Patent application number | Description | Published |
20130153979 | THREE-DIMENSIONAL NON-VOLATILE MEMORY DEVICE, MEMORY SYSTEM AND METHOD OF MANUFACTURING THE SAME - A three-dimensional (3-D) non-volatile memory device includes channel structures each including channel layers stacked over a substrate and extending in a first direction, wherein the channel layers include well regions, respectively, vertical gates located and spaced from each other between the channel structures, and a well pick-up line contacting on the well regions of the channel layers and extending in a second direction crossing the channel structures. | 06-20-2013 |
20130161783 | SEMICONDUCTOR DEVICE INCLUDING ISOLATION LAYER AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes an isolation trench formed in a semiconductor substrate; an isolation layer filling the isolation trench; and a first epitaxial layer interposed between the isolation layer and the semiconductor substrate, wherein a lattice structure of the semiconductor substrate has an angle difference from a lattice structure of the first epitaxial layer adjacent to the semiconductor substrate. | 06-27-2013 |
20130170303 | NONVOLATILE MEMORY DEVICE, METHOD FOR OPERATING THE SAME, AND METHOD FOR FABRICATING THE SAME - A nonvolatile memory device includes a plurality of channel structures formed over a substrate and including a plurality of interlayer dielectric layers alternately stacked with a plurality of channel layers; first and second vertical gates alternately disposed between the channel structures along one direction crossing with the channel structure and adjoining the plurality of channel layers with a memory layer interposed therebetween; and a pair of first and second word lines disposed over or under the channel structures and extending along the one direction in such a way as to overlap with the first and second vertical gates. The first word line is connected with the first vertical gates and the second word line is connected with the second vertical gates. | 07-04-2013 |
20130307050 | NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME - A nonvolatile memory device includes: a channel layer protruding perpendicular to a surface of a substrate; a tunnel insulation layer formed on a surface of the channel layer; a stack structure, in which a plurality of floating gate electrodes and a plurality of control gate electrodes are alternately formed along the channel layer; and a charge blocking layer interposed between each floating gate electrode, of the plurality of floating gate electrodes, and each control gate electrode of the plurality of control gate electrodes, wherein the floating gate electrode includes a first floating gate electrode between two control gate electrodes and a second floating gate electrode positioned in the lowermost and uppermost parts of the stack structure and having a smaller width in a direction parallel to the substrate than the first floating gate electrode. | 11-21-2013 |
20140160837 | RESISTIVE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A resistive memory device Includes word lines stacked on top of one another, at least one first selection line formed over the word lines, a first channel layer passing through the word lines and the first selection line, a first phase change material layer formed in the first channel layer and overlapping the word lines, and a first insulating layer formed in the first channel layer and overlapping the first selection line. | 06-12-2014 |
20140342519 | THREE-DIMENSIONAL NON-VOLATILE MEMORY DEVICE, MEMORY SYSTEM AND METHOD OF MANUFACTURING THE SAME - A three-dimensional (3-D) non-volatile memory device includes channel structures each including channel layers stacked over a substrate and extending in a first direction, wherein the channel layers include well regions, respectively, vertical gates located and spaced from each other between the channel structures, and a well pick-up line contacting on the well regions of the channel layers and extending in a second direction crossing the channel structures. | 11-20-2014 |
20150214240 | NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME - A nonvolatile memory device includes: a channel layer protruding perpendicular to a surface of a substrate; a tunnel insulation layer formed on a surface of the channel layer; a stack structure, in which a plurality of floating gate electrodes and a plurality of control gate electrodes are alternately formed along the channel layer; and a charge blocking layer interposed between each floating gate electrode, of the plurality of floating gate electrodes, and each control gate electrode of the plurality of control gate electrodes, wherein the floating gate electrode includes a first floating gate electrode between two control gate electrodes and a second floating gate electrode positioned in the lowermost and uppermost parts of the stack structure and having a smaller width in a direction parallel to the substrate than the first floating gate electrode. | 07-30-2015 |
20150221738 | SEMICONDUCTOR DEVICE AND METHOD OF OPERATING THE SAME - A semiconductor device including a channel layer, a gate insulating layer formed on a surface of the channel layer, a cell gate pattern formed along the gate insulating layer, and an Electro Migration (EM) pattern formed in the cell gate pattern, and movable by an electric field formed between the cell gate pattern and the channel layer. | 08-06-2015 |
Patent application number | Description | Published |
20100190082 | Fuel Cell - Disclosed is a fuel cell including, a stack having fuel channels through which fuel flows and air channels through which air flows, the fuel channels and air channels being located at both sides of a reaction film, an actuator disposed to be involved in the air channels, the actuator allowing external air of the stack to affect the air channels, and a skirt extending from the stack with communicating with the air channels. | 07-29-2010 |
20110073290 | HEAT EXCHANGER FOR DEHUMIDIFIER USING LIQUID DESICCANT AND DEHUMIDIFIER USING LIQUID DESICCANT HAVING THE SAME - Disclosed are a heat exchanger for a dehumidifier using a liquid desiccant and a dehumidifier using a liquid desiccant having the same. The heat exchanger for a dehumidifier using a liquid desiccant, comprises: a plurality of plate-type heat exchanger bodies to which a heat transfer medium flows through flow paths formed therein; and a plurality of plates extending between the respective heat exchanger bodies, and inclined with respect to the surfaces of the heat exchanger bodies. | 03-31-2011 |
20120036869 | PORTABLE REFRIGERATOR WITH FUEL CELL SYSTEM AND OPERATING METHOD THEREOF - Disclosed are a portable refrigerator with a fuel cell system and an operating method thereof. The portable refrigerator with a fuel cell system comprises a case having a storage space, a fuel cell stack disposed in the case, a gas tank configured to store gas necessary to operate the fuel cell stack, a fan configured to cool the fuel cell stack and supply air to the fuel stack, a thermoelectric cooling means disposed in the case, and configured to cool the storage space, a battery charged by the fuel cell stack, and configured to supply power to the thermoelectric cooling means, and a controller configured to control the fuel cell stack and the thermoelectric cooling means. | 02-16-2012 |
Patent application number | Description | Published |
