| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 850001000 | SCANNING OR POSITIONING ARRANGEMENTS, I.E., ARRANGEMENTS FOR ACTIVELY CONTROLLING THE MOVEMENT OR POSITION OF THE PROBE | 66 |
| 20100269231 | COMPRESSED SCAN SYSTEMS - A method for building a fast scan system is provided in which a scanner moves the scan sensors faster than scanners of the prior art, even though the total distance that the scan sensors move longer. The scan system includes (a) a scan sensor that measures the scan target by moving around it, and (b) a data processing system that calculates a parameter of the scan target from the collected data. The scan sensor, which has a limited sensing bandwidth, is moved along multiple paths along the target at a scan speed that is faster than the scan speed determined by the scan sensor bandwidth, so as to obtain a clear signal directly from the scan sensor output. The target is then recovered from the scan output using a compressed sampling data recovery data processing method. | 10-21-2010 |
| 20110093989 | SCANNER DEVICE FOR SCANNING PROBE MICROSCOPE - A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device ( | 04-21-2011 |
| 20120137394 | Atomic Force Microscope Manipulation of Living Cells - Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte. | 05-31-2012 |
| 20110302676 | Method and Device for Examining a Sample with a Probe Microscope - The invention relates to a method for examining a sample by using probe microscopy, in particular scanning probe microscopy in which a sample is examined by way of a probe microscope with a multi-part measuring probe comprising a probe element and a guide clement guiding the probe element during the probe microscopy examination with the method furthermore comprising the following steps: capturing of noise measuring signals for the measuring probe in a non measuring configuration in which the probe clement is arranged separately from the guide element, capturing of measuring signals for the measuring probe in a measuring configuration in which the probe element is guided by the guide element, and analysing the measuring signals by at least partially assigning the measuring signals to the noise measuring signals. Further, the invention relates to a device for examining a sample with a probe microscope. | 12-08-2011 |
| 20110289635 | RESONANCE COMPENSATION IN SCANNING PROBE MICROSCOPY - A method includes generating, using a sensor, a data signal. The data signal includes a first component based on a motion in a first direction of an actuator configured to provide motion between a sample and a probe in the first direction, the first direction substantially in the plane of the sample; and a second component based on at least one of topographic variations of the sample in a second direction, and a materials property of the sample. The method further includes generating, using a processor, a compensatory signal based on the first component of the data signal generated by the sensor; and providing the compensatory signal to the actuator. | 11-24-2011 |
| 20100170015 | SCANNING PROBE MICROSCOPE CAPABLE OF MEASURING SAMPLES HAVING OVERHANG STRUCTURE - A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls. | 07-01-2010 |
| 20110219479 | Variable Density Scanning - Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time. | 09-08-2011 |
| 20110173728 | PROBE ALIGNMENT TOOL FOR THE SCANNING PROBE MICROSCOPE - A probe alignment tool ( | 07-14-2011 |
| 20100083410 | MICROSCOPE SYSTEM - A microscope system comprises a microscope including a motorized stage on which is mounted a container containing a specimen and which can adjust the position of the container, a scanner scanning laser light radiated onto the specimen, an objective lens focusing the scanned laser light, an image-acquisition unit acquiring a specimen image by detecting fluorescence produced in the specimen, and a dark box containing these components; a storage unit storing the mounting position of the container on the motorized stage; an image-acquisition-position setting unit setting acquisition positions of partial images of the inside of the container, on the basis of the stored mounting position of the container; a control section controlling the microscope so as to acquire the partial images for each container on the basis of the set acquisition positions; and a map-image generating section arranging the partial images to generate a map image. | 04-01-2010 |
