Patent application number | Description | Published |
20100163125 | FLUID APPARATUS UNIT STRUCTURE - A fluid apparatus unit structure is provided that can be applied to a use in which a chemical fluid is removed as necessary while chemical fluid circulation and water circulation are being carried out, a fluid such as a chemical fluid does not readily solidify therein, and the fluid apparatus unit structure is compact. In the fluid apparatus unit structure (FU) that groups together and integrates plural fluid apparatus components that are connected via a flow path into a base member ( | 07-01-2010 |
20100180963 | FLUID APPARATUS UNIT STRUCTURE - A fluid apparatus unit structure in which a uniform tightening force is easily applied over the entire periphery by tightening a plurality of fastening members to obtain an advantageous sealing performance is provided. In s fluid apparatus unit structure in which plural fluid apparatus components that are connected via flow paths are collected together and integrated onto a base member, a casing member for the fluid apparatus components is partitioned into plural members in the base member mating direction, a female threading portion assembly ( | 07-22-2010 |
20100193051 | DIFFERENTIAL-PRESSURE FLOWMETER AND FLOW-RATE CONTROLLER - A differential-pressure flowmeter that can reduce (eliminate) a difference between the ambient temperature of one pressure sensor and the ambient temperature of another pressure sensor so as to allow for accurate and stable pressure measurement is provided, and a flow-rate controller equipped with such a differential-pressure flowmeter is provided. Provided are a body having a main fluid channel through which a fluid, whose pressure is to be measured, flows, and two pressure sensors held by the body and arranged in series relative to the main fluid channel, and a temperature balancer composed of a material with high thermal conductivity is accommodated in a recess that is formed in the body located below the two pressure sensors. | 08-05-2010 |
20100193056 | FLOWMETER AND FLOW-RATE CONTROLLER - A flowmeter in which a flow rate can be measured over a wide flow-rate range while an increase in the cost of manufacture thereof is minimized, and a flow-rate controller equipped with such a flowmeter are provided. Provided are an upstream-side pressure sensor that measures the pressure of a fluid in an upstream-side channel, a downstream-side pressure sensor that measures the pressure of the fluid in a downstream-side channel, a first throttle section disposed between the upstream-side channel and the downstream-side channel and having a channel area that is smaller than that of at least the upstream-side channel, a bypass channel branching off from between the upstream-side pressure sensor in the upstream-side channel and the first throttle section and connected with the downstream-side channel, an on/off valve that controls the flow rate of the fluid flowing through the bypass channel, and a second throttle section disposed between the bypass channel and the downstream-side channel and having a channel area that is smaller than that of at least the bypass channel. | 08-05-2010 |
20100200083 | FLOW RATE CONTROLLER - A flow rate controller detects a clogged state of an orifice to prevent errors during flow rate measurement. The flow rate controller includes a differential pressure flow meter, with an orifice disposed between a pair of pressure sensors, that converts a pressure difference detected by the two pressure sensors into a flow rate, a flow-rate adjusting valve whose degree of opening is controlled such that the difference between a measured flow rate value and a preset flow rate value falls within a predetermined range, and a control unit that controls the degree of opening of the flow-rate adjusting valve upon receiving the pressure values detected by the pressure sensors. The control unit compares the preset flow rate value and the measured flow rate value and determines that there is a clog fault when a flow rate difference, as compared with a predetermined value, continues for a predetermined time period. | 08-12-2010 |
20110214757 | PRESSURE SENSOR, PRESSURE-DIFFERENTIAL FLOW RATE METER, AND FLOW RATE CONTROLLER - In a pressure sensor that detects the pressure of liquid flowing in a main fluid flow path, a pressure measuring unit is installed by providing a pressure measuring space at a position branching from a straight-pipe portion of the main fluid flow path, and, in addition, the main fluid flow path and the pressure measuring space are connected with an inlet pipe and an outlet pipe whose pipe diameters are smaller than the main fluid flow path. | 09-08-2011 |
20140034856 | PNEUMATIC CONTROL VALVE AND ASSEMBLING METHOD THEREOF - To provide a pneumatic control valve including: a valve body | 02-06-2014 |