Patent application number | Description | Published |
20080246061 | STRESS LAYER STRUCTURE - A stress layer structure disposed on a substrate including a device region and a non-device region is provided. The device region includes active regions and a non-active region. The stress layer structure has stress patterns, at least one partition line, and at least one dummy stress pattern. Each of the stress patterns is disposed on the substrate of each of the active regions, respectively. The partition line exposes a portion of the substrate and divides the two adjacent stress patterns. The dummy stress pattern is disposed on the substrate in the partition line. | 10-09-2008 |
20090146311 | INTERCONNECT STRUCTURE - An interconnect structure is disposed on a substrate with a conductive part thereon and includes a first porous low-k layer on the substrate, a damascene structure in the first porous low-k layer, a second porous low-k layer over the first porous low-k layer and the damascene structure, and a first UV cutting layer at least between the first porous low-k layer and the second porous low-k layer. The damascene structure is electrically connected with the conductive part. The UV cutting layer is a UV reflection layer or a UV reflection-absorption layer. | 06-11-2009 |
20090201625 | CONDUCTIVE STRUCTURE HAVING CAPACITOR - A three-dimensional conductive structure has a first electrode and a second electrode of a capacitor structure, and thereby defines a capacitor space. At least a signal line is further included in the capacitor space where both the first electrode and the second electrode can cross and detour round the signal line. Therefore, the signal line can go directly through the capacitor space for transferring various signals without making a detour to avoid the whole capacitor structure. | 08-13-2009 |
20090261419 | SEMICONDUCTOR DEVICE HAVING ASSIST FEATURES AND MANUFACTURING METHOD THEREOF - A semiconductor device having assist features and manufacturing method thereof includes a substrate having at least an active region and a peripheral region defined thereon. The semiconductor device also includes a plurality of assist features positioned in the peripheral region, or in the active region with a dotted line pattern. The assist features are electrically connected to active circuits formed in the active region, respectively, for serving as redundant circuits that repair or replace defective circuits. | 10-22-2009 |
20110241212 | STRESS LAYER STRUCTURE - A stress layer structure includes an active stress portion and a dummy stress portion, both formed of a stress material and disposed on the substrate. The active stress portion includes first and second active stress patterns in a region where active devices are formed. The first and second active stress patterns coverrespective active regions, and are separated from each other. The dummy stress portion includes a first dummy stress pattern formed directly on the substrate and disposed between and separated from the first and second active stress patterns. | 10-06-2011 |
20110252225 | COMPUTER SYSTEM AND BOOTUP AND SHUTDOWN METHOD THEREOF - A computer system and a bootup and shutdown method thereof are provided. The computer system includes a memory, a chipset, a basic input/output system (BIOS), and an embedded controller, and an operating system (OS) is executed in the computer system. In the shutdown and bootup method, the embedded controller is notified to prepare to enter into a standby mode when the BIOS intercepts a shutdown instruction issued by the OS. The content of a register of the chipset is set according to the standby mode. A current operation mode data of the computer system is retained, and power is continuously supplied to the memory to make the computer system enter into the standby mode. | 10-13-2011 |
20120115284 | METHOD FOR MANUFACTURING MULTI-GATE TRANSISTOR DEVICE - A method for manufacturing a multi-gate transistor device includes providing a semiconductor substrate having a first patterned semiconductor layer formed thereon, sequentially forming a gate dielectric layer and a gate layer covering a portion of the first patterned semiconductor layer on the semiconductor substrate, removing a portion of the first patterned semiconductor layer to form a second patterned semiconductor layer, and performing a selective epitaxial growth process to form an epitaxial layer on a surface of the second patterned semiconductor layer. | 05-10-2012 |
20120131493 | COMPUTER INFORMATION DISPLAY METHOD AND COMPUTER SYSTEM USING THE SAME - A computer system and a computer information display method thereof are provided. In the method, a computer information management unit stores computer information of an application program in a storage unit. During a system login process of the computer system, a processing unit reads the computer information form the storage unit, and displays the computer information and a login dialog on a screen unit. | 05-24-2012 |
