Patent application number | Description | Published |
20100003615 | UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD - An upper layer-forming composition formed on a photoresist while causing almost no intermixing with the photoresist film and a photoresist patterning method are provided. The upper layer-forming composition is stably maintained without being eluted in a medium such as water during liquid immersion lithography and is easily dissolved in an alkaline developer. The upper layer-forming composition covers a photoresist film for forming a pattern by exposure to radiation. The composition comprises a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved. The solvent has a viscosity of less than 5.2×10 | 01-07-2010 |
20100021852 | COMPOSITION FOR FORMATION OF UPPER LAYER FILM, AND METHOD FOR FORMATION OF PHOTORESIST PATTERN - A composition for formation of upper layer film, which is used for forming an upper layer film on the surface of a photoresist film and which comprises
| 01-28-2010 |
20100040974 | UPPER LAYER FILM FORMING COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN - An upper layer film forming composition for forming an upper layer film on the surface of a photoresist film includes (A) a resin dissolvable in a developer for the photoresist film and (B) a compound having a sulfonic acid residue group, the composition forming an upper layer film with a receding contact angle to water of 70° or more. The upper layer film forming composition of the present invention can form an upper layer film which has a sufficient transparency and is stably maintained without eluting the components into a medium without being intermixed with a photoresist film, can form a resist pattern with high resolution while effectively suppressing a defect, and can suppress a blob defect. | 02-18-2010 |
20100255416 | COMPOSITION FOR FORMING UPPER LAYER FILM FOR IMMERSION EXPOSURE, UPPER LAYER FILM FOR IMMERSION EXPOSURE, AND METHOD OF FORMING PHOTORESIST PATTERN - The object of the invention is to provide a composition for forming an upper layer film for immersion exposure capable of forming an upper layer film effectively inhibited from developing defects through an immersion exposure process, such as a watermark defect and dissolution residue defect. Also provided are an upper layer film for immersion exposure and a method of forming a resist pattern. The composition for forming an upper layer film includes a resin ingredient and a solvent. The resin ingredient includes a resin (A) having at least one kind of repeating units selected among those represented by the formulae (1-1) to (1-3) and at least either of the two kinds of repeating units represented by the formulae (2-1) and (2-2). (1-1) (1-2) (1-3) (2-1) (2-2) [In the formulae, R | 10-07-2010 |
20120028198 | UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD - An upper layer-forming composition includes a resin, and a solvent. The resin is dissolvable in a developer for a photoresist film which is to be covered by the upper layer-forming composition to form a pattern by exposure to radiation. The solvent dissolves the resin in the solvent. The solvent includes a compound shown by a formula (1). Each of R | 02-02-2012 |
20130216961 | COMPOSITION FOR FORMING UPPER LAYER FILM FOR IMMERSION EXPOSURE, UPPER LAYER FILM FOR IMMERSION EXPOSURE, AND METHOD OF FORMING PHOTORESIST PATTERN - A composition for forming an upper layer film includes a solvent and a resin component including a first resin having a first repeating unit and a second repeating unit. The first repeating unit is a repeating unit represented by a formula (1-1), a repeating unit represented by a formula (1-2), a repeating unit represented by a formula (1-3), or a combination thereof. The second repeating unit is a repeating unit represented by a formula (2-1), a repeating unit represented by a formula (2-2), or both thereof. The composition is to be used for forming the upper layer film in liquid immersion lithography. | 08-22-2013 |
Patent application number | Description | Published |
20120281334 | ELECTROSTATIC CHUCK APPARATUS - Disclosed is an electrostatic chuck apparatus which is configured of: an electrostatic chuck section; an annular focus ring section provided to surround the electrostatic chuck section; and a cooling base section which cools the electrostatic chuck section and the focus ring section. The focus ring section is provided with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater. | 11-08-2012 |
20140204975 | PLATE-SHAPED BODY FOR TEMPERATURE MEASUREMENT AND TEMPERATURE MEASURING APPARATUS PROVIDED WITH THE SAME - There are provided a plate-shaped body for temperature measurement which, simply by being mounted on a mounting surface of an electrostatic chuck apparatus and without using a semiconductor wafer itself which is a product, is able to easily optimize the in-plane temperature distribution of the mounting surface of the electrostatic chuck apparatus, the temperature rising characteristics, and the cooling characteristics during decreases in temperature, and a temperature measuring apparatus provided with the same. In such a wafer for temperature measurement (plate-shaped body for temperature measurement) ( | 07-24-2014 |
20150179492 | ELECTROSTATIC CHUCK APPARATUS - Disclosed is an electrostatic chuck apparatus which is configured of: an electrostatic chuck section; an annular focus ring section provided to surround the electrostatic chuck section; and a cooling base section which cools the electrostatic chuck section and the focus ring section. The focus ring section is provided with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater. | 06-25-2015 |
Patent application number | Description | Published |
20100209148 | IMAGE FORMING METHOD EMPLOYING CLEAR TONER - A method of image forming comprising the steps of: providing a clear toner all over a transfer material on which an image is formed; heating and pressing the transfer material having thereon the image while the transfer material is in contact with a belt; cooling the transfer material; and peeling the transfer material from the belt, whereby a clear toner layer formed on the transfer material is obtained, wherein a storage modulus G′ at 60° C. of the clear toner is 1×10 | 08-19-2010 |