20080256153 | RANDOM NUMBER SIGNAL GENERATOR USING PULSE OSCILLATOR - A random number signal generator using pulse oscillators, the generator including: a first pulse oscillator oscillating a first pulse at high speed; a second pulse oscillator oscillating a second pulse; a sampler receiving an output pulse of the first oscillator as data, receiving an output pulse of the second pulse oscillator as a clock signal, and outputting a plurality of output signals; and a digital processor generating a random number signal with a desired size by using the output signals of the sampler. | 10-16-2008 |
20100031052 | LOW POWER HMAC ENCRYPTION APPARATUS - There are provided a low power SHA-1 hash algorithm apparatus having a low power structure and optimized to a trusted platform module (TPM) applied to a mobile trusted computing environment and a low power keyed-hash message authentication code (HMAC) encryption apparatus using the low power SHA-1 hash algorithm apparatus, the HMAC encryption apparatus including: a key padder padding key data for HMAC algorithm; an XOR operator XOR operating the padded key data and a padding constant; a data connector connecting a text to be encrypted, to data obtained by the XOR operating; a data padder padding the connected data; an SHA-1 hash algorithm part performing an SHA-1 hash algorithm on the padded data; a data selector selecting and applying one of a result of the SHA-1 hash algorithm and the text to be encrypted, to the data connector; and a controller controlling operations of the key padder, data connector, and data padder, a sequence of performing a hash algorithm of the SHA-1 hash algorithm part, and storing an operation result to read data required for performing an encryption operation and store data with memory. | 02-04-2010 |
20100104098 | CRYPTOGRAPHIC METHOD AND DEVICE FOR SCHEDULING AND COMPRESSING MESSAGE BASED ON SECURE HASH ALGORITHM - The present invention relates to a secure hash algorithm (SHA)-based message schedule operation method, a message compression operation method, and a cryptographic device performing the same. The present invention sequentially performs the message schedule operation by using an adder. Also, a memory for storing operation data input for the message schedule operation is used from a 17th round to store intermediate data generated by the message schedule operation. Further, the message compression operation is sequentially performed by using one adder. | 04-29-2010 |
20100146296 | APPARATUS AND METHOD FOR HASH CRYPTOGRAPHY - An apparatus for hash cryptography has a hardware structure that is capable of providing both secure hash algorithm (SHA)-1 hash calculation and SHA-256 hash calculation. The apparatus for hash cryptography generates a plurality of first message data corresponding to a plurality of first rounds when the SHA-1 hash calculation is performed and generates a plurality of second message data corresponding to a plurality of second rounds when the SHA-256 hash calculation is performed by using one memory, one first register, one XOR calculator, and one OR calculator, calculates a message digest by the SHA-1 hash calculation by using the plurality of first message data when the SHA-1 hash calculation is performed, and calculates a message digest by the SHA-256 by using the plurality of second message data when the SHA-256 hash calculation is performed. | 06-10-2010 |
20100315194 | SENSOR SIGNAL PROCESSOR APPARATUS - Provided is a sensor signal processor apparatus having good characteristics and providing an easy and simple interface for various sensors. The sensor signal processor apparatus includes a current source, a sensor, a ramp integrator, a comparator, and a controller. The current source generates a constant current according to a preset value, and the sensor outputs a sensor voltage using the current from the current source. The ramp integrator generates and outputs an integral voltage according to an input command, and the comparator compares the sensor voltage of the sensor with the integral voltage of the ramp integrator and outputting a result of the comparison. The controller controls the generating and outputting of the integral voltage of the ramp integrator according to the comparison result of the comparator. | 12-16-2010 |
20110136526 | APPARATUS AND METHOD FOR ALLOCATING MULTICAST CONNECTION INDETIFIER IN WIRELESS ACCESS SYSTEM - A base station for allocating an MCID includes: a first transmitting/receiving unit to exchange data with a content distribution network and to extract header information; a combining unit to construct the data on a frame basis; a second transmitting/receiving unit to exchange the frame with a subscriber terminal receiving the constructed frame and to receive a Multicast and Broadcast Service (MBS) channel connection request message; a first analyzing unit to extract attribute information of the data by analyzing the extracted header information and to analyze the type of the data; a second analyzing unit to extract channel information by analyzing the MBS channel connection request message; and a control unit to exchange an MBS burst reservation message with the content distribution network, to reserve/allocate an MBS burst region, to allocate an MCID to the data, and to manage the registration state of an MBS channel corresponding to the MCID. | 06-09-2011 |
Patent application number | Description | Published |
20100288728 | APPARATUS AND METHOD FOR PROCESSING SUBSTRATE - There are provided an apparatus and method for processing a substrate. By using the apparatus and method, plasma processing can be individually performed on each of edge and rear regions of a substrate in a single chamber. The apparatus includes a chamber providing a reaction space; a stage installed in the chamber; a plasma shielding unit installed opposite to the stage in the chamber; a support unit for supporting a substrate between the stage and the plasma shielding unit; a first supply pipe provided at the stage to supply a reaction or non-reaction gas to one surface of the substrate; and second and third supply pipes provided at the plasma shielding unit, the second supply pipe supplying a reaction gas to the other surface of the substrate, the third supply pipe supplying a non-reaction gas to the other surface. | 11-18-2010 |
20110024399 | PLASMA PROCESSING APPARATUS AND METHOD FOR PLASMA PROCESSING - Provided are a plasma processing apparatus and method. The plasma processing apparatus includes a chamber, an upper electrode, a lower electrode, a substrate support, and a movement member. The upper electrode is disposed at an inner upper portion of the chamber. The lower electrode faces the upper electrode at an inner lower portion of the chamber to support a substrate such that a bevel of the substrate is exposed in a substrate level etching process. The substrate support is disposed between the upper electrode and the lower electrode to support the substrate such that a central region of a bottom surface of the substrate is exposed in a substrate backside etching process. The movement member is configured to move the substrate support to separate the substrate from the substrate support in the substrate backside etching process. | 02-03-2011 |
20110049100 | SUBSTRATE HOLDER, SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD USING THE SAME - Provided are a substrate holder, a substrate supporting apparatus, a substrate processing apparatus, and a substrate processing method. Particularly, there are provided a substrate holder, a substrate supporting apparatus, a substrate processing apparatus, and a substrate processing method that are adapted to improve process efficiency and etch uniformity at the back surface of a substrate. | 03-03-2011 |
Patent application number | Description | Published |
