Class / Patent application number | Description | Number of patent applications / Date published |
414222070 | Means to convey load back and forth between initial location and station | 68 |
20080317566 | Automated Cassette and Slide Handling System for an Automatic Microscope - An automated cassette and slide handling system is disclosed which organizes microscope slides in cassettes, automatically and sequentially removes individual slides from their respective cassettes, positioned each slide under the microscope as provided by the protocol, and after examination returns the slide to its proper cassette. | 12-25-2008 |
20090010739 | Processing Station for a Processing Line having a Module Platform and Withdrawable Modules that can be Introduced into the Module Platform - A processing station for a processing line, having a module platform ( | 01-08-2009 |
20090047104 | PACKAGE HANDLER - A package handler is disclosed, by which productivity and work efficiency can be enhanced in a manner of automatically performing a work of unloading a cut package from a cutting jig ( | 02-19-2009 |
20090081008 | STOW AND SORTATION SYSTEM - System and method for sortation of picked inventory into individual orders in an order fulfillment process, for example order fulfillment processes in materials handling facilities. Collections of items picked from inventory for multiple orders are stowed to locations at a stow and sortation station. The items for a particular order may be stowed to two or more different locations, and items for two or more orders may be stowed to one location; no particular location is assigned to or reserved for each order. Thus, no space is allocated or reserved for incomplete orders at the station. When all items for a particular order are stowed to locations at the station, the order may be picked from the various locations at the station and placed into order receptacles. The order receptacles may be shipping containers. | 03-26-2009 |
20090142170 | Loadport - A load port particularly well-suited to application in batch processing semiconductor manufacturing processes is provided with a load port main body having a main table onto which a FOUP containing wafers is placed, a mapping means for mapping the wafers contained within the FOUP, and the like, and is further provided with a displacing means for moving the FOUP placed on the main table between the main table and a predetermined position removed a distance from the load port main body, in which the displacing mechanism is provided with an open space enabling the passing of a FOUP which contains wafers between the aforementioned predetermined position and a piece of equipment located adjacent to the load port main body. | 06-04-2009 |
20090155027 | Industrial robot - A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost position and a lowermost position of a movable range given to the movable member in a vertical direction relative to the fixed member. This movable member has a lower end at which an operation tool is provided The elastic sheet member has both ends. Of these ends, one end is fixed to the lower end of the fixed member and the other end is fixed to the lower end of the movable member. This sheet member droops when the movable member moves up to the uppermost position of the fixed member. | 06-18-2009 |
20090252582 | PROCESSING THIN WAFERS - There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing. | 10-08-2009 |
20100003111 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE FOR THE APPARATUS - A substrate processing apparatus includes a main load unit, a buffer load unit, and a distribution unit. The main load unit is disposed at a front side of the process module for receiving a plurality of containers each accommodating substrates. The buffer load unit receives a plurality of containers, and the distribution unit transfers a container between the main load unit and the buffer load unit. The substrate processing apparatus includes the buffer load unit as well as the main load unit, and the distribution unit is used to transfer a container between the main load unit and the buffer load unit. Therefore, substrates can be transferred to the substrate processing apparatus with less time, and thus productivity can be improved. | 01-07-2010 |
20100028107 | APPARATUS AND METHOD FOR SUCCESSIVELY TRANSPORTING A PLURALITY OF GSM CHIP CARDS - Devices and methods for successively transporting a plurality of cards arranged in a row, in particular GSM chip cards, between at least one feed path and a first tray element which can be displaced perpendicular to the orientation of the feed path, by means of at least one transfer station within a card processing device, wherein the transfer station comprises at least two transport elements for picking up and depositing individual cards, said transport elements being able to be rotated about a respective axle running perpendicular to the plane of the feed path and of the first tray element, wherein the transport elements can be moved back and forth along the orientation of the first tray element and a second tray element which can be displaced in the direction of the first tray element. | 02-04-2010 |
