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Scott Coakley
BELMONT, CA US
1. 20090263747 THREE AXIS LINEAR ACTUATOR - mover moving a stage along a first axis along a second axis and along a third axis includes a magnetic component 10-22-20092. 20090033895 Lithography apparatus with flexibly supported optical system 02-05-2009
3. 20080275661 On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage 11-06-2008