Class / Patent application number | Description | Number of patent applications / Date published |
427100000 | Piezoelectric properties | 36 |
20080199598 | METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR AND METHOD OF MANUFACTURING LIQUID TRANSPORTING APPARTUS - A recess is formed on an upper surface of a vibration plate at a position corresponding to a pressure chamber. Next, a low-elasticity material having a lower modulus of elasticity than the vibration plate is filled in the recess. Then, aerosol including a piezoelectric material particles and carrier gas is sprayed on the upper surface of the vibration plate to form a piezoelectric layer. At this time, the particles of the piezoelectric material do not adhere to a surface of the low-elasticity material filled in the recess, and hence the piezoelectric layer can be formed only in an area excluding the surface of the low-elasticity material. Thus, there is provided a method of manufacturing a piezoelectric actuator, the method capable of easily preventing, when forming the piezoelectric layer by an aerosol deposition method, formation of the piezoelectric layer on a surface of the recess. | 08-21-2008 |
20080199599 | METHOD OF MANUFACTURING DIELECTRIC LAYER AND METHOD OF MANUFACTURING LIQUID JET HEAD - A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time. | 08-21-2008 |
20080213468 | PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING THE SAME, LIQUID-JET HEAD, METHOD OF MANUFACTURING THE SAME, AND LIQUID-JET APPARATUS - Disclosed are a piezoelectric element, which has a high withstand voltage and a longer durability life, a manufacturing method of the piezoelectric element, a liquid-jet head, a manufacturing method of the liquid-jet head, and a liquid-jet apparatus. The manufacturing method of a piezoelectric element includes the steps of: forming a piezoelectric layer by forming, on the lower electrode, a piezoelectric precursor film in which Pb, Zr and Ti are contained and the composition ratio of Pb, Zr and Ti becomes Pb/(Zr+Ti)=1.0 to 1.3 after the piezoelectric precursor film has been baked, and to which at least any one dopant selected from the group consisting of manganese, nickel and strontium is doped, and by then baking the piezoelectric precursor film for half an hour to three hours at 650 to 750° C.; and forming an upper electrode on the piezoelectric layer. | 09-04-2008 |
20080233277 | PIEZOELECTRIC THIN FILM, METHOD OF MANUFACTURING PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, AND INK JET RECORDING HEAD - There is disclosed a piezoelectric thin film having less non-uniform portion and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb | 09-25-2008 |
20080241362 | METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING LIQUID EJECTION HEAD - The method of manufacturing a piezoelectric element includes: a lower electrode forming step of forming a lower electrode on a surface of a substrate; a piezoelectric film deposition step of depositing a piezoelectric film made of a piezoelectric material by one of epitaxial growth and oriented growth onto a surface of the lower electrode reverse to a surface adjacent to the substrate; an upper electrode forming step of forming an upper electrode onto a surface of the piezoelectric film reverse to a surface adjacent to the lower electrode; and a polarization direction reversal step of reversing a polarization direction of the piezoelectric film by maintaining, after the upper electrode forming step, a state for a prescribed duration where a temperature of the piezoelectric film is set to a first temperature while application of an electric field to the piezoelectric film in a direction from the upper electrode toward the lower electrode is performed, then keeping the application of the electric field while lowering the temperature of the piezoelectric film to a second temperature lower than the first temperature, and then stopping the application of the electric field. | 10-02-2008 |
20080241363 | METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING LIQUID EJECTION HEAD - The method of manufacturing a piezoelectric element includes the steps of: a lower electrode forming step of forming a lower electrode on a surface of a substrate; a piezoelectric film deposition step of depositing a piezoelectric film made of a piezoelectric material by one of epitaxial growth and oriented growth onto a surface of the lower electrode reverse to a surface adjacent to the substrate; an upper electrode forming step of forming an upper electrode onto a surface of the piezoelectric film reverse to a surface adjacent to the lower electrode; and a polarization direction reversal step of reversing a polarization direction of the piezoelectric film by applying an alternating electric field of an intensity not lower than a coercive electric field of the piezoelectric material, between the upper electrode and the lower electrode, and then applying a direct electric field of an intensity not lower than the coercive electric field in a direction from the upper electrode toward the lower electrode. | 10-02-2008 |
