Patent application number | Description | Published |
20080239277 | Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method - The present invention provides a method for forming a substrate for use in calibrating a metrology tool in order to compensate for orientation-dependent variations within the metrology tool. | 10-02-2008 |
20080311344 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method - An overlay target on a substrate is disclosed, the overlay target including a periodic array of structures wherein every n | 12-18-2008 |
20090135424 | Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method for Determining A Parameter of a Target Pattern - In a method for determining a structure parameter of a target pattern, a first series of calibration spectra are determined from at least one reference pattern, each spectra being determined using a different known value of at least one structure parameter of the respective reference pattern. The first series of calibration spectra does not take into account parameters of an apparatus used to produce the reference pattern. A representation of each of the first series calibration spectra is stored in a central library. A second series of calibration spectra corresponding to at least one of the stored spectra for a target spectrum is determined using the parameters of the apparatus for measuring the target spectrum. A measured target spectrum is produced by directing a beam of radiation onto the target pattern. The measured target spectrum and the second series of calibration spectra are compared, where this comparison is used to derive a value for the structure parameter of the target pattern. | 05-28-2009 |
20090237676 | Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method - A method is provided for determining an actual profile of an object printed on a substrate. The method can include receiving an actual spectrum signal associated with the object, selecting a first model profile, and generating a first model spectrum signal associated with the first model profile. The method can further include comparing the first model spectrum signal with the actual spectrum signal. If the first model spectrum signal and the actual spectrum signal do not match a desired tolerance, the aforementioned selecting, generating, and comparing can be repeated with a second model profile. The second model profile can be selected based on the first model spectrum signal having undergone an optimization process based on a number of variable parameters of the first model profile, where the number of variable parameters is reduced by approximating the first model profile to a single shape with a reduced number of variable parameters. | 09-24-2009 |
20100201963 | Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method - For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants. | 08-12-2010 |
20100227280 | Method of Measuring a Characteristic - During a multiple patterning process every n | 09-09-2010 |
20110007314 | Method and apparatus for angular-resolved spectroscopic lithography characterization - An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference. | 01-13-2011 |
20110141444 | Inspection Apparatus for Lithography - A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target ( | 06-16-2011 |
20120038929 | Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization - An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference. | 02-16-2012 |
20140055788 | Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization - An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference. | 02-27-2014 |
20140211185 | Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method - For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants. | 07-31-2014 |
20140233025 | Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization - An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference. | 08-21-2014 |
20150085267 | Method of Determining Focus Corrections, Lithographic Processing Cell and Device Manufacturing Method - A method of, and associated apparatus for, determining focus corrections for a lithographic projection apparatus. The method comprises exposing a plurality of global correction fields on a test substrate, each comprising a plurality of global correction marks, and each being exposed with a tilted focus offset across it; measuring a focus dependent characteristic for each of the plurality of global correction marks to determine interfield focus variation information; and calculating interfield focus corrections from the interfield focus variation information. | 03-26-2015 |
Patent application number | Description | Published |
20100086668 | PROCESS FOR PRODUCING SLOWLY DIGESTIBLE STARCH - A sterilised food product containing starch, the starch having: (a) an amylose content of at least 60 wt. %; (b) a median particle size of between 1 and 15 &mgr;m, at least 90 wt. % of the starch particles having a particle diameter of less than 50 &mgr;m; and (c) a non-digestible starch content of less than 50 wt. %; and (d) a slowly digestible starch content of 15-75 wt. %. The product is obtained by heating and rapidly cooling the starch product and has a high slowly digestible starch content. It is suitable for use in the treatment of diabetes, obesitas, insulin resistance, or for postprandial glucose response. | 04-08-2010 |
20110008485 | PROTEIN-DENSE MICELLAR CASEIN-BASED LIQUID ENTERAL NUTRITIONAL COMPOSITION - Protein-dense micellar casein-based liquid enteral nutritional composition are provided that contain micellar casein and optionally caseinate. Liquid enteral nutritional compositions are disclosed comprising 10 to 20 g of protein per 100 ml of the composition, in which all or a major part of said protein comprises native micellar casein. Also, a method is disclosed for producing the composition according to the invention, comprising a step wherein an aqueousprotein solution in which all or a major part of said protein comprises native micellar casein, is subjected to an evaporation step. | 01-13-2011 |
20110257089 | LIQUID HIGH-FAT PROTEIN COMPOSITION - The invention concerns nutritional compositions for persons with a (partially) functional gastrointestinal tract, who are unwilling and/or unable to consume sufficient quantities of conventional food to meet their nutritional requirements such as malnourished persons or persons at risk of becoming malnourished, and in need of liquid oral nutrition. The shelf-stable liquid nutritional compositions comprise at least non-micellar casein, a high amount of fat, and optionally a heat stabilisation system. | 10-20-2011 |
20120309831 | BALANCED FAT COMPOSITION AND USE THEREOF IN A LIQUID NUTRITIONAL COMPOSITION SUITABLE FOR ENTERAL FEEDING - This invention relates to a balanced fat composition and use thereof in a liquid nutritional composition, in particular suitable for tube feeding. This invention further relates to said liquid nutritional composition for providing enteral nutrition to patients in need thereof, in particular for providing a complete enteral nutrition, in particular for providing a long-term enteral nutrition. More specifically, the balanced fat composition and the liquid nutritional composition comprising said balanced fat composition comprises specific amounts of linoleic acid (LA), alpha-linolenic acid (ALA), docosahexaenoic acid (DHA), eicosapentaenoic acid (EPA), at least one medium chain fatty acid (MCFA), and at least one mono-unsaturated fatty acid (MUFA). The invention relates further to a method for providing enteral nutrition to patients in need thereof comprising administering an effective amount of said liquid nutritional composition comprising the balanced fat composition according to the invention. | 12-06-2012 |
20130023468 | LIQUID ENTERAL NUTRITIONAL COMPOSITION SUITABLE FOR TUBE FEEDING, MINIMIZING LOWER AND UPPER TRACT DIGESTIVE CONDITIONS - The invention is directed to liquid enteral nutritional compositions comprising a protein fraction comprising more than 25 weight % and up to 80 weight % of a vegetable protein comprising at least a source of pea protein, and a fat fraction comprising (a) 8 to 15 weight % of linoleic acid; (b) 3.0 to 6.0 weight % of a combination of alpha-linolenic acid, docosahexaenoic acid and eicosapentaenoic acid, wherein the amount of ALA is >2.5 weight % and the combined amount of DHA and EPA is ≦2.5 weight %; (c) 10 to 20 weight % of at least one medium-chain fatty acid; and (d) 35 to 79 weight % of at least one mono-unsaturated fatty acid. The compositions provide for a healthy and balanced diet, which is well-tolerated and minimises clinical complications that are frequently associated with the administration of enteral nutrition in patients using tube feeding, especially with respect to a reduced gastric emptying. | 01-24-2013 |
20140220174 | PROCESS FOR PRODUCING SLOWLY DIGESTIBLE STARCH - A sterilized food product containing starch, the starch having: (a) an amylose content of at least 60 wt. %; (b) a median particle size of between 1 and 15 μm, at least 90 wt. % of the starch particles having a particle diameter of less than 50 μm; and (c) a non-digestible starch content of less than 50 wt. %. The product is obtained by heating and rapidly cooling the starch product and has a high slowly digestible starch content. It is suitable for use in the treatment of diabetes, obesity, insulin resistance, or for postprandial glucose response. | 08-07-2014 |