Class / Patent application number | Description | Number of patent applications / Date published |
438080000 | Lateral series connected array | 46 |
20090098679 | CMOS SOLID-STATE IMAGING DEVICE AND METHOD OF MANUFACTURING THE SAME AS WELL AS DRIVE METHOD OF CMOS SOLID-STATE IMAGING DEVICE - A CMOS solid-state imaging device configured to restrain the occurrence of white spots and dark current caused by pixel defects, and also to increase the saturation signal amount. | 04-16-2009 |
20090191663 | Method for producing a photovoltaic module - For producing a photovoltaic module ( | 07-30-2009 |
20090215218 | METHOD FOR MAKING SOLAR CELL HAVING CRYSTALLINE SILICON P-N HOMOJUNCTION AND AMORPHOUS SILICON HETEROJUNCTIONS FOR SURFACE PASSIVATION - A thin silicon solar cell is described. Specifically, the solar cell may be fabricated from a crystalline silicon wafer having a thickness of approximately 50 micrometers to 500 micrometers. The solar cell comprises a first region having a p-n homojunction, a second region that creates heterojunction surface passivation, and a third region that creates heterojunction surface passivation. Amorphous silicon layers are deposited on both sides of the silicon wafer at temperatures below approximately 400 degrees Celsius to reduce the loss of passivation properties of the amorphous silicon. A final layer of transparent conductive oxide is formed on both sides at approximately 165 degrees Celsius. Metal contacts are applied to the transparent conductive oxide. The low temperatures and very thin material layers used to fabricate the outer layers of used to fabricate the outer layers of the solar cell protect the thin wafer from excessive stress that may lead to deforming the wafer. | 08-27-2009 |
20090311824 | METHOD FOR FABRICATING ORGANIC LIGHT EMITTING DISPLAY DEVICE - A fabricating method of an organic light emitting display device including performing a sheet test as a sheet unit on a mother board formed with panels and sheet wires for supplying test signals to the panels on the mother board, the method including: forming drive elements for driving the panels in each of the panels and forming sheet wires electrically coupled to at least a portion of the drive elements and shorting bar electrically coupling all of the sheet wires; forming organic light emitting diodes in each of the panels and isolating the sheet wires from each other by etching open regions of the shorting bar apart from contact regions of the shorting bar for coupling the shorting bar to the sheet wires; performing the sheet test on the plurality of panels by supplying the test signals to the sheet wires; and separating the panels by scribing the mother board. | 12-17-2009 |
20090317937 | Maskless Doping Technique for Solar Cells - A improved, lower cost method of producing solar cells utilizing selective emitter design is disclosed. The contact regions are created on the substrate without the use of lithography or masks. The method utilizes ion implantation technology, and the relatively low accuracy requirements of the contact regions to reduce the process steps needed to produce a solar cell. In some embodiments, the current of the ion beam is selectively modified to create the highly doped contact regions. In other embodiments, the ion beam is focused, either through the use of an aperture or via adjustments to the beam line components to create the necessary doping profile. In still other embodiments, the wafer scan rate is modified to create the desired ion implantation pattern. | 12-24-2009 |
20090317938 | ADJUSTMENT OF MASKS BY RE-FLOW - As a step in performing a process on a structure, a hole pattern is provided in a thin layer of organic resin masking material formed over the structure to provide a process mask. A processing step is then performed through the openings in the mask, and after a processing step is completed the mask is adjusted by a re-flow process in which the structure is placed into an atmosphere of solvent vapor of a solvent of the mask material. By way of the re-flow process, the mask material softens and re-flows to reduce the size of the openings in the mask causing edges of the surface areas on which the processing step was performed to be covered by the mask for subsequent processing steps. | 12-24-2009 |
20090325340 | Plasma vapor deposition system and method for making multi-junction silicon thin film solar cell modules and panels - A plasma vapor deposition system for making multi-junction silicon thin film solar cell modules and panels including a flexible substrate disposed about and removably supported by a dual-walled cylindrical substrate support for axially rotating the flexible substrate about its longitudinal axis, the dual-walled cylindrical substrate support comprising an inner wall spaced apart by an outer wall to define a coaxial cavity, a plasma vapor deposition torch located substantially adjacent to the flexible substrate for depositing at least one thin film material layer on an outer surface of the flexible substrate; and a traversing platform for supporting the rotatable substrate support relative to the plasma vapor deposition torch, the rotatable substrate support being traversed along its longitudinal axis by the traversing platform. | 12-31-2009 |
