Class / Patent application number | Description | Number of patent applications / Date published |
702084000 | Quality control | 47 |
20080215275 | Overlay Inspection System - A registration detection system realizes both substrate-by-substrate correction and highly accurate correction of an exposure process. Therefore, the registration detection system includes: the first detection apparatus installed on a pathway to a collection in a transport container of substrates taken out of the transport container, after passing at least an exposure process and a development process, registration-detects the substrates after passing the development process at multiple points; the second detection apparatus outside the pathway, and performing registration-detecting the substrates at more points than the first detection apparatus when the substrates after passing the first detection apparatus and collected in the transport container are taken out from the transport container again; and a generation unit (image processing parts of the aforementioned detection apparatuses) that generates compensation data for the exposure process based on detection results by the first detection apparatus and detection results by the second detection apparatus. | 09-04-2008 |
20080215276 | IN-LINE OVERLAY MEASUREMENT USING CHARGED PARTICLE BEAM SYSTEM - A method and system for controlling an overlay shift on an integrated circuit is disclosed. The method and system comprises utilizing a scanning electron microscope (SEM) to measure the overlay shift between a first mask and a second mask of the circuit after a second mask and comparing the overlay shift to information about the integrated circuit in a database. The method and system includes providing a control mechanism to analyze the overlay shift and feed forward to the fabrication process before a third mask for error correction. | 09-04-2008 |
20080215277 | Method for manufacturing filter canisters and tracking quality assurance - An assembly line for manufacturing filter canisters is disclosed. The method for assembling filter canisters provides a unique serial number for each canister and a database that associates the component lot numbers, activated charcoal weight, and quality assurance test results with the serial number for the filter canister. The manufacturing method can be adapted for assembly of canisters with activated charcoal and an aerosol HEPA filter, canisters with activated charcoal only, and canisters with an aerosol HEPA filter only. Some embodiments can also enable different testing conditions and specifications, activated charcoal loading requirements, labeling specifications, and packaging requirements. | 09-04-2008 |
20080249729 | Systems and methods for real time hot mix asphalt production - A computer-implemented system performs analysis on a construction material mixture includes accessing a server located on a wide-area-network; sending information collected from the material mixture to the server; applying one or more test methodologies to the collected information; generating one or more reports from the test methodologies; and sending the one or more reports to a project manager. | 10-09-2008 |
20080249730 | System and Method For Determining Characteristics of a Moving Material by Using Microwaves - The present invention is related to a system for determining characteristics of a material. The system comprises means for sending and measuring microwave radiation, whereby the microwave radiation is used for determining the characteristics of the material | 10-09-2008 |
20080275659 | APPARATUS AND METHOD FOR FULLY AUTOMATED CLOSED SYSTEM QUALITY CONTROL OF A SUBSTANCE - The present invention provides an apparatus and method for automated quality control of a substance comprising a compartment wherein a substance is located, a monitoring device coupled to the compartment and configured to monitor at least one quality control parameter prior to an end-use of the substance, and a processor coupled to the monitoring device, wherein the monitoring device is configured to communicate data to the processor for comparing at least one quality control parameter to an end-use value, and wherein the processor is further configured to control the release of the substance from the compartment to its end-use. | 11-06-2008 |
20080288198 | Method and Apparatus for Generalized Performance Evaluation of Equipment Using Achievable Performance Derived from Statistics and Real-Time Data - A statistical performance evaluation system for a thermodynamic device and process uses the achievable performance derived from statistics and real-time data for the device or process to evaluate the current performance of the device or process, and to adjust the operations of the device or process accordingly, or provide feedback to an operator or other monitoring system for taking corrective actions to obtain performance approaching the optimum achievable performance. The achievable performance of the device or process is derived from data collected during operational periods when the best achievable performance is anticipated, such as after maintenance is performed, and supersedes the ideal or design performance specified by the manufacturer, which typically does not represent the actual operating conditions in the field, as the basis for evaluating the real-time performance of the device. The statistical performance evaluation system may set desired upper and lower limits for performance parameters, and compare desired limits to the actual performance parameter values to determine the readjustment to be made to the operation of the device or process. | 11-20-2008 |
