Class / Patent application number | Description | Number of patent applications / Date published |
359200800 | Electromechanical driver | 21 |
20100085619 | Amplified bimorph scanning mirror, optical system and method of scanning - An amplified bimorph scanning mirror for use in various optical systems, an optical coherence tomography scanner incorporating the amplified bimorph scanning mirror, and a method for manufacturing the foregoing are described. A method for optically scanning a target site using the amplified bimorph scanning mirror is further provided. The scan range which can be obtained by exemplary implementations of the present invention can be larger than the scan range made available by conventional scanners. | 04-08-2010 |
20100195180 | DEFLECTING MIRROR FOR DEFLECTING AND SCANNING LIGHT BEAM - The deflecting mirror includes a fixed base member; a mirror having a reflection surface; a support member swingably supporting the mirror; a pair of driving beam members, each having a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides; and a piezoelectric member fixed to each driving beam member and extending from the first or second end of each driving beam member while having length not longer than about half the length of the driving beam member. The piezoelectric member and the driving beam members constitute piezoelectric unimorph or bimorph structure. By applying voltage to the piezoelectric member, the driving beam members are driven at the same time in the same direction, thereby vibrating the support member in a direction perpendicular to the reflection surface of the mirror, resulting in swinging of the mirror. | 08-05-2010 |
20100245956 | OPTICAL REFLECTION DEVICE - An optical reflection device includes a flexible substrate, an elastic member provided, an elastic portion connected with an end of the flexible substrate, an optical reflector coupled with the flexible substrate via the first elastic portion, a first electrode layer provided on the flexible substrate, and a piezoelectric layer provided on the first electrode layer. The optical reflection device may have a small size. | 09-30-2010 |
20100309536 | OPTICAL DEFLECTOR, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND IMAGE PROJECTOR - An optical deflector, including a fixed base; a mirror having a light reflection surface; a pair of elastic support members oscillatably supporting the mirror; and a pair of drive beams formed of a beam-shaped member on which a piezoelectric is fixed, wherein the elastic support members and the drive beams in longitudinal directions are almost orthogonally located and connected with each other, other ends of the drive beams are fixed on the fixed base, the mirror and the pair of elastic support members are cantilevered by the pair of drive beams relative to the fixed base, and bending oscillation of the drive beams causes torsional deformation of the elastic members to rotationally oscillate the mirror. | 12-09-2010 |
20110085221 | MODIFYING THE OUTPUT OF A LASER TO ACHIEVE A FLAT TOP IN THE LASER'S GAUSSIAN BEAM INTENSITY PROFILE - A laser beam is periodically deflected before being directed into a sample volume. The beam is deflected at a frequency such that the beam makes one or more passes through the sample volume while data are collected from the sample volume. The amplitude of motion of the beam, the dwell time of the beam at any given point, and the Gaussian intensity profile of the beam cooperate to produce an effective flat topped illumination profile for the light that is incident on specimens in the sample volume. The total photon exposure at any given point in the sample volume is a function of both the beam intensity and the dwell time at that location. Therefore, a longer dwell time and lower intensity at the edge of the profile are in balance with a shorter dwell time and higher intensity at the center of the profile. | 04-14-2011 |
20120113492 | OPTICAL REFLECTION ELEMENT - An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode. | 05-10-2012 |
20120140302 | MEMS-BASED OPTICAL IMAGE SCANNING APPARATUS, METHODS, AND SYSTEMS - Disclosed are MEMS-based optical image scanners and methods for imaging using the same. According to one embodiment, a 3-D scanner for endoscopic imaging is provided, which includes a MEMS mirror for 1-D or 2-D lateral scanning and a MEMS lens for scanning along the optical axis to control the focal depth. The MEMS lens can be a microlens bonded to a MEMS holder. Both the MEMS holder and the MEMS mirror can be electrothermally actuated. A single-mode fiber can be used for both delivering the light to and receiving the returning light from an object being examined. | 06-07-2012 |
20120170094 | SCANNING LENS APPARATUS ADOPTING BIMORPH ACTUATOR - A scanning lens apparatus with a bimorph actuator is provided. The scanning lens apparatus includes: a housing having a hollow cylindrical shape; a first suspension and a second suspension which are parallel to each other, and a first end of each of the first suspension and the second suspension is fixed on an inner surface of the housing; first bimorphs disposed on first surfaces of the first and second suspensions and second bimorphs disposed on second surfaces facing the first surfaces of the first and second suspensions; a first lens which is fixed between a second end of the first suspension and a second end of the second suspension; a second lens fixed parallel to the first lens between the first and second suspensions; and an object lens disposed on an end of the housing to face the second lens with respect to the first lens. | 07-05-2012 |
