Patent application number | Description | Published |
20080272436 | Semiconductor device and method of fabricating the same - A semiconductor device includes a first stress film covering a first gate electrode and first source/drain areas of a first transistor area and at least a portion of a third gate electrode of an interface area, a second stress film covering a second gate electrode and second source/drain areas of a second transistor area and overlapping at least a portion of the first stress film on the third gate electrode of the interface area, and an interlayer insulating film formed on the first and the second stress film. The semiconductor device further includes a plurality of first contact holes formed through the interlayer insulating film and the first stress film in the first transistor area to expose the first gate electrode and the first source/drain areas, a plurality of second contact holes formed through the interlayer insulating film and the second stress film in the second transistor area to expose the second gate electrode and the second source/drain areas, and a third contact hole formed through the interlayer insulating film, the second stress film, and the first stress film in the interface area to expose the third gate electrode. A depth of a recessed portion of an upper side of the third gate electrode in which the third contact hole is formed is equal to or larger than a depth of a recessed portion of an upper side of the first gate electrode in which the first contact hole is formed. | 11-06-2008 |
20090039480 | SEMICONDUCTOR DEVICE AND METHODS OF FORMING THE SAME - The semiconductor device includes a fuse structure disposed on a substrate. An interlayer dielectric disposed on the fuse structure. A first contact plug, a second contact plug, and a third contact plug penetrate the interlayer dielectric and wherein each of the first contact plug, the second contact plug and the third contact plug are connected to the fuse structure. A first conductive pattern and a second conductive pattern are disposed on the interlayer dielectric. The first conductive pattern and the second conductive pattern are electrically connected to the first contact plug and second contact plug, respectively. | 02-12-2009 |
20090050886 | Test device, SRAM test device, semiconductor integrated circuit device and methods of fabricating the same - A test device, SRAM test device, semiconductor integrated circuit, and methods of fabricating the same are provided. The test device may include a first test active region extending in one direction on a semiconductor substrate, a second test active, apart from the first test active region, extending in one direction on a semiconductor substrate, a plurality of test gate lines crossing the test active regions, a plurality of test contacts on at least one of the test active regions and test gate lines, a plurality of conducting regions electrically connecting the test contacts, and a plurality of conductive wiring lines interconnecting the plurality of test contacts, wherein an open contact chain, which electrically connects the plurality of test contacts, is formed. | 02-26-2009 |
20090057819 | ELECTRICAL FUSE DEVICE - The invention relates generally to a fuse device of a semiconductor device, and more particularly, to an electrical fuse device of a semiconductor device. Embodiments of the invention provide a fuse device that is capable of reducing programming error caused by non-uniform current densities in a fuse link. In one respect, there is provided an electrical fuse device that includes: an anode; a fuse link coupled to the anode on a first side of the fuse link; a cathode coupled to the fuse link on a second side of the fuse link; a first cathode contact coupled to the cathode; and a first anode contact coupled to the anode, at least one of the first cathode contact and the first anode contact being disposed across a virtual extending surface of the fuse link. | 03-05-2009 |
20090075474 | METHODS FOR FORMING DUAL DAMASCENE WIRING USING POROGEN CONTAINING SACRIFICIAL VIA FILLER MATERIAL - Methods for fabricating dual damascene interconnect structures are provided in which a sacrificial material containing porogen (a pore forming agent) is used for filling via holes in an interlayer dielectric layer such that the sacrificial material can be transformed to porous material that can be quickly and efficiently removed from the via holes without damaging or removing the interlayer dielectric layer. | 03-19-2009 |
20090085075 | METHOD OF FABRICATING MOS TRANSISTOR AND MOS TRANSISTOR FABRICATED THEREBY - A method of fabricating a MOS transistor, and a MOS transistor fabricated by the method. The method can include forming a gate pattern on a semiconductor substrate. The gate pattern can be formed by sequentially stacking a gate electrode and a capping layer pattern. The capping layer pattern is formed to have a lower capping layer pattern and an upper capping layer pattern. The lower capping layer pattern is formed to a smaller width than the upper capping layer pattern. | 04-02-2009 |
20090085125 | MOS transistor and CMOS transistor having strained channel epi layer and methods of fabricating the transistors - Provided are a metal oxide semiconductor (MOS) transistor and a complementary MOS (CMOS) transistor each having a strained channel epi layer, and methods of fabricating the transistors. The MOS transistor may include at least one active region defined by an isolation structure formed in a substrate. At least one channel trench may be formed in a part of the at least one active region. At least one strained channel epi layer may be in the at least one channel trench. At least one gate electrode may be aligned on the at least one strained channel epi layer. Sources/drains may be arranged in the at least one active region along both sides of the at least one strained channel epi layer. | 04-02-2009 |
