Class / Patent application number | Description | Number of patent applications / Date published |
702083000 | Sampling Inspection Plan | 30 |
20080270058 | COMBINE-INFORMATION PROCESSING APPARATUS, METHOD FOR PROCESSING COMBINE-INFORMATION, PROGRAM, AND RECORDING MEDIUM - In order to solve the conventional problem in which the occurrence of abnormal behaviors in a manufacturing apparatus cannot be properly determine in view of the variations in measured data caused by adjustment made to the manufacturing apparatuses, the combine-information processing apparatus comprises: an inspectional equation storage unit | 10-30-2008 |
20080270059 | MASK INSPECTION DNIR REPLACEMENT BASED ON LOCATION OF TRI-TONE LEVEL DATABASE IMAGES - 2P SHAPES - Methods, systems, program storage devices and computer program products for mask inspection that automate the detection and placement of do not inspect regions (“DNIR”) for intentionally induced defects on masks. A location of an intentional defect is identified on a mask, and then logic relating to this location is translated into a shape that represents a DNIR for the intentional defect. A second shape representing another DNIR of the mask is provided. It is then determined if the first and second shapes for DNIRs violate a processing rule of the inspection tool, and if so, the violated rule is corrected for by generating a single contiguous DNIR by overlapping the first and second shapes. The inspection tool then utilizes the first and second shapes representing DNIRs, along with any single contiguous DNIRs, to inspect the mask for unintentional defects while avoiding intentional defects. | 10-30-2008 |
20080312858 | SYSTEM AND METHOD FOR RULE-BASED DATA MINING AND PROBLEM DETECTION FOR SEMICONDUCTOR FABRICATION - A fabrication history of a group of wafers is provided, having a record for each wafer of the manufacturing events that did or did not occur in its fabrication, and having the measured value of a given target. A binary decision rule is formed based on the fabrication history, the rule being that if a wafer has a particular pattern of manufacturing events in its fabrication history then the statistic of the given fabrication target for that wafer is a first value; otherwise, the statistic is a second value having at least a given distance from the first value. The pattern of manufacturing events in the binary decision rule is identified in the generation of the binary decision rule. The identified pattern is significant with respect to the given target. | 12-18-2008 |
20090082983 | Method and Apparatus for Creating a Spacer-Optimization (S-O) Library - The invention can provide a method of processing a substrate using S-O processing sequences and evaluation libraries that can include one or more optimized spacer creation and evaluation procedures. | 03-26-2009 |
20090119048 | METHODS AND SYSTEMS FOR SEMICONDUCTOR TESTING USING REFERENCE DICE - Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted. | 05-07-2009 |
20090119049 | AUTOMATED DYNAMIC METROLOGY SAMPLING SYSTEM AND METHOD FOR PROCESS CONTROL - A system and method for optimizing and implementing a metrology sampling plan. A system is provided that includes a system for collecting historical metrology data from a metrology tool; and a reduction analysis system that compares an initial capability calculated from the historical metrology data with a recalculated capability for a reduced data set, wherein the reduced data set is obtained by removing a subset of data from the historical metrology data. | 05-07-2009 |
20090192743 | SAMPLING ESTIMATING METHOD, SAMPLING INSPECTION ESTIMATING APPARATUS, AND COMPUTER READABLE MEDIUM STORING SAMPLING INSPECTION ESTIMATING PROGRAM - A sampling inspection estimating method comprises determining an acceptable range of a measured value and an acceptable range of a acceptance probability, determining a first sampling plan to be inspected and a condition of calculating a first acceptance variables of lots, obtaining a first measured value of a production lot based on the determined first sampling plan, calculating first acceptance variables of lots based on the obtained first measured value and the determined condition of calculating the first acceptance variables of lots, calculating a first acceptance probability based on the first acceptance variables of lots, determining a second sampling plan to be inspected and a condition of calculating a second acceptance variables of lots, obtaining a second measured value of a production lot based on the determined second sampling plan, calculating second acceptance variables of lots based on the obtained second measured value and the determined condition of calculating the second acceptance variables of lots, calculating a second acceptance probability based on the second acceptance variables of lots, calculating operating characteristics of the first and second sampling plans based on the first acceptance probability and the second acceptance probability, and estimating the operating characteristics by using the determined acceptable range of the acceptance probability. | 07-30-2009 |
20090287441 | SYSTEM AND METHOD FOR SORTING DATA - A method and apparatus that enables a user to sort data from one or more sample lots, which may be obtained via a network, such as the Internet, into a composite parameter structure. The composite parameter structure is a function of one or more parameters corresponding to one or more characteristics associated with one or more sample lots. The composite parameter structure representation may be printed, stored, or transmitted to another location. A server device that is coupled and working in conjunction with a client device may implement the present invention. | 11-19-2009 |
