Patent application number | Description | Published |
20100264777 | LONG RANGE TRAVEL MEMS ACTUATOR - An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies. | 10-21-2010 |
20110058180 | Compensated MEMS FTIR Spectrometer Architecture - A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors. | 03-10-2011 |
20110222067 | TECHNIQUE TO DETERMINE MIRROR POSITION IN OPTICAL INTERFEROMETERS - A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable minor. An electrostatic MEMS actuator is coupled to the moveable minor to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable minor based on the current capacitance of the MEMS actuator. | 09-15-2011 |
20120320936 | MEMS BASED SWEPT LASER SOURCE - A MEMS-based swept laser source is formed from two coupled cavities. The first cavity includes a first mirror and a fully reflective moveable mirror and operates to tune the output wavelength of the laser. The second cavity is optically coupled to the first cavity and includes an active gain medium, the first mirror and a second mirror. The second cavity further has a length substantially greater than the first cavity such that there are multiple longitudinal modes of the second cavity within a transmission bandwidth of the first cavity output. | 12-20-2012 |
Patent application number | Description | Published |
20100315647 | System, Method and Apparatus for a Micromachined Interferometer Using Optical Splitting - A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams. | 12-16-2010 |
20110176138 | INTERFEROMETER WITH VARIABLE OPTICAL PATH LENGTH REFERENCE MIRROR AND APPLICATIONS THEREOF - An interferometer includes a variable optical path length reference mirror to produce a final interferogram from a combination of interferograms. Each of the interferograms is generated at a different optical path length of the reference mirror. | 07-21-2011 |
20130100424 | Integrated monolithic optical bench containing 3-D curved optical elements and methods of its fabrication - An optical system, such as an integrated monolithic optical bench, includes a three-dimensional curved optical element etched in a substrate such that the optical axis of the optical system lies within the substrate and is parallel to the plane of the substrate. | 04-25-2013 |
20140022618 | Aspherical optical surfaces and optical scanners - Optical systems with aspherical optical elements are described. The aspherical optical elements have surfaces in which the in-plane radius of curvature spatially varies and the in-plane cross section surface profile is characterized in that the multiplication of the cosine of the incidence angle raised to a non-zero exponent by the in-plane radius of curvature varies less than twenty percent between any two points on the in-plane cross section surface profile. | 01-23-2014 |
20140098371 | Fourier transform micro spectrometer based on spatially-shifted interferogram bursts - A spectrometer with improved resolution includes a spectral domain modulator having a periodic response in the spectral domain to modulate a wideband source spectrum and cause one or more shifted bursts in the interferogram. | 04-10-2014 |
20140139839 | Self Calibration for mirror positioning in Optical MEMS Interferometers - A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit. | 05-22-2014 |
20140192365 | SPATIAL SPLITTING-BASED OPTICAL MEMS INTERFEROMETERS - A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam. | 07-10-2014 |