| 20120066799 | METHOD FOR DRIVING A SCANNING PROBE MICROSCOPE AT ELEVATED SCAN FREQUENCIES - A method for operating a scanning probe microscope at elevated scan frequencies has a characterization stage of sweeping a plurality of excitation frequencies of the vertical displacement of the scanning element; measuring the value attained by the reading parameter at the excitation frequencies; and identifying plateau regions of the response spectrum of the reading parameter. The reading parameter variation is limited within a predetermined range over a predefined frequency interval, thereby defining corresponding fast scanning frequency windows in which the microscope assembly is sufficiently stable to yield a lateral resolution comparable to the one obtained during slow measurements. The measurement stage includes driving the scanning element along at least a scanning trajectory over the surface of the specimen at a frequency selected among the frequencies included in a fast scanning frequency window. | 03-15-2012 |
| 20120079632 | METHOD TO MEASURE 3 COMPONENT OF THE MAGNETIC FIELD VECTOR AT NANOMETER RESOLUTION USING SCANNING HALL PROBE MICROSCOPY - Scanning hall probe microscopy is used to measure 3 components of the magnetic field vector at nanometer resolution by connecting of Hall probe to the end of the piezo scanner, then gluing of the sample to the sample holder, thereafter positioning of the SHPM head under the optical microscope with approximately X40 magnification, then moving back of the slider puck around approximately 30 steps or moving the sensor or sample back by suffient amount using motors, piezo or other positioner such that signal decays to negligible levels; thereafter setting the temperature of cryostat or to desired temperature, then offset nulling of the Hall sensor in gradiometer or normal conditions, and finally setting of the scan area, speed, resolution and the acquisition channels through SPM control program. | 03-29-2012 |
| 20120079631 | Material Property Measurements Using Multiple Frequency Atomic Fore Microscopy - Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described. | 03-29-2012 |
| 20120079630 | SUB-MICROSECOND-RESOLUTION PROBE MICROSCOPY - Methods and apparatus are provided herein for time-resolved analysis of the effect of a perturbation (e.g., a light or voltage pulse) on a sample. By operating in the time domain, the provided method enables sub-microsecond time-resolved measurement of transient, or time-varying, forces acting on a cantilever. | 03-29-2012 |
| 20090210971 | Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope - The present invention provides a displacement measurement method, an apparatus thereof, a probe microscope. which make it possible to stably measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air, mechanical vibration. | 08-20-2009 |
| 20100186132 | PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE - A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus. | 07-22-2010 |
| 20100154084 | METHOD AND APPARATUS FOR PERFORMING APERTURELESS NEAR-FIELD SCANNING OPTICAL MICROSCOPY - A microscope for performing apertureless near-field scanning optical microscopy on a sample comprising a means for mounting a sample; a scanning probe; means for illuminating the sample with light along optical axes from at least two illumination angles relative to an imaginary line connecting the probe and the sample; means for enhancing the electric field of light in a region of the sample with the probe; means for scanning the sample in a plane perpendicular to an imaginary line connecting the probe and the sample; means for moving said sample along said imaginary line to maintain a nearly constant distance between the probe and the sample; and means for collecting light scattered, emitted, or transmitted from the sample. | 06-17-2010 |
| 20100218285 | SCANNING PROBE MICROSCOPE CAPABLE OF MEASURING SAMPLES HAVING OVERHANG STRUCTURE - A scanning probe microscope images a surface of a sample by scanning the sample along a forward path while collecting data for imaging the surface of the sample, recording an uppermost position of the probe while the sample is scanning along the forward path, and scanning the sample along a return path while the probe is positioned higher than the uppermost position of the probe. The return scanning speed is configured to be higher than the forward scanning speed so that the surface image can be obtained rapidly. Also, the return path tracks the forward path until the beginning of the forward path is reached. In this manner, positioning errors caused by hysteresis in the scanning system can be eliminated. | 08-26-2010 |
| 20100218284 | METHOD FOR EXAMINING A TEST SAMPLE USING A SCANNING PROBE MICRSCOPE, MEASUREMENT SYSTEM AND A MEASURING PROBE SYSTEM - The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position. During the second measurement, in relation to the test sample, the measuring probe is held in the non-measurement position and the other measuring probe is held in the other measurement position, and the test sample is examined with the other measuring probe using a scanning probe microscope. The invention also relates to a measuring sensor system of a scanning probe microscope. | 08-26-2010 |
| 20100251437 | Method and Apparatus for Characterizing a Sample with Two or More Optical Traps - The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method. | 09-30-2010 |
