Patent application number | Description | Published |
20080282710 | Integral facet cryopump, water vapor pump, or high vacuum pump - A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock. | 11-20-2008 |
20090016855 | LOAD LOCK FAST PUMP VENT - A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports. | 01-15-2009 |
20130078057 | LOAD LOCK FAST PUMP VENT - A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone. | 03-28-2013 |
20140178157 | LOAD LOCK CHAMBER - A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone. | 06-26-2014 |
Patent application number | Description | Published |
20080214983 | PRESSURE SENSING VALVE - A pressure sensing catheter having a pressure sensor and an antenna that is coupled to the pressure sensor, e.g., by a connector, are provided. The pressure sensor can be adapted to measure a pressure surrounding the catheter, and the antenna can be adapted to telemetrically communicate the measured pressure to an external device. In an exemplary embodiment, the antenna, pressure sensor, and/or connector are hermetically sealed, e.g., by the catheter and/or a coating, to prevent the antenna, pressure sensor, and connector from coming into contact with fluid, thereby allowing the catheter to be permanently implanted or otherwise used for long term use. Exemplary methods for manufacturing and using pressure sensing catheters are also provided. | 09-04-2008 |
20080307854 | METHOD AND KIT FOR MAINTAINING A STERILE ENVIRONMENT DURING CALIBRATION OF A MEDICAL DEVICE - A method for maintaining a medical device in a sterile atmosphere at a desired temperature during a calibration step is provided. The method includes packaging a medical device and temperature indicator in a sterile container such that the indicator is visible to a user. Next, heat can be applied to the container in order to stabilize the temperature of the container (as indicated by the encased temperature indicator) at room temperature. Once at room temperature, the device can be calibrated while remaining in the sterile atmosphere. A kit including such a container and a set of instructions is also provided. Like above, the container of the kit can include a sterile medical device and temperature indicator such that the device can be maintained in a sterile environment during calibration and/or zeroing. As such, the method and kit allow for increased precision and safety in performing medical procedures. | 12-18-2008 |
20090156960 | PRESSURE SENSING VALVE - A pressure sensing catheter having a pressure sensor and an antenna that is coupled to the pressure sensor, e.g., by a connector, are provided. The pressure sensor can be adapted to measure a pressure surrounding the catheter, and the antenna can be adapted to telemetrically communicate the measured pressure to an external device. In an exemplary embodiment, the antenna, pressure sensor, and/or connector are hermetically sealed, e.g., by the catheter and/or a coating, to prevent the antenna, pressure sensor, and connector from coming into contact with fluid, thereby allowing the catheter to be permanently implanted or otherwise used for long term use. Exemplary methods for manufacturing and using pressure sensing catheters are also provided. | 06-18-2009 |
Patent application number | Description | Published |
20130103808 | METHOD AND SYSTEM FOR EXECUTING AND UNDOING DISTRIBUTED SERVER CHANGE OPERATIONS - A method and system for executing and undoing distributed server change operations for a collection of server objects across multiple target servers in a transaction-safe manner is provided. In one embodiment, server change operations for a collection of server objects, such as files and configuration file entries, are specified in a transaction package. The target servers to which the specified change operation are directed are also identified in the transaction package. Parameter values for each of the identified target servers are specified through a parameter file in the transaction package. The transaction package is sent to the identified target servers, which execute the change operations on the target servers in a transaction-safe manner using these parameter values. | 04-25-2013 |
20130232248 | METHOD AND SYSTEM FOR SIMPLIFYING DISTRIBUTED SERVER MANAGEMENT - A method and system for managing a large number of servers and their server components distributed throughout a heterogeneous computing environment is provided. In one embodiment, an authenticated user, such as a IT system administrator, can securely and simultaneously control and configure multiple servers, supporting different operating systems, through a “virtual server.” A virtual server is an abstract model representing a collection of actual target servers. To represent multiple physical servers as one virtual server, abstract system calls that extend execution of operating-system-specific system calls to multiple servers, regardless of their supported operating systems, are used. A virtual server is implemented by a virtual server client and a collection of virtual server agents associated with a collection of actual servers. | 09-05-2013 |
20150326423 | METHOD AND SYSTEM FOR SIMPLIFYING DISTRIBUTED SERVER MANAGEMENT - A method and system for managing a large number of servers and their server components distributed throughout a heterogeneous computing environment is provided. In one embodiment, an authenticated user, such as a IT system administrator, can securely and simultaneously control and configure multiple servers, supporting different operating systems, through a “virtual server.” A virtual server is an abstract model representing a collection of actual target servers. To represent multiple physical servers as one virtual server, abstract system calls that extend execution of operating-system-specific system calls to multiple servers, regardless of their supported operating systems, are used. A virtual server is implemented by a virtual server client and a collection of virtual server agents associated with a collection of actual servers. | 11-12-2015 |