Patent application number | Description | Published |
20080274623 | METHODS FOR FABRICATING A MAGNETIC HEAD READER USING A CHEMICAL MECHANICAL POLISHING (CMP) PROCESS FOR SENSOR STRIPE HEIGHT PATTERNING - Methods for fabricating TMR and CPP GMR magnetic heads using a chemical mechanical polishing (CMP) process with a patterned CMP conductive protective layer for sensor stripe height patterning. The method comprises defining a stripe height of a read sensor of a magnetic head reader. The method further comprises refill depositing an insulator layer on the read sensor. The method further comprises performing a CMP process down to the conductive protective layer on the read sensor deposited while defining the read sensor to remove an overfill portion of the insulator layer above the conductive protective layer and to remove a sensor pattern masking structure on the conductive protective layer. As a result, the insulator layer is planarized and smooth with the read sensor, eliminating fencing and alumina bumps typically encountered in the insulator layer at the edge of the patterned sensor. | 11-06-2008 |
20080278855 | PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH TRAILING SHIELD HAVING NOTCH AND THROAT HEIGHT DEFINED BY NONMAGNETIC PAD LAYER - A perpendicular magnetic recording write head supported on an air-bearing slider has a magnetic write pole (WP) with a WP end at the air-bearing surface (ABS) having a width generally equal to the data track width and a trailing shield (TS) with a TS end generally coplanar with the WP end. The TS has a first portion with a width at the TS end substantially wider than the width of the WP end and a TS notch (TSN) portion with a width at the TS end generally equal to the width of the WP end. The TS first portion has a height in a direction perpendicular to the ABS, and the TSN portion has a throat height (TH) in a direction perpendicular to the ABS that is less than the height of the TS first portion. A nonmagnetic gap layer separates the WP from the TSN portion and a nonmagnetic pad layer separates the WP from the TS first portion. The pad layer has a front edge generally parallel to and recessed from the ABS that defines the TH of the TSN portion, and a thickness that defines the length of the TSN portion in the along-the-track direction. | 11-13-2008 |
20080278861 | STITCHED WRAP AROUND SHIELD FABRICATION FOR PERPENDICULAR MAGNETIC RECORDING WRITE HEADS - A wrap around shield of a write head is fabricated in multiple processes, with side shields fabricated in one process, and a trailing shield formed in another process. These multiple processes form a stitched wrap around shield, resulting in more flexible and accurate placement of the trailing shield and side shields with respect to the write pole. These processes also independently form the dimensions (shapes and sizes) of the side shields and the trailing shield which allows better control of writeability, saturation, and adjacent track interference of the perpendicular recording write head. | 11-13-2008 |
20080316652 | SIMULTANEOUS POLE-TIP AND SIDE SHIELD FABRICATION AND INTEGRATED ELG - A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The method includes the formation of a magnetic structure that provides an electronic lapping guide as well as providing the structure for both the side shields and the write pole. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air hearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane. | 12-25-2008 |
20090057160 | INTERLEAVED HELICAL COILS ON PERPENDICULAR HEADS - A method for manufacturing a write head with a helical coil having a very small and well controlled spacing between adjacent coil leads. The method includes forming a first set of coil leads, then conformally depositing a thin layer of electrically insulating material such as alumina over the first set of coil leads and over the substrate. An electrically conductive seed layer is then deposited over the thin layer of non-magnetic, electrically insulating material An electrically conductive material such as Cu is then deposited by electroplating in order to form a second set of electrically conductive leads interspersed within the first set of electrically conductive leads, each of the second set of leads being separated from the second set of leads by a portion of the thin layer of non-magnetic, electrically insulating material. | 03-05-2009 |
20090117407 | SHORT FLARE DEFINITION BY ADDITIVE PROCESS FOR PERPENDICULAR HEAD - A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head. | 05-07-2009 |
20090122445 | PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH FLUX SHAPING LAYERS ON THE WRITE POLE AND MAGNETIC RECORDING SYSTEM INCORPORATING THE WRITE HEAD - A perpendicular magnetic recording write head has at least one flux shaping layer located on the write pole. The write pole has an end located substantially at the surface of the head carrier that faces the recording medium. The write head includes a main pole, on which the write pole is formed, that has an end recessed from the write pole end, and at least one flux return pole. In one implementation a first flux shaping layer is located between the main pole and the write pole and has an end recessed from the write pole end. A second flux shaping layer, also with its end recessed form the write pole end, may be located on the write pole. The second flux shaping layer may also cover the sides of the write pole in the cross-track direction so that together with the first flux shaping layer, the write pole is substantially surrounded by flux shaping material. The ends of the flux shaping layers may be tapered in the direction of the recording medium to enhance directing and shaping the flux to the write pole end. | 05-14-2009 |
