Patent application number | Description | Published |
20080283879 | TRANSISTOR HAVING GATE DIELECTRIC LAYER OF PARTIAL THICKNESS DIFFERENCE AND METHOD OF FABRICATING THE SAME - A transistor having a gate dielectric layer of partial thickness difference and a method of fabricating the same are provided. The method includes forming a gate dielectric layer having a main portion with a relatively thin thickness formed on a semiconductor substrate, and a sidewall portion with a relatively thick thickness formed on both sides of the main portion. A first gate is formed overlapping the main portion of the gate dielectric layer, and forming a second gate layer covering the sidewall portion of the gate dielectric layer and covering the first gate. The second gate layer is etched, thereby forming second gates patterned with a spacer shape on sidewalls of the first gate. The exposed sidewall portion of the gate dielectric layer is selectively etched using the second gates as a mask, thereby forming a pattern of the gate dielectric layer to be aligned with the second gates. A source/drain is formed in a portion of the semiconductor substrate exposed by the second gates. | 11-20-2008 |
20090267137 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING NOTCHED GATE MOSFET - Provided is a method of manufacturing a semiconductor device, by which a cell transistor formed on a cell array area of a semiconductor substrate employs a structure in which an electrode in the shape of spacers is used to form a gate and a multi-bit operation is possible using localized bits, and transistors having structures optimized to satisfy different requirements depending upon functions of the transistors can be formed on a peripheral circuit area which is the residual area of the semiconductor substrate. In this method, a cell transistor is formed on the cell array area. The cell transistor includes a notch gate structure, a first channel region formed on a semiconductor substrate under the notch gate structure, a source region and a drain region formed on both sides of the first channel region, a first gate insulation film formed between the first channel region and the notch gate structure, and a memory layer locally formed on areas adjacent to the source and drain regions between the first channel region and the notch gate structure. At the same time that the cell transistor is formed, a plurality of peripheral circuit transistors including at least one transistor having a different structure from the cell transistor are formed on the peripheral circuit area. | 10-29-2009 |
20100117140 | NON-VOLATILE MEMORY DEVICE FOR 2-BIT OPERATION AND METHOD OF FABRICATING THE SAME - A non-volatile memory device for 2-bit operation and a method of fabricating the same are provided. The non-volatile memory device includes an active region and a gate extending in a word line direction on a semiconductor substrate, and crossing each other repeatedly; a charge storage layer disposed below the gate, and confined at a portion where the gate and the active region cross; a charge blocking layer formed on the charge storage layer; a tunnel dielectric layer formed below the charge storage layer; first and second source/drain regions formed in the active region exposed by the gate; and first and second bit lines crossing the word line direction. The active region may be formed in a first zigzag pattern and/or the gate may be formed in a second zigzag pattern in symmetry with the first zigzag pattern. | 05-13-2010 |
20110086483 | NON-VOLATILE MEMORY DEVICE FOR 2-BIT OPERATION AND METHOD OF FABRICATING THE SAME - A non-volatile memory device for 2-bit operation and a method of fabricating the same are provided. The non-volatile memory device includes an active region and a gate extending in a word line direction on a semiconductor substrate, and crossing each other repeatedly; a charge storage layer disposed below the gate, and confined at a portion where the gate and the active region cross; a charge blocking layer formed on the charge storage layer; a tunnel dielectric layer formed below the charge storage layer; first and second source/drain regions formed in the active region exposed by the gate; and first and second bit lines crossing the word line direction. The active region may be formed in a first zigzag pattern and/or the gate may be formed in a second zigzag pattern in symmetry with the first zigzag pattern. | 04-14-2011 |
Patent application number | Description | Published |
20080203377 | METHODS OF MANUFACTURING NON-VOLATILE MEMORY DEVICES BY IMPLANTING METAL IONS INTO GRAIN BOUNDARIES OF VARIABLE RESISTANCE LAYERS, AND RELATED DEVICES - Integrated circuit nonvolatile memory devices are manufactured by forming a variable resistance layer on an integrated circuit substrate. The variable resistance layer includes grains that define grain boundaries between the grains. Conductive filaments are formed along at least some of the grain boundaries. Electrodes are formed on the variable resistance layer. The conductive filaments may be formed by implanting conductive ions into at least some of the grain boundaries. Moreover, the variable resistance layer may be a variable resistance oxide of a metal, and the conductive filaments may be the metal. Related devices are also disclosed. | 08-28-2008 |
20080272423 | Conductive structures, non-volatile memory device including conductive structures and methods of manufacturing the same - Conductive structures in an integrated circuit device including an integrated circuit substrate and first conductive layer patterns on the substrate. Second conductive layer patterns are on the substrate extending between respective ones of the first conductive layer patterns. Adjacent ones of the first and second conductive layer patterns are on different horizontal planes relative to the substrate to reduce parasitic capacitance therebetween. | 11-06-2008 |
20090008700 | SEMICONDUCTOR MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME - In methods of manufacturing a memory device, a tunnel insulation layer is formed on a substrate. A floating gate having a substantially uniform thickness is formed on the tunnel insulation layer. A dielectric layer is formed on the floating gate. A control gate is formed on the dielectric layer. A flash memory device including the floating gate may have more uniform operating characteristics. | 01-08-2009 |
20090016110 | METHODS OF READING DATA FROM NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE - A method of reading data in a non-volatile memory device includes applying a bit line read voltage to a bit line and a selected cell read voltage to a word line, both of which are electrically connected to a selected cell located in a selected string. A first read voltage is applied to word lines electrically connected to first non-selected cells separated from the selected cell in the selected string, and a second read voltage is applied to word lines electrically connected to second non-selected cells adjacent to the selected cell in the selected string. The second read voltage is lower than the first read voltage. A pass voltage is applied to turn on a string select transistor and a ground select transistor, respectively, in the selected string. An electrical signal output from the selected string is compared with a standard signal to read data stored in the selected cell. | 01-15-2009 |