Patent application number | Description | Published |
20090307906 | METHOD OF PRODUCING COMPONENTS FOR CONTROLLING A FLUID FLOW AND COMPONENTS PRODUCED BY THIS METHOD - A method for producing a micromechanical component for controlling a fluid flow and a component produced according to this method are described. The method for producing a micromechanical component for controlling a fluid flow includes: producing an oscillatory diaphragm on a surface of a substrate by forming an underlying cavity from the same side of the surface, covering the substrate with an intermediate layer, patterning the intermediate layer, and covering the intermediate layer with a covering layer sealing the micromechanical component. It is characterized by the fact that the intermediate layer is patterned in such a way that a sealing element of a fluid valve forms on the diaphragm, which element seals and/or surrounds a valve opening formed in the covering layer. | 12-17-2009 |
20100266432 | MICRO VALVE, METHOD FOR PRODUCING A MICRO VALVE, AS WELL AS MICRO PUMP - A micro valve includes a first valve chamber and a second valve chamber as well as a closing element, which is adjustable between an opening position, in which the valve chambers are connected to each other, and a closing position in which the valve chambers are separated from each other. A reference chamber is provided, which is delimited by the closing element. | 10-21-2010 |
20110090551 | Micromechanical assembly having a displaceable component - A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane. | 04-21-2011 |
20110101821 | ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHOD FOR PRODUCING AN ELECTRODE COMB OR A MICROMECHANICAL COMPONENT - An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°. | 05-05-2011 |
20110147862 | MICROMECHANICAL COMPONENT HAVING AN INCLINED STRUCTURE AND CORRESPONDING MANUFACTURING METHOD - In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor. | 06-23-2011 |
20110199172 | MAGNETIC YOKE, MICROMECHANICAL COMPONENT, AND METHOD FOR THE MANUFACTURE THEREOF - A magnetic yoke ( | 08-18-2011 |
20110248601 | CASCADED MICROMECHANICAL ACTUATOR STRUCTURE - A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis. | 10-13-2011 |
20110254404 | ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT - An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described. | 10-20-2011 |
20110260658 | METHODS FOR OPERATING AN ELECTROSTATIC DRIVE, AND ELECTROSTATAIC DRIVES - A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit. | 10-27-2011 |
20110278363 | SEMICONDUCTOR SUBSTRATE-BASED SYSTEM FOR AN RFID DEVICE, RFID DEVICE, AND METHOD FOR MANUFACTURING SUCH A SEMICONDUCTOR SUBSTRATE-BASED SYSTEM - A semiconductor substrate-based system for an RFID device, in particular an RFID transponder, having a semiconductor substrate and an electronic circuit system which is mounted on the semiconductor substrate is provided. The semiconductor substrate-based system also has a thin-layer battery, likewise mounted on the semiconductor substrate, for supplying power to the RFID device. Moreover, an RFID device having a corresponding semiconductor substrate-based system, and a method for manufacturing a corresponding semiconductor substrate-based system are provided. | 11-17-2011 |
20110279919 | METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT, AND MICROMECHANICAL COMPONENT - A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer. Also described are micromechanical components. | 11-17-2011 |
20110281102 | METHOD FOR MANUFACTURING POROUS MICROSTRUCTURES, POROUS MICROSTRUCTURES MANUFACTURED ACCORDING TO THIS METHOD, AND THE USE THEREOF - A method for manufacturing porous microstructures in a silicon semiconductor substrate, porous microstructures manufactured according to this method, and the use thereof. | 11-17-2011 |
20110294015 | Method and Apparatus for Production of a Thin-Film Battery - A method for production of a thin-film battery includes providing a mount structure, applying of a first unmasked flow of a first electrode material to the mount structure in order to form a first electrode layer, applying a second unmasked flow of a battery material in order to form a battery layer, and applying a third unmasked flow of a second electrode material in order to form a second electrode layer. The applying steps are repeated in order to produce a thin-film battery which consists of a plurality of first electrode layers, a plurality of battery layers, and a plurality of second electrode layers. | 12-01-2011 |
20120061860 | Method for Constructing an Electrical Circuit, and Electrical Circuit - A method for constructing an electrical circuit that includes at least one semiconductor chip encapsulated with a potting compound is disclosed. The method includes applying a galvanic layer arrangement for forming an electrochemical element on an element of the electrical circuit including the at least one semiconductor chip. | 03-15-2012 |
20130327163 | MICROELECTROMECHANICAL SENSOR MODULE AND CORRESPONDING PRODUCTION METHOD - A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for transmitting signals of the sensing mechanism. At least three of the mechanisms are integrated at the chip level in at least one chip in each case. A corresponding method is implemented to produce the microelectromechanical sensor module. | 12-12-2013 |
20140178769 | LAYER SYSTEM, ENERGY STORE, AND METHOD FOR MANUFACTURING AN ENERGY STORE - A layer system includes at least three layers, the three layers including a top electrode layer, a bottom electrode layer, and an electrolyte layer situated between the top electrode layer and the bottom electrode layer. The electrolyte layer has a solid-state electrolyte, and at least one of the top and bottom electrode layers includes a paste-like composite layer. A layer system of this type may be used to manufacture in particular energy stores, such as rechargeable lithium-ion accumulators, having an enhanced capacity. Moreover, a method for producing a layer system or an energy store is described. | 06-26-2014 |
20150028248 | DIELECTRIC MATERIAL FOR USE IN ELECTRICAL ENERGY STORAGE DEVICES - A dielectric material for use in electrical energy storage devices includes at least two nanostructures which are each embedded in an electrically insulating matrix made of a material having a bandgap greater than a material of the nanostructures. A probability different from zero of charge carrier tunnelling in parallel to a direction of an electrical field that can be used from outside is set between the two nanostructures. | 01-29-2015 |
20150243823 | Device having at least Two Wafers for Detecting Electromagnetic Radiation and Method for Producing said Device - An arrangement of at least two wafers for detecting electromagnetic radiation, in particular far infrared radiation, comprises a first wafer and a second wafer. The first wafer includes a microsystem formed as a sensor array. The microsystem is configured to register electromagnetic radiation and provide a corresponding sensor signal. The second wafer includes an integrated circuit formed as an evaluation circuit that is coupled to the sensor array. The integrated circuit is configured to detect the electromagnetic radiation with the aid of the sensor signal provided. | 08-27-2015 |
20150333314 | Method for Producing a Galvanic Element and Galvanic Element - A method for producing a galvanic element includes applying a first electrode to a substrate, applying a separator to the first electrode, and applying a second electrode to the separator. At least one of the electrodes is applied in the form of a composite electrode using an aerosol separation method. | 11-19-2015 |
20150340592 | Method and Device for Producing a Multi-Layer Electrode System - A method for producing a multi-layer electrode system includes providing a carrier substrate having a recess in a top side of the carrier substrate. At least one wall of the recess is inclined in relation to a bottom side of the carrier substrate, which is opposite to the top side. The method also includes applying a multi-layer stack, which includes at least a first electrode layer, a second electrode layer, and a piezoelectric layer arranged between the first electrode layer and the second electrode layer, to the top side of the carrier substrate. At least the wall and a bottom of the recess are covered by at least a portion of the multi-layer stack. | 11-26-2015 |