Hidetoshi Morokuma

HITACHINAKA, JP

1. 20090218491 SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION INSPECTING/MEASURING APPARATUS 09-03-2009
2. 20090039263 PATTERN MEASUREMENT APPARATUS - Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide 02-12-2009
3. 20080245965 Charged Particle System - capable of facilitating comparison between an actual pattern and an ideal pattern using not only two-dimensional CAD data but 10-09-2008
4. 20080237456 Method And Apparatus For Observing A Specimen 10-02-2008
5. 20080224035 Pattern displacement measuring method and pattern measuring device 09-18-2008
6. 20080204405 Method and System of Displaying an Exposure Condition 08-28-2008