20100035374 | Method for manufacturing a photovoltaic module - For the manufacture of a photovoltaic module ( | 02-11-2010 |
20100068849 | MANUFACTURING METHOD OF TRANSLUCENT SOLAR CELL - A translucent solar cell and a manufacturing method thereof are provided. The translucent solar cell at least includes a substrate, a front electrode layer, a photoconductive layer, and a back electrode layer stacked in order. Therein, a plurality of apertures are formed on the front electrode layer. In addition, a plurality of light-transmissive regions are formed on the back electrode layer and further extended in a depth direction so as to reach the plurality of apertures on the front electrode layer. Thus, the projected area of each light-transmissive region is within and smaller than that of the corresponding aperture. | 03-18-2010 |
20100216276 | Method for Electrically Connecting Photovoltaic Cells in a Photovoltaic Device - A method is disclosed for simultaneously forming the reflector of a photovoltaic concentrator and the electrical connections between a plurality of photovoltaic cells. In some embodiments a method for producing a photovoltaic device is disclosed using triangular prisms to concentrate light onto silicon cells, thereby reducing the amount of photovoltaic silicon required for generation of electrical power from sunlight without reducing the amount of light accepted by the device. | 08-26-2010 |
20100297806 | METHOD OF MANUFACTURING SOLAR CELL MODULE - While using the same laser device, a slit (S | 11-25-2010 |
20100304526 | Method of making a photovoltaic module - Photovoltaic module comprising a transparent substrate ( | 12-02-2010 |
20110033970 | METHODS AND RELATED SYSTEMS FOR THIN FILM LASER SCRIBING DEVICES - Methods and related systems for fabricating a solar-cell assembly are provided. An example method comprises forming a series of layers and scribing a series of aligned interconnect lines in the layers prior to forming any isolation line related features. The example method provides for the use of contiguously-scribed interconnect lines as compared to an existing method where at least one interconnect line is segmented to avoid scribing through a previously-formed isolation line related feature located where an isolation line is to be scribed. The ability to use contiguously-scribed interconnect lines may improve the throughput of the fabrication process. | 02-10-2011 |
20110300663 | Method of manufacturing a monolithic thin-film photovoltaic device with enhanced output voltage - The invention provides a method of manufacturing a monolithic thin-film photovoltaic cell or module with enhanced output voltage as high as 100 V or higher in a single microelectronic process without connecting in series a plurality of premanufactured solar cells. The method consists of forming a plurality of adjacent individual TSCs arranged on a common transparent substrate in the longitudinal direction of the substrate. Each TSC consists of a pair of PV cells having PIN and NIP structures, respectively, with substantially coplanar position of a P-doped layer of one of the cells with respect to an N-doped layer of another cell of the pair. A tunnel junction is formed between the cells of the pair by overlapping P-doped and N-doped layers in the area near the common transparent substrate. The alternating PIN and NIP structures are achieved by forming projections in a continuous monolithic structure of one type and filling the spaces between the projections with the material of the inverse structure of the other type. | 12-08-2011 |
20110300664 | SOLAR CELL INTERCONNECTION, MODULE AND PANEL METHOD - A laminated module or panel of solar cells and a laminating method for making same comprise a top layer of melt flowable optically transparent molecularly flexible thermoplastic and a rear sheet of melt flowable insulating molecularly flexible thermoplastic both melt flowing at a temperature between about 80° C. and 250° C. and having a low glass transition temperature. Solar cells are encapsulated by melt flowing the top layer and rear sheet, and electrical connections are provided between front and back contacts thereof. Light passing through the transparent top layer impinges upon the solar cells and the laminated module exhibits sufficient flexural modulus without cross-linking chemical curing. Electrical connections may be provided by melt flowable electrically conductive molecularly flexible thermoplastic adhesive or by metal strips or by both. | 12-08-2011 |
