Fushida
Atsuo Fushida, Kokubunji JP
Patent application number | Description | Published |
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20130244405 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device disclosed herein includes: mounting a substrate on an electrostatic chuck placed inside a chamber, the electrostatic chuck having a first temperature and the substrate being retained in advance in an atmosphere having a second temperature lower than the first temperature; fixing the substrate onto the electrostatic chuck by applying a voltage to the electrostatic chuck; heating the electrostatic chuck to a third temperature higher than the first temperature and the second temperature after mounting the substrate; and processing the substrate after the heating. | 09-19-2013 |
Masahiro Fushida, Kanagawa JP
Patent application number | Description | Published |
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20080292297 | VIBRATION DETECTING DEVICE, IMAGING APPARATUS, AND VIBRATION DETECTING METHOD - A vibration detecting device includes: a vibration amount detecting unit including at least a vibration amount sensor which is a portion for detecting a vibration amount, and outputting a vibration detection signal which is a signal indicating the detected vibration amount, and a high-pass filter configured to remove DC components to be superimposed on the vibration detection signal; a status detecting unit configured to detect a particular status which causes a result for providing particular change to the vibration amount detected by said vibration amount sensor; and an input control unit configured to prevent said vibration amount detection signal from being input to said high-pass filter in response to said particular status being detected by said status detecting unit. | 11-27-2008 |
Shinya Fushida, Hiroshima JP
Patent application number | Description | Published |
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20150219548 | Method for Examining Microorganisms and Examination Apparatus for Microorganisms - An examination apparatus | 08-06-2015 |