Patent application number | Description | Published |
20160035754 | SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND DISPLAY APPARATUS - Provided is a semiconductor device including a buffer layer that is on a substrate and includes an inclined surface; a crystalline silicon layer that is on the buffer layer; a gate electrode that is on the crystalline silicon layer while being insulated from the crystalline silicon layer; and a source electrode and a drain electrode that are each electrically connected to the crystalline silicon layer, the angle between the substrate and the inclined surface being in a range of about 17.5 degrees to less than about 70 degrees. | 02-04-2016 |
20160042959 | THIN FILM TRANSISTOR, DISPLAY APPARATUS COMPRISING THE SAME, METHOD OF MANUFACTURING THIN FILM TRANSISTOR, AND METHOD OF MANUFACTURING DISPLAY APPARATUS - A thin film transistor includes a polysilicon layer on a substrate, which includes a first area between second and third areas. A polysilicon layer is formed on the substrate, and a source electrode and a drain electrode are formed on the polysilicon layer in the first and third areas. Each of the source electrode and the drain electrode includes a metal silicide layer adjacent the polysilicon layer. | 02-11-2016 |
20160093646 | THIN FILM TRANSISTOR SUBSTRATE, DISPLAY APPARATUS COMPRISING THE SAME, METHOD OF MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE, AND METHOD OF MANUFACTURING DISPLAY APPARATUS - A thin film transistor (TFT) substrate, a flat display apparatus including the TFT substrate, a method of manufacturing the TFT substrate, and a method of manufacturing the flat display apparatus, the thin film transistor (TFT) substrate including a substrate; a first gate electrode on the substrate, the first gate electrode including a first branch electrode and a second branch electrode that are spaced apart from one another; a polysilicon layer on the first gate electrode and insulated from the first gate electrode; and a second gate electrode on the polysilicon layer, the second gate electrode being insulated from the polysilicon layer and overlying the first and second branch electrodes. | 03-31-2016 |
20160097972 | PHASE SHIFT MASK AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME - Provided is a method of manufacturing a display apparatus, the method including forming an amorphous silicon layer on a substrate; changing amorphous silicon in the amorphous silicon layer into crystalline silicon by irradiating the amorphous silicon with a laser beam emitted through a phase shift mask; and forming a display device, the phase shift mask including a base substrate; a barrier layer on the base substrate and including a plurality of transmissive portions which are spaced apart from each other in a first direction; and phase shift portions which alternately fill the plurality of transmissive portions in the first direction. | 04-07-2016 |
Patent application number | Description | Published |
20150069378 | THIN FILM TRANSISTOR ARRAY SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND DISPLAY APPARATUS INCLUDING THE SAME - A thin film transistor (TFT) array substrate includes a substrate, a gate electrode, a gate line, a first data line, and a second data line on the substrate, a gate insulating layer that covers the gate electrode and the gate line and includes a first opening that exposes a portion of the first data line and a second opening that exposes a portion of the second data line, an active layer disposed on the gate insulating layer so that at least one portion of the active layer overlaps the gate electrode, a drain electrode and a source electrode that extend from opposite sides of the active layer, a pixel electrode that extends from the drain electrode, and a connection wiring that extends from the source electrode, and connects the first data line to the second data line through the first and second openings of the gate insulating layer. | 03-12-2015 |
20150206932 | THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THIN FILM TRANSISTOR AND FLAT PANEL DISPLAY HAVING THE THIN FILM TRANSISTOR - A thin film transistor (TFT), method of manufacturing the TFT and a flat panel display having the TFT are disclosed. In one aspect, the TFT comprises a substrate and an active layer formed over the substrate, wherein the active layer is formed of oxide semiconductor, and wherein the active layer includes two opposing sides. The TFT also comprises source and drain regions formed at the opposing sides of the active layer, a first insulating layer formed over the active layer, a gate electrode formed over the active layer, a second insulating layer formed covering the first insulation layer and the gate electrode, and a first conductive layer formed on the source and drain regions and contacting the second insulating layer. | 07-23-2015 |
Patent application number | Description | Published |
20150092130 | LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME - A liquid crystal display includes: a substrate; a thin film transistor comprising one or more terminals and disposed on the substrate; a pixel electrode connected to one of the terminals of the thin film transistor; and a roof layer disposed to face the pixel electrode, wherein a microcavity is formed between the pixel electrode and the roof layer, the microcavity including a liquid crystal material, wherein a plurality of microcavities are disposed along a first row and a second row adjacent to each other, a trench is formed between the first row and the second row, and at least one bridge connecting the first row and the second row is disposed at the trench. | 04-02-2015 |
20150092131 | LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME - A liquid crystal display includes a substrate, a thin film transistor disposed on the substrate, a pixel electrode disposed on the thin film transistor, a roof layer facing the pixel electrode, and at least one partition wall disposed along an edge of the substrate, in which a plurality of microcavities is formed between the pixel electrode and the roof layer, and the plurality of microcavities includes a liquid crystal material. | 04-02-2015 |