| 20100251438 | MICROSCOPY CONTROL SYSTEM AND METHOD - A method for controlling laser scanning microscopy of a probe comprising at least one cell is disclosed. The method comprises the steps of acquiring at least one initial image of the probe and identifying at least one cell within an initial probe image. Using a pre-defined grammar, a first set of scanning mode parameters for monitoring the cell(s); a first set of trigger parameters including at least one physiological parameter defining an event in the cell(s); and a second set of scanning mode parameters for monitoring at least one cell of the probe after an occurrence of the event is defined. A successive set of probe images acquired according to the first set of scanning mode parameters is provided and processed to determine if the event has occurred. Responsive to the event occurring, microscope modality is changed to the second set of scanning mode parameters. | 09-30-2010 |
| 20110239336 | Low Drift Scanning Probe Microscope - A scanning probe microscope, such as an atomic force microscope, include a z-stage and a bridge structure comprised substantially free of Invar. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. A drift compensation system is provided to reduce thermal drift of the z-stage and the bridge. The drift compensation system includes heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. | 09-29-2011 |
| 20100306884 | Scanning Probe Microscope having Improved Optical Access - A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample. | 12-02-2010 |
| 20100333240 | Fully Digitally Controller for Cantilever-Based Instruments - A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware. | 12-30-2010 |
| 20100180354 | Three-Dimensional Nanoscale Metrology using FIRAT Probe - In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement. | 07-15-2010 |
| 20110055981 | Device for Positioning a Moveable Object of Submicron Scale - The instant disclosure describes a device for positioning a moveable object which can be moved over a distance of the order of 1 nanometer in a time of 1 microsecond or less, comprising: a microtip; first piezoelectric positioning, polarization, detection and control means for moving the microtip relative to the object and bringing it to a distance of the order of 1 nanometer from the object in order to make a tunnel current flow between the microtip and the object, for measuring the tunnel current and for slaving, depending on the measured tunnel current, the distance between the microtip and the object to a constant value (d | 03-03-2011 |
| 20100031402 | PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPERATED BY THE SAME - Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark. | 02-04-2010 |
| 20110093987 | MEMS ACTUATOR DEVICE WITH INTEGRATED TEMPERATURE SENSORS - An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph. | 04-21-2011 |
| 20090217425 | Driving apparatus - A driving apparatus is provided with: a stage structure on which a medium having a small recording domain is mounted; and a facing structure which is provided with at least one small action structure, which faces the medium, for performing a predetermined action to the medium, and which is displaced relatively on a predetermined flat surface with respect to the stage structure, the facing structure comprising a facing-side position detecting unit for detecting a relative reference position of the facing structure with respect to the stage structure, the stage structure comprising a stage-side position detecting unit for detecting a relative reference position of the facing structure with respect to the stage structure. | 08-27-2009 |
| 20110107471 | SCANNING PROBE MICROSCOPE HAVING SUPPORT STAGE INCORPORATING A KINEMATIC FLEXURE ARRANGEMENT - A scanning probe microscope (SPM) has a piezoelectric actuator-based tube scanner to which a probe is attached and which is moveable in three planes by the application of a voltage to the piezoelectric tube. A set of flexures flex with the displacement of the tube and strain gauges attached to the flexures measure the flex of the flexures to provide feedback as to the displacement of the tube during the scanning of an object. The strain gauges and flexures form a kinematic sensing frame or arrangement in which a single constraint is provided for each degree of freedom and in which the constraints are at least substantially orthogonal to one another. | 05-05-2011 |
| 20110154546 | Thermal measurements using multiple frequency atomic force microscopy - Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described. | 06-23-2011 |