20080319694 | Methods of monitoring acceptance criteria of vaccine manufacturing systems - Methods of monitoring an acceptance criteria of vaccine manufacturing processes are disclosed herein. Consequently, the methods and systems provide a means to perform high-quality manufacturing on an integrated level whereby vaccine manufacturers can achieve data and product integrity and ultimately minimize cost. | 12-25-2008 |
20090018788 | Normalization of process variables in a manufacturing process - A method of monitoring and controlling a manufacturing process is described. The value of a process variable is measured and treated. A measurement-based value is normalized using a normalization parameter associated with the process variable. Instances in which the normalized value fails to satisfy an acceptance criterion are identified so that, for example, corrective actions can be taken or the quality of the manufactured product can be diagnosed. | 01-15-2009 |
20090076755 | System and Method for Integrating the Internal and External Quality Control Programs of a Laboratory - A system and method that enables a laboratory to integrate its internal and external quality control programs to thereby control the quality of its laboratory testing services. The system comprises a storage device and a processor operable to maintain in the storage device a database identifying a plurality of laboratory tests and the corresponding internal laboratory statistical data, group statistical summary data and control rules. The processor is also operable to calculate a control range for a specified laboratory test by applying the group statistical summary data (and, in some cases, the internal laboratory statistical data) to the control rule corresponding to the specified laboratory test. Preferably, the processor is also operable to receive a test result from a laboratory instrument, and determine whether the test result falls within the calculated control range for the specified laboratory test. Various exemplary embodiments of the system and associated method are provided. | 03-19-2009 |
20090198465 | Proximity sensing systems for manufacturing quality control - A manufacturing quality control system for monitoring the proximity of a workpiece to a machine tool is disclosed. The system includes a proximity sensor attached to the machine tool for deriving a first distance measurement based upon the distance between the workpiece and the machine tool. A wireless transmitter generates a radio frequency signal including the first distance measurement. A remote data processing device communicates with the wireless transmitter to retrieve the first distance measurement and display various derivations of sensor data. | 08-06-2009 |
20090210183 | DETERMINING AND ANALYZING INTEGRATED CIRCUIT YIELD AND QUALITY - Methods, apparatus, and systems for computing, analyzing, and improving integrated circuit yield and quality are disclosed herein. For example, in one exemplary method disclosed herein, information is received from processing test responses of integrated circuits designed for functional use in electronic devices. In this embodiment, the information is indicative of integrated circuit failures observed during testing of the integrated circuits and of possible yield limiting factors causing the integrated circuit failures. Probabilities that one or more of the possible yield limiting factors in the integrated circuits actually caused the integrated circuit failures are determined by statistically analyzing the received information. The probabilities that one or more possible yield limiting factors actually caused the integrated circuit failures are reported. Tangible computer-readable media comprising computer-executable instructions for causing a computer to perform any of the described methods are also disclosed. | 08-20-2009 |
20090281755 | RECIPE PARAMETER MANAGEMENT SYSTEM AND RECIPE PARAMETER MANAGEMENT METHOD - In operation to obtain an optimal observation condition in a review system, the number of trial reviews can be reduced to improve efficiency of the operation. For a defect review conducted by the review system, a recipe parameter management system stores, as recipe parameter setting history in a recipe parameter setting history DB, recipe parameter setting values of recipe parameters set when the defect review is conducted, the number of trial reviews carried out until the recipe parameter setting values are set, and defect images obtained when the defect review is conducted. The apparatus displays, on a terminal, histograms and the numbers of trial reviews generated based on the recipe parameter setting history data stored in the recipe parameter setting history DB. Hence, the operator can easily obtain data regarding the recipe parameter setting in the past. | 11-12-2009 |
