Patent application number | Description | Published |
20080292808 | METHOD OF PRODUCING COMPOUND NANORODS AND THIN FILMS - A method of producing compound nanorods and thin films under a controlled growth mode is described. The method involves ablating compound targets using an ultrafast pulsed laser and depositing the ablated materials onto a substrate. When producing compound nanorods, external catalysts such as pre-deposited metal nanoparticles are not involved. Instead, at the beginning of deposition, simply by varying the fluence at the focal spot on the target, a self-formed seed layer can be introduced for nanorods growth. This provides a simple method of producing high purity nanorods and controlling the growth mode. Three growth modes are covered by the present invention, including nanorod growth, thin film growth, and nano-porous film growth. | 11-27-2008 |
20090246413 | METHOD FOR FABRICATING THIN FILMS - A method of ultrashort pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film completely free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. A ‘burst’ mode of ultrashort pulsed laser ablation and deposition is provided, where each ‘burst’ contains a train of laser pulses. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical setup for delivering the laser beam such that the beam is focused onto the target surface with an appropriate average energy density (fluence), and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted. | 10-01-2009 |
20090246530 | Method For Fabricating Thin Films - A method of pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. In various embodiments a ‘burst’ mode of ultrashort pulsed laser ablation and deposition is provided. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical system for delivering a focused onto the target surface with an appropriate energy density, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted. | 10-01-2009 |
20090311513 | METHOD FOR DEPOSITING CRYSTALLINE TITANIA NANOPARTICLES AND FILMS - A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO | 12-17-2009 |
20100000466 | P-Type Semiconductor Zinc Oxide Films Process for Preparation Thereof, and Pulsed Laser Deposition Method Using Transparent Substrates - A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials. | 01-07-2010 |
20100196192 | Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids - Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required. | 08-05-2010 |
20100209700 | METHOD OF PRODUCING COMPOUND NANORODS AND THIN FILMS - A method of producing compound nanorods and thin films under a controlled growth mode is described. The method involves ablating compound targets using an ultrafast pulsed laser and depositing the ablated materials onto a substrate. When producing compound nanorods, external catalysts such as pre-deposited metal nanoparticles are not involved. Instead, at the beginning of deposition, simply by varying the fluence at the focal spot on the target, a self-formed seed layer can be introduced for nanorods growth. This provides a simple method of producing high purity nanorods and controlling the growth mode. Three growth modes are covered by the present invention, including nanorod growth, thin film growth, and nano-porous film growth. | 08-19-2010 |
20100227133 | PULSED LASER MICRO-DEPOSITION PATTERN FORMATION - A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns. | 09-09-2010 |
20110133129 | METHOD OF TUNING PROPERTIES OF THIN FILMS - A method of tuning thin film properties using pulsed laser deposition (PLD) by tuning laser parameters is provided. Various embodiments may be utilized to tune magnetic properties, conductivity or other physical properties. Some embodiments may improve performance of electrochemical devices, for example a thin film electrode may be fabricated resulting in improved reaction speed of a Li ion battery. By way of example, a material property of thin film is tuned by setting a pulse duration. In some embodiments the numbers of laser pulses and laser pulse energy are other laser parameters which may be utilized to tune the film properties. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals and metal oxides. | 06-09-2011 |
20110192450 | METHOD FOR PRODUCING NANOPARTICLE SOLUTIONS BASED ON PULSED LASER ABLATION FOR FABRICATION OF THIN FILM SOLAR CELLS - A method of producing nanoparticles of solar light absorbing compound materials based on pulsed laser ablation is disclosed. The method uses irradiation of a target material of solar light absorbing compound material with a pulsed laser beam having a pulse duration of from 10 femtoseconds to 500 picoseconds to ablate the target thereby producing nanoparticles of the target. The nanoparticles are collected and a solution of the nanoparticles is applied to a substrate to produce a thin film solar cell. The method preserves the composition and structural crystalline phase of the starting target. The method is a much lower cost fabrication method for thin film solar cells. | 08-11-2011 |