| 20110061139 | METHOD TO MEASURE 3 COMPONENT OF THE MAGNETIC FIELD VECTOR AT NANOMETER RESOLUTION USING SCANNING HALL PROBE MICROSCOPY - Scanning hall probe microscopy is used to measure 3 components of the magnetic field vector at nanometer resolution by connecting of Hall probe to the end of the piezo scanner, then gluing of the sample to the sample holder, thereafter positioning of the SHPM head under the optical microscope with approximately ×40 magnification, then moving back of the slider puck around approximately 30 steps or moving the sensor or sample back by sufficient amount using motors, piezo or other positioner such that signal decays to negligible levels; thereafter setting the temperature of cryostat or to desired temperature, then offset nulling of the Hall sensor in gradiometer or normal conditions, and finally setting of the scan area, speed, resolution and the acquisition channels through SPM control program. | 03-10-2011 |
| 20120204295 | FAST-SCANNING SPM SCANNER AND METHOD OF OPERATING SAME - A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz. | 08-09-2012 |
| 20110138505 | SCANNING PROBE MICROSCOPY EMPLOYING CORRELATION PATTERN RECOGNITION - An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest. | 06-09-2011 |
| 20110093988 | STUD SCANNER - A scanning device ( | 04-21-2011 |
| 20100115671 | INERTIAL POSITIONER AND AN OPTICAL INSTRUMENT FOR PRECISE POSITIONING - We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned. | 05-06-2010 |
| 20130014295 | METHOD FOR POSITIONING AN ATOMIC FORCE MICROSCOPY TIP IN A CELL - A method for positioning a tip of an atomic force microscope relative to a intracellular target site in a cell is provided. In general terms, the method comprises: a) positioning a fluorescent tip of an atomic force microscope over a cell comprising a fluorescent intracellular target site so that said tip is above target site; b) moving the tip toward said target site while obtaining images of the distal end of said tip and/or the target site using a fluorescence microscope; and c) arresting the movement of the tip when the target site and the distal end of the tip are both in focus in the fluorescence microscope. A microscope system for performing the method is also provided. | 01-10-2013 |
| 20120266336 | Fully Digitally Controller for Cantilever-Based Instruments - A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware. | 10-18-2012 |
| 20100017921 | DEVICE AND METHOD FOR THE MICROMECHANICAL POSITIONING AND HANDLING OF AN OBJECT - The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology. | 01-21-2010 |
| 20100017920 | SCANNING PROBE MICROSCOPE WITH TILTED SAMPLE STAGE - A scanning probe microscope has a tilting stage on which a sample is mounted. The sample is scanned back and forth with the stage being tilted clockwise during a forward scan and counterclockwise during a reverse scan. A first surface contour of the sample is determined from the response of the probe and the tilt angle of the stage during the forward scan. A second surface contour of the sample is determined from the response of the probe and the tilt angle of the stage during the reverse scan. A final surface contour of the sample is obtained by combining the first and second surface contours. | 01-21-2010 |
| 20120042422 | VARIABLE PIXEL DENSITY IMAGING - A method and associated apparatus for topographically characterizing a workpiece. The workpiece is scanned with a scanning probe along a first directional grid, thereby scanning a reference surface and an area of interest subportion of the reference surface, at a variable pixel density including a first pixel density outside the area of interest and a second pixel density inside the area of interest to derive a first digital file characterizing topography of the workpiece. The workpiece is further scanned along the reference surface and the area of interest with the scanning probe along a second directional grid that is substantially orthogonal to the first directional grid and at a constant pixel density to derive a second digital file characterizing topography of the workpiece. A processor executes computer-readable instructions stored in memory that generate a topographical profile of the workpiece in relation to the first and second digital files. | 02-16-2012 |
| 20110314576 | NON-LINEARITY DETERMINATION OF POSITIONING SCANNER OF MEASUREMENT TOOL - Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner. | 12-22-2011 |
| 20110321203 | PLANAR POSITIONING DEVICE AND INSPECTION DEVICE PROVIDED WITH THE SAME - According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular to the first axis, a first displacement magnifying mechanism configured to magnify a displacement of the first actuator, a second displacement magnifying mechanism configured to magnify a displacement of the second actuator, a stage arranged in a plane, a first drive support mechanism including a parallel link connected between the first displacement magnifying mechanism and the stage to transmit the magnified displacement in the first-axis direction to the stage, a second drive support mechanism including a parallel link connected between the second displacement magnifying mechanism and the stage to transmit the magnified displacement in the second-axis direction to the stage, and a stabilizing support mechanism configured to apply tensions in the first-axis direction and the second-axis direction to the stage. | 12-29-2011 |
