Patent application number | Description | Published |
20090305063 | COMPOSITION FOR FORMING SILICEOUS FILM AND PROCESS FOR PRODUCING SILICEOUS FILM FROM THE SAME - The present invention provides a siliceous film-forming composition having such a small thickness shrinkage ratio that a highly homogeneous siliceous film can be obtained. The invention also provides a trench isolation structure-fabrication process. According to this process, trenches even having very small widths can be homogeneously filled in. The composition contains a solvent and a polysilazane compound obtained by co-ammonolysis of one or a combination of two or more halosilane compounds. The process comprises the steps of coating a surface of a silicon substrate with the above composition, and subjecting the coated substrate to heat-treatment at less than 1000° C. under an oxygen atmosphere or an oxidizing atmosphere containing water vapor, so that the composition is converted into silicon dioxide in the form of a film. | 12-10-2009 |
20100323168 | METHOD FOR FORMATION OF SILICEOUS FILM AND SILICEOUS FILM FORMED BY THE METHOD - The present invention provides a method for formation of a siliceous film containing nitrogen in a low concentration. The method according to the present invention comprises the steps of: applying a polysilazane composition on an engraved substrate surface, to form a coating layer; hardening the coating layer only in the part adjacent to the substrate surface, to form a covering film along the shape of the engraved substrate; and removing the polysilazane composition of the coating layer in the part not hardened in the above covering film-formation step. According to this method, two or more siliceous films can be formed and layered. | 12-23-2010 |
20110014796 | DIPPING SOLUTION FOR USE IN PRODUCTION OF SILICEOUS FILM AND PROCESS FOR PRODUCING SILICEOUS FILM USING THE DIPPING SOLUTION - This invention relates to a dipping solution used in a process for producing a siliceous film. The present invention provides a dipping solution and a siliceous film-production process employing the solution. The dipping solution enables to form a homogeneous siliceous film even in concave portions of a substrate having concave portions and convex portions. The substrate is coated with a polysilazane composition, and then dipped in the solution before fire. The dipping solution comprises hydrogen peroxide, a foam-deposit inhibitor, and a solvent. | 01-20-2011 |
20120156893 | METHOD FOR PRODUCING SILICEOUS FILM AND POLYSILAZANE COATING TREATMENT LIQUID USED THEREFOR - The present invention provides a method for forming a siliceous film. According to the method, a siliceous film having a hydrophilic surface can be formed from a polysilazane compound at a low temperature. In the method, a composition containing a polysilazane compound and a silica-conversion reaction accelerator is applied on a substrate surface to form a polysilazane film, and then a polysilazane film-treatment solution is applied thereon so that the polysilazane compound can be converted into a siliceous film at 300° C. or less. The polysilazane film-treatment solution contains a solvent, hydrogen peroxide and an alcohol. | 06-21-2012 |
20130277808 | DIPPING SOLUTION FOR USE IN PRODUCTION OF SILICEOUS FILM AND PROCESS FOR PRODUCING SILICEOUS FILM USING THE DIPPING SOLUTION - This invention relates to a dipping solution used in a process for producing a siliceous film. The present invention provides a dipping solution and a siliceous film-production process employing the solution. The dipping solution enables to form a homogeneous siliceous film even in concave portions of a substrate having concave portions and convex portions. The substrate is coated with a polysilazane composition, and then dipped in the solution before fire. The dipping solution comprises hydrogen peroxide, a foam-deposit inhibitor, and a solvent. | 10-24-2013 |
20130316515 | METHOD FOR PRODUCING SILICON DIOXIDE FILM - [Problem] To provide a method capable of forming an insulating film suffering less from both shrinkage and stress. | 11-28-2013 |
Patent application number | Description | Published |
20090041933 | RECORDING DRIVE WAVEFORM ADJUSTING METHOD FOR MANUFACTURING MASTER DISC, MASTER DISC MANUFACTURING METHOD, MASTER DISC MANUFACTURING APPARATUS, AND MASTER DISC - A recording drive waveform adjusting method for manufacturing a master disc is provided. The method includes forming an exposed area in an inorganic resist layer for test exposure by irradiating a master disc having the inorganic resist layer with laser light of a recording power based on a recording drive waveform according to a test recording signal. The method also includes obtaining reflected-light information by irradiating the exposed area formed in the test exposure with laser light of a reproducing power, determining whether the recording drive waveform is appropriate by using the reflected-light information, and correcting the recording drive waveform if the recording drive waveform is determined to be inappropriate in the determination. | 02-12-2009 |
