Class / Patent application number | Description | Number of patent applications / Date published |
359199400 | Electromechanically driven | 38 |
20090279156 | MEMS SCAN CONTROLLER WITH INHERENT FREQUENCY AND METHOD OF CONTROL THEREOF - A MEMS scan controller with inherent frequency and a method of control thereof applied to controllers of a MEMS mirror of bidirectional scanning laser printers are disclosed. The amplitude of the MEMS mirror is adjusted by using the inherent frequency so that scan data string is sent within effective scanning window with preset frequency of a laser source of the laser printer and a certain time interval. Thus the controller is simplified and the high precision scanning is achieved. | 11-12-2009 |
20100046053 | Optical scanning device, image display device and retinal scanning display provided with optical scanning device - An optical scanning device includes a dot clock generator which generates a dot clock having a dot clock cycle corresponding to a scanning direction of an optical flux by dividing master clocks which constitute basic clocks with frequency-dividing-number corresponding to a scanning position. The dot clock generator changes, with respect to a group of dot clocks which is formed of plural sets of dot clocks in which a frequency-dividing-number sequence pattern of the set of dot clocks which is constituted of two or more continuous dot clocks is repeated plural times on one scanning line, the frequency-dividing-number sequence pattern of each set of dot clocks while maintaining a total value of frequency dividing numbers necessary for generating each set of dot clocks at a constant value. | 02-25-2010 |
20100202029 | ACTUATOR, OPTICAL SCANNER AND IMAGE-FORMING DEVICE - An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part. | 08-12-2010 |
20100302609 | MEMS DEVICE HAVING REDUCED DEFORMATIONS - A MEMS apparatus is provided for scanning an optical beam. The MEMS apparatus is formed out of a pre-fabricated multi-layer device and comprises at least one tilting micro-mirror formed in a first active layer of that pre-fabricated multi-layer device and a support structure formed in a second layer of the pre-fabricated multi-layer device, and wherein the support structure is preferably formed by etching parts of the second layer to obtain a pre-determined shape of the supporting structure. | 12-02-2010 |
20110032590 | MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR, AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR - A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved. | 02-10-2011 |
20110292480 | BIAXIAL SCANNING MIRROR HAVING RESONANT FREQUENCY ADJUSTMENT - A biaxial micro-electromechanical (MEMS) device is disclosed. The device includes a gimbal rotatable about a gimbal axis of rotation. A pair of gimbal torsion bars connects the gimbal to a support along the gimbal rotation axis. A mirror plate is rotatable about a mirror axis of rotation, the mirror plate rotation axis being substantially perpendicular to the gimbal rotation axis. A pair of mirror plate torsion bars connects the mirror plate to the gimbal along the mirror plate axis of rotation. One or more gimbal moment-of-inertia-altering blocks are positioned on a surface of the mirror plate away from the gimbal axis of rotation. Additionally, one or more mirror plate moment-of-inertia-altering blocks are positioned on a surface of the mirror plate away from the mirror plate rotation axis such that the distance from the mirror plate axis determines a resonant frequency of the biaxial MEMS device. | 12-01-2011 |
20120062970 | ACTUATOR AND OPTICAL SCANNING DEVICE USING ACTUATOR - An actuator which tilts and drives an object to be driven around an axis of rotation includes: a pair of supporting beams arranged to support the object to be driven from both sides thereof in a direction parallel to the axis of rotation; a pair of movable beams arranged to sandwich the object to be driven and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a drive source arranged to apply bending vibration to the movable frames; and a pair of connection parts arranged to connect the movable frames and end portions of the supporting beams by a multiple-beam structure, convert the bending vibration into torsional vibration, and transmit the torsional vibration to the supporting beams. | 03-15-2012 |
20120218612 | TWO-DIMENSIONAL SCANNING AND REFLECTING DEVICE - A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency. | 08-30-2012 |
20120224239 | DRIVER FOR OPTICAL DEFLECTOR USING TWO ASYNCRONOUS SAW-TOOTH DRIVE VOLTAGES AND METHOD FOR SETTING THE SAME - An optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A driver applies a first drive voltage having first saw-tooth waves to the first group of piezoelectric actuators, and applies a second drive voltage having second saw-tooth waves opposite in phase with the first saw-tooth waves to the second group of piezoelectric actuators. A difference in phase between the first and second saw-tooth waves is a predetermined value to suppress resonation of harmonic components of the drive voltages with a natural frequency of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators. | 09-06-2012 |