20090053401 | Piezoelectric deposition for BAW resonators - Piezoelectric deposition for BAW resonators wherein a thin amorphous layer of AlN over the bottom electrode before depositing a second layer of AlN over the amorphous layer of AlN, the depositing occurring at a temperature allowing the deposited AlN to self-organize into a desired columnar phase. The bottom electrode may have acoustic isolation thereunder, such as a Bragg mirror. Various details of the fabrication process are disclosed. | 02-26-2009 |
20090053402 | Method of manufacturing piezoelectric actuator and method of manufacturing liquid transporting apparatus - A recess is formed on an upper surface of a vibration plate at a position corresponding to a pressure chamber. Next, a low-elasticity material having a lower modulus of elasticity than the vibration plate is filled in the recess. Then, aerosol including a piezoelectric material particles and carrier gas is sprayed on the upper surface of the vibration plate to form a piezoelectric layer. At this time, the particles of the piezoelectric material do not adhere to a surface of the low-elasticity material filled in the recess, and hence the piezoelectric layer can be formed only in an area excluding the surface of the low-elasticity material. Thus, there is provided a method of manufacturing a piezoelectric actuator, the method capable of easily preventing, when forming the piezoelectric layer by an aerosol deposition method, formation of the piezoelectric layer on a surface of the recess. | 02-26-2009 |
20090142480 | Optimal Acoustic Impedance Materials for Polished Substrate Coating to Suppress Passband Ripple in BAW Resonators and Filters - Methods of reducing phase and amplitude ripples in a BAW resonator frequency response by providing a substrate, fabricating a Bragg mirror having alternate layers of a high acoustic material and a low acoustic material on a first surface of the substrate, fabricating a BAW on the Bragg mirror, and coating a second side of the substrate opposite the first side with a lossy material having an acoustic impedance in the range of 0.01x to 1.0x the acoustic impedance of the layers of high impedance material, the second surface of the substrate being a polished surface. Various embodiments are disclosed. | 06-04-2009 |
20090246360 | OXIDE SOURCE MATERIAL SOLUTION, OXIDE FILM, PIEZOELECTRIC ELEMENT, METHOD FOR FORMING OXIDE FILM AND METHOD FOR MANUFACTURING PIEZOELECYTRIC ELEMENT - An oxide source material solution for forming an oxide film having a composition expressed by Pb | 10-01-2009 |
20090311417 | FILM FORMING METHOD AND FILM FORMING APPARATUS - A film forming method in which crystalline film having PZT ( | 12-17-2009 |
20100040770 | PATTERNED INORGANIC FILM, PIEZOELECTRIC DEVICE, AND PROCESS FOR PRODUCING THE SAME - An inorganic film formed of an inorganic material on a metal film having a surface including surface-oxidized areas. The surface-oxidized areas are surface oxidized to different degrees. For example, the surface-oxidized areas are one or more lowly-surface-oxidized areas and one or more highly-surface-oxidized areas. The inorganic film includes regions which are respectively formed on the surface-oxidized areas, and the regions have different crystal structures according to the different degrees of surface oxidation. For example, a patterned inorganic film constituted by one or more protruding portions arranged on one or more lowly-surface-oxidized areas of the surface of the metal film can be produced by removing the portions of the inorganic film formed on highly-surface-oxidized areas. | 02-18-2010 |
20100183803 | ULTRAFINE METAL OXIDE PARTICLE DISPERSION LIQUID AND ULTRAFINE METAL OXIDE PARTICLE THIN FILM - An ultrafine metal oxide particle dispersion liquid is prepared by mixing an ultrafine titanium-based composite metal oxide particle dispersion liquid prepared by hydrolysis in a microemulsion containing a hydrophobic dispersion medium, water, and a surfactant and an organic metal compound solution for the same titanium-based composite metal oxide at a ratio of 1:1 to 1:30 in terms of the composite metal oxide contained. | 07-22-2010 |
