Patent application number | Description | Published |
20090291623 | Polishing head and polishing apparatus - The present invention is a polishing head provided with an annular rigid ring, a rubber film bonded to the rigid ring with a uniform tension, a mid plate joined to the rigid ring and forming a space portion together with the rubber film and the rigid ring, and an annular template provided concentrically with the rigid ring in a peripheral portion on a lower face part of the rubber film and having an outer diameter larger than an inner diameter of the rigid ring, in which a pressure of the space portion can be changed by a pressure adjustment mechanism, a back face of a work is held on the lower face part of the rubber film, and a surface of the work is brought into sliding contact with the polishing pad attached onto a turn table for performing polishing, and an inner diameter of the template is smaller than an inner diameter of the rigid ring, and a ratio between an inner diameter difference between the rigid ring and the template and a difference between the inner diameter and an outer diameter of the template is 26% or more and 45% or less. Thereby, a polishing head and the like that can obtain constant flatness stably can be provided. | 11-26-2009 |
20100233945 | POLISHING HEAD, POLISHING APPARATUS AND METHOD FOR DEMOUNTING WORKPIECE - A polishing head having a disklike carrier in which an annular projecting portion and a carrier-engagement portion are formed in a peripheral portion, a disklike head body in which a head-body-engagement portion is formed outside, a diaphragm for connecting the head body with the carrier, a spacer located between the carrier-engagement portion and the head-body-engagement portion in a part of the carrier-engagement portion and/or the head-body-engagement portion, in which the spacer abuts on the carrier-engagement portion and/or the head-body-engagement portion at the time of lifting the head body so that the workpiece is demounted from the polishing pad by lifting the carrier with it inclined. As a result, there is provided a polishing head in which the workpiece can be easily, safely and surely demounted from the polishing pad by lifting the polishing head holding the workpiece without overhanging the polishing head from the turn table and the like. | 09-16-2010 |
20100291838 | POLISHING HEAD AND POLISHING APPARATUS HAVING THE SAME - The present invention is a polishing head in which a rubber film is formed in a boot shape in such a manner that a position where the rubber film is held by a mid plate is distantly positioned from a work holding portion; an end portion of the boot shaped rubber film is formed in O-ring shape so that the rubber film is held by the mid plate with decreasing an area of contact between the mid plate and the rubber film as much as possible. As a result, there is provided a polishing head with rubber chuck method in which an occurrence of a surface defect, such as a scratch, on a surface of the work is suppressed as much as possible and the work can be uniformly and stably polished to the outer periphery. | 11-18-2010 |
20110070813 | METHOD FOR MANUFACTURING POLISHING HEAD AND POLISHING APPARATUS - A method for manufacturing a polishing head having an annular rigid ring; a rubber film bonded to the rigid ring with uniform tension; a mid plate joined to the rigid ring, forming a space together with the rubber film and the rigid ring; and a mechanism for changing pressure of the space, the method including performing a tensile test on the rubber film according to JIS K6251 before bonding the rubber film to the rigid ring, and selecting the rubber film having a value of 10 MPa or less of an inclination obtained by a linear approximation of a stress-strain curve within a strain value of 5%; and bonding the selected rubber film having a value of 10 MPa or less of the inclination to the rigid ring to manufacture the polishing head. | 03-24-2011 |
20110136414 | POLISHING HEAD AND POLISHING APPARATUS - A polishing head for holding a workpiece when a surface of the workpiece is polished and a polishing apparatus provided with the polishing head, and more particularly a polishing head for holding the workpiece on a rubber film and a polishing apparatus provided with the polishing head. The polishing head and the polishing apparatus provided with the polishing head that can adjust the polishing profile on the basis of the shape of the workpiece before polishing and can stably obtain good flatness. | 06-09-2011 |
20120309175 | VAPOR-PHASE GROWTH SEMICONDUCTOR SUBSTRATE SUPPORT SUSCEPTOR, EPITAXIAL WAFER MANUFACTURING APPARATUS, AND EPITAXIAL WAFER MANUFACTURING METHOD - According to the present invention, there is provided a vapor-phase growth semiconductor substrate support susceptor for supporting a semiconductor substrate at the time of vapor-phase growth, wherein the susceptor comprises a pocket portion in which the semiconductor substrate is arranged and has a taper portion having a taper formed such that an upper surface of the susceptor is inclined upwards or downwards from an edge of the pocket portion to an outer side. As a result, there can be provided the susceptor for supporting the semiconductor substrate at the time of vapor-phase growth that can improve flatness of an epitaxial wafer by controlling a layer thickness of an epitaxial layer at a peripheral portion on a main front surface side of the epitaxial wafer, and the epitaxial wafer manufacturing apparatus using this susceptor. | 12-06-2012 |
