light source shape determined according to the desired pattern. Diffracted light diffracted on the resist layer. | 05-26-2011 |
20110158371 | PRESSURIZED WATER REACTOR PLANT - According to an embodiment, a pressurized water reactor plant has a primary system which includes: a reactor vessel for housing a reactor core which is cooled by a primary coolant, a single steam generator, a hot leg pipe for connecting the reactor vessel and the steam generator, cold leg pipes, at least two primary coolant pumps, and a pressurizer for pressurizing the primary coolant pressure boundary in which the primary coolant flows. The plant also has: a passive cooling and depressurization system which is a primary depressurization means for equalizing the primary system pressure to the secondary system pressure at the time of a tube rupture accident of the steam generator, and a reactor containment vessel containing the primary system and cooling the primary system by air cooling. Thus, a compact pressurized water rector with high economic efficiency, safety, and reliability can be provided. | 06-30-2011 |
20120121056 | REACTOR CONTAINMENT VESSEL AND NUCLEAR POWER PLANT USING THE SAME - According to an embodiment, a nuclear reactor containment vessel has: a primary reactor containment vessel which contains a nuclear pressure vessel; a secondary reactor containment vessel and which is disposed outside the primary reactor containment vessel which has the pressure resistant properties and the leak-tightness which are equivalent to those of the primary reactor containment vessel; an air bag which is disposed within the secondary reactor containment vessel and which, when a failure occurs in primary reactor containment vessel, expands while receiving and encapsulating a high pressure gas discharged from the inside of the primary reactor containment vessel; and a gas phase vent pipe which connects the primary reactor containment vessel and the air bag. | 05-17-2012 |
20130235966 | EMERGENCY CORE COOLING SYSTEM AND BOILING WATER NUCLEAR PLANT - An emergency core cooling system is provided with at least four active safety divisions each equipped with a motor-driven active safety system, and at least one passive safety division equipped with passive system that does not require to be electrically driven. The number of active safety divisions is grater than the number of active safety divisions needed during a design basis accident by two or more, and each active safety division is provided with one motor-driven active safety system. The passive safety system can cool the reactor core without being re-supplied with cooling water from the outside during the time period needed for the active safety system subjected to online maintenance to recover if an accident occurred during online maintenance of one active safety system. In an emergency core cooling system for a boiling water nuclear power plant, it is possible to reduce the size of an emergency power source and the number of systems that lose the function caused by an auxiliary cooling system losing the function. | 09-12-2013 |
20130259183 | PASSIVE COOLING AND DEPRESSURIZATION SYSTEM AND PRESSURIZED WATER NUCLEAR POWER PLANT - A passive cooling and depressurization system for a pressurized water nuclear plant is provided with a cooling water pool, a steam supply piping, a heat exchanger, a steam supply valve, a coolant return pipe and an outlet valve. The steam supply piping extends from the gas phase of the pressurizer. The heat exchanger exchanges heat between water stored in the cooling water pool and steam flowing through the steam supply piping. The steam supply valve is equipped on the steam supply piping. The coolant return pipe extends from the heat exchanger to a liquid phase of the reactor pressure boundary. The outlet valve is equipped on the coolant return pipe. | 10-03-2013 |
20130259184 | CONTAINMENT VESSEL AND NUCLEAR POWER PLANT - A containment vessel has an inner shell covering a reactor pressure vessel and an outer shell forming an outer well which is a gas-tight space covering the horizontal outer periphery of the inner shell. The inner shell has a first cylindrical side wall surrounding the horizontal periphery of the reactor pressure vessel, a containment vessel head which covers the upper part of the reactor pressure vessel, and a first top slab connecting in a gas-tight manner the periphery of the containment vessel head and the upper end of the first cylindrical side wall. The outer shell has a second cylindrical side wall surrounding the outer periphery of the first cylindrical side wall, and also has a second to slab connecting in a gas-tight manner the vicinity of the upper end of the second cylindrical side wall and the first cylindrical side wall. | 10-03-2013 |
20140003567 | NUCLEAR POWER PLANT AND PASSIVE CONTAINMENT COOLING SYSTEM | 01-02-2014 |