20120236379 | LADAR USING MEMS SCANNING - A scanning mirror includes a substrate that is patterned to include a mirror area, a frame around the mirror area, and a base around the frame. A set of actuators operate to rotate the mirror area about a first axis relative to the frame, and a second set of actuators rotate the frame about a second axis relative to the base. The scanning mirror can be fabricated using semiconductor processing techniques or processing methods that do not require clean room process. Drivers for the scanning mirror may employ feedback loops that operate the mirror for triangular motions. Some embodiments of the scanning mirror can be used in a LADAR system for a Natural User Interface of a computing system. | 09-20-2012 |
20120327494 | OPTICAL DEFLECTOR INCLUDING PIEZOELECTRIC SENSOR ON SUPPORT BODY - In an optical deflector including a mirror, a support body, and a piezoelectric actuator connected to the support body for rocking the mirror with respect to an axis of the mirror, at least one piezoelectric sensor is provided on the support body to sense a rocking vibration of the mirror caused by the piezoelectric actuator. | 12-27-2012 |
20130063800 | MIRROR DRIVING APPARATUS, METHOD OF DRIVING SAME AND METHOD OF MANUFACTURING SAME - An aspect of the present invention provides a mirror driving apparatus, including: a mirror section having a reflecting surface which reflects light; a pair of piezoelectric actuator sections arranged on either side of the mirror section; coupling sections which respectively connect one end of each of the piezoelectric actuator sections to an end portion of the mirror section which is distant from an axis of rotation of the mirror section in a direction along the reflecting surface and perpendicular to the axis of rotation; a fixing section which supports another end of each of the piezoelectric actuator sections; and a perpendicular movement suppressing structure which suppresses translational motion of the axis of rotation of the mirror section in a direction perpendicular to the reflecting surface, one end of the perpendicular movement suppressing structure being connected to the fixing section and another end thereof being connected to the mirror section. | 03-14-2013 |
20130063801 | SCANNER APPARATUS HAVING ELECTROMAGNETIC RADIATION DEVICES COUPLED TO MEMS ACTUATORS - A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and is moveably coupled to the distal portion of the member. The electromagnetic radiation device is configured to move in a first plane of movement to a first position to direct the electromagnetic radiation along a first path and configured to move in the plane of movement to a second position to direct the electromagnetic radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator is coupled to the electromagnetic radiation device, wherein the MEMS actuator is configured to move in a first direction to move the electromagnetic radiation device to the first position and configured to move in a second direction to move the electromagnetic radiation device to the second position. Other scanning and robotic structure devices are disclosed. | 03-14-2013 |
20130083379 | OPTICAL SCANNING DEVICE - An optical scanning device includes a mirror part including a mirror reflecting surface to reflect incident light, a pair of torsion bars configured to support the mirror part from both sides and configured to forma first axis around which to swing the mirror part by a torsional motion thereof so as to deflect the reflected light, and at least one stress alleviation area configured to alleviate a stress generated by the torsional motion of the torsion bars. The alleviation area is provided between an intersection of a second axis perpendicular to the first axis and passing through the center of the mirror reflecting surface and an edge of the mirror reflecting surface, and at least one of the torsion bars. | 04-04-2013 |
20130107337 | ACTUATOR, OPTICAL SCANNER AND IMAGE FORMING APPARATUS | 05-02-2013 |
20130163060 | Double-projection apparatus - Disclosed is a double-projection apparatus. The double-projection apparatus includes a frame, a carrier, two eccentric axles, a mirror-twisting axle, two scanning mirrors and two piezoelectric actuators. The carrier is provided in the frame, and includes an opening defined therein. Each of the eccentric axles includes an end connected to the frame and another end connected to the carrier. The mirror-twisting axle is provided in the opening. The scanning mirrors are provided in the opening and connected to two sides of the mirror-twisting axle. The piezoelectric actuators are connected to two sides of the frame. | 06-27-2013 |
20130258432 | OPTICAL DEFLECTOR - An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector A | 10-03-2013 |
20140313558 | MEMS Device with Asymmetric Flexures - A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly. | 10-23-2014 |
20150077823 | OPTICAL DEFLECTION DEVICE, APPARATUS INCLUDING THE SAME, AND METHOD OF CONTROLLING OPTICAL DEFLECTING DEVICE - An optical deflecting device includes a mirror having a reflecting surface and a support unit to support the mirror. The support unit includes a first drive unit. The first drive unit includes a plurality of continuously meandering first beams and a plurality of first piezoelectric members respectively provided to the plurality of first beams to swing the mirror around a first axis to deflect light incident on the reflecting surface of the mirror. Two voltages having non-similar waveforms are respectively applied in parallel to each two of the first piezoelectric members respectively provided to adjacent two of the first beams. | 03-19-2015 |
20150309307 | MIRROR DRIVE DEVICE AND DRIVING METHOD THEREOF - In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement. | 10-29-2015 |
20190146210 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT | 05-16-2019 |
20190146211 | MEMS REFLECTOR WITH CENTER SUPPORT | 05-16-2019 |