20100203236 | COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, FERROELECTRIC THIN FILM AND LIQUID-JET HEAD - A composition for ferroelectric thin film formation, comprising at least a colloidal solution containing metals serving as materials constituting a ferroelectric thin film, the colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and obtaining a particle size distribution having two or more peaks; a ferroelectric thin film formed from the composition for ferroelectric thin film formation, and a liquid-jet head equipped with a piezoelectric element having the ferroelectric thin film. | 08-12-2010 |
20100239751 | Sea of Pillars - Provided is a method for manufacturing multiple devices on a single piezoelectric composite substrate. The piezoelectric composite substrate is significantly larger than a size required for a single device, thus multiple sensors can be simultaneously fabricated from the same piezoelectric composite substrate. | 09-23-2010 |
20100247748 | METHOD FOR FORMING COATING FILM AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT - A method for forming a coating film on an object having a top surface, a side surface, and a corner where the top and side surfaces intersect, includes discharging droplets of coating forming material from a nozzle to deposit the droplets on the corner of the object to form a first coating film on the corner, and immersing the object in an immersion coating liquid after the first coating film is formed on the corner of the object to form a second coating film on the top and side surfaces of the object and on the first coating film. | 09-30-2010 |
20110003073 | METHODS FOR FORMING PIEZOELECTRIC THIN FILM, MANUFACTURING LIQUID EJECTION HEAD AND MANUFACTURING LIQUID EJECTING APPARATUS - A method for forming a piezoelectric thin film includes applying a colloid solution onto a substrate, forming a dried film by drying the colloid solution, forming an inorganic film by degreasing the dried film, and crystallizing the inorganic film. The colloid solution contains lead acetate as a material of lead oxide, an organic metal compound as a material of metal oxides other than lead oxide, a carboxylic acid, and polyethylene glycol. | 01-06-2011 |
20110014362 | METHOD FOR PRODUCING CRYSTALLINE PARTICLES AND METHOD FOR PRODUCING CRYSTALLOGRAPHICALLY ORIENTED CERAMIC - A method for producing crystalline particles according to the present invention includes a mixing step of producing a mixed material containing a lead-containing material and an additional material containing lithium and boron and a first firing step of firing the mixed material at a predetermined firing temperature to form polyhedral crystalline particles. It is possible to produce a crystallographically oriented ceramic by preparing a template layer having uniform crystal orientation in a predetermined direction by fixing the crystalline particles on a substrate, forming a shaped body including a matrix layer arranged on the template layer, the matrix layer being composed of a mixed material that contains a lead-containing material and an additional material containing lithium and boron, and firing the shaped body. | 01-20-2011 |
20110217454 | METHOD FOR MANUFACTURING PIEZOELECTRIC FILM - A method for manufacturing a piezoelectric film includes: forming a piezoelectric precursor film including Bi, Fe, Mn, Ba, and Ti; and obtaining a piezoelectric film preferentially oriented with the (110) plane by crystallizing the piezoelectric precursor film. | 09-08-2011 |
20110311719 | PROPPANTS COATED BY PIEZOELECTRIC OR MAGNETOSTRICTIVE MATERIALS, OR BY MIXTURES OR COMBINATIONS THEREOF, TO ENABLE THEIR TRACKING IN A DOWNHOLE ENVIRONMENT - A method for “tagging” proppants so that they can be tracked and monitored in a downhole environment, based on the use of composite proppant compositions comprising a particulate substrate coated by a material whose electromagnetic properties change at a detectable level under a mechanical stress such as the closure stress of a fracture. In another aspect, the invention relates to composite proppant compositions comprising coatings whose electromagnetic properties change under a mechanical stress such as the closure stress of a fracture. The substantially spherical composite proppants may comprise a thermoset nanocomposite particulate substrate where the matrix material comprises a terpolymer of styrene, ethylvinylbenzene and divinylbenzene, and carbon black particles possessing a length that is less than 0.5 microns in at least one principal axis direction incorporated as a nanofiller; upon which particulate substrate is placed a coating comprising a PZT alloy manifesting a strong piezoelectric effect or Terfenol-D manifesting giant magnetostrictive behavior to provide the ability to track in a downhole environment. | 12-22-2011 |