20120015472 | METHOD OF PRODUCING SOLAR CELL MODULE - On a substrate is formed a transparent and conductive front electrode layer, on which is formed a photoelectric conversion unit that generates an electric power by a light. On the photoelectric conversion unit is formed a transparent and conductive film, on which a silver-containing back electrode layer. On the back electrode layer is formed further a back electrode reinforcing film formed by UV-irradiation of, or by heating of, or by heating after UV-irradiation of a layer that is obtained by applying a composition for reinforcing film on the back electrode layer with a wet coating method. | 01-19-2012 |
20120028404 | METHODS OF TEMPORALLY VARYING THE LASER INTENSITY DURING SCRIBING A PHOTOVOLTAIC DEVICE - Methods for laser scribing a film stack including a plurality of thin film layers on a substrate are provided. A pulse of a laser beam is applied to the film stack, where the laser beam has a power that varies as a function of time during the pulse according to a predetermined power cycle. For example, the pulse can have a pulse lasting about 0.1 nanoseconds to about 500 nanoseconds. This pulse of the laser beam can be repeated across the film stack to form a scribe line through at least one of the thin film layers on the substrate. Such methods are particularly useful in laser scribing a cadmium telluride thin-film based photovoltaic device. | 02-02-2012 |
20120077302 | LEAD WIRE CONNECTION APPARATUS AND CONNECTION METHOD OF SEMICONDUCTOR CELLS - Convey means for pitch-feeding the semiconductor cell to which the conductive tapes have been attached, lead wire processing means for forming-processing the lead wire, provisional pressure-bonding means which is provided at a part opposed to the semiconductor cell that is pitch-fed, holds the lead wires which are forming-processed, repeats provisional pressure-bonding of the lead wires to the conductive tapes provided on the upper surface and lower surface of the semiconductor cell that is pitch-fed, and alternately connects the upper surfaces and lower surfaces of the neighboring semiconductor cells, and main pressure-bonding means which is disposed on a downstream side of the provisional pressure-bonding means in a direction of conveyance of the semiconductor cell, and which mainly pressure-bonds, simultaneously, the paired upper and lower lead wires which have been provisionally pressure-bonded to the upper surface and lower surface of the semiconductor cell. | 03-29-2012 |
20120094425 | ABLATIVE SCRIBING OF SOLAR CELL STRUCTURES - Provided herein are improved methods of laser scribing photovoltaic structures to form monolithically integrated photovoltaic modules. The methods involve forming P1, P2 or P3 scribes by an ablative scribing mechanism having low melting, and in certain embodiments, substantially no melting. In certain embodiments, the methods involve generating an ablation shockwave at an interface of the film to be removed and the underlying layer. The film is then removed by mechanical shock. According to various embodiments, the ablation shockwave is generated by using a laser beam having a wavelength providing an optical penetration depth on the order of the film thickness and a minimum threshold intensity. In some embodiments, photovoltaic materials can be scribed using picosecond pulse widths and certain wavelength and laser fluence levels. | 04-19-2012 |
20120196398 | PHOTODIODE ARRAY, METHOD FOR MANUFACTURING PHOTODIODE ARRAY, EPITAXIAL WAFER, AND METHOD FOR MANUFACTURING EPITAXIAL WAFER - Provided are a photodiode array and its manufacturing method, which maintain the crystalline quality of an absorption layer formed on a group III-V semiconductor substrate to obtain excellent characteristics, and which improve the crystallinity at the surface of a window layer; an epitaxial wafer used for manufacturing the photodiode array; and a method for manufacturing the epitaxial wafer. A method for manufacturing a photodiode array | 08-02-2012 |
20120202313 | METHOD AND APPARATUS FOR FORMING THE SEPARATING LINES OF A PHOTOVOLTAIC MODULE WITH SERIES-CONNECTED CELLS - For forming the separating lines, ( | 08-09-2012 |
20120214271 | MANUFACTURE METHOD FOR PHOTOVOLTAIC MODULE - The invention permits a plurality of strips of resin adhesive film having a desired width and unwound from a single feeding reel to be simultaneously pasted on a solar cell. For this purpose, the invention comprises the steps of: unwinding a resin adhesive film sheet from a reel on which the resin adhesive film sheet is wound; splitting the unwound resin adhesive film into two or more film strips in correspondence to lengths of wiring material to bond; pasting the strips of resin adhesive film on an electrode of the solar cell; and placing the individual lengths of wiring material on the electrode of the solar cell having the plural strips of resin adhesive film pasted thereon and thermally setting the resin adhesive film by heating so as to fix together the electrode of the solar cell and the wiring material. | 08-23-2012 |