20090299669 | Method of yield management for semiconductor manufacture and apparatus thereof - A method of yield management for semiconductor manufacture and an apparatus thereof are provided. The method includes the following steps. Defect data of a layer of a semiconductor wafer is obtained, wherein the defect data includes sizes and locations of defects with respect to the layer. A layout with respect to the layer is obtained. And a critical area analysis is performed in parallel for the layer by a plurality of processing devices according to the defect data and the layout to determine locations of defects falling into a critical area of the layer among the locations of the defects. | 12-03-2009 |
20090299670 | PROCESS CONTROL DEVICE AND PROCESS CONTROL METHOD - A process control device includes: a determination unit reading device data generated by sensors provided at a process device and determining whether the process device is in a normal state or not; a correction value calculation unit calculating a correction value of a recipe by using measurement data generated by a measuring device provided at a succeeding stage of the process device and the device data when the determination unit determines that the process device is in the normal state, and calculating a correction value of the recipe by using the measurement data when the determination unit determines that the process device is not in the normal state; and a recipe correction unit correcting the recipe to be supplied to the process device based on the correction value outputted by the correction value calculation unit and transmitting the recipe to the process device. | 12-03-2009 |
20100094578 | METHOD AND DEVICE FOR RECALIBRATING PRODUCTION PROCESSES - Usually in automated production processes, new model ranges must be created and new calibrations carried out which may be costly, if a product is perfected or individual ingredients are exchanged. The aim of the invention is to simplify and also automate the recalibration. To achieve this, if there is a deviation from the product characteristics, a new calibration model is calculated, taking into consideration the modified ingredients. The process is modified as a result of the new calibration model in such a way that the model range that has been defined as the process objective is achieved again despite the modification of individual components. | 04-15-2010 |
20100217554 | Method of Inspecting Equipment - A method of inspecting equipment to ensure quality control that employs a computer program to assist in the inspection. The program contains an inspection protocol adapted to specific equipment. The inspector follows the protocol to inspect component parts of the equipment. The inspection protocol can only be closed, indicating completion of the inspection, when the protocol has been followed. The program is capable of generating a variety of inspection reports. | 08-26-2010 |
20100241380 | SYSTEM FOR MAPPING VEHICLE MUTILATION DEFECTS - A system and method for analyzing mutilation defects including a benchmark image of a part and a grid having a plurality of cells plotted onto the benchmark image is provided. The system further includes a computer processing unit having an interface operable to associate each identified mutilation defects with the associated cell where the mutilation defect occurred. The system and method further includes a plotting circuit having a code. Each of the labels is associated with a predetermined occurrence of mutilation defects within a given cell. The plotting circuit counts each occurrence of a mutilation defect within each of the cells and plots the associated label within the cell so as to improve the quality control of a part by providing a map showing the frequency of mutilation defects on a particular part of a mass produced product. | 09-23-2010 |
20110054819 | Method and System for Modeling in Semiconductor Fabrication - A method for use in semiconductor fabrication is provided that includes providing manufacturing data of a semiconductor process, providing a plurality of functional transformations, optimizing each of the functional transformations based on the manufacturing data, selecting one of the functional transformations that has a least deviation with respect to the manufacturing data, predicting performance of the semiconductor process using the selected transformation function, and controlling a fabrication tool based on the predicted performance. | 03-03-2011 |