20100040442 | High speed roofing shingle making machine including cutter, catcher and stacker - The invention relates generally to a roofing shingle apparatus and more particularly to an improved such apparatus for high speed shingle making generally when handling a double shingle line (one line overlaid on the other with the high side of each line on opposite sides to make a single mostly even thickness) in a more compact arrangement from the cutter to the stackers and catchers, but not limited to a slower single line of shingle making that uses a flipper at the discharge of the catcher shuttle and not limited to a four wide overlaid to four thicknesses of shingles in one line and scissor cut, not described in detail herein, before entering a single line delivery belt section. The main purpose of this invention is to have control of the shingles coming off the cutter at a speed of up to two times the line speed of present machines, accelerate the shingle pack in a positive controlled manner for exact separation and without slowing down prior to the catchers, distribute the shingle packs to any one of four catchers for controlled stopping and feed the packs into respective stackers for distribution to the packaging machines. | 02-18-2010 |
20100047045 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE FOR THE APPARATUS - A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load unit. The buffer load unit is disposed above the main load unit and movable into and outward from a process module. Therefore, more containers can be placed in the substrate processing apparatus without increasing the footprint of the substrate processing apparatus, and thus it is possible to reduce equipment idle time during which standby substrates wait before being processed, thereby improving productivity. | 02-25-2010 |
20100068011 | PALLET CONVEYANCE DEVICE AND SUBSTRATE INSPECTION DEVICE - A pallet conveyance device has, besides a mechanism for moving a pallet for supporting a substrate, a lifting mechanism for vertically moving the pallet. The lifting mechanism has an impact cushioning mechanism for cushioning an impact applied to the substrate supported on the pallet. When an impact is applied to the substrate from the pallet, the impact cushioning mechanism controls a vertical motion of the lifting mechanism to cushion the impact applied to the substrate supported on the pallet. The impact cushioning mechanism is a mechanism that changes the drive speed of the lifting mechanism. The impact cushioning mechanism changes the drive speed to a low speed at at least either the start of operation of the lifting mechanism or before the end of the operation, and in a drive period excluding a low speed period, the impact cushioning mechanism changes the drive speed to a high speed. | 03-18-2010 |
20100150687 | SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus configured to attain conflicting purposes of high throughput and footprint reduction. The substrate processing apparatus comprises a carrying chamber, and a loadlock chamber and at least two process chambers that are arranged around the carrying chamber. The carrying chamber comprises a substrate carrying unit configured to carry a substrate between the loadlock chamber and the process chambers. The substrate carrying unit comprises a first arm provided with a first finger and a second finger, and leading ends of the first and second fingers extend horizontally in the same direction. Each of the process chambers comprises a first process unit and a second process unit, and the second process unit is disposed at a side of the process chamber distant from the carrying chamber with the first process unit being disposed therebetween. | 06-17-2010 |
20100158645 | Stage apparatus - The present invention enables a movable body to be moved without generating pitching. X-axis drive parts, which have: X-axis shafts formed by disposing a plurality of magnets along an X-axis direction and connected to a pair of Y-axis movers; and X-axis movers constituted by coils surrounding the X-axis shafts, are respectively arranged on both outer sides of an X-axis movable body, thereby making it possible to adjust the position of the X-axis movable body in the vertical direction. Then, lowering the position of the X-axis movable body in the vertical direction brings the center of gravity location of the X-axis movable body in the vertical direction in proximity to the X-axis shafts and Y-axis drive parts having Y-axis movers. Consequently, the X-axis movable body is stabilized and supported by the X-axis drive parts. | 06-24-2010 |
