Patent application number | Description | Published |
20100035437 | SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - Substrate processing uniformity is improved in the surfaces of wafers and between the wafers. A substrate processing apparatus includes a substrate holder holding horizontally oriented and stacked substrates, an inner tube accommodating the substrate holder, an outer tube enclosing the inner tube, a gas nozzle installed in the inner tube, a gas injection hole formed in the gas nozzle, a source gas supply unit supplying source gas to an inside of the inner tube through the gas nozzle, a gas exhaust outlet formed in a sidewall of the inner tube, an exhaust unit exhausting a gap between the outer tube and the inner tube to create a gas stream inside the inner tube from the gas injection hole to the gas exhaust outlet, and a gas penetration preventing cylinder enclosing a region of the substrate holder lower than a region of the substrate holder where the substrates are stacked. | 02-11-2010 |
20100083898 | Substrate processing apparatus - There are provided an inner tube in which a substrate is stored; an outer tube surrounding the inner tube; a gas nozzle disposed in the inner tube; a gas ejection hole opened on the gas nozzle; a gas supply unit supplying gas into the inner tube through the gas nozzle; a gas exhausts hole opened on the side wall of the inner tube; and an exhaust unit exhausting a space between the outer tube and the inner tube and generating a gas flow in the inner tube toward the gas exhaust hole from the gas ejection hole, wherein the side wall of the inner tube is constituted, so that a distance between an outer edge of the substrate and the gas exhaust hole is set to be longer than a distance between the outer edge of the substrate and the gas ejection hole. | 04-08-2010 |
20100087069 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS - The coverage characteristics or loading effect of an oxide film can be improved without having to increase the supply amount or time of an oxidant. There is provided method of manufacturing a semiconductor device. The method comprises loading at least one substrate to a processing chamber; forming an oxide film on the substrate by alternately supplying a first reaction material and a second reaction material containing oxygen atoms to the processing chamber while heating the substrate; and unloading the substrate from the processing chamber, wherein the forming of the oxide film is performed by keeping the substrate at a temperature equal to or lower than a self-decomposition temperature of the first reaction material and irradiating ultraviolet light to the second reaction material. | 04-08-2010 |
20100212593 | SUBSTRATE PROCESSING APPARATUS - To inhibit a diffusion of particles into a processing chamber and reduce a cost required for exchanging a gas filter. A substrate processing apparatus comprises: a processing chamber processing substrates; a gas supply part supplying processing gas into the processing chamber; wherein the gas supply part has a gas supply nozzle disposed in the processing chamber; a filter removing impurities contained in the processing gas; and a gas supply port opened in the gas supply nozzle, for supplying into the processing chamber the processing gas from which impurities are removed by the filter. | 08-26-2010 |
20100218724 | SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus. The apparatus comprises: a process chamber configured to accommodate substrates which are horizontally oriented and stacked in multiple stages and process the substrates; a process gas supply unit configured to supply a process gas to the process chamber; an inert gas supply unit configured to supply an inert gas to the process chamber; and an exhaust unit configured to exhaust the process chamber. The process gas supply unit comprises a process gas supply nozzle. The inert gas supply unit comprises inert gas supply nozzles disposed at both sides of the process gas supply nozzle. Each of the inert gas supply nozzles comprises at least one first inert gas ejection hole formed in a region where the substrates are stacked and at least one second inert gas ejection hole formed in a region where the substrates are not stacked. | 09-02-2010 |
Patent application number | Description | Published |
20080308739 | RADIATION DETECTING APPARATUS AND RADIOGRAPHING SYSTEM - A radiation detecting apparatus includes: a sensor panel having a substrate and a photoelectric conversion element array arranged on the substrate; a scintillator layer arranged on one surface side of the sensor panel; and a light generator arranged on the sensor panel at the other side in opposition to the one side on which the scintillator layer is arranged, in corresponding to an area in which the photoelectric conversion element array is arranged. The light generator includes a light transmitting electrode layer, a rear electrode layer and a light emitting layer arranged between the light transmitting electrode layer and the rear electrode. The light emitting layer according to a first aspect is formed from light emitting substance, a binder and a black pigment. The light emitting layer according to a second aspect contains a first pigment or dye absorbing a light of the same wavelength of a maximum light emission from the scintillator layer, and a second pigment or dye different from the first pigment or dye. | 12-18-2008 |
