Patent application number | Description | Published |
20100189834 | IMPRINTING APPARATUS - The present invention provides an imprinting apparatus in which stampers, after a transfer step, can be readily and quickly detached from a substrate and an atmosphere in the imprinting apparatus is kept clean. The imprinting device has an ejecting mechanism for separating a recording medium substrate from a first stamper and a second stamper the ejecting mechanism being formed including a sleeve and a coil spring that are movably provided in a movable die base with an exhausting duct, and also including a sleeve and a coil spring that are movably provided in a fixed die base with an exhausting duct. | 07-29-2010 |
20100308496 | METHOD OF MANUFACTURING STAMPER - A method of manufacturing a stamper for nanoimprinting is provided which enables formation of finer patterns and which can be executed inexpensively. The method includes a step of forming a metal thin film on the surface of a substrate; a step of forming a resist layer on the surface of the metal thin film; a step of forming a relief pattern in the resist layer in use of an electron beam lithography method; a step of etching the metal thin film in imitation of the relief pattern in the resist layer, and forming a pattern-shaped metal mask; and, a step of forming a relief pattern on the substrate in imitation of the metal mask. In step (d), by side-etching the metal thin film, the width of the protruding portions formed in the substrate in step (e) are reduced to be less than the width of the depression portions of the relief pattern formed in step (c). | 12-09-2010 |
20100330221 | IMPRINT STAMPER AND IMPRINT DEVICE - An imprint stamper and imprint device are provided which, at the same time as being able to swiftly separate a substrate from a stamper after imprinting utilizing an even bowing and the resilience of the stamper when imprinting, can respond to a switch to mass production by making it difficult for a defect to occur on the pattern surface of the substrate and stamper. A stamper is configured of a plate-shaped body whose Young's modulus is 50 GPa or more, 500 GPa or less, whose thickness is 200 μm or more, 1000 μm or less, and which has a bow with a curvature of 2×10 | 12-30-2010 |
Patent application number | Description | Published |
20080265145 | Optical Element and Optical Measurement Device Using the Optical Element - Provided is an optical element in which a groove for a sample to make contact can be formed without machining or etching a material for an optical element, and in which the scattering of a light at the groove does not decrease the precision in an optical measurement. The optical element is formed with a light-emitting prism including a light-output face from which a light to be emitted to a sample is outputted, a light-receiving prism including a light-receiving face which receives the light returned from the sample, and a light intensity-reducing part provided between the light-emitting prism and the light-receiving prism. The light-emitting prism and the light-receiving prism are combined to form a recessed part for the sample to make contact, so that the light outputted from the light-output face travels straight in the sample in contact with the recessed part and enters the light-receiving face. | 10-30-2008 |
20090030295 | INSTRUMENT FOR MEASURING CONCENTRATION OF LIVING BODY INGREDIENT - A biological constituent concentration measuring device that can measure a biological constituent concentration highly accurately using a radiation that has come from an eardrum is provided. | 01-29-2009 |
20090124873 | BIOCOMPONENT CONCENTRATION MEASURING DEVICE - To provide a biocomponent concentration measuring device capable of determining which organ in an ear cavity is in condition for a measurement, the biocomponent concentration measuring device is provided with an infrared ray detector | 05-14-2009 |
20090270698 | BIOINFORMATION MEASUREMENT DEVICE - A bioinformation measurement device that enables further accurate bioinformation measurement is provided. The device includes an insertion portion | 10-29-2009 |
20100063369 | OPTICAL BIOLOGICAL INFORMATION MEASURING APPARATUS, OPTICAL BIOLOGICAL INFORMATION MEASURING METHOD, BIOLOGICAL INFORMATION DECISION APPARATUS, PROGRAM AND RECORDING MEDIUM - An optical biological information measuring apparatus includes a measuring surface to be placed on the surface of a living body, a mark display section which displays a mark at a region to be measured on the surface of the living body, a light-emitting section which irradiates the living body with light of a predetermined wavelength and a light-receiving section which receives light irradiated onto the living body and returned from the living body, and measures information on the living body based on the received light. The optical biological information measuring apparatus is capable of measuring biological information with improved alignment accuracy. | 03-11-2010 |