| 20110321202 | DYNAMIC MODE NANO-SCALE IMAGING AND POSITION CONTROL USING DEFLECTION SIGNAL DIRECT SAMPLING OF HIGHER MODE-ACTUATED MICROCANTILEVERS - An apparatus is provided and includes a cantilever having a tip at a distal end thereof disposed with the tip positioned an initial distance from a sample and a circuit electrically coupled to a substrate on which the sample is layered and the cantilever to simultaneously apply direct and alternating currents to deflect the cantilever and to cause the tip to oscillate about a point at a second distance from the sample, which is shorter than the initial distance, between first positions, at which the tip contacts the sample, and second positions, at which the tip is displaced from the sample. | 12-29-2011 |
| 20110167524 | METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE - An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging. | 07-07-2011 |
| 20120030846 | Atomic Force Microscopy System and Method for Nanoscale Measurement - An atomic force microscope (AFM) system capable of imaging multiple physical properties of a sample material at the nanoscale level. The system provides an apparatus and method for imaging physical properties using an electromagnetic coil placed under the sample. Excitation of the coil creates currents in the sample, which may be used to image a topography of the sample, a physical property of the sample, or both. | 02-02-2012 |
| 20120030845 | SCANNING PROBE MICROSCOPE - An atomic force microscope (AFM) ( | 02-02-2012 |
| 20120124706 | SCANNING PROBE MICROSCOPE AND METHOD FOR DETECTING PROXIMITY OF PROBES THEREOF - A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes. | 05-17-2012 |
| 20120131702 | Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample - An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging. | 05-24-2012 |
| 20100205697 | APPROACH METHOD FOR PROBE AND SAMPLE IN SCANNING PROBE MICROSCOPE - In detecting a displacement of a cantilever ( | 08-12-2010 |
| 20100175154 | Apparatus for Controlling Z-Position of Probe - Apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface. | 07-08-2010 |
| 20110191917 | Harmonic Correcting Controller for a Scanning Probe Microscope - A scanning probe microscope and method for operating the same to correct for errors introduced by a repetitive scanning motion are disclosed. The microscope includes an actuator that moves the probe tip relative to the sample in three directions. The actuator executes a repetitive motion, characterized by a repetitive motion frequency, in one of the directions, and changes a distance between the sample and the probe tip in a second one of the directions. A probe position signal generator generates a probe position signal indicative of a position of the probe tip relative to the cantilever arm. A probe signal correction generator generates a corrected probe position signal by correcting the probe position signal for errors introduced by the repetitive motion. A controller maintains the probe tip in a fixed relationship with respect to the sample in the second one of the dimensions based on the corrected probe position signal. | 08-04-2011 |
| 20120227138 | DISPLACEMENT DETECTION MECHANISM AND SCANNING PROBE MIRCOSCOPE USING THE SAME - Provided are a displacement detection mechanism for a cantilever which does not use an optical cantilever method or self-detection type displacement detection, and a scanning probe microscope using the same. A cantilever displacement detector constituted of an LC resonator and an F-V converter detects a change of capacitance between a cantilever and a sample surface so that a displacement of the cantilever can be detected. Thus, shape measurement and physical property measurement can be performed in a state in which light is blocked. Further, a change of a sample shape and physical property information can be measured between presence and absence of the light. | 09-06-2012 |
| 20120260374 | SCANNING THERMAL TWISTING ATOMIC FORCE MICROSCOPY - Provided are atomic force microscope probes, methods for making probes for use in atomic force microscopes and systems using such probes. The probes include at least a body portion and a cantilever portion. The cantilever portion may include a first surface and a second surface opposite the first surface. The cantilever portion further includes a first material arranged on the first surface, such that the cantilever portion twists about a center axis of the cantilever portion when the cantilever portion is heated. The first material may be arranged symmetrically or non-symmetrically on a portion of the first surface, or it may be arranged non-uniformly over the first surface. The cantilever portion of the probe may also include a second material arranged on the second surface of the cantilever portion. The first and second materials have a different thermal expansion than the material forming the cantilever portion. | 10-11-2012 |