20090128953 | PERPENDICULAR MAGNETIC WRITE HEAD WITH STITCHED NOTCHED TRAILING SHIELD - A magnetic write head for perpendicular magnetic recording having a stitched notched trailing shield. The trailing shield includes a first pedestal portion having sides that are self aligned with the sides of the write pole and having a back edge that extends a first shield throat height. The shield further includes a second shield portion stitched onto the pedestal portion, the second shield portion having a back edge that extends beyond the back edge of the pedestal portion. | 05-21-2009 |
20090128964 | METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH WRAP AROUND MAGNETIC TRAILING AND SIDE SHIELDS - A method for manufacturing a magnetic write head having a wrap around magnetic shield. The method allows a highly accurate short wavelength such as 193 mm photolithography to be used to accurately define the placement and critical dimension of wrap around magnetic shield. The method includes the formation of a magnetic write pole, top gap, and side gap and the deposition of a RIEable fill layer thereover, and CMP to planarization. A 193 nm photolithography and ion milling is used to form a mask over the RIEable layer and one or more reactive ion etching processes are performed to pattern the RIEable layer through 193 nm photolithography mask. A wrap around shield can then be electroplated into the opening formed in the RIEable layer. | 05-21-2009 |
20090147410 | PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH MAGNETIC SHIELDS SEPARATED BY NONMAGNETIC LAYERS - A perpendicular magnetic recording write head that may be used in magnetic recording disk drives has a magnetic write pole (WP) with an end that is generally the same width as the width of the data tracks on the disk. A trailing shield (TS) is spaced from the WP in the along-the-track direction, a pair of side shields are located on opposite sides of the WP in the cross-track direction, and an optional leading shield (LS) is located on the opposite side of the WP from the TS in the along-the-track direction. The TS, side shields and LS are formed of magnetically permeable soft ferromagnetic material and are separated from each other by nonmagnetic separation layers. The TS, side shields and LS each has a throat height (TH) thickness in its region facing the WP. The throat heights for the shields may be different. | 06-11-2009 |
20090152234 | PROCESS FOR SELF-ALIGNED FLARE POINT AND SHIELD THROAT DEFINITION PRIOR TO MAIN POLE PATTERNING - A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point. | 06-18-2009 |
20090154026 | METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH A THIN WRAP AROUND MAGNETIC SHIELD - A magnetic write head for perpendicular magnetic recording having a thin wrap-around magnetic shield. The small thickness and forming method of the thin wrap-around magnetic shield allow it to be electroplated using a thin photoresist frame mask. The thin photoresist frame mask has better critical dimension and straight wall control than a thicker mask, which allows the wrap-around magnetic shield to be constructed with much more straight and uniform back edge for shield throat height control than is possible when forming a thicker (i.e. taller) shield. The thin wrap-around magnetic shield can be stitched to a trailing return pole to avoid magnetic saturation of the wrap-around shield. | 06-18-2009 |
20090168236 | Magnetic head for perpendicular recording having stepped wrap around shield with independent control of write pole track width and flare point dimensions - Methods and structures for the fabrication of a thin film, perpendicular recording write head are disclosed. The fabrication involves the deposition of two different oxide layers which have mutually high etch selectivities. This characteristic allows a write pole structure to be built wherein the track width is independent of the location of the flare point. The process also produces a structure wherein the throat height of the shield is self aligned to the location of the flare point of the write pole. | 07-02-2009 |
20090168237 | Perpendicular magnetic recording writer main pole having imbedded non-magnetic core and de-coupled pole tip - Methods and structures for the fabrication of a thin film, perpendicular recording write head are disclosed. The structure provides a pole tip separated from a rear pole by a non-magnetic separation layer located adjacent the flare point. The rear pole contains an imbedded non-magnetic layer. The separated pole tip and imbedded layer aid in the high data rate recording as well as the erasure performance of the write pole structure. The fabrication involves the deposition of two different oxide layers which have mutually high etch selectivities. This characteristic allows a write pole structure to be built wherein the track width is independent of the location of the flare point. The process also produces a structure wherein the placement of the throat height of the shield is self aligned to the flare point of the write pole. | 07-02-2009 |
20090168253 | METHOD OF MAKING A MAGNETORESISTIVE READER STRUCTURE - A method of making a magnetoresistive sensor includes defining a track width of a magnetoresistive element stack of the sensor. Further, processes of the method enable depositing of hard magnetic bias material on each side of the stack. These processes may permit both milling of excess depositions of the material outside of regions where the hard magnetic bias material is desired via use of a photoresist and making the material have a planar surface via chemical mechanical polishing, which also removes the material on top of the stack. | 07-02-2009 |