20090200479 | RADIATION DETECTION APPARATUS AND SCINTILLATOR PANEL - A radiation detection apparatus includes an optical detector disposed on a substrate and having a plurality of photoelectric conversion elements which convert light into an electrical signal, and a scintillator layer disposed on the optical detector and having a columnar crystal structure which converts radiation into light, wherein the concentration of an activator of the scintillator layer is higher at the radiation-incident side opposite the optical detector and is lower at the optical detector side. The scintillator panel includes the substrate and the scintillator layer disposed on the substrate, wherein the concentration of the activator of the scintillator layer is higher at the radiation-incident side and is lower at the light-emission side. | 08-13-2009 |
20090283685 | RADIATION DETECTION APPARATUS AND RADIATION IMAGING SYSTEM - There is provided a radiation detection apparatus including a sensor panel including a photoelectric conversion unit with a plurality of photoelectric conversion elements over a substrate, a wavelength converter, disposed over the photoelectric conversion unit of the sensor panel, for converting a radiation into light detectable by the photoelectric conversion element, a plane shaped light emitting body for emitting light to the photoelectric conversion unit of the sensor panel, disposed over the wavelength converter, and a protective layer disposed on the plane shaped light emitting body. | 11-19-2009 |
20100102236 | RADIATION DETECTING APPARATUS AND RADIATION DETECTING SYSTEM - To reduce peeling between members constituting an radiation detecting apparatus, the radiation detecting apparatus of the present invention includes a laminating layered structure in which a supporting substance, an adhesive layer, an array substrate having a photoelectric conversion element, a scintillator layer for converting a radiation into light and a resin layer are stacked in this order. Of arrangement regions of each layer in a plane direction, an arrangement region of the scintillator layer is broader than the region opposed to a photoelectric conversion element, and an arrangement region of the adhesive layer is the same as or broader than the arrangement region of the photoelectric conversion element and at least a portion of the arrangement region of the adhesive layer is narrower than that of the scintillator layer. | 04-29-2010 |
20100155612 | IMAGE PICKUP APPARATUS, RADIATION IMAGE PICKUP APPARATUS, AND METHOD FOR MANUFACTURING SAME - An image pickup apparatus includes a base that has electric conductivity, at least one image pickup element, and at least one fixing member for fixing the image pickup element to the base. The base has at least one conducting portion on the surface thereof on the side of the fixing member, and the image pickup element has a conducting portion on the surface thereof on the side of the fixing member. The fixing member is formed of peelable resin for separating the image pickup element from the base by applying current. The area of the conducting portion of the base is larger than the area of the fixing region between the fixing member and the base. | 06-24-2010 |
Patent application number | Description | Published |
20120128532 | OXYGEN-ABSORBING RESIN COMPOSITION - Provided is a resin composition which is excellent in an oxygen-absorbing performance, a resin strength and a resin processability. | 05-24-2012 |
20140308405 | OXYGEN-ABSORBING RESIN COMPOSITION AND OXYGEN-ABSORBING MOLDED ARTICLE USING SAME AND MULTILAYER BODY, CONTAINER, INJECTION-MOLDED ARTICLE AND MEDICAL CONTAINER USING THESE - A novel oxygen-absorbing resin composition is not responsive to a metal detector, produces no odor after absorption of oxygen and has excellent oxygen-absorbing performance, and an oxygen-absorbing molded article, and a multilayer body, container, injection-molded article and medical container. Further provided are an oxygen-absorbing resin composition etc. having excellent oxygen-absorbing performance in a wide range of humidity conditions from low to high humidity. The oxygen-absorbing resin composition is an oxygen-absorbing resin composition containing a polyester compound and a transition metal catalyst, in which the polyester compound has at least one constituent unit having a tetralin ring. Furthermore, the oxygen-absorbing molded article of the present invention is formed by molding the oxygen-absorbing resin composition into a film form or a sheet form. Moreover, the multilayer body, container, injection-molded article, medical container, etc. of the present invention are obtained by using the oxygen-absorbing resin composition of the present invention. | 10-16-2014 |
20140373485 | OXYGEN-ABSORBING RESIN COMPOSITION AND OXYGEN-ABSORBING MULTILAYER BODY USING SAME, AND MOLDED ARTICLE AND MEDICAL CONTAINER USING THESE - Provided is a novel oxygen-absorbing resin composition having excellent oxygen-absorbing performance and suppressing odor generation after absorption of oxygen even if a material responsive to a metal detector is not used. Further provided is an oxygen-absorbing resin composition having excellent oxygen-absorbing performance in a wide range of humidity conditions from low humidity to high humidity. Such an oxygen-absorbing resin composition contains a copolymerized polyolefin compound and a transition metal catalyst, in which the copolymerized polyolefin compound contains at least one constituent unit having a tetralin ring. | 12-25-2014 |
