Patent application number | Description | Published |
20080252689 | LIQUID DISCHARGE HEAD AND METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure. | 10-16-2008 |
20090065472 | METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD SUBSTRATE - To provide a manufacturing method, for a liquid discharge head substrate that includes a silicon substrate in which a liquid supply port is formed, includes the steps of: preparing the silicon substrate, on one face of which a mask layer, in which an opening has been formed, is deposited; forming a first recessed portion in the silicon substrate, so that the recessed portion is extended through the opening from the one face of the silicon substrate to the other, reverse face of the silicon substrate; forming a second recessed portion by performing wet etching for the substrate, via the first recessed portion, using the mask layer; and performing dry etching for the silicon substrate in a direction from the second recessed portion to the other face. | 03-12-2009 |
20090065473 | MANUFACTURING METHOD FOR LIQUID DISCHARGE HEAD SUBSTRATE - To provide a manufacturing method, for a liquid discharge head that includes a silicon substrate in which a supply port is formed for supplying a liquid, includes the steps of: providing the silicon substrate, a mask layer provided with an opening that corresponds to the supply port being provided on one face of the silicon substrate; forming a groove in the silicon substrate along the shape of the opening in the mask layer; removing, using sandblasting, silicon of the silicon substrate from the inner wall of the groove in the silicon substrate; and performing, from the one face, anisotropic etching of the silicon substrate that has been sandblasted, and forming the supply port. | 03-12-2009 |
20090065481 | METHOD OF PROCESSING SILICON SUBSTRATE AND METHOD OF MANUFACTURING LIQUID DISCHARGE HEAD - A method of manufacturing a substrate for a liquid discharge head having a silicon substrate in which a liquid supply port is provided includes providing the silicon substrate, an etching mask layer having an opening being formed on a one surface of the silicon substrate, forming a region comprising an amorphous silicon in the interior of the silicon substrate by irradiating the silicon substrate with laser light, forming a recess, which has an opening at a part of a portion exposed from said opening on said one surface, from said one surface of the silicon substrate toward the region, and forming the supply port by performing etching on the silicon substrate in which the recess and the region have been formed from said one surface through the opening of the etching mask layer. | 03-12-2009 |
20090065482 | METHOD OF MANUFACTURING SUBSTRATE FOR LIQUID DISCHARGE HEAD - Provided is a method of manufacturing a substrate for a liquid discharge head, the substrate including a silicon substrate with a liquid supply opening formed therein, the method including: forming one processed portion by laser processing on the substrate from one surface of the substrate; expanding the one processed portion to form a recess portion by performing laser processing at a position which overlaps a part of the one processed portion and does not overlap another part of the one processed portion; and etching from the one surface the substrate with the recess portion formed therein to form the liquid supply opening. | 03-12-2009 |
20090133256 | MANUFACTURING METHOD OF LIQUID EJECTION HEAD - A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern. | 05-28-2009 |
20090136875 | MANUFACTURING METHOD OF LIQUID EJECTION HEAD - A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer. | 05-28-2009 |
20090167812 | LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE SAME - Provided is a method of manufacturing a liquid discharge head including: forming a first pattern for forming the flow path on the substrate; forming a first coating layer which covers the first pattern; forming a hole in the first coating layer, through which the first pattern is exposed; forming a second pattern for forming the flow path on the first coating layer, such that the second pattern contacts with the first pattern through the hole; forming a second coating layer for covering the second pattern; forming the discharge port in the second coating layer; and removing the first pattern and the second pattern to form the flow path. | 07-02-2009 |
20090267997 | INK JET HEAD - An ink jet head includes a substrate having an ink supply port; an ejection outlet for ejecting ink supplied through the supply port; a flow path portion which provides fluid communication between the supply port and the ejection outlet; wherein the flow path portion includes a near portion which is near to the substrate and a remote portion which is remote from the substrate, and a width of the near portion is different from a width of the remote portion in a sectional plane perpendicular to a direction of flow of the ink, and wherein a stepped portion is provided between the near portion and the remote portion. | 10-29-2009 |
20100037460 | LIQUID DISCHARGE HEAD AND MANUFACTURING METHOD OF THE SAME - A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber. | 02-18-2010 |
20100149280 | SUBSTRATE FOR INK EJECTION HEADS, INK EJECTION HEAD, METHOD OFMANUFACTURING SUBSTRATE, AND METHOD OF MANUFACTURING INK EJECTION HEAD - A liquid ejection head according to the present invention includes a heat-generating resistor layer, a first electrode layer, an insulating layer extending over the heat-generating resistive layers and the first electrode layer, and a second electrode layer that has a first portion which extending through the insulating layer and which is electrically connected to the first electrode layer and also has a second portion which is not in contact with the insulating layer. The second portion has a space or a piece of resin disposed between the insulating layer and the second electrode layer. | 06-17-2010 |
