Patent application number | Description | Published |
20080196743 | CLEANING METHOD AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE - A cleaning method includes: producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning a workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece. A method for manufacturing an electronic device includes: producing a workpiece; producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning the workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece. | 08-21-2008 |
20110073489 | CLEANING LIQUID, CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE - According to embodiments, a cleaning liquid includes an oxidizing substance and hydrofluoric acid and exhibiting acidity. A cleaning method is disclosed. The method includes producing an oxidizing solution including an oxidizing substance by one selected from electrolyzing a sulfuric acid solution, electrolyzing hydrofluoric acid added to a sulfuric acid solution, and mixing a sulfuric acid solution with aqueous hydrogen peroxide. The method includes supplying the oxidizing solution and hydrofluoric acid to a surface of an object to be cleaned. | 03-31-2011 |
20110073490 | CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE - According to one embodiment, a cleaning method is disclosed. The method can produce an oxidizing solution including an oxidizing substance by electrolyzing a dilute sulfuric acid solution. In addition, the method can supply a highly concentrated inorganic acid solution individually, sequentially, or substantially simultaneously with the oxidizing solution to a surface of an object to be cleaned. | 03-31-2011 |
20110143549 | ETCHING METHOD, METHOD FOR MANUFACTURING MICROSTRUCTURE, AND ETCHING APPARATUS - In one embodiment, an etching method is disclosed. The method can include producing an oxidizing substance by electrolyzing a sulfuric acid solution, and producing an etching solution having a prescribed oxidizing species concentration by controlling a produced amount of the produced oxidizing substance. The method can include supplying the produced etching solution to a surface of a workpiece. | 06-16-2011 |
Patent application number | Description | Published |
20080264780 | Water electrolysis system - In a water electrolysis system having an anode catalyst layer containing anode catalyst and a cathode catalyst layer containing cathode catalyst tightly attached, respectively, to each surface of a solid polymer electrolyte membrane comprising a cation exchange membrane, wherein at least one catalyst layer of said anode catalyst layer and cathode catalyst layer comprises a porous structure of anode catalyst or cathode catalyst dispersed in fluorine resin containing resin, featuring the surface of the anode catalyst layer or the cathode catalyst layer being hydrophobized and the water contact angle with the surface of the anode catalyst layer or the cathode catalyst layer of said porous structure being 90 degrees or more, whereby the transfer of gas to the counter electrode can be significantly suppressed, gas purity and current efficiency be improved, and safety operation of the electrolysis system be secured, without a major change in configuration of the water electrolysis system. | 10-30-2008 |
20090078582 | APPARATUS FOR ELECTROLYZING SULFURIC ACID, METHOD OF PERFORMING ELECTROLYSIS, AND APPARATUS FOR PROCESSING A SUBSTRATE - An apparatus for electrolyzing sulfuric acid, the apparatus comprising an electrolytic cell comprising a cathode chamber having a cathode and an anode chamber having an anode, the cathode chamber and the anode chamber being separated by a diaphragm, a sulfuric acid tank configured to store the sulfuric acid, a supply pipe connecting the sulfuric acid tank to an inlet port of the anode chamber, a connection pipe connecting an outlet port of the cathode chamber to the inlet port of the anode chamber, a first supply pump provided on the supply pipe and configured to supply the sulfuric acid from the sulfuric acid tank to the cathode chamber through the supply pipe, and a drain pipe connected to an outlet port of the anode chamber and configured to supply to a solution tank a solution containing an oxidizing agent generated by electrolysis in the anode chamber. | 03-26-2009 |
20090321252 | Sulfuric acid electrolytic cell and a sulfuric acid recycle type cleaning system applying the sulfuric acid electrolytic cell - In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and said cathode are contacted in sequence, the rear face of said cathode is pasted with conductive paste to the current collector comprising a rigid body with size equal to, or larger than, said cathode and electric power is supplied from one current collector to the other current collector via said conductive paste. | 12-31-2009 |
20090321272 | Sulfuric acid electrolysis process - Sulfuric acid electrolysis process wherein;
| 12-31-2009 |
20090325390 | Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device - The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising:
| 12-31-2009 |
20100320082 | Conductive diamond electrode and ozone generator using the same - The present invention relates to a conductive diamond electrode, comprising a substrate having a plurality of convex and concave part disposed over the entire surface of the conductive diamond electrode, and a diamond film coated on the surface of said substrate, wherein the width of each convex part of said convex and concave part is in a range from 0.2 mm to 1 mm. The present invention can provide a conductive diamond electrode, applying a thin film of conductive diamond and a thick substrate, being less expensive than a self-supported type conductive diamond electrode and also having mechanical strength enough to be used in the zero-gap electrolysis, functioning stably for a long time with smooth water supply or gas liberation, and an ozone generator using the conductive diamond electrode. | 12-23-2010 |