20100260203 | TUNNELING IPv6 PACKET THROUGH IPv4 NETWORK USING A TUNNEL ENTRY BASED ON IPv6 PREFIX AND TUNNELING IPv4 PACKET USING A TUNNEL ENTRY BASED ON IPv4 PREFIX - The present invention relates to tunneling an IPv6 packet through an IPv4 network. In using a tunneling method upon transmitting an IPv6 packet in an IP network, when destination nodes desired to be communicated are located within the same IPv6 prefix network, IPv6 prefix information is added for the management of a tunnel entry. Hence, tunneling information on terminals located within the same IPv6 prefix network can be managed as one tunnel entry. Accordingly, the time consumed when retrieving a tunnel entry can be reduced. | 10-14-2010 |
20110200005 | METHOD OF SUPPORTING MOBILITY USING SECURITY TUNNEL - Enclosed is a method of supporting mobility using a security tunnel. For the movement of a terminal in a local network and the movement of a terminal to an external network, an active tunnel and a standby tunnel are set to provide mobility to the terminal. When the local network moves, mobility for the local network is provided. The stability of a network is guaranteed using security connection. | 08-18-2011 |
20120014350 | APPARATUS AND METHOD OF CONTROLLING SEAMLESS HANDOVER BETWEEN HETEROGENEOUS NETWORKS BASED ON IPV6 OVER IPV4 TUNNELING MECHANISM - The invention relates to a method and an apparatus for controlling seamless handover between heterogeneous networks based on IPv6 over IPv4 tunneling. When IPv6 service is provided using tunneling in an IPv4 based network environment, handover of a mobile terminal between different networks is achieved through switching of an active tunnel and a standby tunnel, and thus handover between different networks is facilitated and data loss is prevented to secure continuity of service provided to the mobile terminal even when the mobile terminal hands over to a heterogeneous network. | 01-19-2012 |
20130128741 | FLOW BASED QOS ROUTER CAPABLE OF REPORTING REAL-TIME STATISTICS - Disclosed is a flow-based QoS router capable of reporting real-time statistics, including: a line card configured to collect flow information by analyzing a flow, classify the collected flow information into flow information not requesting filtering and flow information requesting filtering, and transmit each of the flow information not requesting filtering and the flow information requesting filtering; a system supervisor controller configured to receive the flow information not requesting filtering and the flow information requesting filtering from the line card and store the flow information not requesting filtering and the flow information requesting filtering, and accessed by a manager terminal to monitor the flow information not requesting filtering and the flow information requesting filtering to perform filtering of and QoS application to a predetermined flow; and an application processor configured to command QoS application to the predetermined flow according to a request from the system supervisor controller. | 05-23-2013 |
20130133057 | SYSTEM FOR MANAGING VIRTUAL PRIVATE NETWORK AND METHOD THEREOF - Disclosed are a system for managing virtual private networks (VPNs) includes: terminals configured to transmit user data; a manager configured to transmit information for concealing networks and managing the VPNs; border gateways configured to decrypt the user data and perform a network address translation (NAT) procedure and a filtering procedure on the decrypted user data based on the information; and servers configured to receive the user data subjected to the NAT procedure and the filtering procedure, wherein the filtering procedure is a procedure discarding the user data to be transferred to the servers that are not allowed so as to allow the terminals to access only the allowed servers, the NAT procedure is a procedure changing an Internet protocol (IP) address used in a first network to an IP address used in a second network, and the first network and the second network are different networks. | 05-23-2013 |
20130162758 | VIDEO CONFERENCE CONTROL SYSTEM AND METHOD FOR RESERVING VIDEO CONFERENCE - Disclosed is a video conference control system which includes a video conference reserving device which receives video conference reservation resource data; a multipoint controller which collects resource data for a video conference according to the video conference reservation resource data to generate a resource management policy; and a multipoint processor which provides a plurality of terminals with a resource for a video conference according to the resource management policy. | 06-27-2013 |
20140002584 | METHOD OF SELECTING CONFERENCE PROCESSING DEVICE AND VIDEO CONFERENCE SYSTEM USING THE METHOD | 01-02-2014 |
20150029299 | PARTICIPANT-CENTERED DISTRIBUTED VIDEO CONFERENCING APPARATUS AND METHOD - To conduct video conferencing between a plurality of distributed clients, a distributed controller receives a request from a first distributed client for a packet from a second distributed client selected as the main speaker, and a distributed media processor creates a switching entry for switching packets from the first and second distributed clients, in response to a request from the distributed controller. The distributed controller sends a packet transmission request to the second distributed client, and the distributed media processor receives a packet from the second distributed client and sends the received packet to the first distributed client based on the switching entry. | 01-29-2015 |
20150201442 | METHODS OF ENSURING NETWORK CONTINUITY PERFORMED AT LOCAL GATEWAY, FIXED GATEWAY, AND NETWORK DEVICE - Provided are methods of ensuring network continuity performed at a local gateway, a fixed gateway, and a network device. The method of ensuring network continuity performed at a local gateway includes establishing a tunnel with a fixed gateway serving as a relay between an Internet service server and the local gateway, and performing communication with the fixed gateway through the tunnel. Therefore, even when the type of an uplink signal received by a local gateway changes or the local gateway is in an uplink signal shadow area, a terminal connected to the local gateway can be provided with a seamless Internet service. | 07-16-2015 |
Patent application number | Description | Published |
20150070608 | LIQUID CRYSTAL DISPLAY DEVICE - A liquid crystal display device includes a liquid crystal panel of a normally black type which receives a plurality of scan signals and a common voltage having a voltage level which periodically varies, and a backlight unit which provides backlight to the liquid crystal panel, where the plurality of scan signals sequentially has a scan-on voltage along a first direction, and the backlight has a luminance which is increased or decreased along the first direction. | 03-12-2015 |
20150145843 | DISPLAY APPARATUS - A display apparatus includes: a plurality of pixels coupled to gate lines and to data lines configured to cross the gate lines, a gate driver configured to apply gate signals to the gate lines, a first data driver configured to apply first data voltages to first signal lines, a first DEMUX part configured to selectively couple the first signal lines to the data lines, a second data driver configured to apply second data voltages to second signal lines positioned to correspond to the first signal lines, and a second DEMUX part positioned to face the first DEMUX part such that the pixels are positioned between the first and second DEMUX parts, the second DEMUX part configured to couple the second signal lines to the data lines, which are not coupled to the first signal lines. Each of the first data voltages has a polarity opposite to a polarity of a corresponding second data voltage of the second data voltages. | 05-28-2015 |