20100233630 | METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD - A method for manufacturing a liquid discharge head that includes a flow path wall member which forms a wall of a flow path communicating with a discharge port for discharging a liquid and a substrate which forms the flow path in contact with the flow path wall member includes providing a first layer, which is made of a photosensitive resin on the substrate, for forming a pattern having a shape of the flow path, providing a second layer which is capable of absorbing light within a photosensitive wavelength range of the photosensitive resin and has a shape corresponding to the shape of the flow path, on the first layer so as to come into contact with the first layer, performing patterning of the first layer which includes exposure of the first layer with the light using the second layer as a mask, and forming the pattern from the first layer, providing a cover layer which is made of a photosensitive resin and serves as the flow path wall member so as to cover the second layer and the pattern, forming the discharge port on the cover layer by performing patterning of the cover layer which includes exposure of the cover layer with the light, and forming the flow path by removing the second layer and the pattern. | 09-16-2010 |
20100315467 | LIQUID DISCHARGE HEAD AND MANUFACTURING METHOD THEREOF - A liquid discharge head includes, a substrate, a flow path wall member provided with a wall of a liquid flow path connected to a discharge port for discharging liquid, the flow path being formed by the flow path wall member and one surface of the substrate which are in contact with each other, and a coated resin member made of a cured material of a resin composition provided to cover end surfaces of the substrate, wherein a liquid repellent member having a contact angle of the resin composition larger than that of both the flow path wall member and the one surface is provided to cover at least a part of an intersection line between an outer lateral surface of the flow path wall member and the one surface. | 12-16-2010 |
20110050828 | LIQUID DISCHARGE HEAD AND METHOD FOR MANUFACTURING THE SAME - A liquid discharge head of the present invention comprises a substrate and a flow path wall member provided on the substrate and having a wall of a flow path communicated with a discharge port for discharging liquid, wherein said flow path wall member is provided with a cavity not communicated with said flow path, when viewed in a direction from said discharge port toward said substrate, said cavity has a shape of a character, and said character corresponds to information regarding said liquid discharge head. | 03-03-2011 |
20110141193 | INK DISCHARGE HEAD AND MANUFACTURING METHOD THEREOF - An ink discharge head includes a coating resin layer having a plurality of discharge ports for discharging ink, and ink flow passages which communicate with the plurality of discharge ports, respectively; and a substrate having energy generation elements which generate the energy for discharging ink and provided with the coating resin layer. A crack inducing portion for relieving the stress produced at the interface between the coating resin layer and the substrate is formed at lateral faces of the outer peripheral edge of the coating resin layer. | 06-16-2011 |
20110141197 | SUBSTRATE FOR LIQUID-EJECTION HEAD, LIQUID EJECTION HEAD, METHOD FOR MANUFACTURING SUBSTRATE FOR LIQUID-EJECTION HEAD, AND METHOD FOR MANUFACTURING LIQUID EJECTION HEAD - When an insulating layer is provided in order to protect an energy generating element, there arises a possibility that the layer dissolves in a contacting liquid. Therefore, in order to eject liquid, a first protection layer containing metal is provided on the insulating layer facing a substrate for a liquid-ejection head and a second protection layer containing metal is provided on the surface of a liquid supply port to which a base containing silicon is exposed. | 06-16-2011 |
20110148960 | LIQUID EJECTION HEAD, METHOD FOR EVALUATION OF LIQUID EJECTION HEAD, AND LIQUID EJECTION APPARATUS HAVING LIQUID EJECTION HEAD - The opening area and shape of ejection orifices provided in an ejection orifice member influence the amount of liquid droplet. Therefore, it is necessary to check the opening area and shape of the ejection orifices in detail. For this purpose, in a liquid ejection head having ejection orifices used for ejecting liquid using energy generated by energy generating elements and a dummy ejection orifice having the same shape as the ejection orifices and not used for ejection of liquid, an examination member is provided at a position facing the dummy ejection orifice. | 06-23-2011 |
20110167636 | MANUFACTURING METHOD OF LIQUID DISCHARGE HEAD - There is disclosed a manufacturing method of a liquid discharge head including a substrate in which a first energy generating element and a second energy generating element that generate energy used for discharging liquid are provided, a discharge port member in which a first discharge port discharging the liquid is provided corresponding to the first energy generating element and a second discharge port discharging the liquid is provided corresponding to the second energy generating element, and a flow path wall member having a portion of the liquid flow path wall that communicates with the first discharge port and the second discharge port, in which a distance between the second energy generating element and the second discharge port is larger than that between the first energy generating element and the first discharge port. | 07-14-2011 |