20090169732 | PROTECTING HARD BIAS MAGNETS DURING A CMP PROCESS USING A SACRIFICIAL LAYER - Read elements and associated methods of fabrication are disclosed. During fabrication of the read element, and more particularly, the fabrication of the hard bias magnets, a non-magnetic sacrificial layer is deposited on top of the hard bias material. When a CMP process is subsequently performed, the sacrificial layer is polished instead of the hard bias material. The thicknesses of the hard bias magnets are not affected by the CMP process, but are rather defined by the deposition process of the hard bias material. As a result, the variations in the CMP process will not negatively affect the magnetic properties of the hard bias magnets so that they are able to provide substantially uniform effective magnetic fields to bias the free layer of the magnetoresistance (MR) sensor of the read element. | 07-02-2009 |
20100062177 | METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A SLANTED WRITE POLE - A method for manufacturing a write head having write pole with a tapered upper surface to improve the channeling of magnetic flux to a pole tip of the write pole. The method includes depositing a first layer of magnetic material over a substrate. A CMP stop layer, image transfer layer and mask structure are deposited over the first magnetic layer, the mask structure being formed with an edge located a desired distance from an air bearing surface plane. An ion milling operation is performed to remove portions of the magnetic layer that are not protected by the mask structure, the ion milling being performed in a manner to form a tapered surface on the first magnetic layer. Then, a second magnetic layer is deposited over the first magnetic layer to form a tapered magnetic write pole. | 03-11-2010 |
20100078406 | METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH A WRAP AROUND SHIELD - A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield. | 04-01-2010 |
20100157475 | STEPPED MAIN POLE FOR PERPENDICULAR WRITE HEADS IN HARD DISK DRIVES AND METHOD OF MAKING SAME - A stepped main pole for a perpendicular write head and methods of making the stepped main pole. The stepped main pole has a main pole tip and a base portion. The main pole tip has a surface that forms part of the ABS and a first thickness. The base portion extends from the main pole tip and has a thickness that varies from the first thickness to a second thickness to form a slanted surface with an apex angle adjacent the main pole tip. By placing the base portion away from the ABS and providing a thickness that increases in a direction away from the ABS, the stepped pole can provide the necessary magnetic flux for writing, while avoiding undesired leakage and fringing. To form embodiments of the stepped main pole of the invention, a fluorine-based reactive ion etch (RIE) may be used. By using an RIE to define the stepped main pole, the apex angle can be better controlled and tight edge control can be achieved. | 06-24-2010 |
20110042349 | DAMASCENE WRITE POLES PRODUCED VIA FULL FILM PLATING - A method for forming a write pole comprises forming a stop layer over a substrate layer of a wafer, the stop layer having an opening above a damascene trench in the substrate layer, and forming a buffer layer over the stop layer, the buffer layer having an opening above the opening of the stop layer. The method further comprises plating a layer of magnetic material over the wafer, disposing a first sacrificial material over a region of the magnetic material above the damascene trench, performing a milling or etching operation over the wafer to remove the magnetic material not covered by the first sacrificial material and to remove the first sacrificial material, disposing a second sacrificial material over the wafer, and performing a polishing operation over the wafer to remove the region of the magnetic material above the damascene trench, the second sacrificial material, and the buffer layer. | 02-24-2011 |
20120107645 | METHOD FOR MANUFACTURING A SHORT FLARE DEFINITION BY ADDITIVE PROCESS FOR PERPENDICULAR HEAD - A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head. | 05-03-2012 |
20120304454 | PROCESS FOR FABRICATING A MAGNETIC POLE AND SHIELDS - A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench. | 12-06-2012 |
20140175050 | METHOD FOR PROVIDING A MAGNETIC RECORDING TRANSDUCER INCLUDING A WRAPAROUND SHIELD AND A RECTANGULAR POLE - A method fabricates a magnetic transducer having an ABS location. Etch stop and nonmagnetic etchable layers are provided. A side shield layer is provided between the ABS location and the etch stop and etchable layers. Part of the side shield and etchable layers are removed using a first removal process. This portion of the pole trench formed has a top wider than the bottom in the side shield layer. Part of the etchable layer is removed using a second removal process, thereby forming the pole trench. The pole trench has a bottom and a top wider than the bottom in the side shield layer and substantially perpendicular sidewalls in the etchable layer. A nonmagnetic side gap layer is provided. A remaining portion of the pole trench has a location and profile for a pole. At least part of the pole is in the pole trench. | 06-26-2014 |