20110192714 | NANOPARTICLE PRODUCTION IN LIQUID WITH MULTIPLE-PULSE ULTRAFAST LASER ABLATION - A method for generating nanoparticles in a liquid comprises generating groups of ultrafast laser pulses, each pulse in a group having a pulse duration of from 10 femtoseconds to 200 picoseconds, and each group containing a plurality of pulses with a pulse separation of 1 to 100 nanoseconds and directing the groups of pulses at a target material in a liquid to ablate it. The multiple pulse group ablation produces nanoparticles with a reduced average size, a narrow size distribution, and improved production efficiency compared to prior pulsed ablation systems. | 08-11-2011 |
20110193025 | PRODUCTION OF FINE PARTICLES OF FUNCTIONAL CERAMIC BY USING PULSED LASER - A method of forming nanometer sized fine particles of functional ceramic from a bulk functional ceramic, particularly fine particles of phosphorous ceramics from a bulk phosphor material is disclosed. The method relies on irradiation of a bulk phosphorous ceramic in a liquid with an ultrashort-pulsed-laser-fragmentation beam to thereby form nanometer sized particles of the phosphorous ceramic. The method is unique in that the generated particles retain the chemical and crystalline properties of the bulk phosphorous ceramic. The generated solutions are stable colloids from which the particles can be isolated or used as is. | 08-11-2011 |
20110194106 | METHOD AND APPARATUS TO PREPARE A SUBSTRATE FOR MOLECULAR DETECTION - An device for Raman spectroscopy such as surface enhanced Raman spectroscopy (SERS) is disclosed herein. Various embodiments may be utilized to prepare a SERS substrate using several deposition techniques such as pulsed laser deposition. Some embodiments optimize coverage, volume, or elements of SERS active metals. The method is a single step inexpensive method for preparing a SERS active substrate. In some embodiments a coating layer underneath the SERS active metals is utilized for additional enhancements. | 08-11-2011 |
20120097224 | NON-VACUUM METHOD FOR FABRICATION OF A PHOTOVOLTAIC ABSORBER LAYER - The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption. | 04-26-2012 |
20120098032 | NON-VACUUM METHOD FOR FABRICATION OF A PHOTOVOLTAIC ABSORBER LAYER - The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption. | 04-26-2012 |
20120100660 | METHOD FOR PREPARATION OF METAL CHALCOGENIDE SOLAR CELLS ON COMPLEXLY SHAPED SURFACES - Methods for fabricating a photovoltaic device on complexly shaped fabricated objects, such as car bodies are disclosed. Preferably the photovoltaic device includes absorber layers comprising Copper, Indium, Gallium, Selenide (CIGS) or Copper, Zinc, Tin, Sulfide (CZTS). The method includes the following steps: a colloidal suspension of metal surface-charged nanoparticles is formed; electrophoretic deposition is used to deposit the nanopartieles in a metal thin film onto a complexly shaped surface of the substrate; the metal thin film is heated in the presence of a chalcogen source to convert the metal thin film into a metal chalcogenide thin film layer; a buffer layer is formed on the metal chalcogenide thin film layer using a chemical bath deposition; an intrinsic zinc oxide insulating layer is formed adjacent to a side of the buffer layer, opposite the metal chalcogenide thin film layer, by chemical vapor deposition; and finally, a transparent conducting oxide is formed adjacent to a side of the intrinsic zinc oxide, opposite the buffer layer, by chemical vapor deposition. | 04-26-2012 |
20120148756 | METHOD OF PRODUCING COMPOUND NANORODS AND THIN FILMS - A method of producing compound nanorods and thin films under a controlled growth mode is described. The method involves ablating compound targets using an ultrafast pulsed laser and depositing the ablated materials onto a substrate. When producing compound nanorods, external catalysts such as pre-deposited metal nanoparticles are not involved. Instead, at the beginning of deposition, simply by varying the fluence at the focal spot on the target, a self-formed seed layer can be introduced for nanorods growth. This provides a simple method of producing high purity nanorods and controlling the growth mode. Three growth modes are covered by the present invention, including nanorod growth, thin film growth, and nano-porous film growth. | 06-14-2012 |