20120196410 | METHOD FOR FABRICATING FIN FIELD EFFECT TRANSISTOR - A method for fabricating a fin-FET, wherein the method comprises several steps as follows: A substrate is first provided, and a silicon fin is then formed in the substrate. Next a dielectric layer is formed on the silicon fin and the substrate. A poly silicon layer is subsequently formed on the dielectric layer, and the poly silicon layer is then planarized. Subsequently, a poly silicon gate is formed and a portion of the silicon fin is exposed by patterning the planarized poly silicon layer. A source and a drain are separately formed on two opposite sides of the exposed silicon fin adjacent to the poly silicon gate. | 08-02-2012 |
20120213272 | METHOD AND SYSTEM FOR ADJUSTING VIDEO AND AUDIO QUALITY OF VIDEO STREAM - In a method for adjusting video or audio quality of a video stream, a video stream request for requesting an original target video stream from a client is received. Then, information about a connection bandwidth of the client is obtained, and a step is performed for determining if the connection bandwidth of the client is sufficient for receiving the target video stream. When it is determined that the connection bandwidth of the client is insufficient, at least one video or audio parameter is selected according to the information about the connection bandwidth of the client to adjust and reduce the video or audio quality of the target video stream, and the quality-reduced target video stream is transmitted to the client. Information about connection bandwidth of the client is continually obtained for transmitting all of the target video stream to the client. | 08-23-2012 |
20120233451 | METHOD FOR FAST RESUMING COMPUTER SYSTEM AND COMPUTER SYSTEM - A method for fast resuming a computer system from a shutdown state is provided. The computer system comprises a basic input output system (BIOS), a system memory and a storage device storing a system memory data of the system memory and a used system memory block address table before the computer system enters the shutdown state. The method comprises receiving a starting signal for power supplying the computer system and starting the storage device. A fast boot built-in program of the BIOS is started and, according to the used system memory block address table, the fast boot built-in program sequentially reads the stored system memory data from the storage device and writes the read system memory data into the system memory with a use of an optimized read-and-write block size as a read-and-write unit. The computer system enters a suspended state and is resumed from the suspended state. | 09-13-2012 |
20120241863 | FIN FIELD-EFFECT TRANSISTOR STRUCTURE AND MANUFACTURING PROCESS THEREOF - A fin field-effect transistor structure includes a substrate, a fin channel and a high-k metal gate. The high-k metal gate is formed on the substrate and the fin channel. A process of manufacturing the fin field-effect transistor structure includes the following steps. Firstly, a polysilicon pseudo gate structure is formed on the substrate and a surface of the fin channel. By using the polysilicon pseudo gate structure as a mask, a source/drain region is formed in the fin channel. After the polysilicon pseudo gate structure is removed, a high-k dielectric layer and a metal gate layer are successively formed. Afterwards, a planarization process is performed on the substrate having the metal gate layer until the first dielectric layer is exposed, so that a high-k metal gate is produced. | 09-27-2012 |
20120248507 | METAL GATE STRUCTURE AND MANUFACTURING METHOD THEREOF - A manufacturing method of a metal gate structure includes providing a substrate having at least a first metal oxide layer formed thereon, and transferring the surface of the first metal oxide layer into a second metal oxide layer. The first metal oxide layer includes a metal oxide (M | 10-04-2012 |
20120264306 | Method of Forming Opening on Semiconductor Substrate - The present invention provides a method of forming an opening on a semiconductor substrate. First, a substrate is provided. Then a dielectric layer and a cap layer are formed on the substrate. A ratio of a thickness of the dielectric layer and a thickness of the cap layer is substantially between 15 and 1.5. Next, a patterned boron nitride layer is formed on the cap layer. Lastly, an etching process is performed by using the patterned hard mask as a mask to etch the cap layer and the dielectric layer so as to form an opening in the cap layer and the dielectric layer. | 10-18-2012 |
20120272095 | COMPUTER BOOTING METHOD AND COMPUTER SYSTEM - A computer booting method is provided for a computer system. The method comprises performing a power-on-self test. When the test result shows no error on the BIOS, a booting procedure is executed. When the test result shows the BIOS is damaged, whether the computer system stores a backup file of the BIOS is determined. When the computer system stores the backup file, the central processing unit reads the data of backup file and write it into a BIOS system memory and a reboot process is performed. When there is no backup file in the computer system, the computer system is connected to an internet server and downloads a BIOS backup file to the system main memory from the internet server. The central processing unit reads the BIOS backup file and write it into the BIOS system memory and a reboot process is formed. | 10-25-2012 |