20120276681 | SERIAL CONNECTION OF THIN-LAYER SOLAR CELLS - The invention relates to a serial connection of thin layer solar cells. The aim of the invention is to provide a structuring method which provides a reliable and effective connection, prevents short-circuits and enlarges usable solar cell surfaces. The aim of the invention is achieved according to claims | 11-01-2012 |
20120295395 | METHOD FOR PRODUCING AN ARRAY OF THIN-FILM PHOTOVOLTAIC CELLS HAVING A TOTALLY SEPARATED INTEGRATED BYPASS DIODE ASSOCIATED WITH A PLURALITY OF CELLS AND METHOD FOR PRODUCING A PANEL INCORPORATING THE SAME - A method for producing an array a thin-film solar cell with a cell level integrated bypass diode, the includes forming at least three series-connected solar cells; totally separating a bypass diode from a selected parent solar cell; connecting the semiconducting material of the first type of the photovoltaic junction layer of the bypass diode with the semiconducting material of the second type of any one chosen solar cell in the array; and connecting the semiconducting material of the second type of the photovoltaic junction layer of the bypass diode with the semiconducting material of the first type of any other chosen solar cell in the array so that the bypass diode is connected in parallel and in opposition to both the one chosen solar cell and the other chosen solar cell. | 11-22-2012 |
20130084673 | METHOD FOR MANUFACTURING SEE-THROUGH SOLAR BATTERY MODULE - A method for manufacturing a see-through solar battery module includes disposing a first mask above a transparent substrate, forming a plurality of metal electrode layers alternately arranged on the transparent substrate, disposing a second mask above the transparent substrate, forming a photoelectric transducing layer on each metal electrode layer by the second mask, removing a part of each photoelectric transducing layer along a first direction to expose a part of each metal electrode layer, forming a transparent electrode layer on each photoelectric transducing layer and each metal electrode layer, and removing a part of each transparent electrode layer and a part of each photoelectric transducing layer to expose a part of each metal electrode layer so as to make the plurality of metal electrode layers and the transparent electrode layer in series connection along a second direction respectively. | 04-04-2013 |
20130122639 | AUTOMATED ASSEMBLY METHOD FOR THE PRODUCTION OF INTERCONNECTED THIN FILM SOLAR CELL MODULES - A method of manufacturing electrically interconnected solar cell assemblies, including the steps of: positioning at least a first interconnect element ( | 05-16-2013 |
20130189810 | Nanostructure and Photovoltaic Cell Implementing Same - Nanostructures and photovoltaic structures are disclosed. A nanostructure according to one embodiment includes an array of nanocables extending from a substrate, the nanocables in the array being characterized as having a spacing and surface texture defined by inner surfaces of voids of a template; an electrically insulating layer extending along the substrate; and at least one layer overlaying the nanocables. A nanostructure according to another embodiment includes a substrate; a portion of a template extending along the substrate, the template being electrically insulative; an array of nanocables extending from the template, portions of the nanocables protruding from the template being characterized as having a spacing, shape, and surface texture defined by previously-present inner surface of voids of the template; and at least one layer overlaying the nanocables. | 07-25-2013 |
20130280853 | Combinatorial Methods for Making CIGS Solar Cells - The present disclosure is directed to methods of forming different types of Cu | 10-24-2013 |
20140038343 | METHOD FOR MANUFACTURING SOLAR CELL MODULE PROVIDED WITH AN EDGE SPACE - The solar cell module having a preferable edge space that prevents characteristics of a solar cell such as conversion efficiency from being deteriorated without making processes complicated is provided. In a method for manufacturing a solar cell module including a substrate glass, a first layer formed on the substrate glass and a second layer formed on the first layer, the method includes a step of forming a first edge space having a first width by removing the first layer and the second layer by the first width from an end part of the glass substrate and a step of forming a second edge space by removing only the second layer by a second width from the end part of the glass substrate, and the width of the second edge space is larger than the width of the first edge space. | 02-06-2014 |