20100254789 | PLUNGER WITH A QUICK LOCKING SYSTEM - The invention relates to a plunger that is used to feed and withdraw an electronic component, in particular integrated circuits, to and/or from a contact device that is connected to a test device. The plunger head can be secured to a base body by means of a quick locking system. Said quick locking system comprises locking means that are designed such that they can be placed in a rear-engagement position when the plunger head is rotated in relation to the base body, a position in which the plunger head is axially coupled to the base body. | 10-07-2010 |
20100310343 | Method and apparatus for processing individual sensor devices - To process a plurality of sensor devices, such as humidity sensors or gas sensors, the sensor devices are run through a testing station and a turret handler. In order to increase throughput of the testing station, several test cycles are operated simultaneously in a phase-shifted manner. The sensor devices are e.g. sequentially fed onto trays of the test station, on which they are assembled in batches. Each batch is subjected to a test cycle. After the test cycle, the sensor devices of a batch are sequentially fed back to the turret handler. | 12-09-2010 |
20110002760 | APPARATUS FOR LOADING BIOLOGICAL MATERIAL CONTAINERS IN A CONVEYING SYSTEM - There is described an apparatus for loading test tubes ( | 01-06-2011 |
20110135428 | SUBSTRATE-PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE IN THE SAME - Provided is a substrate-processing apparatus including a plurality of process chambers, a buffer unit, and a transfer member. The transfer member transfers the substrate between the process chambers and the buffer unit, and collects the substrates processed in at least two of the process chambers where processes are simultaneously finished, to transfer the processed substrates to the buffer unit at once. Accordingly, a number of times during which the transfer member transfers substrates is decreased, so that the substrate-processing apparatus reduces the process time and improves the productivity. | 06-09-2011 |
20110150609 | CRUCIBLE SHUTTLE ASSEMBLY AND METHOD OF OPERATION - A crucible handling shuttle includes a pair of opposed dual crucible-gripping arms mounted on a rotatable head. The shuttle is removably plugged into a sliding block of a carriage to move between a furnace and a crucible loading station. The carriage includes mechanical, electrical, and pneumatic plugs or sockets which couple to mating sockets or plugs of the shuttle. A linear actuator extends between the carriage and the furnace base to raise and lower the carriage and shuttle coupled thereto. | 06-23-2011 |
20110158775 | WORK PROCESSING APPARATUS AND WORK PROCESSING METHOD - A work machining apparatus capable of reducing the stand-by time in each main spindle as much as possible and can improve the operation ratio is provided. | 06-30-2011 |
20110176894 | HANDLING DEVICE FOR DRIVING, IMMERSING, REMOVING, OR ROTATING MOTOR VEHICLE BODYWORKS INTO OR FROM A PROCESSING BASIN OR BASINS - An improved handling device for driving, immersing/removing and rotating motor vehicle, truck cabin, van and metal article vessel bodyworks into/from processing basins is characterized in that said device comprises a sliding frame designed for sliding on sliding rails, driven by one or two driving chains, and supporting a pair of arms bearing, at their free end portion, a swinging platform, in turn adapted to bear a skid for supporting a bodywork, the sliding frame comprising one or two winch assemblies driving respective pulleys thereon are entrained ropes, belts, chains or the like, and being associated with a respective arm at a swinging shaft, said sliding frame comprising moreover two rack assemblies, therealong slide respective end portions of the arms coupled to the frame, said swinging platform being driven by a chain driving system. | 07-21-2011 |
20110182702 | SUBSTRATE TRANSFER ROBOT AND SUBSTRATE TRANSFER SYSTEM - A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit. | 07-28-2011 |
20110194917 | Storage Rack - A storage rack for storing and transferring objects is provided with at least one rack module ( | 08-11-2011 |
20110222994 | SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANSPORTING SUBSTRATE STORING CONTAINER - In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand. | 09-15-2011 |
20110236165 | RACK TRAY, RACK, AND RACK TRANSPORT SYSTEM - A rack tray, a rack, and a rack transport system that can safely perform transport and setting in an apparatus with a plurality of racks supporting a plurality of specimen containers arranged are provided. For this purpose, it comprises a rack dropout-preventing mechanism ( | 09-29-2011 |