20150090932 | OXYGEN ABSORBING AGENT COMPOSITION - An oxygen absorbing agent composition including at least one type of a compound having an indane skeleton represented by the following general formula (1) and a transition metal catalyst: | 04-02-2015 |
20150144838 | OXYGEN-ABSORBING RESIN COMPOSITION - An oxygen-absorbing resin composition copolymerized polyolefin compound including a copolymerized polyolefin compound and a transition metal catalyst, wherein the copolymerized polyolefin compound is a copolymerized polyolefin compound including at least one of constitutional unit (a) selected from the group consisting of the constitutional units represented by the general formula (1), and at least one of the constitutional unit (b) having an indane ring, selected from the group consisting of the constitutional units represented by the general formulas (2) and (3). | 05-28-2015 |
20150232251 | OXYGEN ABSORBER COMPOSITION AND OXYGEN ABSORBER PACKAGE - The present invention provides an oxygen absorbing agent composition comprising a compound (A) having two or more tetralin rings, and a transition metal catalyst. | 08-20-2015 |
20150259467 | OXYGEN-ABSORBING RESIN COMPOSITION - Provided is an oxygen-absorbing resin composition having a polyester compound having a constitutional unit (a), which has at least one tetralin ring selected from the group consisting of the following general formulas (1) to (4) and a constitutional unit (b) represented by the following general formula (5) and/or general formula (6). | 09-17-2015 |
20150298887 | OXYGEN-ABSORBING RESIN COMPOSITION, AND MULTILAYER BODY, CONTAINER, INJECTION-MOLDED BODY, AND MEDICAL CONTAINER USING SAME - Provided are a novel oxygen-absorbing resin composition not responsive to a metal detector, producing no odor after absorption of oxygen and having excellent oxygen-absorbing performance, and a multilayer body, container, injection-molded article and medical container using these. Further provided are an oxygen-absorbing resin composition etc. having excellent oxygen-absorbing performance in a wide range of humidity conditions from low humidity to high humidity. The oxygen-absorbing resin composition of the present invention is an oxygen-absorbing resin composition containing a polyamide compound and a transition metal catalyst, wherein the polyamide compound has at least one constituent unit having a tetralin ring. Moreover, the multilayer body, container, injection-molded article, medical container, etc. of the present invention are obtained by using the oxygen-absorbing resin composition of the present invention. | 10-22-2015 |
20150368022 | OXYGEN-ABSORBING MULTILAYER BODY, OXYGEN-ABSORBING CONTAINER, OXYGEN-ABSORBING AIRTIGHT CONTAINER, OXYGEN-ABSORBING PUSH-THROUGH PACK, AND STORAGE METHOD USING SAME - Provided is an oxygen-absorbing multilayer body including an oxygen-absorbing layer containing an oxygen-absorbing composition and a thermoplastic resin layer containing a thermoplastic resin (b), wherein the oxygen-absorbing composition includes at least one compound having a tetralin ring represented by Formula (1), a transition metal catalyst, and a thermoplastic resin (a). | 12-24-2015 |
20160031628 | OXYGEN ABSORBENT COMPOSITION - The oxygen absorbent composition of the present invention at least contains a polyester oligomer containing a constitutional unit having a predetermined tetralin ring and a transition metal catalyst. It is preferable that the oxygen absorbent composition of the present invention further contains a thermoplastic resin. | 02-04-2016 |
Patent application number | Description | Published |
20130137279 | Exhaust Unit, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device - Provided is a substrate processing apparatus capable of increasing a conductance of an exhaust system while preventing or suppressing an increase in footprint of an apparatus, thereby reducing a pressure thereof. The substrate processing apparatus includes a process container ( | 05-30-2013 |
20130327273 | SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus. The apparatus includes: a process chamber configured to accommodate substrates which are horizontally oriented and stacked in multiple stages and process the substrates; a process gas supply unit configured to supply a process gas to the process chamber; an inert gas supply unit configured to supply an inert gas to the process chamber; and an exhaust unit configured to exhaust the process chamber. The process gas supply unit includes a process gas supply nozzle. The inert gas supply unit includes inert gas supply nozzles disposed at both sides of the process gas supply nozzle. Each of the inert gas supply nozzles includes at least one first inert gas ejection hole formed in a region where the substrates are stacked and at least one second inert gas ejection hole formed in a region where the substrates are not stacked. | 12-12-2013 |