20090306922 | Method and System for Classifying Defect Distribution, Method and System for Specifying Causative Equipment, Computer Program and Recording Medium - A production line includes an inspection step for acquiring inspection information representing positions of defects on each of substrates after an end of specified steps. With respect to m substrates subjected to the inspection step, a surface of each of the substrates is segmented into n regions, and defect density information having (m×n) components, which represent densities of defects contained in the regions, respectively, is acquired based on the inspection information. From the defect density information having (m×n) components, statistically mutually independent p (where p12-10-2009 | |
20100169036 | METHODS AND SYSTEMS TO ALIGN WAFER SIGNATURES - One embodiment relates to a computer method for aligning wafers processed in a semiconductor fabrication facility. In the method, a first arrangement of dies having a common functionality level is identified on a first wafer. A first alignment signature is assigned to the first wafer based on the first arrangement. A second arrangement of dies having the common functionality level is identified on a second wafer. A second alignment signature is assigned to the second wafer based on the second arrangement. The first alignment signature is compared to the second alignment signature, and the first and second wafers are selectively aligned based on a result of the comparison. Other systems and methods are also disclosed. | 07-01-2010 |
20100250174 | SAMPLE INSPECTION SYSTEM AND OPERATING METHOD FOR MANAGEMENT SERVER THEREOF - A management server of a sample inspection system includes sample processing information generated on the basis of inspection request data, facility data, a simulation execution portion and a window generation portion for generating a monitor window. The inspection request data contains a priority, an order time, a required time and inspection items and the sample processing information contains an inspection start time and an inspection estimate finish time. The monitor window has a work area in which the samples represented by sample bars parallel to the abscissa are arranged in a vertical direction and a past record and a future schedule are allocated to this abscissa with the present time as the base. The sample bars display a simulation execution portion for executing simulation on the basis of the inspection start time, the inspection estimate finish time and a delay time. The management server displays the simulation result. | 09-30-2010 |
20110071783 | Verification and modification method of rules of do-not-inspect regions, computer program, and apparatus for such verification and modification - The verification method of do-not-inspect region rules includes: an information storage process which includes storing information of a plurality of do-not-inspect regions which specifies each of the plurality of do-not-inspect regions, and storing a pixel size which defines a length of a single pixel; a minimum size verification process which includes, calculating a size of each of the plurality of do-not-inspect regions, and verifying whether a minimum size rule is obeyed, the minimum size rule requiring that the size of each of the plurality of do-not-inspect regions is equal to or greater than a single unit of the pixel size while referring to the pixel size; and a distance verification process which includes, calculating distances between every pair among the plurality of do-not-inspect regions by referring to the information of the plurality of do-not-inspect regions, and verifying whether a distance rule is obeyed when a distance between a pair among the plurality of do-not-inspect regions is greater than zero, the distance rule requiring that the distance is equal to or greater than a predetermined distance. | 03-24-2011 |
20110172941 | SCREENING APPARATUS, SCREENING METHOD, AND PROGRAM - A screening apparatus includes: a measurement unit measuring characteristics of a semiconductor device and reading an identification code allocated to the semiconductor device; a database storing a table representing a correspondence between an identification code and a fabrication condition of a semiconductor device; a conversion unit extracting, based on the identification code sent from the measurement unit, a corresponding fabrication condition from the database and associating the extracted fabrication condition with the characteristics corresponding to the fabrication condition; a characteristics reconstruction unit classifying the characteristics according to the fabrication condition sent from the conversion unit; and an evaluation and analysis unit evaluating and analyzing the characteristics classified by the characteristics reconstruction unit according to the fabrication condition in a predetermined manner and determining a semiconductor device to be screened. | 07-14-2011 |
20110202298 | METHOD AND SYSTEM FOR PROVIDING PROCESS TOOL CORRECTABLES USING AN OPTIMIZED SAMPLING SCHEME WITH SMART INTERPOLATION - The present invention may include performing a first measurement on a wafer of a first lot of wafers via an omniscient sampling process, calculating a first set of process tool correctables utilizing one or more results of the measurement performed via an omniscient sampling process, randomly selecting a set of field sampling locations of the wafer of a first lot of wafers, calculating a second set of process tool correctables by applying an interpolation process to the randomly selected set of field sampling locations, wherein the interpolation process utilizes values from the first set of process tool correctables for the randomly selected set of field sampling locations in order to calculate correctables for fields of the wafer of the first lot not included in the set of randomly selected fields, and determining a sub-sampling scheme by comparing the first set of process tool correctables to the second set of correctables. | 08-18-2011 |
