Patent application number | Description | Published |
20090002854 | PRECISION MECHANICAL-OPTICAL SYSTEM AND METHOD FOR PRODUCING A COMPOSITE FROM OPTICAL ELEMENTS HELD INDIVIDUALLY IN MOUNTS - In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements. | 01-01-2009 |
20090207511 | ASSEMBLY FOR ADJUSTING AN OPTICAL ELEMENT - An assembly for fixation or adjusting of an optical element ( | 08-20-2009 |
20100073786 | Optical Mounting and Optical Component Comprising Said Type of Optical Mounting - The invention relates to an optical mounting comprising a stationary outer mounting and an inner mounting part embodied to receive an optical element. The aim of the invention is to enlarge the adjustment path in the direction of the optical axis of the optical element that is to be mounted, and as a result, obtaining high stability and rigidity that is perpendicular to the optical axis. Also, the invention aims at keeping the space requirements and the manufacturing and mounting costs as low as possible. | 03-25-2010 |
20100128367 | PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD - A projection objective for a microlithography apparatus with improved imaging properties is provided. A manipulator for a projection objective is provided. A microlithography apparatus including a projection objective of this type and/or a manipulator of this type is provided. A method for improving the imaging properties of a projection objective is provided. | 05-27-2010 |
20100271716 | REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT - A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same. | 10-28-2010 |
20110255181 | REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT - A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same. | 10-20-2011 |
20130279029 | REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT - A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same. | 10-24-2013 |
20150070789 | REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT - A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same. | 03-12-2015 |