Patent application number | Description | Published |
20080275661 | On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage - Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range. | 11-06-2008 |
20090033895 | Lithography apparatus with flexibly supported optical system - A lithography apparatus includes a projection optical system that projects an image of a pattern, a first support member, a second support member that is flexibly coupled to the first support member by a first flexible coupling device such that the second support member is suspended from the first support member, and a second flexible coupling device that flexibly couples the projection optical system to the second support structure. This arrangement is capable of improving the vibration characteristics of the projection optical system. | 02-05-2009 |
20090263747 | THREE AXIS LINEAR ACTUATOR | 10-22-2009 |
20100156198 | SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS - According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature. | 06-24-2010 |
20100167556 | THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER | 07-01-2010 |
20100237819 | Control Systems and Methods for Compensating for Effects of a Stage Motor - Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners. | 09-23-2010 |
20100284119 | Compensating Temperature Effects in Magnetic Actuators - Methods and apparatus for adjusting the amount of current provided to a magnetic actuator to compensate for a temperature change associated with the magnetic actuator are disclosed. According to one aspect of the present invention, an apparatus includes an actuator, which has at least one magnet and an associated force constant. The apparatus also includes a temperature sensing arrangement and a control arrangement, the temperature sensing arrangement being arranged to determine or measure a temperature of the magnet. The control arrangement adjusts the current provided to the actuator based on the temperature of the magnet. The current is adjusted to maintain a correct or desired force in light of temperature-induced variations to a force constant. | 11-11-2010 |
20110109419 | Thermally Conductive Coil and Methods and Systems - Embodiments of the invention provide improved thermal conductivity within, among other things, electromagnetic coils, coil assemblies, electric motors, and lithography devices. In one embodiment, a thermally conductive coil includes at least two adjacent coil layers. The coil layers include windings of wires formed from a conductor and an insulator that electrically insulates the windings within each coil layer. In some cases the insulator of the wires is at least partially absent along an outer surface of one or both coil layers to increase the thermal conductivity between the coil layers. In some embodiments, an insulation layer is provided between the coil layers to electrically insulate the coil layers. In some cases the insulation layer has a thermal conductivity greater than the thermal conductivity of the wire insulator. | 05-12-2011 |
20120062866 | MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG - Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag. | 03-15-2012 |
20120069316 | METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMBLIES INCORPORATING SAME - An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands. | 03-22-2012 |
20120074890 | APPARATUS AND METHODS FOR DETERMINING AN INITIALLY UNKNOWN COMMUTATION POSITION OF A MEMBER MOVED BY A PLANAR MOTOR - An exemplary stage apparatus has a motor, stage, and position-measuring device. The motor has a planar stator and moving-coil mover (planar motor). The stator is a checkerboard magnet array extending in an x-y plane and producing a magnetic field having a field period of 2π in a u-v coordinate system rotated 45° from the x-y coordinate system of the plane. The stage, coupled to the mover, moves with corresponding motions of the mover relative to the stator. The position-measurement device includes a first group of four magnetic-field sensors that are movable with the stage. The sensors are situated at integer multiples of π/2 from each other in u- and v-directions of the u-v coordinate system. The sensors produce respective data regarding a respective component of the magnetic field at, and hence the position of, the respective sensor within the period of the magnetic field. | 03-29-2012 |
20120113405 | METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE - A method for determining a commutation offset for a mover ( | 05-10-2012 |
20120127447 | METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE - A method for determining a commutation offset for a mover ( | 05-24-2012 |
20130135603 | C-CORE ACTUATOR FOR MOVING A STAGE - A mover assembly ( | 05-30-2013 |
20130164687 | HYBRID COOLING AND THERMAL SHIELD FOR ELECTROMAGNETIC ACTUATORS - A stage assembly includes a stage, a base assembly, a stage mover, and a temperature adjuster. The temperature adjuster includes a first plate, a first thermal insulator, a circulation housing, a first fluid system, and a second fluid system. The first plate is positioned adjacent to a conductor array of the stage mover. The first thermal insulator is positioned adjacent to the first plate. The circulation housing defines at least a portion of a housing passageway that is positioned adjacent to the first thermal insulator. The first fluid system directs a first circulation fluid through the housing passageway, and the second fluid system directs a second circulation fluid through the first plate channel. With this design, the second circulation fluid removes the majority of the heat from the conductor array, and the first circulation fluid shields an outer surface of the circulation housing from thermal disturbance. | 06-27-2013 |
20130255414 | Parallel Linkage and Actuator Motor Coil Designs for Tube Carrier - A stage apparatus includes at least one tube having a first section and a second section, the first section being coupled to a point of reference. The apparatus also includes at least one magnet, a precision stage, and a tube carrier. The precision stage is positioned at least partially over the at least one magnet, and has a first set of coils. The first set of coils cooperates with the at least one magnet to drive the precision stage. The tube carrier is at least partially positioned over the at least one magnet, and includes an end effector portion arranged to carry the second section, wherein the tube carrier further includes a second set of coils, the second set of coils being supported by the end effector portion and arranged to cooperate with the at least one magnet to control motion of the end effector portion. | 10-03-2013 |
20140132087 | THREE AXIS LINEAR ACTUATOR | 05-15-2014 |
20140260951 | MECHANISM FOR MAINTAINING A CLEARANCE GAP - An element is provided to maintain a clearance gap between a piston and a cylinder wall. In some embodiments, an element is included that is capable of spatial change. In some embodiments, the element is a component such as a clearance ring, a surface bearing, or a segment of a clearance ring or surface bearing. A clearance gap may be maintained by inward and outward motion of the component with respect to a piston assembly and a cylinder wall, where the motion is determined by a balance of forces acting on the component. In some embodiments, an inward force generated by an external gas pressure source is balanced by an outward preload force generated by, for example, a pneumatic piston. In some embodiments, a clearance gap is maintained based on in part on the ratio of inner to outer surface areas of a clearance ring. | 09-18-2014 |