20120224240 | DRIVER FOR OPTICAL DEFLECTOR USING COMPLEX-SINUSOIDAL-WAVE DRIVE VOLTAGES AND METHOD FOR SETTING THE SAME - A driver for driving an optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A first drive voltage for the first group of piezoelectric actuators has first repeated waves each with a first rising period. A second drive voltage for the second group of piezoelectric actuators has second repeated waves each with a second falling period corresponding to the first rising period of the first drive voltage and a second rising period corresponding to the first falling period of the first drive voltage. Frequencies of the first and second repeated waves exclude natural frequencies of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators. | 09-06-2012 |
20120243065 | TWO-DIMENSIONAL OPTICAL DEFLECTOR APPARATUS USING CURVED-TYPE SAW-TOOTH DRIVE VOLTAGES - In a two-dimensional optical deflector apparatus comprising an optical deflector and a driver for driving the optical deflector, the optical deflector includes a mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, and a second piezoelectric actuator of a meander type for rocking the mirror with respect to a second axis of the mirror perpendicular to the first axis. The driver generates a curved-type saw-tooth drive voltage and applies the curved-type saw-tooth drive voltage to the second piezoelectric actuator. | 09-27-2012 |
20120250127 | MIRROR DRIVING DEVICE AND MIRROR DRIVING METHOD - A mirror driving device of an aspect can include: a mirror part; a pair of inner actuator parts; a pair of outer actuator parts; fixing and supporting parts; an inner actuator driving voltage supply part; and an outer actuator driving voltage supply part. A driving voltage with a frequency inducing oscillation of the mirror part in a rotating direction of the mirror part associated with resonance drive of the corresponding actuator parts can be supplied from one driving voltage supply part of the inner actuator driving voltage supply part and the outer actuator driving voltage supply part to the inner actuator parts or the outer actuator parts corresponding to the one driving voltage supply part. Simultaneously with the resonance drive, a driving voltage for inclining the mirror part without exciting resonance drive can be supplied from the other driving voltage supply part to corresponding actuator parts. | 10-04-2012 |
20120250128 | ASSEMBLY HAVING A DISPLACEABLE PART AND METHOD FOR OPERATING AN ASSEMBLY HAVING A DISPLACEABLE PART - A component having a mounting support, a displaceable part, which is joined to the mounting support by at least one flexible joining component, and an actuator device. The actuator device is configured to set at least one subunit of the displaceable part and/or of the at least one flexible joining component into a first oscillatory motion along a first axis in such a manner, that the displaceable part may be set into an angular oscillatory motion about a first rotational axis. The actuator device is additionally configured to set the same and/or another subunit into a second oscillatory motion having a motion component along a second axis at an inclination to the first axis, in such a manner, that, in addition to the angular oscillatory motion, the displaceable part is displaceable about a second rotational axis. | 10-04-2012 |
20130027760 | OPTICAL PROBE USING SENSOR AND METHOD FOR CONTROLLING THE SAME - Disclosed are an optical probe using a sensor and a method for controlling the same. The optical probe includes: an optical converter to change a light path of light generated from a light source; a vibrator to convert an electrical signal into a mechanical motion; a transmission member to transmit the motion of the vibrator to the optical converter; a position sensor to sense the position of the optical converter; and a controller to adjust the position of the optical converter by controlling the vibrator based on the position sensed by the position sensor. | 01-31-2013 |
20130050791 | OPTICAL REFLECTION ELEMENT - An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part. | 02-28-2013 |
20130083378 | OPTICAL SCANNER APPARATUS AND OPTICAL SCANNER CONTROL APPARATUS - An optical scanner apparatus includes first and second torsion beams which support a mirror support portion supporting a mirror from both sides in an axial direction; first and second horizontal driving beams configured to include first and second horizontal driving sources, respectively, a connecting beam; a first piezo-electric sensor; first and second sensor interconnects connected to one of and the other of an upper electrode and a lower electrode of the first piezo-electric sensor, respectively, the first sensor interconnect and the second sensor interconnect being formed to extend toward the first horizontal driving beam and the second horizontal driving beam, respectively. | 04-04-2013 |
20130128328 | Optical scanning device and image display device - An optical scanning device includes movable mirror ( | 05-23-2013 |
