Patent application number | Description | Published |
20110027724 | SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - There is disclosed a spatial light modulating unit comprising, a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, and an exit-side optical system which guides light having traveled via the plurality of optical elements of the spatial light modulator, wherein the exit-side optical system is configured so that zero-order light having traveled via a surface portion other than the plurality of optical elements and approximately parallel to an array plane where the plurality of optical elements are arrayed, does not pass through an entrance pupil of the exit-side optical system. | 02-03-2011 |
20110069305 | INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR, ILLUMINATION OPTICAL SYSTEM, METHOD FOR ADJUSTING THE ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - There is disclosed an inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising, a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the conjugate plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector. | 03-24-2011 |
20120171627 | INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR, ILLUMINATION OPTICAL SYSTEM, METHOD FOR ADJUSTING THE ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - An inspection device is for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually. The inspection device includes a Fourier transform optical system which is arranged optically downstream the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the Fourier transform plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector. | 07-05-2012 |
Patent application number | Description | Published |
20090011932 | Exhaust Gas-Purifying Catalyst and Method of Manufacturing the Same - An object of the present invention is to provide an exhaust gas-purifying catalyst that is less prone to cause a decrease in its activity even when used at high temperatures in an atmosphere whose oxygen concentration is high. An exhaust gas-purifying catalyst of the present invention includes a composite oxide of alkaline-earth metal and aluminum, and platinum, wherein at least a part of the composite oxide and at least a part of the platinum forms a solid solution. | 01-08-2009 |
20090036300 | EXHAUST GAS-PURIFYING CATALYST - An exhaust gas-purifying catalyst ( | 02-05-2009 |
20090131251 | EXHAUST GAS-PURIFYING CATALYST - An exhaust gas-purifying catalyst is less prone to cause a decrease in its activity even when used in a high temperature atmosphere containing oxygen at a high concentration. The exhaust gas-purifying catalyst includes a composite oxide and Pd or a second solid solution of a composite and Rh and/or Pt. The first and second solid solutions have perovskite structure and are represented by ABO | 05-21-2009 |
20100004123 | OXYGEN STORAGE MATERIAL - An excellent oxygen storage capacity is achieved even in the case used for a long period of time under high temperature conditions. An oxygen storage material contains a first particle made of a composite oxide of cerium and zirconium or a composite oxide of cerium, a rare-earth element other than cerium and zirconium, a second particle including a composite oxide of a rare-earth element, an alkaline-earth element and zirconium, and a precious metal. A part of the precious metal forms a solid solution with the composite oxide included in the second particle. | 01-07-2010 |
20100204039 | Exhaust Gas-Purifying Catalyst - The exhaust gas-purifying catalyst includes at least one of a first composite oxide represented by a formula A(Al | 08-12-2010 |
Patent application number | Description | Published |
20080227334 | MULTI-POLE COAXIAL CONNECTOR - To provide a multi-pole coaxial connector that can be made more compact. More specifically, to provide a multi-pole coaxial connector in which a pitch between members is reduced to reduce a connecting body in size. In a multi-pole coaxial connector in which when a housing block and a receptacle are coupled to each other, a signal post and a signal contact are brought into conduction, a ground contact and a ground case are brought into conduction, an internal conductor and a signal SMD terminal are brought into conduction, and an external conductor and a ground SMD terminal are brought into conduction, and a cross section of the ground contact is formed into substantially U-shape in which adjacent ground contact side is opened. | 09-18-2008 |
20080242131 | CABLE CONNECTOR - A cable connector includes a housing and a first contact provided in the housing. The first contact includes a first engaging and pivoting unit opposed to a back surface of the cable. The cable connector also includes a second contact which is provided in the housing and which includes a second engaging and pivoting unit opposed to the back surface of the cable. The second engaging and pivoting unit has a root which is thicker than that of the first engaging and pivoting unit. The cable connector also includes a cover. The cover includes a first through hole into which the first engaging and pivoting unit is inserted, a first cam unit engaged with the first engaging and pivoting unit, a second through hole into which the second engaging and pivoting unit is inserted, and a second cam unit engaged with the second engaging and pivoting unit. | 10-02-2008 |
20080242143 | CABLE CONNECTOR - A cable connector includes a housing, a first contact having a first contact unit opposed to a front surface of a cable and an engaging and pivoting unit opposed to a back surface of the cable, a second contact which is provided in the housing and which has a second contact unit opposed to the front surface of the cable and a wall opposed to the back surface of the cable, and a cover which is turnably supported on the engaging and pivoting unit by a through hole into which the engaging and pivoting unit is inserted and a cam unit engaged with the engaging and pivoting unit. The engaging and pivoting unit is engaged with the cam unit so that the cover can move in an inserting and releasing direction of the cable. The wall limits movement of the cover in an inserting direction of the cable. | 10-02-2008 |
20090137152 | MEMORY CARD SOCKET - A memory card socket has a plate-like antenna block having a coil-like secondary antenna which is opposed to an antenna incorporated in a memory card in a state where the memory card is attached to the card receiving portion. Openings as cavities are formed in portions of the antenna block inside of the coil of the secondary antenna. With this structure, it is possible to obtain a memory card socket having a compact and simple structure and having a non-contact communication function capable of preventing producing cost from increasing. | 05-28-2009 |
20100197158 | CABLE CONNECTOR - A cable connector includes a housing and a first contact provided in the housing. The first contact includes a first engaging and pivoting unit opposed to a back surface of the cable. The cable connector also includes a second contact which is provided in the housing and which includes a second engaging and pivoting unit opposed to the back surface of the cable. The second engaging and pivoting unit has a root which is thicker than that of the first engaging and pivoting unit. The cable connector also includes a cover. The cover includes a first through hole into which the first engaging and pivoting unit is inserted, a first cam unit engaged with the first engaging and pivoting unit, a second through hole into which the second engaging and pivoting unit is inserted, and a second cam unit engaged with the second engaging and pivoting unit. | 08-05-2010 |
Patent application number | Description | Published |
20090115989 | LIGHTING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD - There is disclosed an illumination optical apparatus which illuminates a surface to be illuminated on the basis of light from a light source, comprising, a first polarizing member arranged as rotatable around an optical axis of the illumination optical apparatus or around an axis substantially parallel to the optical axis; and a second polarizing member arranged as rotatable around the optical axis or around said axis substantially parallel thereto in an optical path between the first polarizing member and the surface to be illuminated, wherein each of the first polarizing member and the second polarizing member provides incident light with variations in a polarization state different according to respective positions of incidence. | 05-07-2009 |
20090128796 | Illumination optics apparatus, exposure method, exposure apparatus, and method of manufacturing electronic device - An illumination optical apparatus which constantly controls a plurality of polarization states with high accuracy. An illumination optical system, which illuminates a pattern surface of a mask with illumination light, includes a polarization optical system and a depolarizer. The polarization optical system includes a half wavelength plate and PBS, which varies a polarization state of the illumination light to form a linear polarization state having a predetermined polarization direction. The depolarizer is arranged toward the mask from the polarization optical system and varies the polarization state of the illumination light emitted from the polarization optical system. | 05-21-2009 |
20120236284 | ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - An illumination optical system for illuminating an irradiated plane M with illumination light provided from a light source includes a spatial light modulator, which is arranged in an optical path of the illumination optical system and forms a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position, and a diffuser, which is arranged at an incidence side of the spatial light modulator through which the illumination light enters. | 09-20-2012 |
20140307245 | ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path. | 10-16-2014 |