Patent application number | Description | Published |
20080305434 | Developing Apparatus and Developing Method - A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle. | 12-11-2008 |
20090053904 | SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM - In the present invention, a coating solution containing polysilazane is applied to a substrate to form a coating film. Thereafter, an ultraviolet ray is applied to the coating film formed on the substrate to cut a molecular bond of polysilazane in the coating film. Then, the coating film in which the molecular bond of polysilazane has been cut is oxidized while the coating film is being heated. Then, the oxidized coating film is baked at a baking temperature equal to or higher than a heating temperature when the coating film is oxidized. | 02-26-2009 |
20100216077 | DEVELOPING APPARATUS AND DEVELOPING METHOD - A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle. | 08-26-2010 |
Patent application number | Description | Published |
20090092865 | Fuel Cell System - A fuel cell system includes: a fuel cell stack configured to have a plurality of unit fuel cells arranged on an identical plane; a chassis configured to cover at least one side of said fuel cell stack via an air flow space; and a condensation water holding member configured to be provided in at least a part between said fuel cell stack and said chassis, have a mesh shape and have a function for keeping moisture. | 04-09-2009 |
20090263698 | FUEL CELL SYSTEM AND FUEL CELL - A fuel cell system which allows uniform fuel distribution to respective fuel cells, comprising: a plurality of fuel cells | 10-22-2009 |
20100015504 | FUEL CELL - Cut lines ( | 01-21-2010 |
20100055510 | POLYMER ELECTROLYTE FUEL CELL - A polymer electrolyte fuel cell includes a power generation part as an electrolyte membrane-electrode assembly formed of a solid polymer electrolyte membrane, a fuel electrode arranged in contact with one side of the solid polymer electrolyte membrane and an oxygen electrode arranged in contact with the other side of the membrane, and a fuel supply part for storing and supplying an alcohol fuel to the fuel electrode. The fuel supply part is composed of a high-concentration fuel tank for storing and supplying a highly-concentrated fuel and a water fuel tank for storing and supplying a water fuel. The fuel is gasified and supplied to the power generation part through a fuel gasification/supply layer provided between at least the high-concentration fuel tank and the fuel electrode. | 03-04-2010 |
20130209878 | NONAQUEOUS SECONDARY CELL AND METHOD OF MANUFACTURING THE SAME - A thin nonaqueous secondary cell has high stability where a positive charge collector and a negative charge collector also serve as outer covering members. A sealing layer concurrently achieves high adhesiveness with both electrode charge collectors, high reliability preventing of short circuits, and satisfactory gas barrier properties. The nonaqueous secondary cell includes a positive charge collector containing aluminum as a primary component, a positive electrode layer formed on the positive charge collector, a negative charge collector containing copper as a primary component, a negative electrode layer formed on the negative charge collector so the negative electrode layer opposes the positive electrode layer, and a separator including an electrolyte between positive and negative electrode layers. Inner surfaces of a peripheries of positive and negative charge collectors are connected while a sealing material including a multilayered structure is interposed between the inner surfaces of the peripheries of the two charge collectors. | 08-15-2013 |
20140079984 | NON-AQUEOUS SECONDARY BATTERY, MOUNTED UNIT, AND METHOD FOR MANUFACTURING NON-AQUEOUS SECONDARY BATTERY - A non-aqueous secondary battery includes: a positive-electrode collector layer; a positive-electrode layer formed on one surface of the positive-electrode collector layer; a negative-electrode collector layer; a negative-electrode layer formed on one surface of the negative-electrode collector layer so as to be opposed to the positive-electrode layer; a separator provided between the positive-electrode layer and the negative-electrode layer; and a positive-electrode-side insulating layer and a negative-electrode-side insulating layer respectively formed on another surface of the positive-electrode collector layer and another surface of the negative-electrode collector layer. Circumferential inner surfaces of peripheral edges of the positive-electrode collector layer and the negative-electrode collector layer are joined with a sealing agent including at least a positive-electrode fusion layer, a gas barrier layer, and a negative-electrode fusion layer. The positive-electrode-side insulating layer and/or the negative-electrode-side insulating layer has a battery-side recess provided on a surface. | 03-20-2014 |
20140087235 | NONAQUEOUS-SECONDARY-BATTERY LAYERED STRUCTURE AND NONAQUEOUS-SECONDARY-BATTERY LAYERING METHOD - A layered structure includes a configuration in which non-aqueous secondary batteries are layered. Each non-aqueous secondary battery includes: a positive-electrode collector layer; a positive-electrode layer formed on one surface of the positive-electrode collector layer; a negative-electrode collector layer; a negative-electrode layer formed on one surface of the negative-electrode collector layer so as to be opposed to the positive-electrode layer; a separator containing an electrolytic solution provided between the positive-electrode layer and the negative-electrode layer; a positive-electrode-side insulating layer formed on another surface of the positive-electrode collector layer; and a negative-electrode-side insulating layer formed on another surface of the negative-electrode collector layer. Two non-aqueous secondary batteries share one negative-electrode-side insulating layer. | 03-27-2014 |
Patent application number | Description | Published |
20110117291 | TEMPLATE TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM - In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template. | 05-19-2011 |
20120152136 | IMPRINT METHOD, COMPUTER STORAGE MEDIUM AND IMPRINT APPARATUS - The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance. | 06-21-2012 |