20090096104 | Semiconductor device having crack stop structure - Example embodiments relate to semiconductor devices having a single body crack stop structure configured to reduce or prevent crack propagation and/or moisture penetration. A semiconductor substrate according to example embodiments may include an active region and a crack stop region surrounding the active region. Interlayer insulating layers may be sequentially stacked on the semiconductor substrate. The interlayer insulating layers may include first dual damascene patterns and a first opening. The first dual damascene patterns may be formed in the interlayer insulating layers so as to be perpendicular to the surface of the semiconductor substrate while exposing a first portion of the semiconductor substrate. The first opening may be formed in the crack stop region and may extend through the interlayer insulating layers to expose a second portion of the semiconductor substrate. First dual damascene metal wirings may be formed in the first dual damascene patterns and may contact the exposed first portion of the semiconductor substrate. A single body first crack stop structure may be formed in the first opening so as to contact the exposed second portion of the semiconductor substrate. | 04-16-2009 |
20090167319 | TEST APPARATUS FOR DETERMINING IF ADJACENT CONTACTS ARE SHORT-CIRCUITED AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICES THAT INCLUDE SUCH TEST APPARATUS - A test apparatus includes a plurality of pairs of test contacts on a semiconductor substrate; a first test structure which includes a plurality of first test interconnection layers and a first body interconnection layer that is electrically connected to the first test interconnection layers, each of the first test interconnection layers being electrically connected to at least one test contact; and a second test structure which includes a plurality of second test interconnection layers and a second body interconnection layer that is electrically connected to the second test interconnection layers, each of the second test interconnection layers being electrically connected to at least one test contact. | 07-02-2009 |
20090280637 | Method of manufacturing semiconductor device including ultra low dielectric constant layer - Provided is a method of manufacturing a semiconductor device. The method employs multi-step removal on a plurality of different porogens included in a low dielectric layer both before and after metal lines are formed, thereby facilitating formation of an ultra low dielectric constant layer which is used as an insulation layer between metal lines of a semiconductor device. The method may include forming an interlayer dielectric layer on a substrate, forming a plurality of porogens in the interlayer dielectric layer, removing a portion of the plurality of porogens in the interlayer dielectric layer to form a plurality of first pores in the interlayer dielectric layer, forming a wiring pattern where the plurality of first pores are formed, and removing the remaining porogens of the plurality of porogens to form a plurality of second pores in the interlayer dielectric layer. | 11-12-2009 |
20090280645 | Method of fabricating semiconductor device - Provided is a method of fabricating a semiconductor device including a dual suicide process. The method may include sequentially siliciding and stressing a first MOS region, and sequentially siliciding and stressing a second MOS region after siliciding and stressing the first MOS region, the second MOS region being a different type than the first MOS region. | 11-12-2009 |
20100001941 | Gate driving unit for liquid crystal display device and method of repairing the same - A gate driving unit for a liquid crystal display device including a plurality of liquid crystal pixels, first to Nth gate lines, a plurality of liquid crystal capacitors and a plurality of thin film transistors, includes first and second clock signal lines for providing first and second clock signals; first to Nth shift registers respectively corresponding to the first to Nth gate lines, the first to Nth shift registers receiving one of the first clock signal and the second clock signal and outputting first to Nth scanning signals, respectively; a redundant repair shift register as (N+1)th shift register receiving one of first and second clock signals and outputting a repair scanning signal; a plurality of first switches for respectively connecting one of the first and second clock signal lines to the first to Nth shift registers and the redundant repair shift register; a plurality of second switches for respectively switching a connection of the first to Nth shift registers with the first to Nth gate lines; and a plurality of third switches for respectively switching a connection of the second to Nth shift registers and the redundant repair shift register with the first to Nth gate lines, wherein N is positive integer. | 01-07-2010 |
20100065919 | Semiconductor Devices Including Multiple Stress Films in Interface Area - A semiconductor substrate includes a first transistor area having a first gate electrode and first source/drain areas, a second transistor area having a second gate electrode and second source/drain areas, and an interface area provided at an interface of the first transistor area and the second transistor area and having a third gate electrode. A first stress film is on the first gate electrode and the first source/drain areas of the first transistor area and at least a portion of the third gate electrode of the interface area. A second stress film is on the second gate electrode and the second source/drain areas of the second transistor area and not overlapping the first stress film on the third gate electrode of the interface area or overlapping at least a portion of the first stress film. The second stress film overlapping at least the portion of the first stress film is thinner than the second stress film in the second transistor area. Related methods are also described. | 03-18-2010 |