20120282783 | METHOD FOR FABRICATING HIGH-K DIELECTRIC LAYER - A method for fabricating high-k dielectric layer is disclosed. The method includes the steps of: providing a substrate; and forming a plurality of high-k dielectric layers by using a plurality of reacting gases to perform a plurality of process stages on the surface of the substrate, wherein at least one of the reacting gases comprises different flow rate in the fabrication stages. | 11-08-2012 |
20120319198 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A semiconductor device including a substrate, a spacer and a high-k dielectric layer having a U-shape profile is provided. The spacer located on the substrate surrounds and defines a trench. The high-k dielectric layer having a U-shape profile is located in the trench, and the high-k dielectric layer having a U-shape profile exposes an upper portion of the sidewalls of the trench. | 12-20-2012 |
20120322260 | THROUGH-SILICON VIA FORMING METHOD - A through-silicon via forming method includes the following steps. Firstly, a semiconductor substrate is provided. Then, a through-silicon via conductor is formed in the semiconductor substrate, and a topside of the through-silicon via conductor is allowed to be at the same level as a surface of the semiconductor substrate. Afterwards, a portion of the through-silicon via conductor is removed, and the topside of the through-silicon via conductor is allowed to be at a level lower than the surface of the semiconductor substrate, so that a recess is formed over the through-silicon via conductor. | 12-20-2012 |
20130001707 | FABRICATING METHOD OF MOS TRANSISTOR, FIN FIELD-EFFECT TRANSISTOR AND FABRICATION METHOD THEREOF - A fabricating method of a MOS transistor includes the following steps. A substrate is provided. A gate dielectric layer is formed on the substrate. A nitridation process containing nitrogen plasma and helium gas is performed to nitride the gate dielectric layer. A fin field-effect transistor and fabrication method thereof are also provided. | 01-03-2013 |
20130009288 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a dielectric layer on the substrate, wherein the dielectric layer comprises metal interconnects therein; forming a top metal layer on the dielectric layer; and forming a passivation layer on the top metal layer through high-density plasma chemical vapor deposition (HDPCVD) process. | 01-10-2013 |
20130020648 | SEMICONDUCTOR DEVICE - A semiconductor device is disclosed. The semiconductor device includes: a substrate; a metal-oxide semiconductor (MOS) transistor disposed in the substrate; and a shallow trench isolation (STI) disposed in the substrate and around the MOS transistor, in which the STI comprises a stress material. | 01-24-2013 |
20130037886 | SEMICONDUCTOR DEVICE AND METHOD OF MAKING THE SAME - A semiconductor device includes a semiconductor substrate, at least a first fin structure, at least a second fin structure, a first gate, a second gate, a first source/drain region and a second source/drain region. The semiconductor substrate has at least a first active region to dispose the first fin structure and at least a second active region to dispose the second fin structure. The first/second fin structure partially overlapped by the first/second gate has a first/second stress, and the first stress and the second stress are different from each other. The first/second source/drain region is disposed in the first/second fin structure at two sides of the first/second gate. | 02-14-2013 |
20130045579 | METHOD OF FORMING SEMICONDUCTOR DEVICE - A method of forming a semiconductor device includes the following steps. A semiconductor substrate having a first strained silicon layer is provided. Then, an insulating region such as a shallow trench isolation (STI) is formed, where a depth of the insulating region is substantially larger than a depth of the first strained silicon layer. Subsequently, the first strained silicon layer is removed, and a second strained silicon layer is formed to substitute the first strained silicon layer. | 02-21-2013 |
20130049141 | METAL GATE STRUCTURE AND FABRICATION METHOD THEREOF - A metal gate structure located on a substrate includes a gate dielectric layer, a metal layer and a titanium aluminum nitride metal layer. The gate dielectric layer is located on the substrate. The metal layer is located on the gate dielectric layer. The titanium aluminum nitride metal layer is located on the metal layer. | 02-28-2013 |