20150221273 | LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR DRIVING THE SAME - A liquid crystal display device includes a plurality of pixels arranged substantially in a matrix form, where a part of the plurality of pixels defines a pixel column block, a first scan signal is simultaneously applied to an n-th row pixel and an (n+2)-th row pixel of the pixel column block, a second scan signal, which is applied prior to the first scan signal, is simultaneously applied to an (n+1)-th row pixel and an (n+3)-th row pixel of the pixel column block, a first data voltage is applied to the n-th row pixel and the (n+1)-th row pixel, a second data voltage having a polarity different from a polarity of the first data voltage is applied to the (n+2)-th row pixel and the (n+3)-th row pixel, and the polarities of the first data voltage and the second data voltage are inverted on a frame-by-frame basis. | 08-06-2015 |
Patent application number | Description | Published |
20110159221 | INORGANIC HOLLOW YARNS AND METHOD OF MANUFACTURING THE SAME - Disclosed herein is a method of manufacturing inorganic hollow yarns, such as cermets, oxide-non oxide composites, poorly sinterable non-oxides, and the like, at low costs. The method includes preparing a composition comprising a self-propagating high temperature reactant, a polymer and a dispersant, wet-spinning the composition through a spinneret to form wet-spun yarns, washing and drying the wet-spun yarns to form polymer-self propagating high temperature reactant hollow yarns, and heat-treating the polymer-self propagating high temperature reactant hollow yarns to remove a polymeric component from the polymer-self propagating high temperature reactant hollow yarns while inducing self-propagating high temperature reaction of the self-propagating high temperature reactant to form inorganic hollow yarns. The composition comprises 45˜60 wt % of the self-propagating high temperature reactant, 6˜17 wt % of the polymer, 0.1˜4 wt % of the dispersant, and the balance of an organic solvent. | 06-30-2011 |
20110303290 | METHOD AND APPARATUS FOR MANUFACTURING SILICON SUBSTRATE WITH EXCELLENT SURFACE QUALITY USING INERT GAS BLOWING - The present disclosure provides a method and apparatus for manufacturing a silicon substrate using inert gas blowing during continuous casting to provide excellent productivity and surface quality. The apparatus includes a raw silicon feeder through which raw silicon is fed, a silicon melting unit disposed under the raw silicon feeder and melting the raw silicon to form molten silicon, a molten silicon storage unit storing the molten silicon supplied from the silicon melting unit and tapping the molten silicon to provide a silicon melt having a constant thickness, a transfer unit transferring the silicon melt tapped from the molten silicon storage unit, and a cooling unit cooling the silicon melt transferred by the transfer unit. Here, the cooling unit cools the silicon melt by blowing inert gas at a rate of 0.1˜2.5 Nm | 12-15-2011 |
20110305891 | METHOD AND APPARATUS FOR MANUFACTURING SILICON SUBSTRATE WITH EXCELLENT PRODUCTIVITY AND SURFACE QUALITY USING CONTINUOUS CASTING - The present disclosure provides an apparatus for manufacturing a silicon substrate for solar cells using continuous casting, and a method for manufacturing a silicon substrate using the same. The apparatus includes a raw silicon feeder, a silicon melting unit melting raw silicon to form molten silicon, a molten silicon storage unit storing the molten silicon supplied from the silicon melting unit and tapping the molten silicon to provide a silicon melt having a constant thickness, a transfer board transferring the tapped silicon melt, and a silicon substrate forming unit cooling the silicon melt transferred by the transfer board to form a silicon substrate. The molten silicon stored in the molten silicon storage unit has a surface temperature of 1300˜1500° C., the transfer board is preheated to 700˜1400° C., and a transfer time of the silicon substrate after tapping the molten silicon from the molten silicon storage unit is 0.5˜3.5 seconds. | 12-15-2011 |
20120009120 | THERMAL CRACKING RESISTANT ZEOLITE MEMBRANE AND METHOD OF FABRICATING THE SAME - The present disclosure relates to a thermal cracking resistant zeolite membrane and a method of fabricating the same. The method includes dissolving an alumina-based material, a silica-based material and sodium hydroxide in water to prepare an aqueous solution, stirring the aqueous solution to form a hydrothermal solution, preparing a slurry of zeolite seeds through wet-type vibration pulverization and centrifugal separation of zeolite powder, passing the zeolite seeds through a support by vacuum filtration such that the zeolite seeds can be infiltrated into an inner region of the support ranging from a depth of 3 μm to a depth corresponding to 50% of a total thickness of the support, and immersing the support into the hydrothermal solution for hydrothermal treatment to grow a dense zeolite separation layer not only on the surface of the support but also on the inner region thereof. The zeolite membrane prevents the occurrence of thermal cracking on the zeolite separation layer, thereby providing good thermal stability and separation performance during heating and at a target processing temperature. | 01-12-2012 |
20120025127 | Aerogel Mat and Manufacturing Method Thereof - The present invention relates to a method of manufacturing a mat containing aerogel and to a mat manufactured using this method. A method of manufacturing a mat containing silica aerogel according to an aspect of the invention includes: (S1) producing a wet gel by mixing water glass and alcohol in a reactor; (S2) modifying a surface of the wet gel by adding an organic silane compound and an organic solvent to the reactor and mixing; (S3) separating a upper liquid from a solution in the reactor and impregnating a fibrous matrix with the upper liquid; and (S4) drying the fibrous matrix impregnated with the upper liquid. According to an aspect of the invention, a mat containing silica aerogel can be manufactured using only water glass as raw material, even when applying the drying process in an ambient environment, without using expensive materials or supercritical apparatus. | 02-02-2012 |
20120288418 | REUSABLE DUAL CRUCIBLE FOR SILICON MELTING AND MANUFACTURING APPARATUS OF SILICON SLIM PLATE INCLUDING THE SAME - A dual crucible for silicon melting and a manufacturing apparatus of a silicon thin film including the same are disclosed. The dual crucible for the silicon melting includes a graphite crucible formed in a container shape with an open top and a bottom having an outlet part formed therein to exhaust silicon melt, the graphite crucible comprising a slope part configured to connect the outlet part and an inner wall with each other, with a predetermined slope with respect to a top surface of the outlet part, and a quartz crucible insertedly coupled to the graphite crucible, with being formed in a corresponding shape to the graphite crucible, the quartz crucible having a silicon base material charged therein. | 11-15-2012 |
20130067959 | A GRAPHITE CRUCIBLE FOR SILICON ELECTROMAGNETIC INDUCTION HEATING AND APPARATUS FOR SILICON MELTING AND REFINING USING THE GRAPHITE CRUCIBLE - The present disclosure provides a graphite crucible induction-based silicon melting. The graphite crucible comprises a cylindrical body having a plurality of slits which is formed through an outer wall and an inner wall of the cylindrical body and a bottom part connected with an edge of the cylindrical body to seal an end of the cylindrical body. | 03-21-2013 |
20130106008 | Method of Preparing Silica Aerogel Granules | 05-02-2013 |