20110137596 | QUALITY CONTROL METHOD AND MICRO/NANO-CHANNELED DEVICES - Embodiments of the present invention comprise a quality control system and method for testing micro- or nano-channeled devices. The system and method can utilize a pressure-driven gas flow for the detection and quantification of structural defects. The test method and system are non-destructive and allow defects to be detected and classified quickly based on measured factors, such as mass flow rate for a given pressure differential. | 06-09-2011 |
20110137597 | METHOD AND APPARATUS FOR ANALYSIS OF CONTINOUS DATA USING BINARY PARSING - A method, apparatus, and a system for generating a binary mapping of wafer regions using measured value. A first measured value relating to processing a first workpiece is acquired. A second measured value relating to a second workpiece is acquired. At least a first region common to the first and second workpieces is defined. A determination is made as to whether the results associated with the first or second measured value is above a predetermined threshold. A first binary value is assigned to the first region based upon a determination that the results associated the first or second measured value data is above the threshold. | 06-09-2011 |
20110172942 | SYSTEMS AND METHODS FOR INDICATING AN AMOUNT OF USE OF A SENSOR - Aspects of the present disclosure include systems and methods for indicating an amount of use of a pulse oximetry sensor. According to one embodiment, the system includes an oximeter that monitors the amount of use for a given sensor. The oximeter and/or the sensor may advantageously include a visual alarm, an audio alarm, a vibrational alarm, a power down function, or the like, which can be activated when a predetermined amount of use has expired. According to another embodiment, the system includes a sensor having a memory device storing a unique identifier. | 07-14-2011 |
20110288803 | METHOD FOR INSPECTING QUALITY OF GLASS PLATE - The present invention provides a quality inspection method of a glass plate, which can predict the shape of the glass plate on a four-point supporting type actual measurement inspection stand from the shape of the glass plate on a three-point supporting type universal actual measurement inspection stand. | 11-24-2011 |
20110307203 | PREDICTIVE AND INTERNET-BASED SAMPLER CONTROL - Described is a system for remotely monitoring water quality at one or more locations via a web-enabled application. | 12-15-2011 |
20120158337 | Method and Integrated System for Improving Data and Service Quality with Respect to Measurement and Analysis of Reservoir Fluid Samples - A technique facilitates substantially improved service quality and data quality with respect to measurement and analysis of reservoir fluid samples. The technique integrates a variety of components which simplify the actions involved in measurement and analysis of the reservoir fluid samples. As a result, the reservoir fluid analysis process is more reliable and repeatable during many or all phases of the procedure from job initiation to output of the data as a final report. | 06-21-2012 |
20120283975 | SAMPLE ANALYZER AND DATA PROCESSING APPARATUS - A sample analyzer shows, on a display, a screen that includes a first quality control graph plotted by a time-series of quality control values, and a second quality control graph plotted by a time-series of quality control values; wherein when a first number of quality control values are included in the first quality control data in a predetermined period and a second number of quality control values, which is different from the first number, are included in the second quality control data in the predetermined period, the sample analyzer shows, on the screen, the first quality control graph of the first number of quality control values plotted in a range in the direction of the time axis of the graph and a second quality control graph of the second number of the second quality control values plotted in the range | 11-08-2012 |
20120290243 | METHOD FOR AUTOMATED DETECTION OF INDIVIDUAL PARTS OF A COMPLEX DIFFERENTIAL STRUCTURE - The invention relates to a method for the automated detection of individual parts of a complex differential structure. The method comprises the following steps:
| 11-15-2012 |
20120296592 | MULTIPLE INSPECTION SYSTEM AND METHOD THAT INSPECTS DIFFERENT MEDICATIONS - A multiple inspection system and method that inspects packages filled with at least two different medications that are to be consumed by a patient is described. The method includes filling each package with the at least two different medications. A package that is to be inspected is selected by a process control module. A first automated inspection examines the different medications with a first measurement device. A first measurement result is generated. A first automated inspection result is generated by comparing a first expected inspection value with the first measurement result. A second automated inspection having a second measurement device generates a second measurement result. A second automated inspection result is generated by comparing a second expected inspection value with the second measurement result. An analytical module then proceeds to compare the first automated inspection result and the second automated inspection result. | 11-22-2012 |