20110262252 | Substrate Processing System and Substrate Transferring Method - A substrate processing system and substrate transferring method is disclosed, which is capable of transferring a substrate bi-directionally through the use of substrate transferring device provided between two rows of processing chambers arranged linearly, thereby improving the substrate-transferring efficiency, the substrate processing system comprising a transfer chamber having at least one bi-directional substrate transferring device for bi-directionally transferring a substrate; and a plurality of processing chambers for applying a semiconductor-manufacturing process to the substrate, wherein the plurality of processing chambers are linearly arranged along two rows confronting each other, and the transfer chamber is interposed between the two rows of the processing chambers, wherein the at least one bi-directional substrate transferring device comprises a moving unit provided inside the transfer chamber, and horizontally moved by a linear motor; and a bi-directional substrate transferring unit provided in the moving unit, the bi-directional substrate transferring unit for transferring the substrate to the processing chamber through a bi-directional sliding movement. | 10-27-2011 |
20110280692 | MACHINE TOOL HAVING WORKPIECE HOPPER - A machining device for material-removing machining of a workpiece includes a stationary frame, a workpiece magazine, a workpiece slide movable relative to the frame and accommodates a workpiece and a housing which encompasses a machining chamber and is located outside the workpiece magazine, wherein the workpiece magazine accommodates a plurality of workpieces, the workpiece magazine moves workpieces to an interchange point, the workpiece slide imparts translational movement to a workpiece along an X axis during workpiece machining and the workpiece slide is movable along the X axis to such an extent that the workpiece located on the workpiece slide is movable to the interchange point disposed outside the machining chamber encompassed by the housing. | 11-17-2011 |
20120045300 | HIGH SPEED SUBSTRATE ALIGNER APPARATUS - In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter. | 02-23-2012 |
20120099951 | INSPECTION DEVICE, INSPECTION METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR INSPECTING DEFORMATION OF SUBSTRATE HOLDING MEMBER, AND SUBSTRATE PROCESSING SYSTEM INCLUDING THE INSPECTION DEVICE - Disclosed is an inspection device for inspecting deformation of a substrate holding -member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged. | 04-26-2012 |
20120288348 | Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists - An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail. | 11-15-2012 |
20120308345 | PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM - A system for processing surfaces of substrates having a process module having a process module frame and a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A plurality of substrate holder assemblies, each having a number of substrate holders, each of which is removably coupled to the process module frame, each substrate holder configured to hold a substrate. The process module frame has alignment features aligning the substrate holders in the substrate holder assembly in repeatable alignment with respect to each of the process elements with each of the process elements located between the substrates. A loader module is configured to unload processed substrates from each of the substrate holder assemblies and load unprocessed substrates to each of the substrate holder assemblies. A transporter is configured to transport the substrate holder assemblies to and from the process module and the loader module. | 12-06-2012 |
20120321418 | Device for Coning and/or Deconing a Container and Methods Related Thereto - The invention relates to a device for coning and/or deconing a container unit having corner fittings for the attachment of twist-locks. The device has a support structure for the container unit. The support structure has two parallel long sides and two end sides. According to the invention, the device also includes a storage station that is located adjacent and outside one of the end sides. There is a first conveyor means along a first of the long sides and a second conveyor means along a second of the long sides. Each conveyor means is arranged to transport twist-locks to and from the corner fittings from and to the storage station. The invention also relates to corresponding methods for coning and deconing, respectively. | 12-20-2012 |
20130202389 | PALLET CHANGING DEVICE FOR A MACHINE TOOL AND MACHINE TOOL COMPRISING A PALLET CHANGING DEVICE - A pallet changing device ( | 08-08-2013 |
