TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICEAANM KOSUGI; TetsuyaAACI ToyamaAACO JPAAGP KOSUGI; Tetsuya Toyama JPAANM UENO; MasaakiAACI ToyamaAACO JPAAGP UENO; Masaaki Toyama JPAANM YAMAGUCHI; HidetoAACI ToyamaAACO JPAAGP YAMAGUCHI; Hideto Toyama JP - diagram, schematic, and image 09
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