20130132015 | AUTOMATIC TESTING METHOD - An automatic testing method for controlling a manual test program to judge whether at least one tested object complies with a quality standard. The manual test program has a plurality of control items. The automatic testing method is executed by an electronic calculator. The automatic testing method includes steps of: (a) acquiring all control identification codes of all control items, and (b) successively performing the control items. | 05-23-2013 |
20130346007 | Characterizing an Elongated Textile Test Material - The measured values of a property of a yarn along its longitudinal direction are detected for the characterization of a yarn moved along its longitudinal direction. The values of a parameter of the yarn are determined from the measured values. An event field is provided, whose abscissa indicates an extension of parameter values in the longitudinal direction and whose ordinate indicates a deviation of the parameter from a set point value. Densities of events in the event field are determined from the values of the parameter and its extension in the longitudinal direction. A test material body is calculated in the event field as an area, which is delimited by the abscissa on the one hand, by the ordinate on the other hand, and further by a line which substantially follows a constant event density. The area is specified numerically. At least one value of the numerical specification is output as a characteristic of the yarn. | 12-26-2013 |
20140039822 | METHOD FOR IN-LINE DETERMINATION OF FILM THICKNESS AND QUALITY DURING PRINTING PROCESSES FOR THE PRODUCTION OF ORGANIC ELECTRONICS - The present invention is related to the in-line determination of thickness, optical properties and quality of thin films and multilayer structures of organic (conductors, semiconductors and insulators), hybrid (organic/inorganic) and inorganic (e.g. metals, oxides) materials in real-time by the use of Spectroscopic Ellipsometry—SE, during their printing and/or treating by roll-to-roll and sheet-to-sheet processes. SE unit is located on a stage with the possibility of movement in the lateral direction in relation to the movement of e.g. the roll, taking measurements in the spectral range of Vis-fUV from 1.5-6.5 eV. The method can be used in-line to monitor and control in real-time the printing and surface or bulk treatment processes on flexible rolls or sheets both along and across the web or sheet, in the air or in an environment of nitrogen or other gas, resulting in the production of flexible organic and printed electronic devices such as organic photovoltaics, organic light-emitting diodes etc with controlled and tailored functional properties. | 02-06-2014 |
20140067303 | Screening Method for Electrolytic Capacitors - A method of iteratively screening a sample of electrolytic capacitors having a predetermined rated voltage is provided. The method can include measuring a first leakage current of a first set of capacitors, calculating a first mean leakage current therefrom, and removing capacitors from the first set having a first leakage current equal to or above a first predetermined value, thereby forming a second set of capacitors. The second set can be subjected to a burn in heat treatment where a test voltage can be applied, then a second leakage current of the second set of capacitors can be measured and a second mean leakage current can be calculated. Capacitors having a second leakage current equal to or above a second predetermined value can be removed from the second set, forming a third set of capacitors. Because of such iterative screening, the capacitors in the third set have low failure rates. | 03-06-2014 |
20140114597 | Systems, Methods and Metrics for Wafer High Order Shape Characterization and Wafer Classification Using Wafer Dimensional Geometry Tool - Systems and methods for improving results of wafer higher order shape (HOS) characterization and wafer classification are disclosed. The systems and methods in accordance with the present disclosure are based on localized shapes. A wafer map is partitioned into a plurality of measurement sites to improve the completeness of wafer shape representation. Various site based HOS metric values may be calculated for wafer characterization and/or classification purposes, and may also be utilized as control input for a downstream application. In addition, polar grid partitioning schemes are provided. Such polar grid partitioning schemes may be utilized to partition a wafer surface into measurement sites having uniform site areas while providing good wafer edge region coverage. | 04-24-2014 |
20140142881 | System and Method to Test and Certify Equipment for Regulatory Compliance - A system and method to test and certify equipment for regulatory compliance. The system and method are particularly directed to testing, certification and approval of gaming equipment, including electronic gaming machines such as slot and video games as well as gaming systems such as player tracking, slot accounting, and progressive systems. The method and system are implemented between a gaming laboratory and a manufacturer and provide efficiencies to increase the speed and reduce the costs of approving tested equipment. | 05-22-2014 |