20140101925 | POLISHING HEAD, POLISHING APPARATUS, AND METHOD FOR POLISHING WORKPIECE - A polishing head configured to hold a workpiece at the time of polishing the workpiece by bringing a front surface of the workpiece into sliding contact with a polishing pad attached to on a turn table, the polishing head includes: a workpiece-holding board configured to hold a back surface of the workpiece, the workpiece-holding board being flexible and being composed of ceramics; a sealed space defined on a surface of the workpiece-holding board on an opposite side of a surface on which the workpiece is held; and a pressure-controlling device configured to control a pressure in the sealed space, the polishing head being capable of adjusting a shape of the flexible workpiece-holding board into a convex shape or a concave shape by controlling a pressure in the sealed space by the pressure-controlling device. | 04-17-2014 |
20140113531 | POLISHING HEAD AND POLISHING APPARATUS - A polishing head comprising an annular rigid ring; a rubber film attached to the rigid ring by using uniform tensile force; a back plate that is connected to the rigid ring and forms a space portion with the rubber film and the rigid ring; and an annular template that is provided at a peripheral portion of a lower surface portion of the rubber film concentrically with the rigid ring and configured to hold an edge portion of a workpiece, the polishing head holding a back surface of the workpiece on the lower surface portion of the rubber film and sliding a front surface of the workpiece on a polishing pad attached to a turn table to perform polishing. The polishing head and the polishing apparatus can be used for final polishing and uniformly polish the entire front surface regardless of the thickness of the template. | 04-24-2014 |
Patent application number | Description | Published |
20080214382 | Dielectric Ceramic Composition and Multi-Layer Ceramic Capacitor - The present invention provides a dielectric ceramic composition, which is, in addition to having superior resistance to reduction during firing, superior capacitance temperature characteristics after firing and superior dielectric characteristics, also demonstrates an enhanced lifetime for insulation resistance. | 09-04-2008 |
20090202912 | ALL SOLID STATE SECONDARY BATTERY - This is to provide an all solid state secondary battery which can be produced by an industrially employable method capable of mass-production and has excellent secondary battery characteristics. | 08-13-2009 |
20100216032 | LITHIUM ION RECHARGEABLE BATTERY AND PROCESS FOR PRODUCING THE LITHIUM ION RECHARGEABLE BATTERY - Conventional ion rechargeable batteries having an electrode layer on an electrolyte layer suffer from an impurity layer formed at the interface, degrading performance. Conventional batteries with no such impurity layer have a problem of weak interface bonding. In the present invention, in a baking process step after an electrode layer is laminated on an electrolyte layer, materials for an electrode layer and an electrolyte layer are selected such that an intermediate layer formed of a reaction product contributing to charging and discharging reactions is formed at the interface of the electrode layer and the electrolyte layer. In addition, a paste that an active material is mixed with a conductive material at a predetermined mixing ratio is used to form a positive electrode layer and a negative electrode layer. Reductions in electrode resistance and interface resistance and improvement of charging and discharging cycle characteristics are made possible. | 08-26-2010 |
20140015173 | LITHIUM ION RECHARGEABLE BATTERY AND PROCESS FOR PRODUCING THE LITHIUM ION RECHARGEABLE BATTERY - Conventional ion rechargeable batteries having an electrode layer on an electrolyte layer suffer from an impurity layer formed at the interface, degrading performance. Conventional batteries with no such impurity layer have a problem of weak interface bonding. In the present invention, in a baking process step after an electrode layer is laminated on an electrolyte layer, materials for an electrode layer and an electrolyte layer are selected such that an intermediate layer formed of a reaction product contributing to charging and discharging reactions is formed at the interface of the electrode layer and the electrolyte layer. In addition, a paste that an active material is mixed with a conductive material at a predetermined mixing ratio is used to form a positive electrode layer and a negative electrode layer. Reductions in electrode resistance and interface resistance and improvement of charging and discharging cycle characteristics are made possible. | 01-16-2014 |