20140154833 | MANUFACTURING METHOD FOR DETECTION APPARATUS - A manufacturing method for a detection apparatus is provided. The method includes depositing a first impurity semiconductor layer and a first intrinsic semiconductor layer in this order on a plurality of first electrodes arranged in an array above a substrate. The method also includes patterning the first intrinsic semiconductor layer and the first impurity semiconductor layer and thereby dividing the first intrinsic semiconductor layer and the first impurity semiconductor layer so as to cover each of the plurality of first electrodes separately. The method further includes depositing a second intrinsic semiconductor layer on the patterned first intrinsic semiconductor layer. | 06-05-2014 |
20140213013 | PHOTOVOLTAIC INTERCONNECT SYSTEMS, DEVICES, AND METHODS - Photovoltaic modules may include multiple flexible thin film photovoltaic cells electrically connected in series by a substantially transparent top sheet having an embedded conductive wire grid pattern. Methods of manufacturing photovoltaic modules including integrated multi-cell interconnections are provided. | 07-31-2014 |
20140273332 | METHOD FOR PRODUCING PHOTOVOLTAIC DEVICE ISOLATED BY POROUS SILICON - Photovoltaic devices are produced using a minimally modified standard process flow by forming lateral P-I-N light-sensitive diodes on silicon islands that are isolated laterally by trenches performed by RIE, and from an underlying support substrate by porous silicon regions. P+ and N+ doped regions are formed in a P− epitaxial layer, trenches are etched through the epitaxial layer into a P+ substrate, a protective layer (e.g., SiN) is formed on the trench walls, and then porous silicon is formed (e.g., using HF solution) in the trenches that grows laterally through the P+ substrate and merges under the island. The method is either utilized to form low-cost embedded photovoltaic arrays on CMOS IC devices, or the devices are separated from the P+ substrate by etching through the porous silicon to produce low-cost, high voltage solar arrays for solar energy sources, e.g., solar concentrators. | 09-18-2014 |
20150318427 | PHOTOVOLTAIC DEVICE ASSEMBLY AND METHOD - The present invention is premised upon a connector device and method that can more easily electrically connect a plurality of PV arrays and/or locate these arrays upon a building or structure. It also can optionally provide some additional components (e.g. a bypass diode and/or an indicator means) and can enhance the serviceability of the array. | 11-05-2015 |
20150325730 | INTEGRATED THIN FILM SOLAR CELL INTERCONNECTION - Photovoltaic modules may include multiple flexible thin film photovoltaic cells electrically connected in series, and laminated to a substantially transparent top sheet having a conductive grid pattern facing the cells. Methods of manufacturing photovoltaic modules including integrated multi-cell interconnections are 5 provided. Methods may include steps of coordinating, integrating, and registering multiple rolls of substrates in continuous processes. | 11-12-2015 |
20160005898 | METHOD FOR PRODUCING A THIN FILM CELL ARRANGEMENT - The present invention relates to a method for the production of a thin-film solar cell array in which a plurality of individual thin-film solar cells are applied on a substrate. The individual thin-film solar cells are thereby deposited one above the other in regions so that an overlapping region is produced from respectively one pair of two individual thin-film solar cells; in this region, a series connection of the two thin-film solar cells forming the pair is present. In addition, the thin-film solar cell array has a transition region in which the thin-film solar cell applied on the first solar cell is converted into a layer situated below. | 01-07-2016 |
20160043314 | METHOD OF MANUFACTURING INVERTED ORGANIC SOLAR MICROARRAY FOR APPLICATIONS IN MICROELECTROMECHANICAL SYSTEMS - The fabrication and characterization of large scale inverted organic solar array fabricated using all-spray process is disclosed. Solar illumination has been demonstrated to improve transparent solar photovoltaic devices. The technology using SAM has potential to revolute current silicon-based photovoltaic technology by providing a complete solution processable manufacturing process. The semi-transparent property of the solar module allows for applications on windows and windshields. The inventive arrays are more efficient than silicon solar cells in artificial light environments, permitting use of the arrays in powering microelectromechanical systems and in integration with microelectromechanical systems. | 02-11-2016 |
20160104730 | PHOTODIODE INSULATION STRUCTURE - A structure of insulation between photodiodes formed in a doped semiconductor layer of a first conductivity type extending on a doped semiconductor substrate of the second conductivity type, the insulating structure including a trench crossing the semiconductor layer, the trench walls being coated with an insulating layer, the trench being filled with a conductive material and being surrounded with a P-doped area, more heavily doped than the semiconductor layer. | 04-14-2016 |