20140172340 | DEBUGGING METHOD FOR PRE-ALIGNMENT - The application discloses a debugging method for pre-alignment applicable to an electronic device and the method includes: obtaining a preset voltage value which is an average voltage value of a first voltage value corresponding to a thin wafer placed on a table of the electronic device and a second voltage value corresponding to a thick wafer placed on the table of the electronic device; detecting and acquiring a first operation, and correcting a third voltage value of the electronic device according to the preset voltage value in response to the first operation so that a voltage difference between the third voltage value and the preset voltage value lies in a preset voltage range; detecting location of a flatten edge of the thick wafer on the table of the electronic device to obtain first location information, and detecting location of a flatten edge of the thin wafer on the table of the electronic device to obtain second location information; and detecting and acquiring a second operation, and correcting the second location information according to the first location information in response to the second operation so that an angle difference between the corrected second location information and the first location information lies in a preset angle range. | 06-19-2014 |
20140236515 | CLOUD-BASED ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED AND MATERIAL-RELATED DATA AND METHODS THEREFOR - Cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data and the correlated tool-related data and material-related data is employed by logic to perform, using a cloud computing approach, at least one of root-cause analysis, prediction model building and tool control/optimization. | 08-21-2014 |
20140236516 | METHOD AND APPARATUS FOR DETERMINING A CRITICAL DIMENSION VARIATION OF A PHOTOLITHOGRAPHIC MASK - The invention relates to a method for determining a critical dimension variation of a photolithographic mask which comprises (a) using layout data of the photolithographic mask to determine at least two sub-areas of the photolithographic mask, each sub-area comprising a group of features, (b) measuring a distribution of a transmission of each sub-area, (c) determining a deviation of the transmission from a mean transmission value for each sub-area, (d) determining a constant specific for each sub-area, and (e) determining the critical dimension variation of the photolithographic mask by combining for each sub-area the deviation of the transmission and the sub-area specific constant. | 08-21-2014 |
20140288864 | METHOD OF CALCULATING ASSEMBLY TIME AND ASSEMBLY TIME CALCULATING DEVICE - A non-transitory computer readable storage medium storing a program that causes a computer to execute a process, the process includes: acquiring animation data for displaying steps of assembling a product on a display with an animation; detecting change in a viewpoint of an animation from the acquired animation data; and calculating an estimate of an assembly time of the product based on the detected change in the viewpoint of the animation. | 09-25-2014 |
20140316732 | QUALITY CONTROL SYSTEM, METHOD AND COMPUTER READABLE MEDIUM FOR USE WITH BIOLOGICAL/ENVIRONMENTAL DIAGNOSTIC TEST DEVICES, USERS AND CONSUMABLES - A quality control (QC) system collects data associated with biological/environmental diagnostic test devices, users and consumables, and identifies corresponding parameters. The system determines when the data are outside the parameters, and then generates corresponding QC improvement data. A database receives and stores the QC improvement data for use in improved QC procedures. A related method and computer readable medium are also disclosed. | 10-23-2014 |
20140336966 | METHOD AND APPARATUS TO AUTOMATICALLY CREATE VIRTUAL SENSORS WITH TEMPLATES - A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template. | 11-13-2014 |
20150081241 | PRODUCTION SUPPORT SYSTEM, PRODUCTION SUPPORT METHOD, AND PRODUCTION SUPPORT PROGRAM - According to one embodiment, a production support system includes: a production information storage unit; a manufacturing apparatus information storage unit; an inspection/measurement apparatus information storage unit; a planned lot number calculation unit; a first control mode calculation unit. The first control mode calculation unit is configured to calculate an appropriate control mode from the number of products to be subjected to the control of the final quality, a relationship between fluctuation of the final quality and a number of products when performing a predetermined feedback type/feedforward type combined APC, fluctuation of the final quality when performing a feedforward type APC, and fluctuation of the final quality when not performing the feedback type/feedforward type combined APC. | 03-19-2015 |
