METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMSAANM LAI; CANFENGAACI FremontAAST CAAACO USAAGP LAI; CANFENG Fremont CA USAANM ABERLE; DAVID EUGENEAACI MilpitasAAST CAAACO USAAGP ABERLE; DAVID EUGENE Milpitas CA USAANM CAMP; MICHAEL P.AACI San RamonAAST CAAACO USAAGP CAMP; MICHAEL P. San Ramon CA USAANM BARANDICA; HENRYAACI San JoseAAST CAAACO USAAGP BARANDICA; HENRY San Jose CA USAANM HILKENE; MARTIN A.AACI GilroyAAST CAAACO USAAGP HILKENE; MARTIN A. Gilroy CA USAANM SCOTNEY-CASTLE; MATTHEW D.AACI Morgan HillAAST CAAACO USAAGP SCOTNEY-CASTLE; MATTHEW D. Morgan Hill CA USAANM TOBIN; JEFFREYAACI Mountain ViewAAST CAAACO USAAGP TOBIN; JEFFREY Mountain View CA USAANM BURNS; DOUGLAS H.AACI SaratogaAAST CAAACO USAAGP BURNS; DOUGLAS H. Saratoga CA USAANM HAWRYLCHAK; LARAAACI GilroyAAST CAAACO USAAGP HAWRYLCHAK; LARA Gilroy CA US