20110207035 | Exposure apparatus and exposure method - An exposure apparatus includes an exposure unit selectively performing exposure on a resist layer with a first laser beam, focused by a lens system, in a pattern including pits and lands arranged in a scanning direction; a detecting unit detecting a reflection of a second laser beam applied through the lens system to the resist layer selectively exposed to the first laser beam, the second laser beam being produced by changing a focal length of the lens system such that the resist layer is prevented from responding thereto; a calculating unit calculating, from a result of the detection, a displacement between center axes of signal waveforms representing beams reflected from first and second portions of the pattern having a smallest width and a larger width, respectively; a setting unit setting the focal length of the lens system to such a value that the displacement is maximal; and a control unit controlling the exposure unit to expose the resist layer to the first laser beam focused with the focal length set by the setting unit. | 08-25-2011 |
20120207006 | RECORDING APPARATUS, MASTER MANUFACTURING APPARATUS, AND METHOD OF MANUFACTURING AN OPTICAL DISC RECORDING MEDIUM - A recording apparatus includes a rotation driving portion that rotates and drives an optical disc master; and a recording portion that performs an information recording on the optical disc master, by performing a laser beam irradiation on the optical disc master, based on a recording waveform which has a land pulse of a first power, a recording waveform portion having a recording pulse of a second power higher than the first power, and a cooling pulse which has a third power lower than the first power and is inserted between the land pulse and the recording waveform portion. | 08-16-2012 |
20120236697 | MASTER STRATEGY ADJUSTMENT METHOD AND DISC MANUFACTURING METHOD - A master strategy adjustment method includes performing first recording on a master with a predetermined strategy, performing first measurement of an evaluation value of the master of the first recording, forming a first optical disc based on the master after the first recording, performing second measurement of an evaluation value of the optical disc formed as the first optical disc, calculating a target value of the evaluation value of the master based on a difference with the first measurement evaluation value and the second measurement evaluation value, and adjusting the strategy so that the evaluation value with regard to the master matches the target value, performing recording on the master with the adjusted writing strategy, performing measurement of the evaluation value of the master, and performing determination of whether the evaluation value is within a predetermined range with the target value as a reference until an affirmative result is obtained. | 09-20-2012 |
20130297995 | Data Recording Apparatus, Data Recording System, Data Recording Method, And Program - A data recording apparatus includes a storage unit, a control unit, and a card interface unit. The storage unit stores master data being original data of data to be recorded on a card-type medium. The control unit reads out the master data from the storage unit and executes a recording processing control of the read-out master data with respect to the card-type medium. The card interface unit installs the card-type medium therein and executes data recording processing. Further, the control unit executes, in parallel to recording processing of the master data with respect to the card-type medium, error verification processing of the master data to which the verification value stored in the storage unit is applied, and performs a control of stopping the recording processing of the master data with respect to the card-type medium when an error is detected. | 11-07-2013 |
Patent application number | Description | Published |
20110001777 | AZO COMPOUND, AZO PIGMENT, DISPERSION CONTAINING THE AZO COMPOUND OR AZO PIGMENT, COLORING COMPOSITION, INK FOR INKJET RECORDING, INK TANK FOR INKJET RECORDING, INKJET RECORDING METHOD AND RECORDED MATERIAL - To provide an azo pigment excellent in coloristic characteristics such as tinctorial strength and hue and at the same time, excellent in the durability such as light fastness and ozone resistance, a pigment dispersion containing the azo pigment, a coloring composition, and an ink for inkjet recording. | 01-06-2011 |
20110017099 | AZO PIGMENT COMPOSITION, PRODUCTION PROCESS OF AZO PIGMENT COMPOSITION, DISPERSION CONTAINING AZO PIGMENT COMPOSITION, COLORING COMPOSITION AND INK FOR INKJET RECORDING - To provide an azo pigment composition exhibiting very good hue and light fastness and having excellent tinctorial strength (color density) and preferably further provide an azo pigment composition containing an azo pigment having characteristic X-ray diffraction peaks at different positions or a tautomer thereof. | 01-27-2011 |
20110018946 | AZO COMPOUNDS, AZO PIGMENTS, AND DISPERSION, COLORING COMPOSITION AND INK FOR INKJET RECORDING CONTAINING THE AZO COMPOUNDS OR AZO PIGMENTS, INK TANK FOR INKJET RECORDING, INKJET RECORDING METHOD, AND RECORDED PRODUCTS - An azo pigment represented by the general formula (1), a tautomer, salt, or hydrate thereof: | 01-27-2011 |
20110021763 | AZO PIGMENTS, AND PIGMENT DISPERSION, COLORING COMPOSITION AND INK FOR INKJET RECORDING CONTAINING THE AZO PIGMENT - Provided is an azo pigment represented by the following general formula (1), a tautomer of the azo pigment, and a salt or a hydrate thereof: | 01-27-2011 |