20100136790 | Method of fabricating semiconductor integrated circuit device - A method of fabricating a semiconductor integrated circuit device, including providing a semiconductor substrate, sequentially forming an etching target layer and a hard mask layer on the semiconductor substrate, forming first etch masks on the hard mask layer, the first etch masks including a plurality of first line patterns spaced apart from one another at a first pitch and extending in a first direction, forming first hard mask patterns by etching the hard mask layer using the first etch masks, forming second etch masks on the first hard mask patterns, the second etch masks including a plurality of second line patterns spaced apart from one another at a second pitch and extending in a second direction different from the first direction, forming second hard mask patterns by etching the first hard mask patterns using the second etch masks, forming spacers on sidewalls of the second hard mask patterns, and patterning the etching target layer using the second hard mask patterns having the spacers. | 06-03-2010 |
20100173497 | Method of fabricating semiconductor integrated circuit device - A method manufacturing a semiconductor integrated circuit device includes providing a substrate; sequentially forming a layer to be etched, a first layer, and a second layer on the substrate; forming on the first and second layers a first etch mask having a plurality of first line patterns separated from each other by a first pitch and extending in a first direction; sequentially performing first etching on the second layer and the first layer using the first etch mask to form an intermediate mask pattern with second and first patterns; forming on the intermediate mask pattern a second etch mask including a plurality of second line patterns separated from each other by a second pitch and extending in a second direction other than the first direction; performing second etching using the second etch mask on a portion of the second pattern so that the remaining portion of the second pattern is left on the first pattern; performing third etching using the second etch mask under different conditions than the second etching on the first pattern and the remaining portion of second pattern of the intermediate mask pattern and forming a final mask pattern; and patterning the layer to be etched using the final mask pattern. | 07-08-2010 |
20100248436 | Methods of forming insulation layer patterns and methods of manufacturing semiconductor devices including insulation layer patterns - In a method of forming an insulation layer pattern, an insulation layer is formed on a substrate. An organic layer and a hard mask layer are successively formed on the insulation layer. A preliminary hard mask pattern having first openings is formed by patterning the hard mask layer. A hard mask pattern having the first openings and second openings is formed by patterning the preliminary hard mask pattern. Width control spacers are formed on sidewalls of the first and the second openings. An etching mask pattern is formed by etching the organic layer using the hard mask pattern as an etching mask. The insulation layer pattern having third openings is formed by etching the insulation layer using the etching mask pattern as an etching mask. | 09-30-2010 |
20110074743 | GATE DRIVE CIRCUIT FOR DISPLAY DEVICE - A gate drive circuit for a display device is disclosed, by which output states of scan pulses are identically maintained in a manner of minimizing load deviation between connecting units. The present disclosure includes at least two clock transmission lines transmitting at least two clock pulses having a phase difference in-between, a shift register outputting scan pulses sequentially based on the clock pulses transmitted from the clock transmission lines, and a plurality of connecting units connecting the clock transmission lines to the shift register, respectively, wherein at least one of the connecting units is zigzagged in part. | 03-31-2011 |
20110195550 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device, the method including providing a semiconductor substrate; forming a gate pattern on the semiconductor substrate such that the gate pattern includes a gate dielectric layer and a sacrificial gate electrode; forming an etch stop layer and a dielectric layer on the semiconductor substrate and the gate pattern; removing portions of the dielectric layer to expose the etch stop layer; performing an etch-back process on the etch stop layer to expose the sacrificial gate electrode; removing the sacrificial gate electrode to form a trench; forming a metal layer on the semiconductor substrate including the trench; removing portions of the metal layer to expose the dielectric layer; and performing an etch-back process on the metal layer to a predetermined target. | 08-11-2011 |
20110284988 | ELECTRICAL FUSE DEVICE - The invention relates generally to a fuse device of a semiconductor device, and more particularly, to an electrical fuse device of a semiconductor device. Embodiments of the invention provide a fuse device that is capable of reducing programming error caused by non-uniform current densities in a fuse link. In one respect, there is provided an electrical fuse device that includes: an anode; a fuse link coupled to the anode on a first side of the fuse link; a cathode coupled to the fuse link on a second side of the fuse link; a first cathode contact coupled to the cathode; and a first anode contact coupled to the anode, at least one of the first cathode contact and the first anode contact being disposed across a virtual extending surface of the fuse link. | 11-24-2011 |