20150116637 | LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME - A liquid crystal display includes: a substrate; a thin film transistor disposed on the substrate; a pixel electrode disposed on the thin film transistor; a roof layer facing the pixel electrode; a plurality of microcavities formed between the pixel electrode and the roof layer, each microcavity including liquid crystal materials; a trench formed between the microcavities; and a buffer region formed at an end portion of the trench. | 04-30-2015 |
20150192806 | DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME - A display apparatus includes a substrate; a cavity layer; a display material layer; and a capping layer. The cavity layer includes a plurality of barriers arranged to be spaced apart from one another on the substrate and partitioning pixel regions, and a roof layer connecting upper parts of the plurality of barriers. The cavity layer forms a plurality of cavities including a cavity. The display material layer is formed in the cavity. The capping layer is formed on the cavity layer, the capping layer including a sealant and a plurality of fillers dispersed in the sealant. | 07-09-2015 |
20150268502 | LIQUID CRYSTAL DISPLAY AND METHOD FOR FABRICATING THE SAME - A liquid crystal display comprises: a substrate having a plurality of pixel regions; first electrode formed on the substrate in each of the pixel regions and including a plurality of separated branch electrodes; a cover layer forming a cavity with the substrate, the cover layer including side walls formed on the substrate to partition the plurality of pixel regions and a roof formed on the side walls; a second electrode formed on a bottom surface of the cover layer; a capping layer formed in the cavity to cover the first electrode on the substrate and to cover the second electrode on the bottom surface of the roof; an alignment layer formed on the capping layer; and a liquid crystal layer formed through injection of liquid crystal molecules into the cavity. | 09-24-2015 |
Patent application number | Description | Published |
20100188794 | Electrostatic chuck and device of manufacturing organic light emitting diode having the same - The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate. | 07-29-2010 |
20100275842 | Evaporating apparatus - Provided is an evaporating apparatus that deposits a deposition material onto a treatment object. The evaporating apparatus includes a base, a deposition source, and first and second correction units. The deposition source deposits the deposition material onto the treatment object. The base is disposed separately from the treatment object. The deposition source is placed on a surface of the base. The first and second correction units located between the deposition source and the treatment object. The first and second correction units are disposed on outer regions of the deposition source and face each other. Each of the first and second correction units rotates to control the thickness of a layer formed by the deposition material deposited on the treatment object. | 11-04-2010 |
20100279021 | APPARATUS FOR DEPOSITING ORGANIC MATERIAL AND DEPOSITING METHOD THEREOF - An apparatus for depositing an organic material and a depositing method thereof, wherein a deposition process is performed with respect to a second substrate while transfer and alignment processes are performed with respect to a first substrate in a chamber, so that loss of an organic material wasted in the transfer and alignment processes can be reduced, thereby maximizing material efficiency and minimizing a processing tack time. The apparatus includes a chamber having an interior divided into a first substrate deposition area and a second substrate deposition area, an organic material deposition source transferred to within ones of the first and second substrate deposition areas to spray particles of an organic material onto respective ones of first and second substrates and a first transferring unit to rotate the organic material deposition source in a first direction from one of the first and second substrate deposition areas to an other of the first and second substrate deposition areas. | 11-04-2010 |
20100304025 | DEPOSITION APPARATUS AND METHOD OF CONTROLLING THE SAME - A deposition apparatus including a plurality of reaction chambers, and a method of controlling the deposition apparatus. The deposition apparatus includes a first chamber to deposit a first deposition material onto a deposition body, a second chamber to deposit a second and different deposition material onto the deposition body, a third chamber to deposit the first deposition material onto the deposition body, a transfer chamber connected to the first through third chambers, the transfer chamber to transfer the deposition body to ones of the first through third chambers and a control unit to transport the deposition body from the transfer chamber to ones of the first through third chambers. | 12-02-2010 |
20110073042 | Substrate Centering Device and Organic Material Deposition System - A substrate centering device for an organic material deposition system comprises: a plurality of substrate support holders configured to be reciprocally movable in a facing direction within an organic material deposition chamber and supporting both side portions of a substrate loaded by a robot; a substrate centering unit configured to be reciprocally movable at each of the substrate support holders and centering the substrate by guiding both side portions of the substrate; and a plurality of substrate clampers configured to be reciprocally movable in a vertical direction at each of the substrate support holders, and clamping the substrate that has been centered by the substrate centering unit. | 03-31-2011 |
20110083788 | SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD - A substrate bonding apparatus includes a vacuum chamber having a bonding space where a first substrate and a second substrates are bonded together, a first pump for sucking air of the bonding space at a first intensity, a second pump for sucking the air of the bonding space at a second intensity greater than the first intensity, a nitrogen supply for supplying nitrogen to the bonding space, a sensor for sensing the pressure of the bonding space; and a controller for controlling the first pump, the second pump, and the nitrogen supply. | 04-14-2011 |