20130056827 | NON-PLANAR SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF - A non-planar semiconductor structure includes a substrate, at least two fin-shaped structures, at least an isolation structure, and a plurality of epitaxial layers. The fin-shaped structures are located on the substrate. The isolation structure is located between the fin-shaped structures, and the isolation structure has a nitrogen-containing layer. The epitaxial layers respectively cover a part of the fin-shaped structures and are located on the nitrogen-containing layer. A non-planar semiconductor process is also provided for forming the semiconductor structure. | 03-07-2013 |
20130078778 | SEMICONDUCTOR PROCESS - A semiconductor process is described as follows. A plurality of dummy patterns is formed on a substrate. A mask material layer is conformally formed on the substrate, so as to cover the dummy patterns. The mask material layer has an etching rate different from that of the dummy patterns. A portion of the mask material layer is removed, so as to form a mask layer on respective sidewalls of each dummy pattern. An upper surface of the mask layer and an upper surface of each dummy pattern are substantially coplanar. The dummy patterns are removed. A portion of the substrate is removed using the mask layer as a mask, so as to form a plurality of fin structures and a plurality of trenches alternately arranged in the substrate. The mask layer is removed. | 03-28-2013 |
20130078780 | SEMICONDUCTOR PROCESS - A semiconductor process includes the following steps. An interlayer is formed on a substrate. A first metallic oxide layer is formed on the interlayer. A reduction process is performed to reduce the first metallic oxide layer into a metal layer. A high temperature process is performed to transform the metal layer to a second metallic oxide layer. | 03-28-2013 |
20130087810 | FIN FIELD-EFFECT TRANSISTOR STRUCTURE - A fin field-effect transistor structure comprises a substrate, a fin channel, a source/drain region, a high-k metal gate and a plurality of slot contact structures. The fin channel is formed on the substrate. The source/drain region is formed in the fin channel. The high-k metal gate formed on the substrate and the fin channel comprises a high-k dielectric layer and a metal gate layer, wherein the high-k dielectric layer is arranged between the metal gate layer and the fin channel. The slot contact structures are disposed at both sides of the metal gate. | 04-11-2013 |
20130089957 | FIN FIELD-EFFECT TRANSISTOR STRUCTURE AND MANUFACTURING PROCESS THEREOF - A fin field-effect transistor structure includes a substrate, a fin channel and a high-k metal gate. The high-k metal gate is formed on the substrate and the fin channel. A process of manufacturing the fin field-effect transistor structure includes the following steps. Firstly, a polysilicon pseudo gate structure is formed on the substrate and a surface of the fin channel. By using the polysilicon pseudo gate structure as a mask, a source/drain region is formed in the fin channel. After the polysilicon pseudo gate structure is removed, a high-k dielectric layer and a metal gate layer are successively formed. Afterwards, a planarization process is performed on the substrate having the metal gate layer until the first dielectric layer is exposed, so that a high-k metal gate is produced. | 04-11-2013 |
20130193585 | Fabrication method and structure of through silicon via - A method of fabricating a through silicon via (TSV) structure, in which, a patterned mask is formed on a substrate, the patterned mask has an opening, a spacer-shaped structure is formed on a sidewall of the opening, and a via hole having a relatively enlarged opening is formed by etching the spacer-shaped structure and the substrate through the opening after the spacer-shaped structure is formed. A TSV structure, in which, a via hole has an opening portion and a body portion, the opening portion is a relatively enlarged opening and has a tapered shape having an opening size of an upper portion greater than an opening size of a lower portion. | 08-01-2013 |
20130207122 | METHOD FOR FABRICATING FINFETS AND SEMICONDUCTOR STRUCTURE FABRICATED USING THE METHOD - A method for fabricating FinFETs is described. A semiconductor substrate is patterned to form odd fins. Spacers are formed on the substrate and on the sidewalls of the odd fins, wherein each spacer has a substantially vertical sidewall. Even fins are then formed on the substrate between the spacers. A semiconductor structure for forming FinFETs is also described, which is fabricated using the above method. | 08-15-2013 |
20130228836 | NON-PLANAR SEMICONDUCTOR STRUCTURE - A non-planar semiconductor structure includes a substrate, at least two fin-shaped structures, at least an isolation structure, and a plurality of epitaxial layers. The fin-shaped structures are located on the substrate. The isolation structure is located between the fin-shaped structures, and the isolation structure has a nitrogen-containing layer. The epitaxial layers respectively cover a part of the fin-shaped structures and are located on the nitrogen-containing layer. Anon-planar semiconductor process is also provided for forming the semiconductor structure. | 09-05-2013 |