20130263777 | APPARATUS FOR MANUFACTURING SILICON SUBSTRATE - There is disclosed an apparatus for manufacturing a silicon substrate including a crucible part, a molding part extended from an outlet of the crucible part, the molding part comprising a molding space where a silicon substrate is formed, and a dummy bar inserted in the molding space from a predetermined portion of the molding part, wherein the dummy bar is formed of a single-crystalline material. | 10-10-2013 |
20130277882 | INORGANIC HOLLOW YARNS AND METHOD OF MANUFACTURING THE SAME - Disclosed herein is a method of manufacturing inorganic hollow yarns, such as cermets, oxide-non oxide composites, poorly sinterable non-oxides, and the like, at low costs. The method includes preparing a composition comprising a self-propagating high temperature reactant, a polymer and a dispersant, wet-spinning the composition through a spinneret to form wet-spun yarns, washing and drying the wet-spun yarns to form polymer-self propagating high temperature reactant hollow yarns, and heat-treating the polymer-self propagating high temperature reactant hollow yarns to remove a polymeric component from the polymer-self propagating high temperature reactant hollow yarns while inducing self-propagating high temperature reaction of the self-propagating high temperature reactant to form inorganic hollow yarns. The composition comprises 45˜60 wt % of the self-propagating high temperature reactant, 6˜17 wt % of the polymer, 0.1˜4 wt % of the dispersant, and the balance of an organic solvent. | 10-24-2013 |
20130291595 | APPARATUS FOR MANUFACTURING HIGH PURITY POLYSILICON USING ELECTRON-BEAM MELTING AND METHOD OF MANUFACTURING HIGH PURITY POLYSILICON USING THE SAME - Apparatus and method for manufacturing high purity polysilicon. The apparatus includes a vacuum chamber maintaining a vacuum atmosphere; first and second electron guns disposed at an upper side of the vacuum chamber to irradiate electron beams into the vacuum chamber; a silicon melting unit placed on a first electron beam-irradiating region corresponding to the first electron gun and in which powdery raw silicon is placed and melted by the first electron beam; and a unidirectional solidification unit placed on a second electron beam-irradiating region corresponding to the second electron gun and connected to the silicon melting unit via a runner. The unidirectional solidification unit is formed at a lower part thereof with a cooling channel and is provided therein with a start block driven in a downward direction. | 11-07-2013 |
20130291596 | APPARATUS FOR MANUFACTURING POLYSILICON BASED ELECTRON-BEAM MELTING USING DUMMY BAR AND METHOD OF MANUFACTURING POLYSILICON USING THE SAME - Methods and apparatus for manufacturing high purity polysilicon. The apparatus includes a vacuum chamber; first and second electron guns disposed at an upper side of the vacuum chamber to irradiate electron beams into the vacuum chamber; a silicon melting unit which is placed on a first electron beam-irradiating region corresponding to the first electron gun and to which powdery raw silicon is fed and melted by the first electron beam; and a unidirectional solidification unit placed on a second electron beam-irradiating region corresponding to the second electron gun. The unidirectional solidification unit is provided therein with a start block driven in a downward direction to transfer molten silicon in the downward direction and is formed at a lower side thereof with a cooling channel. The start block includes a dummy bar having a silicon button joined to an upper portion of the dummy bar. | 11-07-2013 |
20130299121 | POLYMER COMPOSITE MATERIALS FOR BUILDING AIR CONDITIONING OR DEHUMIDIFICATION AND PREPARATION METHOD THEREOF - The present disclosure relates to the preparation of a polymer composite material for building air conditioning or dehumidification having superior water-adsorbing ability, durability and antibacterial properties by electro spinning. Specifically, the disclosed method for preparing a polymer composite material for building air conditioning or dehumidification includes: (S1) adding a crosslinking agent or a crosslinking agent and a porous filler for conferring durability and antibacterial properties into a hydrophilic polymer solution antibacterial properties to prepare a polymer composite material solution; (S2) electrospinning the polymer composite material solution to prepare a nanofiber sheet; and (S3) crosslinking the nanofiber sheet by heat-treatment. Since the disclosed polymer composite material for building air conditioning or dehumidification has superior antibacterial properties and excellent water-adsorbing ability and durability, the polymer composite material can perform dehumidification when used for air conditioning of a building, thereby reducing air conditioning load and improving energy efficiency. Further, through dehumidifying cooling, the high-efficiency polymer composite material can remove moisture from the hot and humid air in the summer, thus reducing air conditioning load by decreasing latent heat load and saving energy. In addition, the polymer composite material can be used in moisture-sensitive production processes, industrial applications requiring moisture control or protection from damage or corrosion by moisture to reduce moisture and provide dry air. | 11-14-2013 |
20150090406 | METHOD FOR DISASSEMBLING PHOTOVOLTAIC MODULE - Provided is a method of disassembling a photovoltaic module. The method includes: applying heat to the photovoltaic module in an oxidizing atmosphere; removing an insulating protective layer wrapping a photovoltaic cell of the photovoltaic module; and obtaining the photovoltaic cell of the photovoltaic module. | 04-02-2015 |
Patent application number | Description | Published |
20100207855 | CIRCUIT BOARD AND DISPLAY PANEL ASSEMBLY HAVING THE SAME - A circuit board includes a capacitor and a circuit substrate. The capacitor is mounted on the first insulation layer, and a first conductive layer is disposed between the first and second insulation layers. A plurality of first holes is disposed extended through the first conductive layer, and has a mesh pattern to decrease the spread of vibration generated by the capacitor. A third insulation layer is disposed in the first holes, and the third and first insulation layers may include the same material. | 08-19-2010 |
20140201762 | EVENT HANDLING SYSTEM AND METHOD - An event handling system includes a standard operating procedure (SOP) engine configured to process an SOP defined for an event and transmit the event, and an event publisher configured to transmit the event transmitted from the SOP engine to a target according to a type and a connection state of the target. | 07-17-2014 |
20140237397 | DISPLAY APPARATUS AND CONTROL METHOD THEREOF - A display apparatus and a control method thereof are provided. The display apparatus includes an image processor configured to process an image signal, a display unit configured to display an image based on the image signal, a storage section configured to store Graphic User Interface (GUI) information about a GUI to be displayed in a mobile device for controlling the display apparatus, a web server configured to communicate with a web browser of the mobile device, and a controller configured to transmit the stored GUI information to the mobile device if the web browser of the mobile device requests the GUI information through the web server, and to operatively control the display apparatus in accordance with control information received from the mobile device. | 08-21-2014 |
