Patent application number | Description | Published |
20080311507 | Fluorine-Containing Compound, Fluorine-Containing Polymer, Postive-Type Resist Composition, And Patterning Process Using Same - Disclosed is a fluorine-containing compound represented by formula (1), | 12-18-2008 |
20090011199 | Fluorine-Containing Compound, Fluorine-Containing Polymer, Negative-Type Resist Composition, and Patterning Process Using Same - Disclosed is a fluorine-containing unsaturated carboxylic acid represented by formula (1), | 01-08-2009 |
20090030173 | NOVEL FLUORINE-CONTAINING DICARBOXYLIC ACIDS AND THEIR NOVEL POLYMER COMPOUNDS - Disclosed is a fluorine-containing dicarboxylic acid represented by formula (1), | 01-29-2009 |
20090061353 | Positive-Type Resist Composition - Disclosed is a fluorine-containing polymer compound containing first and second repeating units respectively represented by formulas (a-1) and (a-2), | 03-05-2009 |
20110098500 | Polymerizable Fluorine-Containing Compound - A polymerizable fluorine-containing compound represented by formula (1), | 04-28-2011 |
20110282026 | Fluorine-Containing Dicarboxylic Acids and Their Novel Polymer Compounds - A fluorine-containing dicarboxylic acid represented by formula (1), | 11-17-2011 |
20110319652 | Processes for Production of 2-Bromo-2,2-Difluoroethanol and 2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt - Disclosed is a process for producing 2-bromo-2,2-difluoroethanol, which comprises reducing a bromodifluoroacetic acid derivative represented by the formula [1] by using an ate hydride complex as a reducing agent. 2-Bromo-2,2-difluoroethanol thus produced can be used as the starting material to carry out the esterification step, the sulfination step and the oxidation step in this order, thereby producing a 2-alkylcarbonyloxy-1,1-difluoroethanesulfonic acid salt, wherein A represents a substituted or unsubstituted linear, branched or cyclic alkoxy group having 1 to 20 carbon atoms, a substituted or unsubstituted aryloxy group having 6 to 15 carbon atoms, a heteroaryloxy group having 4 to 15 carbon atoms, or a halogen atom. | 12-29-2011 |
20120226070 | Fluorine-Containing Compound, Fluorine-Containing Polymer, Negative-Type Resist Composition, and Patterning Process Using Same - A fluorine-containing unsaturated carboxylic acid represented by formula (1), | 09-06-2012 |
20120322006 | Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method - A sulfonate resin according to the present invention has a repeating unit of the following general formula (3): | 12-20-2012 |
20130065182 | Fluorine-Containing Sulfonate, Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method - According to the present invention, there is provided a fluorine-containing sulfonate resin having a repeating unit of the following general formula (3). | 03-14-2013 |
20130085237 | Fluorinated Diamine and Polymer Formed Therefrom - Polymer compounds derived from fluorine-containing diamine compounds represented by formula (1). | 04-04-2013 |
20130209937 | Polymerizable Fluorine-Containing Sulfonate, Fluorine-Containing Sulfonate Resin, Resist Composition And Pattern-Forming Method Using Same - According to the present invention, there is provided a sulfonate resin having a repeating unit of the following general formula (3): | 08-15-2013 |
20130209938 | Fluorine-Containing Sulfonic Acid Salts, Photo-Acid Generator And Resist Composition And Pattern Formation Method Utilizing Same - A resist composition according to the present invention includes at least a base resin, a photoacid generator and a solvent, wherein the photoacid generator comprises a fluorine-containing sulfonic acid salt of the following general formula (4). | 08-15-2013 |
20130216960 | Water Repellent Additive for Immersion Resist - Disclosed is a water repellent additive for an immersion resist, which is composed of a fluorine-containing polymer that has a repeating unit represented by general formula (1). By adding the water repellent additive to a resist composition, the resist composition can be controlled to have high water repellency during exposure and to exhibit improved solubility in a developing solution during development. | 08-22-2013 |
20130317250 | 2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt and Method for Producing the Same - By using an organic base when a carboxylic acid bromodifluoroethyl ester is sulfinated by using a sulfinating agent, there is obtained 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfinic acid ammonium salt. By oxidizing the 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfinic acid ammonium salt, there is obtained 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfonic acid ammonium salt. By using the 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfonic acid ammonium salt as a raw material and exchanging it into an onium salt directly or through saponification/esterification, there can be obtained a 2-alkylcarbonyloxy-1,1-difluoroethanesulfonic acid onium salt. | 11-28-2013 |
20140287359 | Fluorine-Containing Sulfonate, Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method - According to the present invention, there is provided a fluorine-containing sulfonate resin having a repeating unit of the following general formula (3). | 09-25-2014 |