20100248130 | IMAGE FORMING METHOD AND METHOD OF RECYCLING IMAGE FORMING MATERIAL - An image forming method comprising the step of: forming a toner image employing toner particles containing at least a resin on an image supporting substrate having thereon a toner holding layer via a toner image holding process to form an image print, the toner image being held in the toner holding layer in the toner image holding process, wherein at least the toner particles or the image supporting substrate is separated from the image print via a separation process; and at least the separated toner particles or the separated image supporting substrate is recyclable as an image forming material. | 09-30-2010 |
20100279220 | METHOD OF RECYCLING IMAGE FORMING MATERIAL - A method of recycling an image forming material comprising the steps of holding a toner image formed by employing toner particles in a toner holding layer formed on an image supporting substrate to form a first generation image print, separating the toner particles from the first generation image print; and recycling the separated toner particles to form a second generation image print by holding a toner image formed by employing the separated toner particles in a toner holding layer formed on an image supporting substrate, provided that the image forming material comprises at least toner particles, wherein Condition (1) 0.9≧B/A≧0.1 and Condition (2) 1≧C/A≅0.9 are satisfied, A, B and C representing particle shape factors of original toner particles, toner particles held in the image holding layer of the first generation image print; and separated toner particles, respectively. | 11-04-2010 |
20110033211 | IMAGE FORMING METHOD - An image forming method using toner comprising toner particles having a core-shell structure comprising a core particle incorporating a viscous material and a shell layer covering the above core particle is disclosed. The method comprises steps of a toner image forming step on a dielectric drum; a first pressure applying step in which the shell layer of the toner particles forming the toner image is subjected to a preliminary break treatment by a first pressure roller, which is arranged in contact with the dielectric drum; and a transfer/fixing step in which a toner image made by the toner particles which have been subjected to a preliminary break treatment by the first pressure applying step is transferred and fixed to an image support by a second pressure roller which is arranged in contact with the dielectric drum. | 02-10-2011 |
20110207045 | TONER FOR ELECTROSTATIC LATENT IMAGE DEVELOPMENT AND PRODUCTION METHOD THEREOF - A toner for electrostatic latent image development is disclosed, comprising a binder resin which comprises a resin A comprising a copolymer comprised of at least a styrenic monomer unit and a (meth)acrylic monomer unit and a resin B comprising a copolymer comprised of at least a methacrylate monomer unit and a radical-polymerizable monomer unit containing plural carboxyl groups, and a total amount of the methacrylate monomer unit and the radical-polymerizable monomer unit containing plural carboxyl groups accounts for not less than 70% by mass and not more than 95% by mass of all monomer units forming the copolymer of the resin B. | 08-25-2011 |
20110236652 | IMAGE PRINT AND IMAGE FORMING METHOD - Disclosed is an image print which has a toner-holding layer on an image-supporting substrate in which the toner-holding layer holds a toner image formed by toner particles, wherein the toner-holding layer is composed of a hydrogel having a water content of 10% by mass or more and not more than 90% by mass. | 09-29-2011 |
20110254260 | IMAGE PRINTED MATTER AND IMAGE FORMING METHOD - An image forming method for forming an image printed matter, includes the steps of: forming a toner image with toner particles on a photoreceptor; transferring the toner image from the photoreceptor onto a substrate; laminating an toner holding material layer on the substrate so as to embed the toner image in the toner holding material layer so that the toner holding material layer holds the toner image therein and the image printed matter is formed, wherein the toner holding material layer is composed of a gel including a liquid dispersion medium having a contact angle of 20 to 110 degrees to the image supporting substrate. | 10-20-2011 |
Patent application number | Description | Published |
20140203632 | POWER CONVERSION APPARATUS - A power conversion apparatus comprises a first converter connected to a second converter. The first converter includes a first capacitor and the second converter includes a second capacitor connected in series to a third capacitor. The capacitors are each connected in parallel with a respective resistor. The power conversion apparatus also includes a bypass switch connected in parallel to the first converter and in series to the second converter. A control module is configured to control a single-phase output voltage by operation of the first converter, the second converter, and the bypass switch. | 07-24-2014 |
20150076903 | CONTROLLING APPARATUS, POWER CONVERTING APPARATUS, CONTROLLING METHOD, COMPUTER-READABLE RECORDING MEDIUM AND CONTROLLING SYSTEM - According to one embodiment, a controlling apparatus includes a power phase controlling unit to control the phase of the power to be output to the power line by the power converting apparatus, based on the synchronous signal, and when a disruption of the synchronous signal is detected, control the phase of the power to be output to the power line by the power converting apparatus, based on the synchronous signal received before the disruption. The controlling apparatus includes a communication controlling unit to control the communicating unit such that, for information to determine a master that sends the synchronous signal, the communicating unit performs either one of a receiving from the controlling apparatus for the other power converting apparatus and a sending to the controlling apparatus for the other power converting apparatus, while the power phase controlling unit performs the control based on the synchronous signal received before the disruption. | 03-19-2015 |