20130270612 | Non-Planar FET and Manufacturing Method Thereof - The present invention provides a non-planar FET which includes a substrate, a fin structure, a gate and a gate dielectric layer. The fin structure is disposed on the substrate. The fin structure includes a first portion adjacent to the substrate wherein the first portion shrinks towards a side of the substrate. The gate is disposed on the fin structure. The gate dielectric layer is disposed between the fin structure and the gate. The present invention further provides a method of manufacturing the non-planar FET. | 10-17-2013 |
20130334650 | SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF - A semiconductor structure is located in a recess of a substrate. The semiconductor structure includes a liner, a silicon rich layer and a filling material. The liner is located on the surface of the recess. The silicon rich layer is located on the liner. The filling material is located on the silicon rich layer and fills the recess. Furthermore, a semiconductor process forming said semiconductor structure is also provided. | 12-19-2013 |
20140042501 | MOS TRANSISTOR AND PROCESS THEREOF - A MOS transistor includes a gate structure and a spacer. The gate structure is located on a substrate. The spacer is located on the substrate beside the gate structure, and the spacer includes an L-shaped inner spacer and an outer spacer, wherein the outer spacer is located on the L-shaped inner spacer, and the two ends of the L-shaped inner spacer protrude from the outer spacer. Moreover, the present invention also provides a MOS transistor process for forming the MOS transistor. | 02-13-2014 |
20140065775 | FABRICATION METHOD FOR SEMICONDUCTOR DEVICES - A method of fabricating a semiconductor device includes the following steps. First, a semiconductor substrate is provided, which includes at least a fin structure and at least a gate semiconductor layer disposed thereon. The gate semiconductor layer covers a portion of the fin structure. Then a sacrificial layer is deposited to cover the fin structure entirely. Subsequently, a top surface of the fin structure is exposed from the sacrificial layer through an etching process. A material layer is then deposited, which covers the gate semiconductor layer, the fin structure and the sacrificial layer conformally. Finally, the material layer is etched until the top surface of the fin structure is exposed and a first spacer is concurrently formed on side surfaces of the gate semiconductor layer. | 03-06-2014 |
20140091395 | TRANSISTOR - A method for fabricating a transistor device including the following processes. First, a semiconductor substrate having a first transistor region is provided. A low temperature deposition process is carried out to form a first tensile stress layer on a transistor within the first transistor region, wherein a temperature of the low temperature deposition process is lower than 300 degree Celsius (° C.). Then, a high temperature annealing process is performed, wherein a temperature of the high temperature annealing process is at least 150° C. higher than a temperature of the low temperature deposition process. Finally, a second tensile stress layer is formed on the first tensile stress layer, wherein the first tensile stress layer has a lower tensile stress than the second tensile stress layer. | 04-03-2014 |
20140106568 | METHOD OF FORMING OPENING ON SEMICONDUCTOR SUBSTRATE - The present invention provides a method of forming an opening on a semiconductor substrate. First, a substrate is provided. Then a dielectric layer and a cap layer are formed on the substrate. A ratio of a thickness of the dielectric layer and a thickness of the cap layer is substantially between 15 and 1.5. Next, a patterned boron nitride layer is formed on the cap layer. Lastly, an etching process is performed by using the patterned hard mask as a mask to etch the cap layer and the dielectric layer so as to form an opening in the cap layer and the dielectric layer. | 04-17-2014 |
20140117455 | MULTIGATE FIELD EFFECT TRANSISTOR AND PROCESS THEREOF - A multigate field effect transistor includes two fin-shaped structures and a dielectric layer. The fin-shaped structures are located on a substrate. The dielectric layer covers the substrate and the fin-shaped structures. At least two voids are located in the dielectric layer between the two fin-shaped structures. Moreover, the present invention also provides a multigate field effect transistor process for forming said multigate field effect transistor including the following steps. Two fin-shaped structures are formed on a substrate. A dielectric layer covers the substrate and the two fin-shaped structures, wherein at least two voids are formed in the dielectric layer between the two fin-shaped structures. | 05-01-2014 |