20130201539 | ACTUATOR, OPTICAL SCANNER AND IMAGE FORMING DEVICE - An actuator, includes: a movable plate; a supporter to support the movable plate; a pair of linking portions to link the movable plate and the supporter so as to allow the movable plate to rotate relative to the supporter; and a piezoelectric element to rotate the movable plate. The piezoelectric element elongated and contracted by an energization twists the pair of linking portions to rotate the movable plate, and each of the pair of the linking portions includes an axial member extending from the movable plate and a returned portion that links the axial member and the supporter and is formed so as to return to a side adjacent to the movable plate. | 08-08-2013 |
20130271804 | VIBRATING ELEMENT HAVING MEANDERING SHAPE, AND OPTICAL REFLECTION ELEMENT - A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes. | 10-17-2013 |
20140002877 | ELECTROACTIVE OPTICAL DEVICE | 01-02-2014 |
20140016170 | ACTUATOR AND OPTICAL SCANNING DEVICE USING ACTUATOR - An actuator includes: a pair of supporting beams to support an object from both sides thereof in a direction parallel to an axis of rotation; a pair of movable beams to sandwich the object and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a plurality of beams to sandwich the pair of movable frames from both sides thereof in the direction perpendicular to the axis of rotation and support the object; a resonant drive source to apply bending vibration to the pair of movable frames and drive the object around the axis of rotation when a resonant drive operation is performed; and a non-resonant drive source to apply bending vibration to the plurality of beams and tilt and drive the object around a second axis of rotation perpendicular to the axis of rotation when a non-resonant drive operation is performed. | 01-16-2014 |
20140071507 | OPTICAL DEFLECTOR INCLUDING NARROW PIEZOELECTRIC SENSOR ELEMENT BETWEEN TORSION BAR AND PIEZOELECTRIC ACTUATOR - In an optical deflector including a mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror having an end coupled to an outer circumference of the mirror, a pair of piezoelectric actuators arranged between the support frame and the torsion bar, and a piezoelectric sensor inserted between the torsion bar and one of the piezoelectric actuators, the piezoelectric sensor includes at least one piezoelectric sensor element having a width being smaller than two-fifths of a width of the one of the piezoelectric actuators and being arranged at a wide portion within two-fifths of the width from an inner end of the one of the piezoelectric actuators. | 03-13-2014 |
20140085694 | PIEZOELECTRIC ACTUATOR AND OPTICAL SCANNING APPARATUS HAVING A PLURALITY OF PIEZOELECTRIC LAYERS - A piezoelectric actuator includes a plurality of piezoelectric layers, a plurality of electrodes between which each of the piezoelectric layers is placed so that the electrodes and the piezoelectric layers alternate with each other, and a substrate on which the plurality of piezoelectric layers and the plurality of electrodes are formed. | 03-27-2014 |
20140355088 | OPTICAL DEFLECTOR INCLUDING SEPARATED PIEZOELECTRIC PORTIONS ON PIEZOELECTRIC ACTUATORS AND ITS DESIGNING METHOD - In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions. | 12-04-2014 |
20140355089 | MEMS Device and Electronic Device Having Projector Function - In a MEMS device ( | 12-04-2014 |
20150062677 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT - A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element. | 03-05-2015 |
20150116806 | OPTICAL SCANNER, IMAGE DISPLAY DEVICE, HEAD MOUNT DISPLAY, AND HEADS-UP DISPLAY - An optical scanner includes: a movable plate which includes a light reflection unit; a first torsion bar which oscillatably supports the movable plate around a first axis; a first displacement member which is connected to the first torsion bar; a second torsion bar which oscillatably supports the first displacement member around a second axis; a second displacement member which is connected to the second torsion bar; and an actuator which is installed on the second displacement member and applies a displacement to the second displacement member so as to apply torsional deformation and bending deformation to the second torsion bar, in which the first displacement member includes a frame member surrounding the movable plate, and a damper which has a smaller thickness than that of the frame member and extends in a direction intersecting with a direction in which the second torsion bar extends from the frame member. | 04-30-2015 |
20150323783 | OPTICAL REFLECTION ELEMENT - An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts are disposed in each of the pair of vibration parts, and rotate the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts. | 11-12-2015 |
20150338645 | A MEMS DEVICE - A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms. | 11-26-2015 |