20150127675 | DISPLAY APPARATUS AND METHOD OF CONTROLLING THE SAME - A display apparatus for and a method of providing to users additional information associated with a broadcasting signal that is being output via the display apparatus are provided. The display apparatus includes a communication unit configured to perform data communication, and a control unit configured to acquire a keyword from content being reproduced by the display apparatus, to acquire user preference information corresponding to a mobile terminal, to acquire a search result corresponding to the acquired keyword, to produce additional information based on the acquired search result and the acquired user preference information, and to provide the additional information to the mobile terminal via the communication unit. | 05-07-2015 |
Patent application number | Description | Published |
20100077629 | Liquid storage container and clothes dryer having the same - Disclosed are a liquid storage container and a clothes dryer having the same. The liquid storage container comprises: a reservoir installed at a clothes dryer, and configured to store liquid therein; a floating member floating on the liquid, and disposed on the reservoir with a rotation angle variable according to level change of the liquid inside the reservoir; and display means configured to display information corresponding to the rotation angle of the floating member. The rotation angle of the floating member may vary according to a remaining amount of the liquid. And, the remaining amount of the liquid may be informed to a user through the display means. Accordingly, the user may easily check the remaining amount of the liquid without checking the inside of the liquid storage container. | 04-01-2010 |
20100077630 | Liquid storage container and clothes dryer having the same - Disclosed are a liquid storage container and a clothes dryer having the same. The clothes dryer comprises: a body; a front supporter which forms a part of a front surface of the body, and configured to fix the drum; a door installed at the front supporter; a liquid storage container comprising a reservoir configured to store liquid therein, and an inlet unit through which liquid is introduced into the reservoir; and a remaining amount indicator configured to indicate a remaining amount of the liquid stored in the reservoir, wherein the remaining amount indicator is installed on a rear surface of the front supporter, and is exposed to the front surface of the body. | 04-01-2010 |
20100077631 | Liquid storage container and clothes dryer having the same - Disclosed is a liquid storage container and a clothes dryer having the same. The liquid storage container comprises: a reservoir installed at the clothes dryer, and configured to store liquid therein; a light transmitting window disposed above the reservoir; and a level indicator configured to be partially or wholly immersed into the liquid stored in the reservoir according to a level of the liquid. According to the amount of the liquid stored in the reservoir, an immersed degree of the level indicator into the liquid may become different. Accordingly, a user may easily and rapidly check a remaining amount of the liquid with his or her naked eyes. | 04-01-2010 |
20100077633 | Laundry dryer having fragrance storage and supply assembly - A drum rotatably disposed within a cabinet, a door coupled to a front of the cabinet, a front supporter to support a side of the drum, and a fragrance storage and supply assembly disposed on the front supporter and comprising a receiving part that is rotatably installed within the cabinet. A cabinet defining an outer appearance of the laundry dryer, a drum rotatably installed in the cabinet, a door to open and close a laundry passage formed by an opening in the cabinet that is configured for passage of laundry into and out of the drum, a fragrance storage and supply assembly comprising a receiving assembly to receive liquid fragrance, a storage chamber, remote from the receiving part, to store the liquid fragrance, a mount fixed to the cabinet, a hinge, rotatably joining the mount and the receiving part, wherein the receiving part rotates about the hinge from a space within an interior of the laundry dryer to a space exterior to the laundry dryer. The laundry dryer further comprises a storage chamber to store liquid fragrance. Additionally, the storage chamber is provided with a level detector for detecting an amount of fragrance solution remaining in the storage chamber. | 04-01-2010 |
Patent application number | Description | Published |
20100149352 | SHAKE CORRECTING APPARATUS AND METHOD THEREOF IN DIGITAL PHOTOGRAPHING APPARATUS - Provided are a method and apparatus for correcting a shake of a digital photographing apparatus. The method includes sensing a shake via an inertial sensor comprised in the digital photographing apparatus, and calculating a first shake value; comparing the first shake value with a predetermined threshold value and, when the first shake value is greater than the predetermined threshold value, driving an OIS (optical image stabilizer); detecting an edge component of an image of a target subject, wherein the image is input via an imaging device of the digital photographing apparatus, and calculating a second shake value from a difference value between edge values of sequential frames of the input image; and comparing the second shake value with the first shake value, and according to a result of the comparing, controlling a shake of the target subject to be corrected. | 06-17-2010 |
20100149353 | PHOTOGRAPHING CONTROL METHOD AND APPARATUS ACCORDING TO MOTION OF DIGITAL PHOTOGRAPHING APPARATUS - Provided are a photographing control method and apparatus according to motion of a digital photographing apparatus. The photographing control method may prevent inconvenience when a subject is photographed while changing a viewing angle by using an additional zoom button, by sensing predetermined motion via a motion sensor comprised in the digital photographing apparatus and calculating a first motion value; comparing the calculated first motion value to predetermined threshold values; and controlling a zoom lens to be driven in a predetermined direction according to a result of the comparing. | 06-17-2010 |
20110115927 | DIGITAL PHOTOGRAPHING APPARATUS AND METHOD OF CONTROLLING THE SAME - A digital photographing apparatus includes a handshake correction module and a method of controlling the digital photographing apparatus. As a first image and a second image that is input by minutely adjusting a photographing direction from the first image are captured by using a pre-mounted handshake correction module, the second image that is accurately continuous from the first image may be obtained. As such, highly reliable panorama shooting may be enabled and an ultra-wide-angle image having a viewing angle greater than that of a currently mounted lens may be obtained without exchanging the currently mounted lens for an expensive lens used in wide-angle shooting. | 05-19-2011 |
20130258124 | PHOTOGRAPHING CONTROL METHOD AND APPARATUS ACCORDING TO MOTION OF DIGITAL PHOTOGRAPHING APPARATUS - Provided are a photographing control method and apparatus according to motion of a digital photographing apparatus. The photographing control method may prevent inconvenience when a subject is photographed while changing a viewing angle by using an additional zoom button, by sensing predetermined motion via a motion sensor comprised in the digital photographing apparatus and calculating a first motion value; comparing the calculated first motion value to predetermined threshold values; and controlling a zoom lens to be driven in a predetermined direction according to a result of the comparing. | 10-03-2013 |