20130209200 | CARRIER DEVICE - A carrier device according to an aspect of an embodiment includes a carrier chamber, a robot that is placed near one longitudinal-side wall in the carrier chamber, and a linear moving mechanism that has a track by which the robot is linearly moved in the longitudinal direction of the carrier chamber. The arm of the robot is defined to a length by which the arm does not interfere with the other longitudinal-side wall even if the arm is rotated around an arm spindle. The track of the linear moving mechanism has a length by which the leading end of the hand perpendicular to the track reaches a predetermined position in a connecting hole located at an end among connecting holes provided in the longitudinal-side wall. | 08-15-2013 |
20130236276 | Delivery system for analytical samples - A system for handling sample vials includes a vault for receiving a series of storage cartridges. Inside the cartridges are one or more discs providing vial recesses. In multidisc cartridges, through passages are provided to place and retrieve vials into and from the subjacent discs. A pick up device is moved until it aligns with a selected vial and the vial is pneumatically removed. A device is provided to reverse orientation of a vial moving through the system. A venturi operated system is provided including symmetrical bleed off ports to propel vials through the system without inducing excessive spinning of the vials. A piping system from a central bank to a multiplicity of analytical instruments includes a minimum number of through conduits and a diverter at each instrument location for sending the vial either to the instrument or downstream toward another diverter and instrument. | 09-12-2013 |
20130280017 | SUBSTRATE PROCESSING SYSTEM, SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM - A substrate processing system | 10-24-2013 |
20130309050 | WORK TRANSFER APPARATUS - To provide a work transfer apparatus which can transfer works at high speed with controlling respectively the posture of the right and left of works. The work transfer apparatus includes an arm moving back and forth between machines in order to transfer work(s), a crossbar coupled to the arm, and a pair of right and left work holding devices provided at the left and right sides of the crossbar and tilt drive devices being provided on the arm, respectively controlling the work holding devices to rotate around an axis of a longitudinal direction of the crossbar. | 11-21-2013 |
20140017042 | END EFFECTOR HAVING MULTIPLE-POSITION CONTACT POINTS - An apparatus is provided for lifting a substrate. The apparatus comprises a first piece and a second piece. The apparatus further comprises a set of first contact points in a plane and a set of second contact points, where at least one contact point from each set is present on the first piece and the second piece. The apparatus also comprises an actuator that translates the first piece, substantially parallel to the plane, between a first position and a second position relative to the second piece. Additionally, the first position arranges the set of first contact points so that all of the contact points of the set of first contact points are able to engage the substrate, and the second position arranges the set of second contact points so that all of the contact points of the second set of contact points are able to engage the substrate. | 01-16-2014 |
20140023461 | ELECTROSTATIC CHARGE REMOVAL FOR SOLAR CELL GRIPPERS - A manufacturing system includes a gantry module, having an end effector, for moving workpieces from a conveyor system to a working area, such as a swap module. The swap module removes a matrix of processed workpieces from a load lock and place a matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. Due to the speed of operation, the end effector may build up excessive electrostatic charge. To remove this built up charge, grounded electrically-conductive brushes are strategically positioned so that, as the end effector moves during normal operation, it comes in contact with these brushes. This removes this built up charge on the end effector, without affecting throughput. In another embodiment, the end effector moves over the brushes while the swap module is moving matrix to and from the load lock. | 01-23-2014 |
20140119857 | Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists - A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. | 05-01-2014 |
20140169916 | MACHINE FOR LOADING AND UNLOADING MATERIAL - A machine is capable of loading and unloading materials from a product. The product is capable of loading the materials and ejecting the materials. The machine includes a containing device and a transferring device. The containing device includes a containing assembly for receiving the materials; and an ejecting assembly for driving the materials out of the containing assembly. The transferring device is positioned between the product and the containing device. The transferring device transfers the materials ejected from the containing assembly to the product and transfers the materials ejected from the product to the containing device. When the transferring device releases the materials, the materials are capable of sliding into the containing assembly. | 06-19-2014 |