20120082781 | METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING PIECE, WAFER, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE - Disclosed is a method of manufacturing a piezoelectric vibrating piece. In a resist pattern forming step, a mask member is arranged in a wafer S while a mask-side mark formed in a mask member prepared for one electrode film is aligned with wafer-side marks S | 04-05-2012 |
20120100284 | Switching Element, Method For Manufacturing The Same, And Display Device Including Switching Element - A method for manufacturing a switching element which has enough resistance to repeat switching operations and which can be miniaturized and have low power consumption, and a display device including the switching element are provided. The switching element includes a first electrode to which a constant potential is applied, a second electrode adjacent to the first electrode, and a third electrode over the first electrode with a spacer layer formed of a piezoelectric material interposed therebetween and provided across the second electrode such that there is a gap between the second electrode and the third electrode. A potential which is different from or approximately the same as a potential of the first electrode is applied to the third electrode to expand and contract the spacer layer, so that a contact state or a noncontact state between the second electrode and the third electrode can be selected. | 04-26-2012 |
20120171364 | Piezoelectric Thin Film Process - A process of forming an integrated circuit containing a piezoelectric thin film by forming a sol gel layer, drying in at least 1 percent relative humidity, baking starting between 100 and 225° C. increasing to between 275 and 425° C. over at least 2 minutes, and forming the piezoelectric thin film by baking the sol gel layer between 250 and 350° C. for at least 20 seconds, annealing between 650 and 750° C. for at least 60 seconds in an oxidizing ambient pressure between 700 and 1000 torr and a flow rate between 3 and 7 slm, followed by annealing between 650 and 750° C. for at least 20 seconds in a pressure between 4 and 10 torr and a flow rate of at least 5 slm, followed by ramping down the temperature. | 07-05-2012 |
20120177815 | Sputtered Piezoelectric Material - Piezoelectric actuators having a composition of Pb | 07-12-2012 |
20120177816 | METHOD OF FABRICATING PIEZOELECTRIC MATERIALS WITH OPPOSITE C-AXIS ORIENTATIONS - In accordance with a representative embodiment, a method, comprises: providing a substrate; forming a first piezoelectric layer having a compression-negative (C | 07-12-2012 |
20130022736 | FERROELECTRIC OXIDE STRUCTURE, METHOD FOR PRODUCING THE STRUCTURE, AND LIQUID-DISCHARGE APPARATUS - A ferroelectric oxide structure includes a substrate and a ferroelectric thin-film deposited on the substrate. The ferroelectric thin-film has a thickness of greater than or equal to 200 nm and a tetragonal crystal system. The ferroelectric thin-film has (100) single-orientation crystal orientation. | 01-24-2013 |
20130029033 | METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE - A method for manufacturing an acoustic wave device with an excellent frequency-temperature profile is performed such that the acoustic wave device produced includes a piezoelectric substrate, an IDT electrode located on the piezoelectric substrate, and a dielectric film mainly including Si and O and arranged on the piezoelectric substrate to cover the IDT electrode. The dielectric film is formed by sputtering in a sputtering gas containing H | 01-31-2013 |
20130040048 | ELECTRODE STRUCTURE OF PIEZOELECTRIC ELEMENT, METHOD OF FORMING ELECTRODE OF PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, AND HEAD SUSPENSION - An electrode structure of a piezoelectric element is provided. The piezoelectric element | 02-14-2013 |
20130064970 | METHOD FOR PREPARING A LEAD-FREE PIEZOELECTRIC THIN FILM - The present invention discloses a method of preparing a lead-free piezoelectric thin film comprising the steps of: providing a precursor solution comprising at least one alkali metal ion, a polyamine carboxylic acid, and an amine; depositing the precursor solution on a substrate to form a film; and annealing the film. The present invention also provides a lead-free piezoelectric thin film prepared according to the method, a precursor solution for use in the method and a method of preparing the precursor solution. | 03-14-2013 |