Patent application number | Description | Published |
20090295989 | METHOD AND APPARATUS FOR TRANSMITTING CONTENT, AND METHOD AND APPARATUS FOR RECEIVING CONTENT - Provided are method and apparatus for transmitting/receiving broadcasting content. The method of transmitting broadcasting content includes generating metadata including at least one of information about an acquisition route of at least one additional content related to the broadcasting content and information about a target device to use the at least one additional content and transmitting the metadata and a broadcasting signal including the broadcasting content. | 12-03-2009 |
20100088732 | METHOD AND APPARATUS FOR USING SERVICE BASED ON OBJECTS FOR IMPLEMENTING DIFFERENT FUNCTIONS OF SERVICE - Provided are a method and apparatus for generating a plurality of objects for implementing different functions related to a service provided via a home network; and using the service based on the plurality of objects. | 04-08-2010 |
20100118663 | METHOD AND APPARATUS FOR PROCESSING REQUEST FROM APPLICATION IN HOME NETWORK - A method is used by an Open Cable-Digital Media Player (OC-DMP) to process a request of an application with respect to content of an Open Cable-Digital Media Server (OC-DMS). The method includes determining validity of the request based on metadata of the content, and selectively transmitting the request to the OC-DMS based on a result of the determination. | 05-13-2010 |
20100169413 | METHOD AND APPARATUS FOR PROVIDING DEVICE WITH REMOTE APPLICATION IN HOME NETWORK - Provided is a method and apparatus for providing a client with an application received through a data broadcast channel as a type of content of a content directory service (CDS) or a Universal Plug and Play (UPnP) service newly defined to provide applications by a server. | 07-01-2010 |
20100174950 | METHOD AND SECURE MODULE FOR COMMUNICATION WITH HOST, METHOD AND APPARATUS FOR COMMUNICATION WITH SECURE MODULE, METHOD AND APPARATUS FOR CONTROLLING SECURE MODULE - A method of communicating with a host in a security module providing information necessary for decrypting encrypted broadcast data received by the host, includes if an event occurs, characterizing the event as an event that a user of the host is to be notified about with regard to the decryption of the encrypted broadcast data, generating a user notification message including information about the event that occurred; and transmitting the user notification message to the host. | 07-08-2010 |
20100185765 | CONTENT INFORMATION PROVIDING AND REPRODUCING METHOD AND APPARATUS - Provided are a content information providing method and apparatus. Application information about application data is obtained from broadcasting data. An application resource is generated based on the application information. The application resource is added to a content item. Link information between the application resource and an audio/video (AV) resource is added to attribute information of the content item. The content information including the attribute information is provided to a content reproducing apparatus. | 07-22-2010 |
20150256926 | MOBILE DEVICE AND METHOD FOR CONTROLLING SPEAKER - A mobile device including an audio processor processing audio data and generating an audio signal, an outputter outputting the audio signal, a communicator that may be connected to an AP (Access Point) network, and a controller, in response to a predetermined event occurring with the audio signal being output, transmitting the audio signal to an external speaker included in the AP network through the communicator and controlling the external speaker to output the audio signal. | 09-10-2015 |
Patent application number | Description | Published |
20090174888 | IMAGE FORMING APPARATUS AND CONTROL METHOD THEREOF - An image forming apparatus includes: an image forming part which picks up a recording medium at a predetermined pickup timing and forms an image at a predetermined printing speed; and a controller which accelerates the timing for picking up the recording medium in advance of the predetermined pickup timing, and which lowers the printing speed so as to allow the printing operation to take place at a lower fusing temperature during warming up from a cold start in order to shorten the first print output time (FPOT). | 07-09-2009 |
20140105629 | IMAGE FORMING APPARATUS AND CONTROL METHOD THEREOF - An image forming apparatus includes: an image forming part which picks up a recording medium at a predetermined pickup timing and forms an image at a predetermined printing speed; and a controller which accelerates the timing for picking up the recording medium in advance of the predetermined pickup timing, and which lowers the printing speed so as to allow the printing operation to take place at a lower fusing temperature during warming up from a cold start in order to shorten the first print output time (FPOT). | 04-17-2014 |
20150063872 | IMAGE FORMING APPARATUS - An image forming apparatus, toner container, and method are provided. The image forming apparatus includes a main body, and a toner container configured to be installed in the main body. The toner container is installed in a toner container installing groove that is formed in an upper housing part of the main body. | 03-05-2015 |
20150063874 | IMAGE FORMING APPARATUS - An image forming apparatus is provided, which includes an image forming apparatus main body, and first and second toner containers mounted in the image forming apparatus main body, wherein the first and second toner containers are respectively mounted in first and second toner container mounting grooves that are concavely formed from a housing portion of the image forming apparatus main body. | 03-05-2015 |
Patent application number | Description | Published |
20100015872 | METHOD OF PREPARING FLAME-RETARDANT POLYESTER FIBER AND FLAME-RETARDANT POLYESTER FIBER - The present invention provides a method of preparing a flame retardant polyester fiber that makes it possible to prepare a flame retardant polyester fiber having excellent shape stability while preventing a lumping phenomenon and reducing powder generation and discoloration during the preparing process of the flame retardant polyester fiber, and a flame retardant polyester fiber prepared therefrom. | 01-21-2010 |
20100261868 | INDUSTRIAL HIGH TENACITY POLYESTER FIBER WITH SUPERIOR CREEP PROPERTIES AND THE MANUFACTURE THEREOF - The present invention relates to an industrial high tenacity polyester fiber with superior creep properties and a method of preparing the same, and more particularly to an industrial polyester fiber having a mono-filament fineness of 5 to 15 dpf, an intrinsic viscosity of 0.8 to 1.25 dl/g, and a creep change rate of 4.7% or less, wherein the creep change rate is measured at 160° C. for 24 hours while giving a load corresponding to a strain of 3% after heat-treating the fiber at 220° C. for 2 minutes while giving a load of 1 g/d, and the load corresponding to the strain of 3% is based on a value obtained from a load-strain curve of the fiber before heat-treatment, and a method of preparing the same. | 10-14-2010 |
20120165496 | INDUSTRIAL HIGH TENACITY POLYESTER FIBER WITH SUPERIOR CREEP PROPERTIES AND THE MANUFACTURE THEREOF - Disclosed are an industrial high tenacity polyester fiber with superior creep properties and a method of preparing the fiber. The industrial polyester fiber has a mono-filament fineness of 5 to 15 dpf, an intrinsic viscosity of 0.8 to 1.25 dl/g, and a creep change rate of 4.7% or less, wherein the creep change rate is measured at 160° C. for 24 hours while giving a load corresponding to a strain of 3% after heat-treating the fiber at 220° C. for 2 minutes while giving a load of 1 g/d, and the load corresponding to the strain of 3% is based on a value obtained from a load-strain curve of the fiber before heat-treatment. | 06-28-2012 |
