Patent application number | Description | Published |
20080297744 | Lithographic apparatus and device manufacturing method - An immersion lithographic apparatus is described with a drain configured to remove liquid from a gap between an edge of the substrate and the substrate table on which the substrate is supported. The drain is provided with a means to provide liquid to the drain irrespective of the position of the substrate table and/or a means to saturate gas within the drain. Those measures reduce the variations in heat load due to evaporation of liquid in the drain. | 12-04-2008 |
20090015246 | Lithographic apparatus and position sensor - A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter. | 01-15-2009 |
20090279061 | LITHOGRAPHIC APPARATUS AND METHOD - A substrate table is disclosed in which heaters are provided to account for a heat load which may be applied to the substrate. The heaters are grouped in segments to improve control. A temperature sensor per segment may be provided. The temperature sensor may be embedded in the substrate table. | 11-12-2009 |
20090303455 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow. | 12-10-2009 |
20100149514 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow. | 06-17-2010 |
20100157277 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A liquid confinement structure configured to contain a liquid in a space between a projection system and a substrate has a recess in its lower surface which is open to both a relatively low pressure source and a relatively high pressure source and through which liquid and/or gas from between the liquid confinement structure and the substrate is extracted. | 06-24-2010 |
20110273675 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow. | 11-10-2011 |
20110310367 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow. | 12-22-2011 |
20120092640 | Shared Compliance in a Rapid Exchange Device for Reticles, and Reticle Stage - Provided is a method to load a patterning device ( | 04-19-2012 |
20140300883 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow. | 10-09-2014 |
Patent application number | Description | Published |
20080271588 | STAVE CONSTRUCTION METHOD OF DRUM MANUFACTURE - A percussion instrument, comprising a plurality of wood blocks or staves interlocked to each other through tongue and groove joints, such that the interlocked blocks form a solid surface having the shape of a cylinder with two open ends. A drum head is in contact with one of the open ends of the body, and suitable fixing means, coupled to said head, retain the head under pressure against one of the ends. Preferably, the tongue and groove joints are defined by grooves in the blocks or staves with a spline member disposed in each groove. | 11-06-2008 |
20090178538 | TAMBOURINE WITH SOUND MUTING SYSTEM - A musical instrument comprising: a main body mounting a plurality of jingles to produce sound when said main body is vibrated as with a conventional tambourine. At least one muting element is associated with at least one of the jingles to selectively restricting movement of the jingles to mute a jingle sound produced by said jingles. In the preferred embodiment, the jingles are comprised of pairs of metallic discs carried by the main body. With the invention, the jingles can be selectively opened, either fully or partially, by the amount of pressure applied by the muting elements thus controlling an amount of jingle sound. | 07-16-2009 |
20090293703 | LUG PROTECTOR FOR A TENSION SYSTEM ON A DRUM - A protector device for the tension lock of a conga or the like provides a cost-effective production and easy attachment and the possibility of operation of the tension nut in the attached condition. The protector device comprises a main body, which is U-shaped in its horizontal cross section and radially open on the inside toward the conga, accepting the tension lug of the conga. A slot in the top portion snaps onto the tension hook in the attached position and the tension nut is exposed so that a tightening of the tension lock via the tension nut is possible even when the protector device is attached, without having to remove the protector device. | 12-03-2009 |
Patent application number | Description | Published |
20100192790 | Printing Cylinder or Printing Sleeve with Insert - A printing cylinder or printing sleeve including an internal structure that is at least partially open and the internal structure defines a hollow space. A substantially liquid-tight cylindrical outer layer surrounds the internal structure and a coupling device couples a plate to the printing cylinder or printing sleeve. The coupling device is at least partially positioned in, on, or under the outer layer. An insert is supported by the internal structure and is arranged at least partially around or under the coupling device. The insert is constructed to impart strength to the coupling device. | 08-05-2010 |
20100199868 | PRINTING CYLINDER OR PRINTING SLEEVE, CUP AND METHOD FOR PRODUCING A PRINTING CYLINDER OR PRINTING SLEEVE - A printing cylinder for a printing machine or printing sleeve for forming a printing cylinder that includes a plurality of cups for forming a supporting inner structure of the printing cylinder or printing sleeve. Each cup includes a central disc, a radially outer edge, and a first conical surface part. The first conical surface part of one cup at least partially bears against an adjacent cup in order to form a connection between the one cup and the adjacent cup. The radially outer edges of the plurality of cups together define a substantially cylindrical surface. | 08-12-2010 |
20100326302 | PRINTING CYLINDER OR PRINTING CYLINDER SLEEVE AND METHOD FOR PRODUCING IT - A method for producing a printing cylinder or a printing cylinder sleeve includes providing a plurality of cylindrical discs with an essentially cylindrical outside surface and respectively one central opening for positioning the cylindrical discs around a core, and machining the essentially cylindrical outside surfaces so that the cylindrical discs form a printing cylinder surface when mounted on the core. Prior to positioning the cylindrical discs around the core, the method includes machining at least one of the cylindrical discs to form at least one contact surface. The contact surface is machined precisely so that during the installation of the respective cylindrical disc around the core, the contact surface comes to rest parallel against a complementary formed surface of an adjacent element of the printing cylinder or printing cylinder sleeve. The method further includes positioning the cylindrical discs around the core and alternately joining the cylindrical discs. | 12-30-2010 |