20150309005 | METHOD FOR PRODUCING WEB-LIKE MATERIAL - A method for the production and/or processing of a web-shaped material, particularly paper, with at least one measuring system which records m measurement values y | 10-29-2015 |
20150338846 | A METHOD AND SYSTEM FOR QUALITY INSPECTION WITHIN A MULTI LAYER MANUFACTURING LIFECYCLE - The present relates to a method and system for performing quality inspection of a product, within a multi layer manufacturing lifecycle. For doing so, the present method and system receive, at a quality control platform, a quality control request for the product. The method and system process, at the quality control platform, the quality control request to generate a quality specification, and transmit the quality specification, from the quality control platform, to at least one portable quality inspection terminal. The method and system collect, at the at least one portable quality inspection terminal, quality data representative of a compliance of an article under inspection with the quality specification. The method and system process, at the at least one portable quality inspection terminal, the quality data to generate aggregated quality data; and transmit the aggregated quality data, from the at least one portable quality inspection terminal, to the quality control platform. The article under inspection is handled at a specific layer of the manufacturing lifecycle of the product. | 11-26-2015 |
20150377743 | IMPROVEMENT OF TIRE UNIFORMITY THROUGH IDENTIFICATION OF PROCESS EFFECTS USING REGRESSION ANALYSIS WITHOUT AZIMUTH DATA - Systems and methods for improving the uniformity of a tire based on estimated process harmonic magnitudes for one or more process effects are provided. Magnitudes of process harmonics associated with one or more candidate process effects can be determined from the observed magnitudes of one or more harmonics of measured uniformity parameters. The estimated process harmonic magnitude(s) can be determined without requiring phase angle or azimuth information associated with the observed magnitudes. The estimated process harmonic magnitude(s) can be determined by identifying a process harmonic magnitude pattern for identified candidate process effects. A model can be constructed correlating the candidate magnitudes specified by the process harmonic magnitude pattern with observed magnitudes of corresponding harmonics of a measured uniformity waveform. Regression or programming techniques can be used to estimate coefficients associated with candidate magnitude terms in the model. | 12-31-2015 |
20160004983 | METHOD AND APPARATUS FOR QUANTIFYING DIMENSIONAL VARIATIONS AND PROCESS CAPABILITY INDEPENDENTLY OF DATUM POINTS - A measurement system receives design values specifying measurement points of a first design and values corresponding to measurement points of a first part manufactured according to the first design using a first process. The system calculates a reference point of the first part and translates the received values based on a difference between reference points of the first part the first design. The system includes a rotation module that applies a rotational transformation with a first angle to the translated values. The system includes an error minimization module that determines a first value for the first angle that minimizes deviations between the transformed values and the specified design values. The system includes an error determination module that computes deviations between the transformed values and the specified design values. The system includes an analysis module that calculates a process metric of the first process based on the computed deviations. | 01-07-2016 |
20160018819 | IDENTIFYING REGISTRATION ERRORS OF DSA LINES - Methods and respective modules are provided, configured to identify registration errors of DSA lines with respect to guiding lines in a produced structure, by comparing a measured signature of the structure with simulated signatures corresponding to simulated structures having varying simulated characteristics, and characterizing the produced structure according to the comparison. The characterization may be carried out using electromagnetic characterization of a geometric model or in a model-free manner by analyzing model-based results. Thus, for the first time, positioning and dimensional errors of DSA lines may be measured. | 01-21-2016 |
20160033960 | SYSTEM AND METHOD FOR AUTOMATED OBJECT MEASUREMENT - A method for automated part probing using a physical machine defining a physical working volume, the method including: generating a virtual model based on a virtual part design received from a user account, the virtual model comprising a virtual part model, based on the virtual part design, virtually fixed to a virtual fixture plate arranged within a virtual working volume representative of the physical working volume; generating a probing routine based on the virtual model; sending the probing routine to the machine; receiving probe outputs from the machine; and validating the virtual model based on the probe outputs. | 02-04-2016 |