Patent application number | Description | Published |
20110247041 | RECEPTION DEVICE - A reception device includes a first input terminal receiving a first television broadcast signal of a first frequency band or a mixed wave of the first television broadcast signal and a second television broadcast signal of a second frequency band; a second input terminal receiving the second television broadcast signal; first and second tuner; a matching unit extracting a second broadcast signal from a broadcast signal received from a first circuit terminal and outputting the extracted second broadcast signal from a second circuit terminal; a first connection portion selectively performing a connection between the first input terminal and the first circuit terminal of the matching unit; and a second connection portion setting an input path of the second television broadcast signal to the second tuner to a path from the second input terminal or a path from the second circuit terminal of the matching unit. | 10-06-2011 |
20120200782 | HIGH FREQUENCY MODULE AND RECEIVER - There are provided a high frequency module and a receiver capable of exhausting an electric field and a magnetic field to the outside of a shield, more closely arranging electronic components inside the shield, and being downsized. The high frequency module has integrated circuits (IC) | 08-09-2012 |
20140024326 | RECEIVING APPARATUS AND RECEIVING METHOD - A first high frequency processing unit detects a first broadcasting wave transmitted using a first frequency band, and extracts a first high frequency signal. Further, a second high frequency processing unit detects a second broadcasting wave transmitted using a second frequency band different from the first frequency band, and extracts a second high frequency signal. Furthermore, at least one local oscillator generates a local oscillation signal used in the first high frequency processing unit and the second high frequency processing unit. | 01-23-2014 |
Patent application number | Description | Published |
20080239177 | LIQUID CRYSTAL DISPLAY DEVICE - To reduce flickers generated in a liquid crystal display device for allowing the use of a liquid crystal material exhibiting a high response speed so as to improve the light utilizing efficiency of a field sequential type liquid crystal display device. A liquid crystal display device includes: a display panel including a pixel matrix in which pixels each including a switching element and a pixel electrode are arranged in matrix near intersection of data lines and gate lines, and a counter electrode arranged to oppose the pixel matrix; and a control part which divides a period for displaying a color image of one frame into a plurality of sub-frame periods, and lights up light sources of different colors for each of the sub-frame periods to display images on the display panel. A shield electrode layer separated by an insulating film is disposed between the pixel electrode and the data lines. | 10-02-2008 |
20090121993 | LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF DRIVING SAME - A color field-sequential liquid crystal display device comprising: a liquid crystal panel; a planar light-source unit for emitting light toward the liquid crystal panel; and a signal processor connected to the liquid crystal panel and to the planar light-source unit; wherein the signal processing includes: a comparing unit that compares video signals included in subframes of at least one identical color in each frame of two mutually adjacent video frames; and a polarity reversing unit that reverses the polarities of video signals in mutually adjacent subframes within the same frame, deciding whether or not to reverse the polarities of all video signals of one frame based upon the result of the comparison by the comparing unit, and outputting a video signal having the decided polarity to the liquid crystal panel. | 05-14-2009 |
20150015592 | DISPLAY CONTROLLER, DISPLAY DEVICE, IMAGE PROCESSING METHOD, AND IMAGE PROCESSING PROGRAM - To overcome issues generated due to the light-shield part in a display device which displays different images towards a plurality of viewpoints, and to provide a device for easily synthesizing images to be displayed on a display part. A display controller includes: an image memory which stores viewpoint image data for a plurality of viewpoints; a writing control device which writes the viewpoint image data inputted from outside to the image memory; a parameter storage device which stores parameters showing a positional relation between a lenticular lens and the display part; and a readout control device which reads out the viewpoint image data from the image memory according to a readout order obtained by applying the parameters to a repeating regulation that is determined based on layout of he sub-pixels, number of colors, and layout of the colors, and outputs it to the display module as synthesized image data. | 01-15-2015 |