20140134824 | METHOD OF FABRICATING DIELECTRIC LAYER AND SHALLOW TRENCH ISOLATION - A method of fabricating a dielectric layer includes the following steps. At first, a dielectric layer is formed on a substrate, and a chemical mechanical polishing (CMP) process is performed on the dielectric layer. Subsequently, a surface treatment process is performed on the dielectric layer after the chemical mechanical polishing process, and the surface treatment process includes introducing an oxygen plasma. | 05-15-2014 |
20140181996 | COMPUTER READABLE STORAGE MEDIUM FOR STORING APPLICATION PROGRAM FOR NETWORK CERTIFICATION - The present invention discloses a computer readable storage medium for storing an application program for network certification. The application program is implemented by an electrical device to execute a network certification process. The network certification process includes the following steps: a network module of the electrical device is driven to receive a certification code, which is broadcasted by a network access point (AP). Determine if the certification code is in an identified list. When the certification code is not in the identified list, the application program executes an action to limit communication between the electrical device and the network AP. | 06-26-2014 |
20140213034 | METHOD FOR FORMING ISOLATION STRUCTURE - A method for forming an isolation structure includes the following steps. A hard mask layer is formed on a substrate and a trench is formed in the substrate and the hard mask layer. A protective layer is formed to cover the trench and the hard mask layer. A first isolation material is filled into the trench. An etching process is performed to etch back part of the first isolation material. | 07-31-2014 |
20140242811 | ATOMIC LAYER DEPOSITION METHOD - An ALD method includes providing a substrate in an ALD reactor, performing a pre-ALD treatment to the substrate in the ALD reactor, and performing one or more ALD cycles to form a dielectric layer on the substrate in the ALD reactor. The pre-ALD treatment includes providing a hydroxylating agent to the substrate in a first duration, and providing a precursor to the substrate in a second duration. Each of the ALD cycles includes providing the hydroxylating agent to the substrate in a third duration, and providing the precursor to the substrate in a fourth duration. The first duration is longer than the third duration. | 08-28-2014 |
20140256115 | SEMICONDUCTOR PROCESS - A semiconductor structure is located in a recess of a substrate. The semiconductor structure includes a liner, a silicon rich layer and a filling material. The liner is located on the surface of the recess. The silicon rich layer is located on the liner. The filling material is located on the silicon rich layer and fills the recess. Furthermore, a semiconductor process forming said semiconductor structure is also provided. | 09-11-2014 |
20140332824 | SEMICONDUCTOR STRUCTURE WITH DIFFERENT FINS OF FINFETS - A semiconductor structure for forming FinFETs is described. The semiconductor structure includes a semiconductor substrate, a plurality of odd fins of the FinFETs on the substrate, and a plurality of even fins of the FinFETs on the substrate between the odd fins of the FinFETs. The odd fins of the FinFETs are defined from the substrate. The even fins of the FinFETs are different from the odd fins of the FinFETs in at least one of the width and the material, and may be further different from the odd fins of the FinFETs in the height. | 11-13-2014 |
20140367779 | SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF - A semiconductor structure includes a fin-shaped structure and a gate. The fin-shaped structure is located in a substrate, wherein the fin-shaped structure has a through hole located right below a vacant part. The gate surrounds the vacant part. Moreover, the present invention also provides a semiconductor process including the following steps for forming said semiconductor structure. A substrate is provided. A fin-shaped structure is formed in the substrate, wherein the fin-shaped structure has a bottom part and a top part. A part of the bottom part is removed to form a vacant part in the corresponding top part, thereby forming the vacant part over a through hole. A gate is formed to surround the vacant part. | 12-18-2014 |
20140370701 | METHOD OF FABRICATING SEMICONDUCTOR PATTERNS - A method of fabricating semiconductor patterns includes steps as follows: Firstly, a substrate is provided and has at least a first semiconductor pattern and at least a second semiconductor pattern, wherein a line width of the first semiconductor pattern is identical to a line width of the second semiconductor pattern. Then, a barrier pattern is formed over a surface of the first semiconductor pattern, and the second semiconductor pattern is exposed. Then, a surface portion of the second semiconductor pattern is reacted to form a sacrificial structure layer. Then, the barrier pattern and the sacrificial structure layer are removed, and the line width of the second semiconductor pattern is shrunken to be less than the line width of the first semiconductor pattern. A third semiconductor pattern having a line width can be further provided. | 12-18-2014 |