20120242987 | SURFACE-ENHANCED RAMAN SCATTERING APPARATUS AND METHODS - An apparatus for performing surface-enhanced Raman scattering (SERS) is disclosed wherein an inner surface of a container is coated with SERS active materials such as nanoparticles of noble metals. Such a container can provide a partially enclosed, optical diffuse cavity whose inner surfaces serve for dual purposes of enhancing Raman scattering of the contained analyte and optical integration, therefore improving the efficiency of optical excitation and signal collection. The container may be configured to isolate the SERS active material from the external environment. The container, which may be a cylindrical tube, may be referred to as a SERS tube. Methods of coating the inner wall of a container with pulsed laser ablation and with nanoparticle colloids, respectively, are disclosed. | 09-27-2012 |
20120282134 | PRODUCTION OF METAL AND METAL-ALLOY NANOPARTICLES WITH HIGH REPETITION RATE ULTRAFAST PULSED LASER ABLATION IN LIQUIDS - Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required. | 11-08-2012 |
20130101830 | Metal Organic Complexes For Improved Smoothness And Uniformity Of Thin Films Deposited From Nanocolloids Via Electrophoresis - Disclosed is a process for electrophoretic deposition of colloidal suspensions of nanoparticles, especially from aprotic solvents, onto a variety of substrates. The process provides chemical additives that can be used to improve thin films deposited from colloidal suspensions by increasing the rate of deposition and the smoothness of the deposited film. In this process, a chemical additive is used to improve the properties of the deposited thin films. The chemical additive comprises a redox couple, an organometallic complex, a metallocene, a ferrocene, or a nickelocene. The colloidal suspension can be composed of semiconductor, metal or ceramic nanoparticles suspended in an aprotic polar solvent such as acetone, acetonitrile, or pyridine. The process also improves the properties of thin films deposited from protic solvents. The particles have at least one dimension ranging from 0.1 nanometers (nm) to 500 nm. | 04-25-2013 |
20130150231 | METHOD OF MANUFACTURING ORDERED INTERMETALLIC CATALYSTS - At least one embodiment includes a method for fabricating a catalyst comprising a colloidal suspension of nanoparticles, the nanoparticles comprising intermetallics of two or more metals exhibiting long range superlattice crystal ordering. The method comprising the steps of: producing a bulk target of the intermetallics of two or more metals exhibiting long range crystal ordering and submerging the target in a solvent. A pulsed laser is used to ablate bulk target material and to produce nanoparticle of the intermetallics of two or more metals exhibiting long range crystal ordering. At least one embodiment includes a catalyst made with the method. The catalyst can exhibit some desirable properties. For example, the catalyst may remain suspended in solution, essentially without surface modification by ionic compounds. Furthermore, the concentration of elements other than those which comprise the solvent or the intermetallic compound may be less than about 1 ppm. | 06-13-2013 |
20140017416 | P-TYPE SEMICONDUCTOR ZINC OXIDE FILMS PROCESS FOR PREPARATION THEREOF, AND PULSED LASER DEPOSITION METHOD USING TRANSPARENT SUBSTRATES - A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials. | 01-16-2014 |
20140093744 | METHOD FOR DEPOSITING CRYSTALLINE TITANIA NANOPARTICLES AND FILMS - A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO | 04-03-2014 |
20140161998 | PULSED LASER MICRO-DEPOSITION PATTERN FORMATION - A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns. | 06-12-2014 |
20140314995 | PULSED LASER PROCESSING METHOD FOR PRODUCING SUPERHYDROPHOBIC SURFACES - A method of pulsed laser processing of solid surface for enhancing surface hydrophobicity is disclosed wherein the solid surface is covered with a transparent medium during laser processing and the laser beam incidents through the covering medium and irradiates the solid surface. Two effects are obtained simultaneously. One is the laser-induced texture formation directly under the laser irradiation. The other is the deposition of the laser-removed materials along the laser scan lines. Both effects introduce surface roughness on nanometer scales, and both enhance surface hydrophobicity, rendering superhydrophobicity on the surfaces of both the laser-irradiated solid and the covering medium. Because the beam scan line spacing can be larger than a single scan line width by multiple times, this method provides a high processing speed of square inch per minute and enables large area processing. | 10-23-2014 |