Class / Patent application number | Description | Number of patent applications / Date published |
359199200 | Electrostatically driven | 15 |
20090109512 | MEMS SCANNER HAVING ACTUATOR SEPARATED FROM MIRROR - A microelectromechanical systems (MEMS) scanner is provided. The MEMS scanner includes: a stationary frame; a first movable stage disposed inside the stationary frame and suspended on the stationary frame so as to pivot and vibrate around a virtual center shaft; a second movable stage disposed inside the first movable stage and suspended on the first movable stage so as to pivot and vibrate around the center shaft; and an actuator providing a driving force used to pivot and vibrate the first movable stage. | 04-30-2009 |
20090153932 | MEMS devices and related scanned beam devices - Embodiments relate to a MEMS device including a scanner rotatable about at least one rotation axis, with the scanner having a characteristic resonant frequency. According to one embodiment, the MEMS device includes drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis. The drive signal has a drive frequency selected to be about equal to the characteristic resonant frequency or a sub-harmonic frequency of the characteristic resonant frequency. According to another embodiment, the drive electronics are operable to generate a drive signal having a plurality of drive-signal pulses that moves the scanner at an operational frequency and sensing electronics are operable to sense a position of the scanner only when the drive-signal pulses of the drive signal are not being transmitted by the drive electronics. The MEMS device embodiments may be incorporated in scanned beam imagers, endoscopes, and displays. | 06-18-2009 |
20090290205 | OPTICAL SCANNING DEVICE AND IMAGE FORMING APPARATUS USING THE SAME - An optical deflector of the present invention includes a movable mirror and torsion bars supporting the mirror and formed integrally with the mirror. The mirror reciprocatingly vibrates to reflect a light beam to thereby deflect it. The mirror is curved in the form of an arch in a section including at least the torsion bars. The mirror deforms little during vibration even if it is thin. Small power can cause such a thin mirror to vibrate with a large amplitude. | 11-26-2009 |
20110188104 | MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME - In a semiconductor mechanical structure, hinges may not be broken even when a mechanical shock is applied from outside, and thus, crashworthy is enhanced. A light scanning mirror includes a moving plate, a twin hinges constituting an axis of swing motion of the moving plate wherein an end of each hinge is connected to both ends of the moving plate, a stationary frame which is disposed to surround peripheries of the moving plate and supports another end of each of the twin hinges, and stoppers formed on the stationary frame. When the moving plate displaces in a lateral direction, the stopper contacts a side end portion of a recess of the moving plate, so that the displacement of the moving plate in the lateral direction is restrained. Thereby, the breakage of the hinges is prevented even when the mechanical shock is applied from outside. | 08-04-2011 |
20110228367 | GIMBALED SCANNING MICRO-MIRROR APPARATUS - Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom. | 09-22-2011 |
20120162735 | MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD - A mirror device includes a mirror ( | 06-28-2012 |
20120162736 | MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD - A mirror device includes a mirror ( | 06-28-2012 |
20120162737 | MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD - A mirror device includes a mirror ( | 06-28-2012 |
20120206782 | DEVICE FOR REDUCING SPECKLE EFFECT IN A DISPLAY SYSTEM - The present invention relates to a method and apparatus for speckle noise reduction in laser scanning display. In particular, a MEMS device which can superpose vibrational motion onto a biaxial scanning mirror is provided for reducing the effect of speckling. | 08-16-2012 |
20120262770 | ELECTROMECHANICAL TRANSDUCER AND PHOTOACOUSTIC APPARATUS - The present invention provides an electromechanical transducer which can prevent light from being incident on a receiving face, without deteriorating mechanical characteristics of a vibration film. The electromechanical transducer has at least one cell | 10-18-2012 |
20120287492 | MICROELECTROMECHANICAL SYSTEM WITH A CENTER OF MASS BALANCED BY A MIRROR SUBSTRATE - MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a minor substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member. | 11-15-2012 |
20120327493 | MIRROR DEVICE - In a biaxial mirror device where beams for connecting a first movable frame to a second movable frame and the second movable frame to a fixed frame pass a center of the mirror along an axis, an actuator for moving the second movable frame is composed of two first and second actuators and in a state that rotational angles of the movable frames are zero, the first actuator permits the second movable frame to start rotation and when it reaches a specific rotational angle, the second actuator permits the second movable frame to rotate, thus a large deflection angle is obtained even by the dissonance drive. | 12-27-2012 |
20130141768 | TILTING ACTUATOR WITH CLOSE-GAP ELECTRODES - A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure. | 06-06-2013 |
20130335797 | LASER BEAM SELECTORS - Various beam selectors for selectively placing one of at least two beams of light along the same output path are disclosed. In one aspect, a beam selector receives at least two substantially parallel beams of light. The beam selector includes a plate with an aperture so that when one of the at least two beams is selected for transmission, the beam selector directs only the selected beam along an output path through the aperture. The plate can also serve to block transmission of unselected beams. The output path through the aperture is the same for each of the at least two beams when each beam is selected. Beam selectors can be incorporated into fluorescence microscopy instruments to selectively place particular excitation beams along the same path through the microscope objective lens and into a specimen to excite fluorescence of fluorescent probes attached to a particular component of the specimen. | 12-19-2013 |
20140300942 | MEMS SCANNING MICROMIRROR - A MEMS micromirror ( | 10-09-2014 |