Patent application number | Description | Published |
20080271747 | Cleaning device and a lithographic apparatus cleaning method - A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity. | 11-06-2008 |
20080273181 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method - An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves through a liquid to clean a surface of an immersion lithographic projection apparatus are disclosed. A flow, desirably a radial flow, is induced in the liquid. | 11-06-2008 |
20080284990 | Cleaning device, a lithographic apparatus and a lithographic cleaning method - An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves through a liquid to clean a surface of an immersion lithographic projection apparatus are disclosed. A flow, desirably a radial flow, is induced in the liquid. | 11-20-2008 |
20100110398 | METHODS RELATING TO IMMERSION LITHOGRAPHY AND AN IMMERSION LITHOGRAPHIC APPARATUS - A method of detecting particles in an immersion fluid of or from a lithographic apparatus. The method includes extracting a sample, using a vacuum system, from a single phase flow of the immersion fluid of or from a fluid handling structure in the lithographic apparatus. The method includes detecting particles in the sample, and initiating a signal if the detected particles are above a certain threshold. | 05-06-2010 |
20110292359 | CLEANING DEVICE AND A LITHOGRAPHIC APPARATUS CLEANING METHOD - A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity. | 12-01-2011 |
Patent application number | Description | Published |
20100152393 | BRANCHED POLYESTER CONTAINING POWDER COATING COMPOSITION - The invention relates to binder comprising a crosslinker that is reactive with acid-functional polyester and a branched, partially defunctionalized acid-functional polyester, wherein the polyester is based on: a. At least one multi-functional component that is either carboxyl-functional, hydroxyl-functional or carboxyl- and hydroxyl-functional; b. At least one di-functional component that is reactive towards a functional group on the multi-functional component; and c. At least one mono-functional component; wherein the multi-functional component does not contain a tertiary carboxylic functionality and at least 50% of the acid-derived groups originate from an aromatic acid. | 06-17-2010 |
20120070630 | POWDER COATING COMPOSITION COMPRISING A POLYESTER AND A BETA-HYDROXYALKYLAMIDE AS CROSSLINKER - The invention relates to a thermosetting powder coating composition comprising a crosslinker and a polyester, wherein the polyester has functional groups which functional groups are capable of reacting with β-hydroxyalkylamide groups, wherein the polyester is prepared from at least the following monomers: neopentylglycol, a difunctional alcohol other than neopentylglycol; isophthalic acid, terephthalic acid, optionally adipic acid and a branching monomer chosen from the group of an at least trifunctional carboxylic acid, an at least trifunctional alcohol, an at least trifunctional hydroxy carboxylic acid and mixtures thereof, wherein the amount of difunctional alcohol other than neopentylglycol in the polyester ranges from 1 to 50% w/w based on the polyester, wherein the amount of isophthalic acid in the polyester ranges from 6 to 35% w/w based on the polyester, wherein the polyester has a functionality of at least 2.1, wherein the crosslinker is a compound having β-hydroxyalkylamide groups. This thermosetting powder coating composition has the ability to be cured at low temperature, while at the same time being able provide powder coatings having at least two of the following three properties: limited blooming to no blooming, an acceptable smoothness, sufficient impact resistance. | 03-22-2012 |
20120231283 | POWDER COATING COMPOSITION COMPRISING A POLYESTER AND A CROSSLINKER WITH OXIRANE GROUPS PROVIDING IMPROVED CORROSION RESISTANCE TO A SUBSTRATE COATED THEREWITH - The invention relates to a carboxylic acid functional branched polyester for thermosetting powder coating composition, wherein said polyester is prepared from at least the following monomers: a difunctional aromatic acid, the difunctional aromatic acid being a combination of terephthalic acid (TPA), isophthalic acid (IPA), an at least trifunctional monomer and a difunctional alcohol, the difunctional alcohol being a combination of at least ethylene glycol (EG) and/or diethylene glycol (DEG) and neopentyl glycol (NPG), the molar ratio of TPA to IPA in the carboxylic acid functional branched polyester is at most 12.4, and the functionality of the carboxylic acid functional branched polyester is from 2.15 to 4.0, and the carboxylic acid functional branched polyester has an acid value of from 14 to 80 mg KOH/g resin, and the carboxylic acid functional branched polyester has a glass transition temperature of at least 40C. The powder coating compositions of the present invention derived upon curing of the thermosetting powder coating compositions which comprise the polyester according to the invention together with a crosslinker with oxirane groups and an epoxy cure catalyst present good corrosion resistance to steel substrates. Furthermore, said low cost and corrosion resistant powder coatings may present good reverse impact resistance (RIR) and/or good smoothness. | 09-13-2012 |
Patent application number | Description | Published |
20090262325 | Positioning System, Lithographic Apparatus and Device Manufacturing Method - A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass. | 10-22-2009 |
20120078561 | Method for Calibrating a Target Surface of a Position Measurement System, Position Measurement System, and Lithographic Apparatus - A method is used to calibrate a target surface of a position measurement system configured to measure a position of a movable object. The position measurement system includes the target surface mounted on the movable object, a stationary sensor system, and a processing device to calculate a position of the movable object on the basis of at least one measurement signal of the sensor system. The processing device includes a correction map of the target surface to correct for irregularities of the target surface. The method includes recalibrating the correction map of the target surface by measuring the target surface and determining a recalibrated correction map of the complete target surface on the basis of the measured target surface and one or more deformation modes of the target surface and/or physical objects affecting the target surface. | 03-29-2012 |
20120105817 | LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS - A leaf spring to be mounted between two objects, the leaf spring configured to have a high stiffness in two orthogonal directions, and a relative low stiffness in other degrees of freedom, wherein the leaf spring has a substantially panel-shaped body, the leaf spring including a first mounting location at or near the center of the panel-shaped body to mount the leaf spring to a first of the two objects, wherein the leaf spring includes one or more second mounting locations at or near the circumference of the panel-shaped body to mount the leaf spring to the second of the two objects, and elongate grooves and/or slits in the panel shaped body between the first mounting location and the second mounting location, the grooves and/or slits running in at least two non-orthogonal directions in the plane of the two orthogonal directions. | 05-03-2012 |
20120147355 | Positioning System, Lithographic Apparatus and Device Manufacturing Method - A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass. | 06-14-2012 |
20120229783 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A lithographic apparatus includes a substrate table constructed to hold a substrate, a projection system configured to project a patterned radiation beam through an opening and onto a target portion of the substrate, and a conduit having an outlet in the opening. The conduit is configured to deliver gas to the opening. The lithographic apparatus further includes a cooling apparatus controlled by a control system. The cooling apparatus is configured to cool the gas such that gas which travels from the opening to the substrate has a predetermined temperature when the gas is incident upon the substrate. | 09-13-2012 |
20130146785 | SUPPORT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A support for an object having a support surface configured to support the object; wherein the support surface includes a main part and a moveable part, the moveable part of the support surface being moveable between a retracted position in which the moveable part of the support surface is adapted to be substantially in the same plane as the main part of the support surface and an extended position in which the moveable part of the support surface protrudes from the plane of the main part of the support surface. | 06-13-2013 |