20130101731 | METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING LIQUID EJECTION HEAD, AND METHOD OF MANUFACTURING LIQUID EJECTING APPARATUS - A method of manufacturing a piezoelectric element includes a process of forming on the surface of an electrode having lanthanum nickel preferentially aligned in (100) plane, at least on a surface thereof; a process of applying a precursor solution including at least Bi, Ba, Fe, and Ti onto the surface of the electrode, and a process of crystallizing the applied precursor solution to form the piezoelectric layer including a perovskite oxide preferentially aligned in (100) plane. | 04-25-2013 |
20130230643 | ATOMIC LAYER DEPOSITION ENCAPSULATION FOR ACOUSTIC WAVE DEVICES - Acoustic wave devices and methods of coating a protective film of alumina (Al | 09-05-2013 |
20140178574 | Method and Apparatus for Focusing Miniature Ultrasound Transducers - The present disclosure provides methods and apparatus of fabricating a transducer for use in ultrasound imaging. A substrate is provided. The substrate may be a silicon substrate having a first side and a second side opposite the first side. A transducer membrane is formed over the first side of the substrate. The transducer membrane includes a piezoelectric component. A well is formed in the substrate from the second side. A backing material is dispensed onto a first sidewall of the well in a manner so as to create a capillary effect that causes the backing material to wick down the sidewall, across the back side of the substrate exposed by the well, and up a second sidewall of the well. The transducer membrane is deflected so that the transducer membrane has a concave shape. | 06-26-2014 |
20150110954 | Method of Fabricating a Card with Piezo-Powered Indicator by Printed Electronics Processes - An interactive card or the like employs a piezoelectric charge generator (piezo-strip) for temporarily driving an indicator. The piezo-strip may be displaced (bent) in order to generate charge to drive the indicator. Printed electronic processes are utilized to produce the indicator and/or the piezoelectric charge generator The need for a printed battery or supplemental power source is obviated. The card may carry printed indicia which corresponds to the states of the indicator (e.g., indication of a test answer selection). Multiple display elements and selector switches may provide multiple indicator states. Multiple piezo-strips may provide a selection function as well as a rest function. Applications include business cards, greeting cards and novelty items, toys and games, advertising and promotions, testing and education, sensors, and so forth. | 04-23-2015 |
20150132475 | METHOD FOR PREPARING A LEAD-FREE PIEZOELECTRIC THIN FILM - The present invention discloses a method of preparing a lead-free piezoelectric thin film comprising the steps of: providing a precursor solution comprising at least one alkali metal ion, a polyamino carboxylic acid, and an amine; depositing the precursor solution on a substrate to form a film; and annealing the film. The present invention also provides a lead-free piezoelectric thin film prepared according to the method, a precursor solution for use in the method and a method of preparing the precursor solution. | 05-14-2015 |
20150376000 | METHOD FOR REDUCING DISCHARGE DEFECTS AND ELECTRODE DELAMINATION IN PIEZOELECTRIC OPTICAL MEMS DEVICES - A method includes forming a piezoelectric optical micro-electromechanical system (MEMS) device having a piezoelectric capacitor over a lens material. The lens material forms a lens, and the piezoelectric capacitor is configured to change a shape of the lens material in order to change a focus of the lens. The piezoelectric capacitor includes first and second electrodes separated by at least one piezoelectric material. The method also includes performing a first anneal on the piezoelectric optical MEMS device in nitrogen gas and performing a second anneal on the piezoelectric optical MEMS device in oxygen gas after performing the first anneal. The method further includes depositing a protective oxide layer over the lens material and the piezoelectric capacitor after performing the second anneal. The first anneal in the nitrogen gas causes the piezoelectric optical MEMS device to be substantially free of discharge defects. | 12-31-2015 |
20160181507 | METHOD FOR MANUFACTURING PNbZT THIN FILM | 06-23-2016 |