20140199140 | APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMMODATING AND PROCESSING A SUBSTRATE - A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part. | 07-17-2014 |
20150016927 | Bobbin Changing Device - The invention relates to a bobbin changing device ( | 01-15-2015 |
20150023768 | TRANSPORT DEVICE FOR SAMPLES IN A MICROTOME - A transport device ( | 01-22-2015 |
20150030418 | PROCESSING STATION FOR TWO-DIMENSIONAL SUBSTRATES AND METHOD FOR PROCESSING TWO-DIMENSIONAL SUBSTRATES - A processing station for two-dimensional substrates including at least two processing units and at least two conveyor lines for substrates arranged in parallel to another, wherein both the processing units are placed between the two conveyor lines, and an arrangement for moving the substrates from the conveyor lines to the processing units and back is provided. The arrangement includes four linear conveyor units each having at least one substrate support, wherein a first linear conveyor unit leads from the second conveyor line to the first processing unit, a second linear conveyor unit leads from the first conveyor line to the first processing unit, a third linear conveyor unit leads from the first conveyor line to the second processing unit, and a fourth linear conveyor unit leads from the second conveyor line to the second processing unit. | 01-29-2015 |
20150037122 | STATION ARRANGEMENT FOR PROCESSING AND/OR MEASURING SEMICONDUCTOR WAFERS, AND ALSO PROCESSING METHOD - The present invention relates to a station arrangement for processing and/or measuring semiconductor wafers which comprises, as individual modules, at least one loading module, at least one process station for processing the semiconductor wafers and/or at least one measuring station for measuring a variable of the semiconductor wafers, at least one adjustment-/cooling station and also at least one transport robot which is disposed in a transport housing. The transport robot enables the transport of the semiconductor wafers to be processed between the loading module and the respective process station for processing the semiconductor wafers and/or the at least one measuring station for measuring the semiconductor wafers. The invention relates to the particular arrangement of the adjustment-/cooling station within the station arrangement so that as low a spatial requirement of the individual modules within the station arrangement as possible and hence a space-saving construction of the station arrangement results in total. | 02-05-2015 |
20150050105 | VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION - Embodiments described herein generally relate to a vapor dryer module for cleaning substrates during a chemical mechanical polishing (CMP) process. In one embodiment, a module for processing a substrate is provided. The module includes a tank having sidewalls with an outer surface and an inner surface defining a processing volume, a substrate support structure for transferring a substrate within the processing volume, the substrate support structure having a first portion that is at least partially disposed in the processing volume and a second portion that is outside of the processing volume, and one or more actuators disposed on an outer surface of one of the sidewalls of the tank and coupled between the outer surface and the second portion of the support structure, the one or more actuators operable to move the support structure relative to the tank. | 02-19-2015 |
20150125241 | METHOD FOR MANUFACTURING TIRE COVERS - In the method for manufacturing tires:
| 05-07-2015 |
20150139759 | ROTATION MECHANISM - A rotation mechanism includes a mandrel, a rotation axle, a needle roller bearing and an angular bearing. The mandrel includes a shaft portion, a first annular contact portion and a second annular contact portion. The shaft portion has an outer surface, and the first annular contact portion and the second annular contact portion are located on the outer surface and respectively surround the axis of the mandrel. The rotation axle includes an annular portion, a third annular contact portion and a fourth annular contact portion. The annular portion has a shaft hole and an inner surface forming the shaft hole. The third annular contact portion and the fourth annular contact portion are located on the inner surface, and the mandrel passes through the shaft hole. The needle roller bearing is in contact with the first annular contact portion and the third annular contact portion, and is located between them. | 05-21-2015 |
20150147141 | PICK-AND-PLACE HEAD AND METHOD FOR PICKING WORK-PIECES - A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles. | 05-28-2015 |