20110195192 | METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD - Provided is a method for manufacturing a liquid discharge head, the liquid discharge head includes a substrate provided on a surface with a first energy generating part and a second energy generating part for generating energy utilized for discharging a liquid; a first discharge port provided corresponding to the first energy generating part so as to face the surface; a second discharge port provided corresponding to the second energy generating part so as to face the surface; a first wall member which has a wall of a first liquid flow path which communicates with the first discharge port; and a second wall member which has a wall of a second liquid flow path which communicates the second discharge port, wherein a distance between the second energy generating part and the second discharge port is greater than a distance between the first energy generating part and the first discharge port. | 08-11-2011 |
20120028384 | METHOD FOR MANUFACTURING A LIQUID-EJECTION HEAD - A method for manufacturing a liquid-ejection head having a plurality of nozzles arranged to eject liquid includes: preparing a substrate having a first layer, a second layer, and a third layer stacked in this order, the second layer more resistant than the third layer to etching by an etching method to be used on the third layer; partially etching the third layer by the etching method to expose the second layer; and removing the exposed second layer at least in part to expose some area on the top surface of the first layer, opening a first one of the nozzles down from the exposed area of the top surface, and opening a second one of the nozzles down from the top surface of the third layer. | 02-02-2012 |
20120044294 | LIQUID EJECTION HEAD THAT PERFORMS RECORDING BY EJECTING LIQUID AND METHOD OF INSPECTING LIQUID EJECTION HEAD - A liquid ejection head includes a member having ejection ports and dummy ejection ports. The ejection ports are provided in correspondence with energy-generating elements used in ejecting liquid. The dummy ejection ports are provided in correspondence with a light-receiving element outputting current whose level changes in accordance with the intensity of light applied thereto. By detecting the level of current that is output from the light-receiving element, the shapes of the ejection ports are estimated. | 02-23-2012 |
20120140000 | INK JET RECORDING HEAD - An ink jet recording head capable of maintaining ink supply capability for a long period of time, including a substrate provided with a plurality of energy generating elements and an ink supply port, and a flow path member which has a plurality of discharge ports, a plurality of ink flow paths in communication with the plurality of discharge ports, and a common liquid chamber in communication with the plurality of ink flow paths, in which the common liquid chamber is divided into a discharge port area and a drainage port area, the ink flows into the discharge port area through a filter, and in the case where a smallest diameter among the diameters of the discharge ports and the diameters of the ink flow paths is denoted by A and a largest diameter of openings of the filter is denoted by B, A≧B is satisfied. | 06-07-2012 |
20130017496 | METHOD FOR MANUFACTURING RECORDING HEADAANM Matsumoto; KeijiAACI Yokohama-shiAACO JPAAGP Matsumoto; Keiji Yokohama-shi JPAANM Asai; KazuhiroAACI Kawasaki-shiAACO JPAAGP Asai; Kazuhiro Kawasaki-shi JPAANM Honda; TetsuroAACI Oita-shiAACO JPAAGP Honda; Tetsuro Oita-shi JPAANM Uohashi; KunihitoAACI Yokohama-shiAACO JPAAGP Uohashi; Kunihito Yokohama-shi JPAANM Koyama; ShujiAACI Kawasaki-shiAACO JPAAGP Koyama; Shuji Kawasaki-shi JPAANM Ohsumi; MasakiAACI Yokosuka-shiAACO JPAAGP Ohsumi; Masaki Yokosuka-shi JP - A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator. | 01-17-2013 |
20130027468 | LIQUID EJECTING HEAD AND METHOD FOR MANUFACTURING THE SAME - A liquid ejecting head including a liquid ejecting port for ejecting a liquid and nozzle layer having a liquid channel communicating with the liquid ejecting port, wherein the nozzle layer has two layers, and a first layer which is a layer at the side of the liquid channel among the two layers has a resin film-formed with an acid and has a smaller static contact angle of water as compared with a second layer which is the other layer. | 01-31-2013 |
20130029056 | METHOD FOR MANUFACTURING LIQUID EJECTING HEAD - A method for manufacturing a liquid ejecting head including an orifice plate having an ejecting orifice and a liquid channel, and a substrate having a liquid ejecting energy generating element and a liquid supply port, the method including: (1) forming a liquid channel mold of a soluble resin dissolved in (6) on the substrate; (2) coating the liquid channel mold with a photosensitive resin layer having a refractive index of n at an exposure wavelength used in (4); (3) forming an antireflective film having a refractive index of √n−0.2 or more to √n+0.2 or less at the exposure wavelength used in (4) on the photosensitive resin layer; (4) exposing and developing the photosensitive resin layer and antireflective film to form the ejecting orifice; (5) forming the liquid supply port on the substrate; and (6) dissolving and removing the liquid channel mold from the liquid supply port. | 01-31-2013 |
20130057619 | LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE SAME - Provided is a method of manufacturing a liquid discharge head including: forming a first pattern for forming the flow path on the substrate; forming a first coating layer which covers the first pattern; forming a hole in the first coating layer, through which the first pattern is exposed; forming a second pattern for forming the flow path on the first coating layer, such that the second pattern contacts with the first pattern through the hole; forming a second coating layer for covering the second pattern; forming the discharge port in the second coating layer; and removing the first pattern and the second pattern to form the flow path. | 03-07-2013 |