| 20120331592 | Interatomic force measurements using passively drift compensated non-contact in situ calibrated atomic force microscopy - quantifying chemical bond forces between electronic orbitals by direct force measurements at subatomic lateral resolution - Interatomic forces are measured with subatomic lateral resolution by in situ calibrated non-contact and passively thermal drift compensated atomic force microscopy in aqueous or generally liquidous environment; interatomic forces acting between distinct electronic orbitals of front-most tip atom and opposing sample atom can be quantitatively measured with subatomic lateral resolution. Calibration standard is a CaCO | 12-27-2012 |
| 20110277192 | SCANNING PROBE MICROSCOPE WITH DRIFT COMPENSATION - A scanning probe microscope compensates for relative drift between its upper structure that includes a probe and a scanner that scans the probe in a straight line and a lower structure that includes a sample stage and a scanner that scans the sample stage in a plane. A light beam from the upper structure is initially aligned with a center of a position sensitive photo detector (PSPD) disposed on the lower structure at a predetermined position of the sample stage and any subsequent misalignments of the light beam with the center of the PSPD at the predetermined position of the sample stage are determined to be caused by drift and compensated by the scanning probe microscope. | 11-10-2011 |
| 20120151637 | SCANNING TYPE PROBE MICROSCOPE - The present invention provides a fast-operating and stable scanning probe microscope configured to detect the interaction between a probe and a sample to avoid generation of a harmonic component. An oscillation circuit ( | 06-14-2012 |
| 850002000 | Coarse scanning or positioning | 3 |
| 20110203020 | Atomic force microscopes and methods of measuring specimens using the same - Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen. | 08-18-2011 |
| 20120110707 | Metrology Probe and Method of Configuring a Metrology Probe - A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input. | 05-03-2012 |
| 20110055982 | A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME - It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range. | 03-03-2011 |
| 850003000 | Fine scanning or positioning | 7 |
| 20110035848 | Laser guided tip approach with 3D registration to a surface - The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface. | 02-10-2011 |
| 20110016592 | ITERATIVE FEEDBACK TUNING IN A SCANNING PROBE MICROSCOPE - A method, system, device, and software for automatically determining PI feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process. | 01-20-2011 |
| 20090300804 | MONOLITHIC NANOSCALE ACTUATION - An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions. | 12-03-2009 |
| 20090133167 | METHOD FOR OBTAINING A SCANNING TRANSMISSION IMAGE OF A SAMPLE IN A PARTICLE-OPTICAL APPARATUS - A method for improving the resolution of STEM images of thick samples. In STEM, the diameter of the cross-over depends on the opening half-angle α of the beam and can be as low as 0.1 nm. For optimum resolution an opening half-angle is chosen at which the diameter of the cross-over R(α) shows a minimum. For thick samples the resolution is, for those parts of the sample removed from the cross-over plane, limited by the convergence of the beam, resulting in a diameter D of the beam at the surface of the sample. The opening angle is chosen to balance the contribution of convergence and of diameter of the cross-over by choosing an opening half-angle smaller than the optimum opening half-angle. Effectively the sample is then scanned with a beam that has a substantially constant diameter over the length of the sample material through which the electrons have to travel. | 05-21-2009 |
| 20090077696 | Methods, Systems and Computer Program Products for Measuring Critical Dimensions of Fine Patterns Using Scanning Electron Microscope Pictures and Secondary Electron Signal Profiles - A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection pattern. A determination is made as to whether the inspection pattern is defective by comparing the scanning electron microscope picture of the inspection pattern to a scanning electron microscope picture of a sample pattern, and by comparing the scanning electron microscope secondary electron signal profile of the inspection pattern to a scanning electron microscope secondary electron signal profile of a sample pattern. | 03-19-2009 |
| 850004000 | Circuits or algorithms therefor | 2 |
| 20130042375 | CONTROL SYSTEM FOR A SCANNING PROBE MICROSCOPE - A control system | 02-14-2013 |
| 20110296561 | CONTROL SYSTEM FOR SCANNING PROBE MICROSCOPE - A control system ( | 12-01-2011 |