20160111467 | SOLID-STATE IMAGING APPARATUS, SOLID-STATE IMAGING APPARATUS MANUFACTURING METHOD, AND ELECTRONIC APPARATUS - There is provided a solid-state imaging apparatus including a plurality of photoelectric conversion regions which photoelectrically convert light incident from a rear surface side of a semiconductor substrate, element isolation regions formed between the plurality of photoelectric conversion regions arranged in a matrix shape, and shielding members formed on upper surfaces of the element isolation regions. The element isolation regions have high impurity concentration regions of a high impurity concentration connected to at least a part of the shielding members. | 04-21-2016 |
20160111468 | METHOD OF FABRICATING MULTI-WAFER IMAGE SENSOR - A method of fabricating an image sensor includes forming a pixel array in an imaging region of a semiconductor substrate and forming a trench in a peripheral region of the semiconductor substrate after forming the pixel array. The peripheral region is on a perimeter of the imaging region. The trench is filled with an insulating material. An interconnect layer is formed after filling the trench with insulating material. A first wafer is bonded to a second wafer. The first wafer includes the interconnect layer and the semiconductor substrate. A backside of the semiconductor substrate is thinned to expose the insulating material. A via cavity is formed through the insulating material. The via cavity extends down to a second interconnect layer of the second wafer. The via cavity is filled with a conductive material to form a via. The insulating material insulates the conductive material from the semiconductor substrate. | 04-21-2016 |
20160111582 | MODULAR INTERDIGITATED BACK CONTACT PHOTOVOLTAIC CELL STRUCTURE ON OPAQUE SUBSTRATE AND FABRICATION PROCESS - A back contact integrated photovoltaic cell includes a substrate having a dielectric surface and a patterned metal layer with parallel spaced alternately positive and negative electrode fingers forming an interdigitated two-terminal structure over the dielectric surface of the substrate. A dielectric filler may be in the interstices of separation between adjacent spaced parts of the patterned metal layer. Parallel spaced strips, alternately of p | 04-21-2016 |
20160163910 | SYSTEMS AND METHODS FOR TARGETED ANNEALING OF PHOTOVOLTAIC STRUCTURES - A targeted-annealing system can automatically cure a conductive paste that may bind cascaded strips of a string. The targeted-annealing system can include a first heat-treating bar that may be heated to a first curing temperature, and can include a second heat-treating bar that may be heated to a second curing temperature. During operation, a controller of the targeted-annealing system can activate one or more actuators to conform the first heat-treating bar to a top surface of two cascaded strips, and conform the second heat-treating bar to a bottom surface of two cascaded strips. The first and second heat-treating bars may be aligned along an overlap portion between the two cascaded strips, and can heat the overlap portion to 160 degrees Celsius. | 06-09-2016 |
20160172519 | ELECTRODE SOLDERING METHOD FOR A BACK CONTACT SOLAR MODULE | 06-16-2016 |
20160190186 | THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF - A thin film transistor array panel includes a substrate, an insulation layer, a first semiconductor, and a second semiconductor. The insulation layer is disposed on the substrate and includes a stepped portion. The first semiconductor is disposed on the insulation layer. The second semiconductor is disposed on the insulation layer and includes a semiconductor material different than the first semiconductor. The stepped portion is spaced apart from an edge of the first semiconductor. | 06-30-2016 |
20160204302 | WIRE NETWORK FOR INTERCONNECTING PHOTOVOLTAIC CELLS | 07-14-2016 |
20160380017 | METHOD OF MANUFACTURING A PLURALITY OF ISLAND-SHAPED DIPOLES HAVING SELF-ALIGNED ELECTRODES - An electronic component includes a plurality of dipoles, each comprising an island solid with a base, a first electrode arranged at the top of the island and a second electrode arranged on the base. Its manufacturing includes forming, on the base, a layer of a material capable of being etched by means of a predetermined isotropic etching, forming, over the layer of material, solid patterns made of electrically-conductive material and inert to said etching, applying the isotropic etching of the thickness of material between said solid patterns to form islands totally overlooked by said solid patterns, and depositing electrically-conductive material on top of and between the islands to form the first and second electrodes of the dipoles. | 12-29-2016 |
20170236857 | PHOTOELECTRIC CONVERSION ARRAY SUBSTRATE, ITS MANUFACTURING METHOD, AND PHOTOELECTRIC CONVERSION DEVICE | 08-17-2017 |