Minamihonoki
Takashi Minamihonoki, Osaka JP
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20100216312 | RESIST REMOVING METHOD, SEMICONDUCTOR MANUFACTURING METHOD, AND RESIST REMOVING APPARATUS - This invention provides a resist removing apparatus for removing a resist comprising a deteriorated layer and an undeteriorated layer from a substrate. The apparatus carries out the step of bringing radicals, reduced by subjecting any one of or a mixture of two or more of nitrogen, oxygen, hydrogen, and steam to plasma treatment under a low pressure, into contact with the substrate to remove the resist, and the step of bringing ozone water into contact with the substrate to remove the resist. In the step of removing the resist by radicals, a large part of the undeteriorated layer is allowed to remain by regulating the radical contact time depending upon conditions for the formation of the deteriorated layer on the resist surface. Alternatively, a large part of the undeteriorated layer may be allowed to remain by conducting process control according to the results of analysis of a reactant gas discharged during the removal of the resist. | 08-26-2010 |
Takashi Minamihonoki, Osaka-Shi JP
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20100193977 | OZONE WATER PRODUCTION APPARATUS - The invention relates to an ozone water production apparatus capable of producing ozone water with a highly versatile and simpler configuration and further producing ozone water having a higher concentration with decomposition by heat suppressed. O | 08-05-2010 |
20130233357 | METHOD FOR REMOVING PHOTORESIST - The invention relates to a method for removing a photoresist capable of attaining a sufficient removal rate even using a general-purpose cleaning apparatus. A photoresist formed on a surface of a substrate is removed using supersaturated water solution of ozone. Further, it is preferred that a removal operation is performed under a condition of suppressing reduction in ozone concentration of the supersaturated water solution. | 09-12-2013 |
Takashi Minamihonoki, Yao-City JP
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20130079269 | METHOD FOR PRODUCING HIGH CONCENTRATION OZONATED WATER AND DEVICE FOR PRODUCING HIGH CONCENTRATION OZONATED WATER - The disclosed device and method produce high concentration ozonated water by connecting a high concentration ozone gas-supplying system that comprises an ozone gas-generating unit ( | 03-28-2013 |