20130143027 | METHOD OF PREPARING FLAME-RETARDANT POLYESTER FIBER AND FLAME-RETARDANT POLYESTER FIBER - The present invention provides a method of preparing a flame retardant polyester fiber that makes it possible to prepare a flame retardant polyester fiber having excellent shape stability while preventing a lumping phenomonon and reducing powder generation and discoloration during the preparing process of the flame retardant polyester fiber, and a flame retardant polyester fiber prepared therefrom. | 06-06-2013 |
Patent application number | Description | Published |
20090056979 | Printed circuit board, method of manufacturing the printed circuit board, memory module having the printed circuit board and method of manufacturing the memory module - A PCB can include an insulating member, a cooling member, and a circuit pattern. The cooling member can be built into the insulating member. The cooling member can have a cooling passageway through which a cooling fluid can flow. The circuit pattern can be formed on the insulating member. Thus, high heat in the circuit pattern can be rapidly dissipated by the cooling fluid flowing through the cooling passageway. | 03-05-2009 |
20130167581 | DEHUMIDIFIER FOR A COMPRESSOR, 1-STAGE COMPRESSING-ABSORBING TYPE HEAT PUMP SYSTEM AND 2-STAGE COMPRESSING-ABSORBING TYPE HEAT PUMP SYSTEM - A dehumidifier for a compressor, including: a plurality of dehumidifying members that absorb moisture; and a flow passage controlling valve module that enables a low-temperature vapor refrigerant to alternately flow into the plurality of dehumidifying members and enables the low-temperature refrigerant to flow into a compressor in a state where moisture contained in the low-temperature refrigerant is absorbed and is removed, enables a high-temperature vapor refrigerant ejected from the compressor to alternately flow into the dehumidifying members and regenerates the dehumidifying members. Thus, since a liquid-state absorbent contained in a refrigerant flowing into the compressor is removed by the dehumidifier, damage caused by liquid compression and corrosion of the compressor can be reduced. In addition, the structure of the dehumidifier is simple, and an additional external heating source is not required. | 07-04-2013 |
20130299126 | THERMAL ENERGY NETWORK SYSTEM - Provided is a thermal energy network system including: a first thermal station that stores first thermal energy using a first heat source and supplies the first thermal energy to a first demand source used for residence or commerce; and a second thermal station that stores second thermal energy using a second heat source and supplies the second thermal energy to a second demand source used for industry, wherein the first thermal station and the second thermal station manage a base load of a thermal energy network, and the first thermal energy and the second thermal energy are transferred between the first thermal station and the second thermal station as needed. | 11-14-2013 |
20140041406 | BROADBAND HEAT PUMP SYSTEM - Provided is a broadband heat pump system including: a heat pump module including a plurality of heat pumps that supply hot water with different levels of temperature; a heat source supply module that introduces a heat source from one heat source or selectively introduces a heat source from one or a plurality of heat sources among heat sources with different levels of temperature so as to produce a heat source with a desired temperature; and a controller that controls the heat pump module and the heat source supply module to select one from the plurality of heat pumps to be appropriate to a temperature of hot water requested by a demand source and to receive a heat source with a necessary temperature from the heat source supply module so that the selected heat pump is able to supply hot water with the requested temperature. | 02-13-2014 |
20140192562 | SINGLE STAGE AC/DC CONVERTER - A single stage AC/DC converter includes a rectifier to rectify an input AC voltage and output the input AC voltage from first and second input nodes to first and second output nodes, an input capacitor connected between the first and second output nodes to store a rectified voltage and output a constant voltage, a transformer unit to transform the voltage received from the input capacitor, and transmit the voltage to a secondary side, and a power factor correction circuit to correct a power factor of a circuit. The power factor correction circuit includes a first auxiliary diode having one terminal connected with the first input node, a second auxiliary diode having one terminal connected with the second input node, and an auxiliary winding inductor connected among opposite terminals of the first and second auxiliary diodes and the first output node or the second output node. | 07-10-2014 |
20150204590 | VARIABLE VOLUME RECEIVER FOR REFRIGERATING CYCLE, REFRIGERATING CYCLE COMPRISING THE VARIABLE RECEIVER, AND METHOD FOR CONTROLLING THE REFRIGERATING CYCLE - A variable volume receiver for a refrigerating cycle, according to the present invention, can adjust the capacity of storing a refrigerant according to changes in driving conditions, such as outside air temperature or a load-side temperature, and can secure a proper degree of sub-cooling even when the driving conditions change, thereby providing the advantage of enabling optimum driving regardless of changes in the outside air temperature or the load-side temperature. | 07-23-2015 |
Patent application number | Description | Published |
20140251540 | SUBSTRATE SUPPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME - Provided is a substrate processing apparatus including a chamber provided with a reaction space and formed with an exhaustion opening in a center of a bottom, a substrate supporter provided in the chamber and supporting a substrate, a gas injection assembly provided to be opposite to the substrate supporter, injecting a processing gas, and generating plasma thereof, and an exhauster connected to the exhaustion opening and provided below the chamber to exhaust an inside of the chamber, in which the substrate supporter includes a substrate support supporting the substrate and a plurality of supporting posts supporting an outside of the substrate support disposing the exhausting opening therebetween. | 09-11-2014 |
20140283746 | LINER ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME - Provided are a liner assembly and a substrate processing apparatus including the liner assembly. The liner assembly includes a side liner, an intermediate liner, and a lower liner. The side liner has a cylindrical shape with upper and lower portions opened. The intermediate liner is disposed under the side liner and has a plurality of first holes passing therethrough in a vertical direction. The lower liner is disposed under the intermediate liner. Here, the plurality of first holes are formed in different sizes and numbers in a plurality of regions. | 09-25-2014 |
20150348755 | GAS DISTRIBUTION APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME - Provided is a gas distribution apparatus including first and second regions vertically separated therein. In the first region, a first process gas supplied to the first region from the outside is injected after being excited into a plasma state, and in the second region, a second process gas supplied after being excited into a plasma state from the outside is injected after being accommodated. | 12-03-2015 |