20130313129 | METHOD FOR MEASURING TOTAL CONCENTRATION OF OXIDIZING AGENTS, CONCENTRATION METER FOR MEASURING TOTAL CONCENTRATION OF OXIDIZING AGENTS, AND SULFURIC ACID ELECTROLYSIS DEVICE EQUIPPED WITH SAME - Provided are: a method of measuring the total concentration of oxidizing agents, by which the total concentration can be determined in a single measurement with simple operations even in an evaluation solution containing multiple components such as persulfuric acid, perosulfate and hydrogen peroxide; a simple and inexpensive concentration meter for measuring the total concentration of oxidizing agents; and a sulfuric acid electrolysis device comprising the concentration meter. | 11-28-2013 |
Patent application number | Description | Published |
20090020631 | GASEOUS FUEL INJECTOR USING LIQUID FUEL AS LUBRICANT AND PRESSURE-TRANSMITTING MEDIUM - A fuel injector injects high-pressure gaseous fuel directly into a cylinder of an engine. A small amount of liquid fuel is used in the injector to lubricate sliding portions of the fuel injector in addition to utilizing it as a medium for transmitting driving force. The fuel injector includes a nozzle member having injection holes at its elongated end and a needle slidably disposed in an elongated center hole of the nozzle member. The needle is driven by pressure of the liquid fuel introduced into a control chamber to open or close the injection holes. The pressure in the control chamber is controlled by a switching valve which is in turn driven by an actuator such as an electromagnetic or piezoelectric actuator. The liquid fuel is injected together with the high-pressure gaseous fuel after lubricating the sliding portions between the nozzle member and the needle. | 01-22-2009 |
20090150050 | FUEL INJECTOR AND FUEL INJECTION DEVICE HAVING SAME - A fuel injector is configured to inject gaseous fuel into a combustion chamber of an engine by using liquid fuel as a pressure transmission medium to open and close a nozzle hole. A nozzle portion has a fuel chamber and a tip end, which defines the nozzle hole. A first passage is configured to communicate the fuel chamber with a gaseous fuel passage to introduce gaseous fuel. A second passage is configured to communicate the fuel chamber with a liquid fuel passage to introduce liquid fuel. A passage switching valve is configured to switch the first passage and the second passage. | 06-11-2009 |
20140102414 | FUEL INJECTION APPARATUS - A liquefied gas fuel is supplied to a fuel gallery of a high-pressure pump through a feed pipe. A fuel injection apparatus includes a passage expansion pipe of which passage area is greater than that of the fuel gallery. The passage expansion pipe is arranged between the feed pipe and the fuel gallery. When the fuel is supplied to the fuel gallery during a suction stroke of a plunger, the passage expansion pipe functions as an accumulator accumulating the fuel therein. The replenishing fuel from the passage expansion pipe is added to the fuel supplied from the feed pump. A pressure drop in the fuel gallery becomes small, so that the pressure pulsation in the fuel gallery is reduced. | 04-17-2014 |
20140216405 | FUEL INJECTION NOZZLE - A fuel injection nozzle includes: a nozzle body having a plurality of injection holes; and a needle accommodated in the nozzle body to inject a DME fuel containing dimethyl ether as a main component. The nozzle body has a seat part to which the needle seated or from which the needle separated, and a tip end chamber arranged downstream of the seat part in a flow of the DME fuel to communicate with the plurality of injection holes. The DME fuel in the tip end chamber is heated with combustion heat in a combustion chamber of an internal combustion engine to have a supercritical state. | 08-07-2014 |
Patent application number | Description | Published |
20120168302 | OZONE GENERATOR - The present invention provides an ozone generator comprising an anode and a cathode provided on each side of a fluororesin type cation exchange membrane, the anode being a conductive diamond electrode having conductive diamond on the surface, wherein water is supplied to an anode compartment, DC current is supplied between the anode and the cathode to electrolyze water to evolve ozone from the anode compartment and hydrogen from a cathode compartment, the conductive diamond electrode comprising a substrate having a plurality of convexo-concave and a conductive diamond film coated on the surface of the substrate is applied as the conductive diamond electrode, and a close packed layer of ion exchange resin particles or the fluororesin type cation exchange membrane with notch is closely adhered to the surface of the anode side of the fluororesin type cation exchange membrane. | 07-05-2012 |
20130256150 | ELECTRICALLY CONDUCTIVE DIAMOND ELECTRODE, AND SULFURIC ACID ELECTROLYSIS METHOD AND SULFURIC ACID ELECTROLYSIS APPARATUS EACH UTILIZING SAME - The present invention provides an electrically conductive diamond electrode comprising an electrically conductive substrate and an electrically conductive diamond layer coated on the surface of the electrically conductive substrate, featuring that:
| 10-03-2013 |
20130334059 | APPARATUS FOR ELECTROLYZING SULFURIC ACID AND METHOD FOR ELECTROLYZING SULFURIC ACID - The present invention relates to an apparatus to produce oxidizing agent-rich sulfuric acid by electrolysis of sulfuric acid. More specifically, it relates to the apparatus by which dilute sulfuric acid of the specified temperature and concentration is formed within the electrolysis system and then, by electrolysis of the formed dilute sulfuric acid, electrolytic sulfuric acid containing richly oxidizing agent is formed at a high efficiency and safely under the temperature control. | 12-19-2013 |