20130002930 | LIGHT-REDUCTION DEVICE AND IMAGING APPARATUS - A light reduction device for adjusting an amount of light reaching an imaging device includes: a light shielding plate in which light shielding parts are discretely formed for blocking the light, and a light transmission part is formed for transmitting the light; a first light reduction plate in which light reduction parts are discretely formed for reducing the amount of the light passing through, and a light transmission part is formed for transmitting the light; and a moving unit configured to move at least one of the light shielding plate and the first light reduction plate in a first direction which intersects with an incident direction of the light, in which the light shielding plate and the first light reduction plate overlap each other at least in part, when viewed from the incident direction of the light. | 01-03-2013 |
20130088767 | OPTICAL-PATH CONVERSION DEVICE AND IMAGING APPARATUS - An optical-path conversion device includes: a plate-shaped phase modulation mask in which a plurality of phase modulation parts are discretely formed for providing phase modulation to light passing through, and a first light-transmission part is formed for transmitting the light; and a plate-shaped light-shielding member in which a plurality of light-shielding parts are discretely formed for blocking the light, and a second light-transmission part is formed for transmitting the light, in which the phase modulation mask and the light-shielding member overlap each other at least in part, when viewed in an incident direction of the light, and at least one of the phase modulation mask and the light-shielding member is movable in an intersection direction which intersects with the incident direction. | 04-11-2013 |
20130107104 | SET OF COMPOUND LENSES AND IMAGING APPARATUS | 05-02-2013 |
20130107381 | LENS UNIT | 05-02-2013 |
Patent application number | Description | Published |
20120326051 | EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD - The present invention provides an exposure apparatus which forms a pattern on a substrate, the apparatus including an electron optical system configured to guide a charged particle beam onto the substrate, a stage configured to hold the substrate, an electromagnetic actuator configured to drive the stage, a magnetic shield which is placed in the stage so as to surround the electromagnetic actuator, a measurement member configured to measure a position of the stage, a coil member configured to generate a magnetic field on a path of the charged particle beam between the electron optical system and the substrate, and a control member configured to control the coil member so as to reduce a fluctuation of the magnetic field on the path, the magnetic field on the path fluctuating while the stage being driven by the electromagnetic actuator, based on the position of the stage measured by the measurement member. | 12-27-2012 |
20140306123 | STAGE APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - A stage apparatus includes: a stage; a linear motor configured to drive the stage; a magnetic shield unit configured to surround the linear motor to shield a magnetic field generated by a magnet of the linear motor; and a degaussing coil located in a space surrounded by the magnetic shield unit and configured to degauss the magnetic shield unit. | 10-16-2014 |
20150033546 | DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND METHOD OF MANUFACTURING DEVICE - A driving apparatus includes an electromagnetic actuator configured to generate a motive power by an electromagnetic force; movable portions configured to be moved by the electromagnetic actuator, and a magnetic shield unit including a first magnetic shield and a second magnetic shield that surround the electromagnetic actuator in this order, and from a side closer to a magnetic field generating portion of the electromagnetic actuator. | 02-05-2015 |
20150034842 | DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, METHOD OF MANUFACTURING DEVICE - A driving apparatus includes an electromagnetic actuator configured to generate a motive power by an electromagnetic force; a movable portion configured to be movable by the electromagnetic actuator; a magnetic shield unit that surrounds the electromagnetic actuator, wherein the magnetic shield unit includes a first magnetic shield having an opening and a second magnetic shield having an opening arranged in this order from a side closer to electromagnetic actuator. The opening opposes the second magnetic shield at least part of an area of the opening, and the movable portion is bent so as to penetrate through the openings of the first and the second magnetic shields. | 02-05-2015 |