20150048486 | SPATIAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING THE SAME - A method of fabricating a spatial semiconductor structure includes steps as follows. Firstly, a semiconductor substrate is provided. Then, a first mask layer is formed above the semiconductor substrate. Then, at least a first opening is formed in the first mask layer and exposes a portion of a surface of the semiconductor substrate. Then, a first semiconductor pattern is formed in the first opening. Then, a second mask layer is formed over the first semiconductor pattern and the first mask layer. Then, at least a second opening is formed through the second mask layer to the first mask layer and exposes another portion of the surface of the semiconductor substrate. And, a second semiconductor pattern is formed in the second opening. | 02-19-2015 |
20150064896 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - Provided is a method of fabricating a semiconductor device including the following steps. A dummy gate structure is formed on a substrate, wherein the dummy gate structure includes a dummy gate and a stacked hard mask, and the stacked hard mask includes from bottom to top a first hard mask layer and a second hard mask layer. A spacer is formed on a sidewall of the dummy gate structure. A mask layer is formed on the substrate. An opening corresponding to the second hard mask layer is formed in the mask layer. The second hard mask layer is removed. The mask layer is removed. A dry etch process is performed to remove the first hard mask layer, wherein the dry etch process uses NF | 03-05-2015 |
20150087126 | METHOD OF FABRICATION TRANSISTOR WITH NON-UNIFORM STRESS LAYER WITH STRESS CONCENTRATED REGIONS - A method of fabrication a transistor device with a non-uniform stress layer including the following processes. First, a semiconductor substrate having a first transistor region is provided. A low temperature deposition process is carried out to form a first tensile stress layer on a transistor within the first transistor region, wherein a temperature of the low temperature deposition process is lower than 300 degree Celsius (° C.) . Then, a high temperature annealing process is performed, wherein a temperature of the high temperature annealing process is at least 150° C. higher than a temperature of the low temperature deposition process. Finally, a second tensile stress layer is formed on the first tensile stress layer, wherein the first tensile stress layer has a tensile stress lower than a tensile stress of the second tensile stress layer. | 03-26-2015 |
20150132966 | METHOD FOR FORMING A FINFET STRUCTURE - A method for forming a FinFET structure includes providing a substrate, a first region and a second region being defined on the substrate, a first fin structure and a second fin structure being disposed on the substrate within the first region and the second region respectively. A first oxide layer cover the first fin structure and the second fin structure. Next a first protective layer and a second protective layer are entirely formed on the substrate and the first oxide layer in sequence, the second protective layer within the first region is removed, and the first protective layer within the first region is then removed. Afterwards, the first oxide layer covering the first fin structure and the second protective layer within the second region are removed simultaneously, and a second oxide layer is formed to cover the first fin structure. | 05-14-2015 |
20150198999 | METHOD FOR SWITCHING OPERATING SYSTEMS AND ELECTRONIC APPARATUS - A method for switching operating systems and an electronic apparatus are provided. A first operating system (OS) is notified to enter a power saving mode when a switching signal is received in case of running the first OS. In the power saving mode, a first running data of the first OS is stored to a first dump area of a storage unit from a system memory, a second OS is loaded to the system memory such that the second OS enters a normal operating mode. | 07-16-2015 |
20150214114 | MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE - A manufacturing method of a semiconductor structure is disclosed. The manufacturing method includes the following steps. A substrate with a plurality of dummy gate structures formed thereon and a first dielectric layer covering the dummy gate structures is provided, the dummy gate structures comprising a plurality of dummy gates and a plurality of insulating layers formed on the dummy gates, wherein at least two of the dummy gate structures have different heights. A first planarization process is performed to expose at least one of the dummy gate structures having the highest height. A first etching process is performed to expose the insulating layers. A chemical mechanical polishing (CMP) process with a non-selectivity slurry is performed to planarize the dummy gate structures. The planarized dummy gate structures are removed to form a plurality of gate trenches. | 07-30-2015 |