Patent application number | Description | Published |
20100233591 | PROCESS FOR PRODUCING PELLICLE, AND PELLICLE - There is provided a process for producing a pellicle, the process including a step of irradiating a pellicle film comprising a fluorine resin with UV light having a wavelength of no greater than 220 nm. There is also provided a preferred step of irradiating the pellicle film with UV light having a wavelength of no greater than 220 nm by means of at least one UV light source selected from a group consisting of a low-pressure mercury lamp, a deuterium lamp, a xenon excimer lamp, and ArF excimer laser light. | 09-16-2010 |
20100273097 | PELLICLE - A pellicle is provided that includes an aluminum pellicle frame having an anodized layer on its entire surface; and a pellicle film stretched over and affixed to an end face of the pellicle frame, the anodized layer having a thickness of 4 to 8 μm. | 10-28-2010 |
20100279212 | PHOTOMASK - A photomask is provided that includes a transparent substrate having a pattern region and a pellicle frame-mounting region formed thereon, wherein the pellicle frame-mounting region is formed outside the outer periphery of the pattern region, and at least the pellicle frame-mounting region is covered with a light shielding film. Specifically, there is provided a pellicle-equipped photomask comprising a photomask comprising a pellicle frame-mounting region covered with a light shielding film formed outside the outer periphery of the pattern region on a transparent substrate; and a pellicle comprising at least a pellicle film and a pellicle frame, the pellicle frame being mounted on the pellicle frame-mounting region. | 11-04-2010 |
20100328641 | PELLICLE FRAME AND LITHOGRAPHIC PELLICLE - A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has at least one triangular recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and a cross-sectional area of no greater than 20 mm | 12-30-2010 |
20100330466 | PELLICLE FRAME AND LITHOGRAPHIC PELLICLE - A pellicle frame is provided that comprises a pellicle frame bar having a quadrilateral cross-section, wherein an upper edge and a lower edge of a basic quadrilateral forming said cross-section are parallel to each other and each of side edges of the basic quadrilateral has one quadrilateral recess. There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face. | 12-30-2010 |
20100330467 | PELLICLE FRAME AND LITHOGRAPHIC PELLICLE - A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has a curved line-containing recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and an area of no greater than 20 mm | 12-30-2010 |
20110027700 | PELLICLE - A pellicle for lithography is provided that include a pellicle frame, a pellicle film stretched over one end face of the pellicle frame, and a pressure-sensitive adhesive layer provided on the other end face, the pressure-sensitive adhesive layer having a bubble content of 10 to 90 volume %. | 02-03-2011 |
20110081603 | PELLICLE - A pellicle for lithography is provided that includes a pellicle frame, a pellicle film stretched over one end face of the pellicle frame, and a pressure-sensitive adhesion layer provided on the other end face, the pressure-sensitive adhesion layer being formed from a gel composition. | 04-07-2011 |
20110215602 | PELLICLE HANDLING TOOL - This invention discloses a handling tool for handling a pellicle which is used in the lithography carried out in a manufacturing process of semiconductor devices. The said tool comprises a handle, a main shaft connected with a fore-end of the handle to form a T-shaped part, two parallel arms protruding forward from the both ends of the said main shaft orthogonally to form a U-shaped part, and four pellicle frame holders of which two are each provided on the inward side surface of each arm respectively. Furthermore the said arms are designed in a manner such that they are both capable of moving towards and away from each other so as to be able to adjust the arm-to-arm distance, and the said holders are provided so that they can grasp the frame's side surfaces at the four corners of the pellicle frame when the said arms are closed. | 09-08-2011 |