20140073146 | Reaction Tube, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device - Provided are a reaction tube, a substrate processing apparatus, and a method of manufacturing a semiconductor device capable of suppressing a non-uniform distribution of a gas in a top region to improve the flow of the gas and film uniformity within and between substrate surfaces. The reaction tube has a cylindrical shape, accommodates a plurality of substrates stacked therein, and includes a cylindrical portion and a ceiling portion covering an upper end portion of the cylindrical portion, the ceiling portion having a substantially flat top inner surface. A thickness of a sidewall of the ceiling portion is greater than that of a sidewall of the cylindrical portion. | 03-13-2014 |
20140166145 | SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - Substrate processing uniformity is improved in the surfaces of wafers and between the wafers. An inner tube for a substrate processing apparatus for forming a high-k film, includes: a gas exhaust outlet formed at a sidewall of the inner tube; and a gas injection hole located at position spaced outward from the sidewall of the inner tube, wherein a distance of an outer edge of a substrate accommodated in the inner tube and the gas exhaust outlet is greater than a distance between the outer edge of the substrate accommodated in the inner tube and the gas injection hole. | 06-19-2014 |
20140170860 | SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - Substrate processing uniformity is improved in the surfaces of wafers and between the wafers. A method of manufacturing a semiconductor device, including: loading a substrate holder into an inner tube, the substrate holder holding a plurality of substrates in a state where the plurality of substrates are horizontally oriented and stacked; forming thin films on the plurality of substrates by supplying a source gas to an inside of the inner tube; and unloading the substrate holder from the inner tube, wherein the forming the thin films is performed in a state where a conductance of a space between an inner wall of the inner tube and a gas penetration preventing cylinder is smaller than a conductance of a region where the plurality of substrates are stacked. | 06-19-2014 |
20150162184 | Method of Manufacturing Semiconductor Device - A method of manufacturing a semiconductor device includes processing a substrate accommodated in a process container accommodated in a housing by supplying a process gas onto the substrate; and exhausting the process container using an exhaust system comprising a first exhaust pipe connected to the process container, the first exhaust pipe having circular or oval cross-section perpendicular to an exhausting direction thereof; and a second exhaust pipe connected to the first exhaust pipe, the second exhaust pipe having square or rectangular cross-section perpendicular to the exhausting direction, wherein at least a portion of the second exhaust pipe is disposed within the housing. | 06-11-2015 |
Patent application number | Description | Published |
20130343067 | LIGHT EMITTING DEVICE - A light emitting device includes a package and a light emitting element. The package includes a resin portion and at least one lead frame arranged in the resin portion. The at least one lead frame has at least one protrusion which is surrounded by the resin portion and which has an upper surface exposed from the resin portion. The light emitting element is mounted on the upper surface of the at least one protrusion and is electrically connected to the at least one lead frame. At least a half area of the upper surface is covered with the light emitting element. | 12-26-2013 |
20140124812 | LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING THE SAME - To provide a light emitting device having high light extraction efficiency, and a method for manufacturing the light emitting device. A method for manufacturing a light emitting device ( | 05-08-2014 |
20140203305 | LIGHT EMITTING DEVICE AND ITS METHOD OF MANUFACTURE - The light emitting device is provided with a substrate, semiconductor light emitting elements mounted on the substrate, a mold frame that surrounds the periphery of the light emitting elements on the substrate, and resin layers that fill the inside of the mold frame. The mold frame includes a first mold frame, and a second mold frame formed on top of the first mold frame. The resin layers include a first resin layer that embeds the light emitting elements in resin and is formed with a height approximately equal to the height of the top of the first mold frame, and a second resin layer on top of the first resin layer that is formed with a height approximately equal to the height of the top of the second mold frame. At least one of the resin layers (which are the first resin layer and the second resin layer) includes wavelength-shifting material to change the wavelength of light emitted from the semiconductor light emitting elements. | 07-24-2014 |
20150021640 | LIGHT-EMITTING DEVICE - A light-emitting device includes a lead frame, a white resist, a light-emitting element, and a wire. The white resist is provided on the lead frame to be in contact with the lead frame. The white resist has an opening to expose the lead frame. The light-emitting element is disposed on the white resist and includes a transparent substrate and a semiconductor layer. The transparent substrate is bonded to the white resist via a bonding member. The semiconductor layer is provided on the transparent substrate. The wire connects the light-emitting element and the lead frame at the opening. | 01-22-2015 |