20110231131 | FORGED SEAL IMPRINT INSPECTION METHOD AND RECORDING MEDIUM - Disclosed herein is a forged seal imprint checking method which includes a step ST- | 09-22-2011 |
20110320149 | Selecting One or More Parameters for Inspection of a Wafer - Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are provided. | 12-29-2011 |
20120004879 | CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPLE INSPECTION METHOD - An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes settings for controlling charged particle columns which irradiate charged particles on samples with a plurality of characteristics. Plural inspection recipes are arranged and displayed on a coordinate system which is specified by a plurality of axes having characteristic values (robustness variable of charge up, throughput of defect inspection, and accuracy of defect inspection) which have mutually trade-off relationships. | 01-05-2012 |
20120123717 | ELECTRONIC DEVICE AND METHOD OF OPTIMIZING MEASUREMENT PATHS - A method of optimizing measurement paths computes a minimum bounding box for the measurement elements on a product, and computes a capturing range of a lens of a measurement machine. The method divides the minimum bounding box into M*N partitions according to the capturing range, and assigns a number to each of the M*N partitions. The method puts the number of a partition which exclusively encloses a measurement element into a first array, and puts a number set that includes the numbers of the partitions which all enclose a measurement element into a second array, and lists the numbers of the partitions in order according to the first array and the second array to generate a measurement path. | 05-17-2012 |
20120185194 | SUBSTRATE INSPECTION SYSTEM - An inspection item recognition unit references a component type table and recognizes inspection items necessary for specified components, an inspection means selection unit references an inspection machine capability table and selects an inspection means that performs inspection of each inspection item. By this processing, inspection menu information is generated, the inspection menu information associating, for each component, the component type and position information of the component with the inspection item performed on the component and information indicating the inspection means. Each inspection machine receives input of the inspection menu information and recognizes a component for which inspection by the inspection machine is defined, and generates inspection information by associating an inspection program with the position information of the component according to the component type of the component. | 07-19-2012 |
20120253723 | SYSTEM AND METHOD FOR PRODUCING STATISTICALLY VALID ASSAY MEANS AND RANGES FOR QUALITY CONTROL MATERIALS - A method of establishing statistically valid assay means and ranges for quality control materials, used to qualify medical testing machines, utilizes tests on a new lot of quality control material to establish an assay mean, and uses data from a database of historical test results to establish an assay range. The system may estimate the variability of test results from prior lot data, and then compute the limits of the assay range such that a new test on a new lot of the quality control material will be expected to fall within the range with a specified probability. Because historical data is used to estimate the test variability, the number of new tests required to specify a statistically valid mean and range may be dramatically reduced, as compared with establishing the mean and range based only on tests of the new lot of material. | 10-04-2012 |
20120310576 | MANUFACTURE OF ENGINEERING COMPONENTS WITH DESIGNED DEFECTS FOR ANALYSIS OF PRODUCTION COMPONENTS - An engineering component with a designed defect and use of an engineering component with a designed defect to evaluate a production component are disclosed. A test component having a known defect is manufactured. This known defect is a flaw that is intentionally included in the test component. The test component is then analyzed to obtain a test profile of the defect. In addition, the engineering component to be tested is analyzed to obtain a production profile. This production profile is compared with the test profile to determine whether the engineering component has a defect that corresponds to the known defect. | 12-06-2012 |
20130018618 | METHOD AND SYSTEM FOR AUTOMATED QUALITY CONTROL PLATFORM - A method and system for performing automated quality control analysis of a plurality of radiopharmaceuticals are provided. The method includes uniquely identifying each of the plurality of radiopharmaceuticals, and identifying and implementing a tailored quality control program for each of the radiopharmaceuticals. The method further includes automatically performing a plurality of selected quality control tests for each of the radiopharmaceuticals based on the tailored quality control program, and collecting information produced by the plurality of selected quality control tests. | 01-17-2013 |
20130046498 | MULTI-TESTING PROCEDURE MANAGEMENT METHOD AND SYSTEM - A multi-testing procedure management method tests on a testing platform a plurality of function units of a plurality of devices under testing (DUTs) by a test schedule management list enumerating a plurality of schedule items. The method includes determining, by comparing the schedule items on the test schedule management list, whether the schedule items are directly applicable to testing the function units; keeping the schedule items in case of affirmative determination; and deleting the schedule items in case of negative determination. The method further includes selecting existing built-in items from a test library or creating and adding new test items to the test schedule management list to eventually produce a revised version of the test schedule management list for testing the DUTs. A multi-testing procedure management system is further provided. | 02-21-2013 |