20130302134 | SUBSTRATE CENTERING DEVICE AND ORGANIC MATERIAL DEPOSITION SYSTEM - A substrate centering device for an organic material deposition system comprises: a plurality of substrate support holders configured to be reciprocally movable in a facing direction within an organic material deposition chamber and supporting both side portions of a substrate loaded by a robot; a substrate centering unit configured to be reciprocally movable at each of the substrate support holders and centering the substrate by guiding both side portions of the substrate; and a plurality of substrate clampers configured to be reciprocally movable in a vertical direction at each of the substrate support holders, and clamping the substrate that has been centered by the substrate centering unit. | 11-14-2013 |
20130309403 | APPARATUS FOR DEPOSITING ORGANIC MATERIAL AND DEPOSITING METHOD THEREOF - An apparatus for depositing an organic material and a depositing method thereof, wherein a deposition process is performed with respect to a second substrate while transfer and alignment processes are performed with respect to a first substrate in a chamber, so that loss of an organic material wasted in the transfer and alignment processes can be reduced, thereby maximizing material efficiency and minimizing a processing tack time. The apparatus includes a chamber having an interior divided into a first substrate deposition area and a second substrate deposition area, an organic material deposition source transferred to within ones of the first and second substrate deposition areas to spray particles of an organic material onto respective ones of first and second substrates and a first transferring unit to rotate the organic material deposition source in a first direction from one of the first and second substrate deposition areas to an other of the first and second substrate deposition areas. | 11-21-2013 |
20130319597 | SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD - A substrate bonding apparatus includes a vacuum chamber having a bonding space where a first substrate and a second substrates are bonded together, a first pump for sucking air of the bonding space at a first intensity, a second pump for sucking the air of the bonding space at a second intensity greater than the first intensity, a nitrogen supply for supplying nitrogen to the bonding space, a sensor for sensing the pressure of the bonding space; and a controller for controlling the first pump, the second pump, and the nitrogen supply. | 12-05-2013 |
20140037849 | DEPOSITING APPARATUS AND METHOD FOR MEASURING DEPOSITION QUANTITY USING THE SAME - A deposition apparatus may uniformly control deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter. | 02-06-2014 |
20140131311 | THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD USING THE SAME - A thin film forming apparatus and a thin film forming method using the same are disclosed. In one aspect, the thin film forming apparatus comprises a mask that includes a blocking portion and an opening. It also includes an etching source that jets an etching gas through the opening of the mask to etch a thin film according to a pattern. The mask includes a gas blower for blowing a gas around the opening so that the etching gas does not penetrate into a thin film area corresponding to the block portion. When the thin film forming apparatus is used, a normal residual area of a thin film may be safely preserved and patterning may be accurately performed. Thus, the quality of a product manufactured by using the thin film forming apparatus may be improved. | 05-15-2014 |
20140319475 | ORGANIC LIGHT EMITTING DIODE DISPLAY AND MANUFACTURING METHOD THEREOF - An organic light emitting diode display is disclosed. In one aspect, the display includes a pixel electrode formed on a substrate and a pixel defining layer on the pixel electrode, the pixel defining layer having an opening exposing a part of the pixel electrode, and a stepped side wall of the opening. The display also includes an organic emission layer on the pixel electrode in the opening of the pixel defining layer and a common electrode covering the organic emission layer and the pixel defining layer. The pixel defining layer has a stepped side wall of the opening. | 10-30-2014 |
20140322852 | DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY - A deposition apparatus includes a deposition chamber, a plurality of substrate holders comprising a first holder configured to maintain a substrate at a first substrate position in the deposition chamber and a second holder configured to maintain another substrate at a second substrate position in the deposition chamber, a deposition source disposed in the deposition chamber and configured to supply a deposition material to apply onto substrates placed at the first and second substrate positions, and a deposition source transfer mechanism configured to move the deposition source to be opposite to one of the first and second substrates in a first direction, a substrate transfer mechanism configured to transfer a substrate in a second direction to or from the first substrate position and further configured to transfer another substrate in the second direction to or from the second substrate position. | 10-30-2014 |
20150114293 | THIN-FILM DEPOSITING APPARATUS - A thin-film depositing apparatus including a mask, and a chucking unit for adhering the mask to a surface of a substrate, wherein the chucking unit includes a plurality of magnet units that contact another surface of the substrate by independently rising or falling by using their weight and thus are magnetically combined with the mask. | 04-30-2015 |
20150179710 | METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS - A method of manufacturing an organic light emitting display apparatus by utilizing a deposition apparatus for forming an organic layer on a substrate includes: fixing the substrate to a mask assembly for forming a common layer or a mask assembly for forming a pattern layer in a loading unit; when the one or more deposition assemblies are separated from the substrate, forming an intermediate layer by depositing a deposition material discharged from the one or more deposition assemblies in a deposition unit of the deposition apparatus onto the substrate while the substrate is moved relative to the one or more deposition assemblies by a first conveyer unit; and separating the substrate on which the deposition is finished from the mask assembly for forming the common layer or the mask assembly for forming the pattern layer in an unloading unit. | 06-25-2015 |