20150298271 | MACHINE TOOL - A machine tool includes a pallet exchanger that is placed adjacent to one side of a body cover covering a workpiece machining space, and that exchanges a first pallet on which a machined workpiece is mounted and that is fixed to an upper surface of a table and a second pallet on which a workpiece to be machined is mounted. The pallet exchanger includes a turning member that has a first holding portion and a second holding portion formed in a pair and turns in a horizontal direction. The first holding portion is located at a first end of the turning member and holds the first pallet, and the second holding portion is located at a second end on the opposite side of the turning member from the first end and holds the second pallet. | 10-22-2015 |
20150298272 | MACHINE TOOL - A machine tool includes a pallet exchanger that is placed adjacent to one side of a body cover covering a workpiece machining space, and that exchanges a first pallet on which a machined workpiece is mounted and that is fixed to an upper surface of a table and a second pallet on which a workpiece to be machined is mounted. The pallet exchanger includes a turning member that has a first holding portion and a second holding portion formed in a pair and turns in a horizontal direction. The first holding portion is located at a first end of the turning member and holds the first pallet, and the second holding portion is located at a second end on the opposite side of the turning member from the first end and holds the second pallet. | 10-22-2015 |
20150303087 | AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS - A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility. | 10-22-2015 |
20150303089 | AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS - A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility. | 10-22-2015 |
20150311101 | SUBSTRATE TRANSFER ANTECHAMBER MECHANISM - There is provided a substrate transfer antechamber mechanism for a compact manufacturing apparatus that produces various types of devices in small volume using a small-diameter processing substrate at low cost. A container placement table, on which a wafer transfer container housing a semiconductor wafer is placed, is provided on an upper surface of an apparatus antechamber for a compact semiconductor manufacturing apparatus, and the apparatus antechamber includes therein a wafer elevating mechanism and a horizontal transfer mechanism. The wafer elevating mechanism moves down while holding from below a delivery bottom of the wafer transfer container, on which the semiconductor wafer remains placed, to transfer the semiconductor wafer into the apparatus antechamber. The horizontal transfer mechanism transfers the semiconductor wafer into a processing chamber using a transfer arm that receives the semiconductor wafer from the delivery bottom and extends. | 10-29-2015 |
20150314960 | INTEGRATED SUPPLY CHAIN BUILDING - The application provides a multi-storey warehouse. The warehouse includes a warehouse building, a plurality of floor levels, an inclined ramp arrangement, one or more automated storage and retrieval systems, and a handling device. The floor levels and the automated storage and retrieval system are located within the warehouse building. The inclined ramp arrangement connects the floor levels with a ground level. The automated storage and retrieval system comprises two adjacent rows of multi-storey pallet racks which are separated by an aisle. A first end of the automated storage and retrieval system is provided adjacent to a lateral side of the floor levels. The handling device is located in the area of the aisle, wherein the handling device serves a plurality of pick/place locations which are provided at the floor levels as well as a plurality of storage locations which are provided in the multi-storey pallet racks. | 11-05-2015 |
20150329298 | STORAGE SYSTEM IN THE CEILING SPACE AND STORAGE METHOD FOR GOODS THEREBY - A storage system in a ceiling space includes overhead traveling vehicles and a traveling route for the same, a shuttle carriage configured to transport goods to and from processing devices and a traveling route for the same, an OHT port to and from which the overhead traveling vehicles and the shuttle carriage both transport goods, and buffers that are provided in the ceiling space above the processing device and are for the placement of goods by the shuttle carriage. The traveling route for the shuttle carriage enables delivery and reception of goods by the shuttle carriage between the load port of the processing devices, the buffers, and the OHT port. | 11-19-2015 |
20150336229 | MACHINE TOOL - A machine tool includes a main machine, a pallet change unit, a main body cover, a machine entry door, an internal machine cover, and an internal entrance area. The main machine is configured to machine a workpiece. The pallet change unit is adjacent to the main machine. The main body cover is provided on the pallet change unit. The machine entry door is provided in the main body cover. The internal machine cover is connected to the machine entry door. The internal entrance area is defined by the machine entry door and the internal machine cover. The machine entry door and the internal machine cover are constructed to sweep the internal entrance area. | 11-26-2015 |