20120223802 | ELECTRICAL FUSE DEVICE - The invention relates generally to a fuse device of a semiconductor device, and more particularly, to an electrical fuse device of a semiconductor device. Embodiments of the invention provide a fuse device that is capable of reducing programming error caused by non-uniform current densities in a fuse link. In one respect, there is provided an electrical fuse device that includes: an anode; a fuse link coupled to the anode on a first side of the fuse link; a cathode coupled to the fuse link on a second side of the fuse link; a first cathode contact coupled to the cathode; and a first anode contact coupled to the anode, at least one of the first cathode contact and the first anode contact being disposed across a virtual extending surface of the fuse link. | 09-06-2012 |
20120231564 | MONITORING TEST ELEMENT GROUPS (TEGS) FOR ETCHING PROCESS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME - Disclosed is a monitoring TEG for an etching process in a semiconductor device. The TEG includes an etch stopping layer on a substrate and a target layer to be etched provided on the etch stopping layer. The target layer to be etched includes a first opening portion formed by etching a portion of the target layer to be etched and a second opening portion formed by etching another portion of the target layer to be etched. The second opening portion has a smaller depth than the first opening portion. A depth of a partial contact hole formed by a first partial etching process may be measured. | 09-13-2012 |
20120287112 | Driving Circuit of Liquid Crystal Display - A driving circuit of a liquid crystal display includes: a timing controller to output a gate control signal and a data control signal to control driving of a gate driving unit and a data driving unit and to output digital video data; a pair of gate driving units to be alternately driven by using at least one frame as a period to supply gate signals to gate lines of a liquid crystal panel in response to the gate control signal; and a data driving unit to supply pixel signals to data lines of the liquid crystal panel in response to the data control signal. Degradation of characteristics of transistors constituting each gate driver can be prevented. | 11-15-2012 |
20130148775 | Gate Shift Register - Disclosed is a gate shift register, which can perform a bi-directional shift operation with a reduced number of switching devices. The gate shift register includes a plurality of stages to receive a plurality of gate shift clocks and sequentially output a scan pulse. A k | 06-13-2013 |
20140042395 | Thin Film Transistor Substrate and Method for Manufacturing the Same and Organic Light Emitting Device Using the Same - Disclosed is a thin film transistor substrate which facilitates to improve output and transfer characteristics of thin film transistor, wherein the thin film transistor substrate comprises a thin film transistor comprising a lower gate electrode on a substrate, an active layer on the lower gate electrode, source and drain electrodes on the active layer, and an upper gate electrode on the source electrode, drain electrode and active layer, the upper gate electrode for covering a channel region defined by the source and drain electrodes; and a contact portion for electrically connecting the lower gate electrode with the upper gate electrode. | 02-13-2014 |
20140308810 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device includes sequentially forming an etch stop film and an insulating film on a substrate including a lower pattern forming a conductive mask pattern including a first opening on the insulating film, forming a via-hole in the insulating film using the conductive mask pattern as an etch mask, the via-hole exposing the etch stop film, removing the conductive mask pattern, and forming a passivation film along a side wall of the via-hole after removing the conductive mask pattern. | 10-16-2014 |
20140319498 | THIN FILM TRANSISTOR SUBSTRATE AND ORGANIC LIGHT EMITTING DEVICE USING THE SAME - A thin film transistor substrate provided with two gate electrodes comprises a thin film transistor including a first gate electrode formed on the substrate; an active layer formed on the first gate electrode; first and second electrodes formed on the active layer; and a second gate electrode formed on the first electrode, the second electrode, and the active layer, wherein the second gate electrode is provided with an opening formed in an area corresponding to at least a part of the second electrode. | 10-30-2014 |
20150072483 | Thin Film Transistor Substrate and Method for Manufacturing the Same and Organic Light Emitting Device Using the Same - Disclosed is a thin film transistor substrate which facilitates to improve output and transfer characteristics of thin film transistor, wherein the thin film transistor substrate comprises a thin film transistor comprising a lower gate electrode on a substrate, an active layer on the lower gate electrode, source and drain electrodes on the active layer, and an upper gate electrode on the source electrode, drain electrode and active layer, the upper gate electrode for covering a channel region defined by the source and drain electrodes; and a contact portion for electrically connecting the lower gate electrode with the upper gate electrode. | 03-12-2015 |