Cernusca
Michael Cernusca, Judendorf AT
Patent application number | Description | Published |
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20080271161 | Method and Apparatus for Transferring a Data Carrier of a First System to a Second System - A description is given of a method of transferring a first electronic data carrier ( | 10-30-2008 |
20100083770 | PROCESS AND DEVICE FOR CONTINUOUS MEASUREMENT OF A DYNAMIC FLUID CONSUMPTION - A process for continuous measurement of a dynamic fluid consumption, particularly fuel consumption, uses a continuously working flow rate sensor (7) with variable pressure drop, preferably a mass flow sensor, whereby the pressure downstream of the flow rate sensor (7) is determined for controlling the transport of fluid. | 04-08-2010 |
Michael Cernusca, Judendorf-Strassengel AT
Patent application number | Description | Published |
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20140216161 | CAPACITIVE ULTRASONIC TRANSDUCER - The invention relates to capacitive ultrasonic transducer comprising a sensor head having a back plate, the structured front side of which is provided with an insulation layer, and. the back side of which is provided with an electrode. | 08-07-2014 |
Stefan Cernusca, Innermanzing AT
Patent application number | Description | Published |
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20100038554 | COMPENSATION OF DOSE INHOMOGENEITY AND IMAGE DISTORTION - An improved aperture arrangement in a device for defining a pattern on a target, for use in a particle-beam exposure apparatus, by being irradiated with a beam of electrically charged particles and allowing passage of the beam only through a plurality of apertures. The device includes an aperture array having a plurality of apertures of identical shape defining the shape and relative position of beamlets permeating the apertures. A blanking device switches off the passage of selected beamlets permeating the apertures and defined by them. The apertures are arranged on the aperture array according to an arrangement deviating from a regular arrangement by small deviations, adjusting for distortions caused by the particle-beam exposure apparatus, and the size of the apertures of the aperture array differs across the aperture array in order to allow for an adjustment of the current radiated on the target through the apertures and the corresponding openings. | 02-18-2010 |
20100224790 | Global Point Spreading Function in Multi-Beam Patterning - In a particle multi-beam structuring apparatus for forming a pattern on a target's surface using a beam of electrically charged particles, during exposure steps the particle beam is produced, directed through a pattern definition means producing a patterned particle beam composed of multiple beamlets, and projected by an optical column including a controllable deflection means onto the target surface to form, at a nominal location on the target, a beam image comprising the image of defining structures in the pattern definition means. The beam image's nominal location relative to the target is changed between exposure steps. The actual location of the beam image is varied within each exposure step around the nominal location, through a set of locations realizing a distribution of locations within the image plane around a mean location coinciding with the nominal location, thus introducing an additional blur which is homogenous over the entire beam image. | 09-09-2010 |
Stefan Cernusca, Wien AT
Patent application number | Description | Published |
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20080258084 | Charged-Particle Exposure Apparatus - A particle-beam projection processing apparatus for irradiating a target, with an illumination system for forming a wide-area illuminating beam of energetic electrically charged particles; a pattern definition means for positioning an aperture pattern in the path of the illuminating beam; and a projection system for projecting the beam thus patterned onto a target to be positioned after the projection system. A foil located across the path of the patterned beam is positioned between the pattern definition means and the position of the target at a location close to an image of the aperture pattern formed by the projection system. | 10-23-2008 |