20130106017 | PROCESS FOR PRODUCING LIQUID EJECTION HEAD | 05-02-2013 |
20130149648 | METHOD OF MAKING NOZZLE CHIP - The present disclosure provides a method of making a nozzle chip including a step of forming an ejection orifice row by performing irradiation with light rays using a mask having ejection orifice row patterns that form an ejection orifice row pattern of one nozzle chip when the ejection orifice row patterns are connected to each other through a connection portion. The mask is configured such that, with respect to a direction in which ejection orifices of the ejection orifice row are arranged, an absolute value of off-axis telecentricity of one of the light rays with which an ejection orifice that is at the smallest distance from the connection portion is irradiated is less than an absolute value of off-axis telecentricity of one of the light rays with which an ejection orifice that is at the greatest distance from the connection portion is irradiated. | 06-13-2013 |
20130161286 | PROCESSING METHOD FOR AN INK JET HEAD SUBSTRATE - Provided is a processing method for an ink jet head substrate, including: forming a barrier layer on a substrate and forming a seed layer on the barrier layer; forming a resist film on the seed layer and patterning the resist film so that the patterned resist film corresponds to a pad portion for electrically connecting an ink jet head to an outside of the ink jet head; forming the pad portion in an opening of the patterned resist film; removing the resist film; subjecting the substrate to anisotropic etching to form an ink supply port; removing the barrier layer and the seed layer; and performing laser processing from a surface of the substrate. | 06-27-2013 |
20130330673 | PROCESS FOR PRODUCING EJECTION ORIFICE FORMING MEMBER AND LIQUID EJECTION HEAD - A process for producing an ejection orifice forming member including the steps of forming a laminate including a first negative photosensitive resin layer that contains a first photoacid generator, and a second negative photosensitive resin layer that is formed on the first negative photosensitive resin layer and contains a second photoacid generator; forming a first latent image and a second latent image on the first negative photosensitive resin layer and the second negative photosensitive resin layer, respectively, by collectively subjecting the first negative photosensitive resin layer and the second negative photosensitive resin layer to exposure; performing a heat treatment after the exposure; and forming the ejection orifice by a development treatment. The first photoacid generator in the first latent image has an acid diffusion length greater than the acid diffusion length of the second photoacid generator in the second latent image. | 12-12-2013 |
20140068940 | PROCESS FOR PRODUCING LIQUID EJECTION HEAD - The invention provides a process for producing a liquid ejection head having an ejection orifice forming member in which an ejection orifice for ejecting a liquid has been formed, and a substrate having an energy-generating element for generating energy for ejecting a liquid from the ejection orifice on the side of a front surface thereof, the process includes the steps of providing a film having a support, a first layer and a second layer in this order, arranging the film on the substrate in such a manner that the second layer faces the front surface, detaching the support from the film arranged, forming the ejection orifice in the second layer, and removing at least a part of the first layer from the second layer. | 03-13-2014 |
20140083974 | PROCESS FOR PRODUCING LIQUID EJECTION HEAD - A process for producing a liquid ejection head, comprising providing a substrate with an energy-generating element for ejecting liquid and a wiring; forming a flow path wall forming layer containing a negative photosensitive resin on the substrate; exposing a portion to be a flow path wall of the flow path wall forming layer; forming an ejection orifice forming layer containing a negative photosensitive resin on the flow path wall forming layer; applying a material for a water-repellent layer onto the ejection orifice forming layer; drying a solvent contained in the applied material to form the water-repellent layer; exposing another region than a portion to be an ejection orifice of the ejection orifice forming layer and the water-repellent layer; and dissolving and removing the non-exposed portions, wherein the boiling point of the solvent is not more than the drying temperature in the step to form the water-repellent layer. | 03-27-2014 |
20140141379 | METHOD OF PRODUCING INK EJECTION HEAD - Provided is a method of producing an ink ejection head including a substrate, an ink ejection energy-generating element, a flow path-forming member, and an ejection orifice-forming member having an ink ejection orifice, the ink ejection orifice having, on a side open to an outside, a portion whose sectional area is constant and a portion whose sectional area increases from the portion to an ink ejection energy-generating element side, the method including: forming, on the substrate, a first negative photosensitive resist; forming, on the first negative photosensitive resist, a second negative photosensitive resist; partially mixing the first negative photosensitive resist and the second negative photosensitive resist to form a compatible layer; and subjecting the second negative photosensitive resist and the compatible layer to collective exposure and development to form the ink ejection orifice. | 05-22-2014 |