20130304408 | Measurement Recipe Optimization Based On Spectral Sensitivity And Process Variation - An optimized measurement recipe is determined by reducing the set of measurement technologies and ranges of machine parameters required to achieve a satisfactory measurement result. The reduction in the set of measurement technologies and ranges of machine parameters is based on available process variation information and spectral sensitivity information associated with an initial measurement model. The process variation information and spectral sensitivity information are used to determine a second measurement model having fewer floating parameters and less correlation among parameters. Subsequent measurement analysis is performed using the second, constrained model and a set of measurement data corresponding to a reduced set of measurement technologies and ranges of machine parameters. The results of the subsequent measurement analysis are compared with reference measurement results to determine if a difference between the estimated parameter values and the parameter values derived from the reference measurement is within a predetermined threshold. | 11-14-2013 |
20140180618 | TEST DEVICE FOR TESTING STARTUP FUNCTION OF ELECTRONIC DEVICE - A test device for testing an electronic device, includes an alternating current (AC) input port used to connect to an AC power source. An AC output port used to connect to a power port of the electronic device, a switch unit connected between the AC input port and the AC output port, a first USB port, a startup control unit, and a power on maintaining unit. The switch unit is used to establish a connection between the AC input port and the AC output port, or to cut off the connection. The first USB port connects to a second USB port of the electronic device. The startup control unit turns on the switch unit after the electronic device is turned off for a predetermined time. The power on maintaining unit maintains the switch unit to turn on after the electronic device is turned on. | 06-26-2014 |
20140324374 | EXTRACTING ATTRIBUTE FAIL RATES FROM CONVOLUTED SYSTEMS - A method, system or computer usable program product for extracting attribute fail rates for manufactured devices including testing manufactured devices having a set of attributes to provide a set of test results stored in memory; generating a yield model of the manufactured devices parsed by the set of attributes; populating the yield model based on the set of test results; and utilizing a processor to perform statistical analysis of the populated yield model to extract fail rates of the selected subset of attributes. | 10-30-2014 |
20150081240 | SYSTEM AND METHOD FOR GENERATING A TEST FILE - A test system for generating a test file includes an information obtaining module, a file header generation module, an identification module, and a measuring module. The information obtaining module reads an original information of an electronic component. The file header generation module generates a file header according to the original information. The identification module determines a manufacturing process of the electronic component according to the original information, and generates test items according to the manufacturing process. The measuring module activates measuring program according to the manufacturing process to measure the electronic device for obtain a measuring result corresponding to the test items. | 03-19-2015 |
20150112625 | TESTING APPARATUS AND METHOD FOR TESTING PRODUCT - A testing apparatus and a method for testing products are provided. The method includes the following steps. First, a first testing procedure is performed to at least one product to be tested in response to a test starting command to test a plurality of first items to be tested of the at least one product. When the first testing procedure corresponding to the at least one product to be tested and a manual testing procedure of the at least one product to be tested are finished, a testing result of each of the at least one produce is reported. The manual testing procedure of each of the at least one product to be tested is configured to test a plurality of second items to be tested of the at least one product. | 04-23-2015 |
20160018818 | IN-SITU MONITORING OF FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS - Techniques include receiving a design of an integrated computational element (ICE), the ICE design including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the plurality of layers of the ICE in accordance with the ICE design; performing at least two different types of in-situ measurements; predicting, using results of the at least two different types of in situ measurements, performance of the ICE relative to the ICE design; and adjusting the forming of the layers remaining to be formed, at least in part, by updating the ICE design based on the predicted performance. | 01-21-2016 |
20160147220 | RELIABILITY MONITOR TEST STRATEGY DEFINITION - In an approach to determining reliability test strategy, one or more computer processors receive a volume forecast for manufacturing one or more products. The one or more computer processors receive information describing the one or more products. The one or more computer processors retrieve reliability test requirements associated with the one or more products. The one or more computer processors retrieve reliability test capability of one or more reliability test vendors. The one or more computer processors determine, based, at least in part, on the volume forecast, the information describing the one or more products, the reliability test requirements, and the reliability test capability of the one or more reliability test vendors, a reliability test strategy. | 05-26-2016 |