20150362724 | OPTICAL DEFLECTOR APPARATUS CAPABLE OF INCREASING OFFSET DEFLECTING AMOUNT OF MIRROR - In an optical deflector apparatus including a mirror, an inner frame, an outer frame, an inner piezoelectric actuator adapted to flex the mirror around an axis of the mirror, an outer piezoelectric actuator adapted to flex the mirror around the axis of the mirror, and a driver adapted to generate an offset drive voltage and a rocking drive voltage. The offset drive voltage is applied to a first piezoelectric actuator selected from the inner piezoelectric actuator and the outer piezoelectric actuator. The rocking drive voltage is applied to a second piezoelectric actuator different from the first piezoelectric actuator. | 12-17-2015 |
20160025966 | OPTICAL SCANNING APPARATUS - An optical scanning apparatus, including: an optical fiber ( | 01-28-2016 |
20160062108 | OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE INCLUDING THE SAME - An optical deflector includes a mirror unit and a support member. The mirror unit includes a vibration mirror part extending in a main scanning direction and a torsion bar part extending in a direction crossing the main scanning direction and supporting the vibration mirror part. The support member supports the mirror unit. The support member has a pair of solid parts. The pair of solid parts are arranged adjacent to the circumferential side surfaces of both end portions of the vibration mirror part in the main scanning direction and suppress a vortex generated when the vibration mirror part vibrates. The optical deflector further includes a positioning mechanism which performs positioning of the mirror unit for the support member so that a clearance distance between each solid part and the circumferential side surfaces of both end portions of the vibration mirror part becomes a preset setting distance. | 03-03-2016 |
20160131895 | OPTICAL DEVICE AND MANUFACTURING METHOD THEREOF - An optical device includes: an optical element having an optically functional surface which is pivotable; a base supporting the optical element; and a package housing the optical element and the base, in which the package includes: a wall that surrounds the optical element and the base; a window that closes a first opening defined by the wall, and forms an optical path to the optically functional surface, the window being transmissive to light; and a bottom plate that closes a second opening defined by the wall. | 05-12-2016 |
20160139405 | OSCILLATION DEVICE, SCANNING-TYPE SCANNER DEVICE, INFORMATION TERMINAL, PHASE-SHIFT AMOUNT ADJUSTMENT DEVICE, AND PHASE-SHIFT AMOUNT ADJUSTMENT METHOD - An oscillation device includes an oscillator, an oscillation detection unit that detects oscillation of the oscillator and outputs an oscillation detection signal, and a drive unit that generates a drive signal in keeping with the oscillation detection signal and outputs the drive signal to the oscillator. The drive unit includes a phase shift unit that shifts the phase to provide the drive signal as positive feedback to the oscillator. The phase shift unit includes a disturbance generating unit that outputs the periodic signal, a fluctuation unit that causes the amount of phase shift to fluctuate based on the periodic signal, a drive amplitude detection unit that detects the amplitude of the drive signal and outputs a drive amplitude signal, a product detection unit that outputs a detection signal after performing product detection on the drive amplitude signal based on the periodic signal, and an adjustment unit that adjusts the phase-shift amount based on the detection signal. | 05-19-2016 |
20160178895 | COUPLING SCHEMES FOR GIMBALED SCANNING MIRROR ARRAYS | 06-23-2016 |
20160187643 | Micro-Electromechanical System (MEMS) Devices and Methods for Packaging the Same - An assembly for a micro-electromechanical system (MEMS) device includes a sealed enclosure, a MEMS component disposed within the sealed enclosure, and a transformer arrangement. The transformer arrangement includes a first wire coil disposed outside the sealed enclosure, and a second wire coil disposed within the sealed enclosure and coupled to the MEMS component, the first and second wire coils being mutually inductively coupled to each other. Upon applying energy to the first wire coil outside the sealed enclosure, electrical energy is induced in the second wire coil within the sealed enclosure which is used to drive the MEMS component. | 06-30-2016 |
20160377859 | OPTICAL DEFLECTOR AND IMAGE FORMING APPARATUS INCLUDING THE SAME - An optical deflector is a piezoelectrically-driven optical deflector including a vibration mirror part having a reflection surface portion for reflecting light, a torsion bar part connected to the vibration mirror part, and a piezoelectric element that allows the vibration mirror part to swing around the torsion bar part so as to vibrate. Protruding portions are formed respectively at both end portions of the vibration mirror part in a main scanning direction of reflected light to protrude to an outer side in the main scanning direction. | 12-29-2016 |
20180024351 | OPENING ANGLE MEASUREMENT OF AN OSCILLATING MEMS MIRROR | 01-25-2018 |