20160009503 | Automated Positive Pressure Solid Phase Extraction Apparatus and Method | 01-14-2016 |
20160096690 | TRANSFER APPARATUS, TRANSFER SYSTEM, AND TRANSFER METHOD - This invention provides a transfer apparatus for loading/unloading a work into/from a processing apparatus, comprising: a main body being able to move in a horizontal direction; an arm portion pivotally provided with respect to the main body; a hand portion pivotally provided with respect to the arm portion, and configured to grip the work; and a control unit configured to horizontally swing the arm portion and move the main body in order for the hand portion to linearly move the work, when the hand portion facing the processing apparatus loads/unloads the work into/from the processing apparatus. | 04-07-2016 |
20160114444 | METHOD FOR MAKING TOOLS AND/OR HANDLING EQUIPMENT AVAILABLE, AND ASSOCIATED DEVICES - The invention relates to a method and a device for making tools and/or handling equipment available for a treatment machine, wherein a mobile magazine contains at least two different types of tools and/or handling equipment together. | 04-28-2016 |
20160114987 | CASSETTE-TYPE NOZZLE EXCHANGING UNIT AND REPLACEMENT SYSTEM THEREOF - A revolving nozzle station and a revolving drive device that revolves the revolving nozzle station are housed inside a cassette case of a cassette-type nozzle exchanging unit. In an outer circumferential portion of the revolving nozzle station, multiple nozzles for exchange with a nozzle of component mounter are arranged radially along a revolution path, and the nozzles are held in a detachable manner. A nozzle exchange port is formed in a top end surface of cassette case, and nozzle exchange is performed between the revolving nozzle station and a mounting head of the component mounter through the nozzle exchange port. A shutter mechanism which opens and closes the nozzle exchange port is provided in the cassette case. | 04-28-2016 |
20160118282 | BUFFER STATION WITH SINGLE EXIT-FLOW DIRECTION - A buffer for use in semiconductor processing tools is disclosed. The buffer may be used to temporarily store wafers after processing operations are performed on those wafers. The buffer may include two side walls and a back wall interposed between the side walls. The side walls and the back wall may generally define an area within which the wafers may be stored in a stacked arrangement. Wafer support fins extending from the side walls and the back wall may extend into a wafer support region that overlaps with the edges of the wafers. Purge gas may be introduced in between each pair of wafers via purge gas ports located in one of the walls. | 04-28-2016 |
20160133493 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane. | 05-12-2016 |
20160136818 | INDUSTRIAL ROBOT - An industrial robot may include a robot main body; and an elevating mechanism to raise and lower the robot main body. The robot main body may include a hand, an arm to which the hand is joined, a main body portion to which the arm is joined, and an arm-elevating mechanism. The center of rotation on the base end side of the arm may be located farther toward the third direction side than the center of the main body unit when viewed in the up-down direction. In the standby state, part of the arm may be positioned farther toward the fourth direction side than the main body unit. The main body unit may be secured to the elevating mechanism. The elevating mechanism may be arranged on one or both sides of the main body unit in the first direction and/or on the fourth direction side. | 05-19-2016 |
20160163576 | PROCESSING OBJECT TRANSPORT SYSTEM, AND SUBSTRATE INSPECTION SYSTEM - A substrate inspection system includes a plurality of processing units, and each processing unit is provided with a transport mechanism configured to transport an substrate to be inspected along a transport passage which extends substantially horizontally, a lift mechanism configured to lift the substrate to be inspected to a height position, at a set position on the transport passage, and processors each configured to perform a predetermined process on the substrate to be inspected positioned at the height position. The processing units are arranged such that transport passages thereof are aligned and such that the transport directions thereof are the same direction. Between two adjacent transport passages, the substrate to be inspected is delivered from the transport passage on an upstream side to the transport passage on a downstream side. | 06-09-2016 |
20160167103 | WORK TRANSFER APPARATUS | 06-16-2016 |
20160172224 | SUBSTRATE TRANSFER UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TREATING METHOD | 06-16-2016 |